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Improvement of nickel wire bonding using Al nano coating 铝纳米涂层对镍丝键合性能的改进
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962852
R. Klengel, S. Klengel, J. Schischka, G. Lorenz, M. Petzold
In recent years Ni wire bonding has found some interest as a contacting technology for high temperature applications or for power electronic components. In addition to high thermal stability, further advantageous properties of Ni wires are its good electrical conductivity and a high mechanical strength. On the other hand, the relatively high hardness of the wires entails the risk of defect formation, particularly if applied for bonding on semiconductor components. In the presented investigation it was tried to improve the bond process parameters to lower bond forces by sputtering the wire with nm thick aluminum layer which should support the binding mechanisms. The paper presents mechanical characterization of the wire before and after sputtering, morphology and adhesion behavior of Al sputter layer on the wire as well as the contact formation in the wire bond interface after wedge-wedge bonding on different metallization. Mechanical test methods like tensile test and nano-indentation were performed as well as high resolution preparation and analyzes methods like focused ion beam technique (FIB), scanning electron microscopy (SEM) and transmission electron microscopy (TEM).
近年来,作为高温应用或电力电子元件的接触技术,镍丝键合引起了人们的兴趣。除了高的热稳定性外,镍线的另一个优点是其良好的导电性和高的机械强度。另一方面,电线的相对高硬度带来了形成缺陷的风险,特别是如果应用于半导体元件的粘接。本研究试图通过溅射纳米厚的铝层来改善结合工艺参数,以降低结合力,从而支持结合机制。本文研究了金属丝溅射前后的力学特性,铝溅射层在金属丝上的形貌和粘附行为,以及不同金属化方式下楔-楔键合后金属丝键合界面的接触形成。进行了拉伸试验和纳米压痕等力学测试方法,以及聚焦离子束技术(FIB)、扫描电子显微镜(SEM)和透射电子显微镜(TEM)等高分辨率制备和分析方法。
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引用次数: 1
Thermal power plane enabling dual-side electrical interconnects for high-performance chip stacks: Implementation 实现高性能芯片堆叠的双侧电互连的热功率平面:实现
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962835
T. Brunschwiler, T. Tick, Michele Castriotta, G. Schlottig, Dominic Gschwend, Ken Sato, T. Nakajima, Shidong Li, S. Oggioni
We report on the design, implementation and performance of a laminate named Thermal Power Plane and solder joints that enable dual-side electrical interconnects (EIC) to a chip stack. This novel packaging topology with a laminate on both sides of the chip stack doubles the number of EIC thus supporting increased communication bandwidth and power density. In addition, in a two-die stack, all power TSVs can be eliminated with the advantage of gained silicon active area. The use of two laminates also enables individual test & burn-in of the dies before stack formation. The TPP needs to provide efficient heat removal and current feed in the out-of-plane and in-plane direction, respectively. An 8+1 coreless build-up laminate with aligned and stacked thermal laminate vias (TLVs) was designed and implemented. Bar-, chevron- and mesh-like copper planes with varying TLV densities were characterized. The mesh design resulted in minimal warpage and voltage drop. The bar and chevron designs result in the lowest thermal resistance. In combination with rail-shaped solder interconnects interfacing between TPP and top chip, the overall thermal resistance of the junction to cold plate of the dual-side EIC approach can outperform that of the standard single-side EIC package. The electrical DC characteristics of the TPP was also evaluated experimentally. The sheet resistance of 0.21 MΩ allows the supply of the required currents within the voltage uniformity requirements. In general, the experimental evaluation supports the feasibility of the proposed dual-side EIC concept supporting further performance and efficiency scaling of high-performance chip stacks.
我们报告了一种名为热功率平面的层压板和焊点的设计、实现和性能,该层压板和焊点能够实现芯片堆栈的双侧电互连(EIC)。这种新颖的封装拓扑结构在芯片堆栈的两侧都有层压板,使EIC的数量增加了一倍,从而支持增加的通信带宽和功率密度。此外,在双晶片堆叠中,由于获得了硅有源面积,可以消除所有功率tsv。使用两个层压板还可以在堆栈形成之前对模具进行单独测试和老化。TPP需要分别在面外和面内方向提供有效的散热和电流供给。设计并实现了一种8+1无芯层压板,具有对齐和堆叠的热层压板通孔(TLVs)。对不同TLV密度的条形、v形和网状铜面进行了表征。网状设计导致最小的翘曲和电压降。条形和雪佛龙设计导致最低的热阻。结合TPP与顶部芯片之间的轨道形焊料互连接口,双面EIC方法的结对冷板的整体热阻优于标准单面EIC封装。实验还对TPP的直流特性进行了评价。0.21 MΩ的片电阻允许在电压均匀性要求内提供所需的电流。总的来说,实验评估支持所提出的双侧EIC概念的可行性,支持高性能芯片堆栈的进一步性能和效率扩展。
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引用次数: 5
Roll-to-roll paper sensors (ROPAS); Wireless communicating sensors on paper in the logistic chain 卷对卷纸传感器(ROPAS);物流链中的纸上无线通信传感器
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962775
Corné Rentrop, Erik Rubingh, R. Lelieveld, Henrik Sandberg
The ROPAS project (Roll-to-roll paper sensors) combines high end electronics and wireless sensors with low cost paper substrates and processing techniques that can be applied on a large scale. Paper is the next step in the printed electronics roadmap of utilising cheaper substrate materials as a replacement of silicon and PET and is generally referred to as paper electronics. The creation of highly conductive structures applied at high speed on (temperature unstable) paper is extremely important to enable paper electronics. Hereto, recent advantages in nanotechnology such as (encapsulation) printing, surface modification of fiber based products, sensor and battery development, and electronic design (wireless communication) are integrated for large scale roll to roll and sheet to sheet paper applications. The possibilities of paper electronics are demonstrated in high impact (security) and logistics applications, which are demonstrated in security tags and smart labels for anti-counterfeiting purposes by e.g. integration of near field communication (NFC) in paper and finally track-and-trace post pieces such as envelopes. The paper explains the project and its impact, including implications of using a rough, coarse, porous and composite, paper substrate of limited high temperature stability on the design and fabrication of demonstrators and building blocks. Important topics herein are: fast curing of conductive inks on paper using state of the art printing techniques such as inkjet, screen and flexogravure. In the talk, synthesis of printable (humidity) sensor materials, placing of electrical components on paper surfaces including electronic design of the wireless communication and environmental and recycling constraints of the products are discussed as well.
ROPAS项目(卷对卷纸张传感器)将高端电子和无线传感器与低成本纸张基材和可大规模应用的加工技术相结合。纸是印刷电子路线图的下一步,利用更便宜的衬底材料作为硅和PET的替代品,通常被称为纸电子。在(温度不稳定的)纸上高速应用高导电结构的创造对于实现纸电子是极其重要的。在这里,纳米技术的最新优势,如(封装)印刷,纤维基产品的表面改性,传感器和电池的开发,以及电子设计(无线通信)被集成为大规模的卷对卷和片对片纸应用。纸质电子产品的可能性在高影响(安全)和物流应用中得到了证明,这在防伪目的的安全标签和智能标签中得到了证明,例如将近场通信(NFC)集成在纸上,并最终跟踪和追踪邮寄件,如信封。本文解释了该项目及其影响,包括使用粗糙,粗糙,多孔和复合,有限高温稳定性的纸基板在设计和制造演示和构建块的影响。本文的重要主题是:使用喷墨、丝网和柔性凹版等先进印刷技术在纸上快速固化导电油墨。在演讲中,可打印(湿度)传感器材料的合成,电子元件在纸表面的放置,包括无线通信的电子设计以及产品的环境和回收限制也进行了讨论。
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引用次数: 4
Photoelectrical and microphysical properties of Sol-Gel derived IGZO thin films for printed TFTs 用于印刷tft的溶胶-凝胶衍生IGZO薄膜的光电和微物理特性
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962826
T. Matsuo, T. Sugahara, Y. Hirose, J. Jiu, S. Nagao, K. Suganuma, Jianying He, Zhiliang Zhang
We fabricated stack layer transparent conductive IGZO thin films for TFT device applications using a sol-gel method. This research focuses on the properties of the resulting thin films to evaluate the ability of solution methods to replace current ultra-high vacuum techniques to fabricate thin films and its used devices. In this paper, we describe our high quality solution deposited technique: developing a sol-gel process that produced TCO semiconductor layer films with surface roughness in the same order as that of films formed by ultra-high vacuum deposition. As a result, good electrical conductivity and optical transmittance were achieved. The results suggest that solution-based methods show promise as an alternative to ultra-high vacuum methods to produce TCO thin films.
我们采用溶胶-凝胶法制备了用于TFT器件的堆叠层透明导电IGZO薄膜。本研究的重点是所得薄膜的性能,以评估溶液方法取代目前超高真空技术制造薄膜及其使用的器件的能力。在本文中,我们描述了我们的高质量的溶液沉积技术:开发了一种溶胶-凝胶工艺,生产表面粗糙度与超高真空沉积形成的薄膜相同的TCO半导体层膜。因此,获得了良好的导电性和透光性。结果表明,基于溶液的方法有望替代超高真空方法来生产TCO薄膜。
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引用次数: 0
A new embedded die package — WFOP™ 一个新的嵌入式芯片封装- WFOP™
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962743
Tomoko Takahashi, H. Inoue, Takahiro Yada, Naoki Hayashi, Yukari Imaizumi, Y. Ikemoto, Shigenori Sawachi, Atsushi Furuno, K. Yoshimitsu, M. Ooida, Akio Katsumata, Y. Hiruta
A new package structure and technology for the next generation of embedded-die package named as WFOP™ (Wide panel Fan-Out Package) was developed. It's a facedown mounting type, using metal plate as the base plate of its redistributed layer. Manufacturing is done not in wafer scale, but in large scale panel substrate. The structure, process, reliability results, and some performance are introduced. The package assembly technology for WFOP is using die-embedding method. So the technology is also able to apply to 3D packages. Some experience of 3D packages is shown in this paper. This technology will be expected to lead a new packaging technology for the next generation.
开发了一种用于下一代嵌入式芯片封装的新封装结构和技术,称为WFOP™(宽面板扇出封装)。它是一种面朝下的安装方式,使用金属板作为其再分配层的底板。制造不是在晶圆规模上完成的,而是在大型面板衬底上完成的。介绍了该系统的结构、工艺、可靠性结果及部分性能。WFOP的封装组装技术采用嵌模法。因此,这项技术也可以应用于3D包装。本文给出了一些三维包装的经验。这项技术有望引领下一代新的封装技术。
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引用次数: 2
Cooling of electronic assemblies through PCM containing coatings 通过含有涂层的PCM冷却电子组件
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962787
A. Novikov, D. Lexow, M. Nowottnick
A novel concept of using phase change materials (PCM) to improve the thermal management of electronic components was investigated. The main idea is the smoothing of temperature peaks produced by the component itself or by high ambient temperature. This was realized by heat absorption during melting process of the PCM. Such materials can be used in powder form as additive to the standard coating material like resin or will be applied directly on the electronic component and encapsulated by a polymer material.
研究了一种利用相变材料(PCM)改善电子元件热管理的新概念。其主要思想是平滑由组件本身或高环境温度产生的温度峰值。这是通过PCM熔化过程中的吸热来实现的。这种材料可以作为粉末形式的添加剂用于标准涂层材料,如树脂,或将直接应用于电子元件并由聚合物材料封装。
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引用次数: 2
eWLB SiP with Sn finished passives eWLB SiP含Sn成品无源
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962746
Eoin O. Toole, R. Almeida, J. Campos, A. Martins, A. Cardoso, F. Cardoso, S. Kroehnert
The use of embedded Wafer Level Ball grid array(eWLB)[1] technology for the construction of single and multiple side by side die packages has become widespread since the introduction by Infineon technologies more than five years ago. The flexibility of this packaging to include different die material types such as Si and GaAs combined with excellent mechanical, electrical and thermal performance and the advantages of wafer level processing has been employed in a wide range of applications. More recently this flexibility has been extended to included system in package(SiP) applications with a range of embedded passive devices being combined with one or more active dies in a single package. Ideally, for motives of availability and cost, the passive devices utilized in these applications should be standard SMT devices without special requirements in terms of terminal finish. In this paper we will describe the development process involved in enabling the use of standard leadfree tin finished passive devices in embedded eWLB based SiP packages. Development of a variety of potential diffusion barriers based upon both multilayer physical vapor deposition(PVD) and electroplated metallization is explained. Significant insight into the reliability performance of the resulting packages under standard stress conditions is gained for a SiP test vehicle. The first assessment was performed using short build parts to enable a rapid feedback for the experiments. The output for this comparison was Jedec standard High Temperature Storage(HTS175°C 200hrs) stress condition. Scanning electron micrography and microsection analysis of the intermetallic region formed before and after stress with a range of barrier solutions are shown. The solution selection process is described both in terms of reliability and ease of implementation. Further development based on the initial findings suggests a path forward for potential implementation of tinned terminal passives in eWLB.
自英飞凌技术在五年多前推出以来,嵌入式晶圆级球栅阵列(eWLB)[1]技术用于构建单个和多个并排芯片封装已得到广泛应用。这种封装的灵活性包括不同的模具材料类型,如Si和GaAs,结合优异的机械、电气和热性能以及晶圆级加工的优势,已被广泛应用。最近,这种灵活性已扩展到包括系统在包(SiP)应用程序,一系列嵌入式无源器件与单个封装中的一个或多个有源器件相结合。理想情况下,出于可用性和成本的考虑,在这些应用中使用的无源器件应该是标准的SMT器件,在终端完成方面没有特殊要求。在本文中,我们将描述在基于eWLB的嵌入式SiP封装中使用标准无铅锡成品无源器件所涉及的开发过程。介绍了基于多层物理气相沉积(PVD)和电镀金属化的各种电位扩散屏障的发展。对于SiP测试车辆,在标准应力条件下获得了对最终封装可靠性性能的重要见解。第一次评估是使用短的构建部件进行的,以便对实验进行快速反馈。该比较的输出是Jedec标准高温储存(HTS175°C 200hrs)应力条件。给出了在各种势垒溶液作用下应力前后形成的金属间区扫描电镜和显微切片分析结果。从可靠性和易于实现两方面描述了解决方案选择过程。基于初步发现的进一步发展为在eWLB中潜在实现罐装终端无源提供了一条前进的道路。
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引用次数: 3
Modelling of the mechanical behaviour of copper in 2nd level interconnection structures 铜在二级互连结构中的力学行为建模
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962812
Steffen Wiese, F. Kraemer
The paper presents an approach to model the mechanical behaviour of copper in 2nd level interconnect structures in electronic assemblies. The discussed mechanical models were analysed in ANSYS and LS-DYNA FEM-Software in order to simulate the performance of typical structural elements in electronic assemblies, such as copper traces or solder pads. Loading conditions span a wide range from low rate deformation of thermal cycles to high rate deformation during drop testing. This study investigated the effect of different mechanical properties of copper, with respect to the stress-strain relationship in 2nd level interconnects. The effect of the anisotropy of Young's modulus, in addition to the effect of isotropic cyclic hardening on the resulting deformation and stresses in the copper structures, were analysed. Furthermore, the resulting contact forces at the copper pad to the solder and to the PCB epoxy material, were investigated. This paper presents specific observations made during the three-dimensional finite element simulations of typical interconnect structures. Microstructural investigations were also carried out, such as to be able to correlate particular mechanical behaviour with established knowledge about copper as an FCC material. Grain sizes and texture of real copper traces are estimated. This study relates these particular features of real structures in electronic assemblies to published properties of copper mono- and polycrystalline materials. The importance of microstructural properties, such as grain size and orientation in terms of their respective influence on the results, are also discussed.
本文提出了一种模拟电子组件中二级互连结构中铜的力学行为的方法。在ANSYS和LS-DYNA有限元软件中对所讨论的力学模型进行了分析,以模拟电子组件中典型结构元件(如铜迹或焊盘)的性能。加载条件跨度很大,从热循环的低速率变形到跌落试验中的高速率变形。本文研究了铜的不同力学性能对二级互连中应力-应变关系的影响。分析了杨氏模量的各向异性以及各向同性循环硬化对铜结构变形和应力的影响。此外,还研究了铜焊盘与焊料和PCB环氧材料的接触力。本文介绍了典型互连结构三维有限元模拟的具体观察结果。微观结构研究也进行了,例如能够将特定的机械行为与关于铜作为FCC材料的既定知识联系起来。估计了真实铜迹的晶粒尺寸和结构。本研究将电子组件中真实结构的这些特征与已发表的铜单晶和多晶材料的特性联系起来。本文还讨论了晶粒尺寸和取向等微观组织特性对结果的影响。
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引用次数: 4
A novel study of mold compound effect towards TCoB and process integration for power leadless package 电源无引线封装中模具复合效应对TCoB和工艺集成的新研究
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962808
H. T. Wang, W. Tan, C. F. Cheong
Solder joint crack in thermal cycling on board (TCoB) for surface mount devices (SMD) is becoming more stringent in semiconductor market. Current TCoB literature mainly focuses on Finite Element Analysis simulation with ANSYS software to identify the most sensitive parameters affecting TCoB performance and estimating the solder fatigue life. By a given Driver Mosfet Power QFN, this paper is focusing on actual TCoB by modifying mold compound's coefficient of thermal expansion (CTE) and storage modulus by altering the filler loading percentage and adding in additive either stress relief additive (SRA) or silicone. These modifications reduce mold compound viscosity, increase CTE1, mold shrinkage potentially increases challenges in wire sweep and map molding panel warpage. Six different mold compounds are assembled and soldered on a PCB board with TCoB condition of -40°C to 125°C. The judging criteria is concentrating on solder joint crack. Package level reliability MSL3@260°C, 500 cycle TC(-65/150°C) and 96h PCT are evaluated. Material analysis of Thermal Mechanical Analysis (TMA) and Dynamic Mechanical Analysis (DMA) are employed to analyze the coefficient of thermal expansion (CTE), glass transition temperature (Tg) and storage modulus of six different mold compounds. Filler loading reduction increase liquid to solid particles ratio, therefore wire sweep and process mapping result for all mold compounds are comparable. Increment of resin induce criticalness of panel warpage as mold shrinkage increases, result shows that filler content ≤87wt% increases panel warpage > 0.7mm which increase the difficulty in package singulation. Experimental TCoB reviews that corner leads are subjected to the highest thermal mechanical stress and becomes the initiation point of solder joint crack. Result further validates storage modulus is primary factor of mold compound instead of CTE1. Higher solder joint thickness ≥34μm is sufficient to prevent solder joint crack and meet TCoB requirement.
半导体市场对表面贴装器件(SMD)板上热循环(TCoB)焊点裂纹的要求越来越严格。目前的TCoB文献主要集中在利用ANSYS软件进行有限元分析仿真,以确定影响TCoB性能的最敏感参数并估计焊料疲劳寿命。在给定的驱动Mosfet功率QFN下,通过改变填充剂加载百分比和添加应力消除添加剂(SRA)或有机硅来改变模具化合物的热膨胀系数(CTE)和存储模量,从而获得实际的TCoB。这些修改降低了模具复合粘度,增加了CTE1,模具收缩潜在地增加了钢丝扫描和地图成型板翘曲的挑战。六种不同的模具化合物组装和焊接在PCB板上,TCoB条件为-40°C至125°C。判断标准主要集中在焊点裂纹上。评估了封装级可靠性MSL3@260°C, 500周期TC(-65/150°C)和96小时PCT。采用热力学分析(TMA)和动态力学分析(DMA)对六种不同模具化合物的热膨胀系数(CTE)、玻璃化转变温度(Tg)和储存模量进行了分析。填充物负荷的减少增加了液体与固体颗粒的比例,因此所有模具化合物的钢丝扫描和工艺绘图结果都是可比较的。树脂含量的增加会随着模具收缩率的增加而引起板坯翘曲临界,结果表明:填料含量≤87wt%使板坯翘曲增大> 0.7mm,增加了封装模拟的难度。TCoB实验表明,角线受到最大的热机械应力,成为焊点裂纹的起始点。结果进一步验证了储模量是模具复合材料的主要影响因素,而不是CTE1。较高的焊点厚度≥34μm足以防止焊点裂纹,满足TCoB要求。
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引用次数: 0
Aligning component and system qualification testing through prognostics 通过预测调整组件和系统资格测试
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962791
D. Braden, D. Harvey
There is a continual growth of test and validation in high reliability product applications such as automotive, military and avionics. Principally this is driven by increased use and complexity of electronic systems installed in vehicles in addition to increased end user reliability expectations. Furthermore product development cycles continue to reduce, resulting in less available time to perform accelerated life tests. Moreover, significant increases in test duration are observed as a direct result of raised reliability expectations. The challenge for automotive electronic suppliers in particular is performing life tests in shorter periods of time whilst reducing the overall associated costs of validation testing. The dichotomy is that reliability testing at the component level does not replicate the intended mission environment. Often this can result in disputes between component suppliers and end users. The focus for many component suppliers is on the thermal performance of devices, but real applications require other factors to be considered, such as manufacturing influences during circuit board manufacture and assembly, mechanical stresses and device interactions. Furthermore, previous work by the authors suggests that interconnect and system level reliability is significantly impacted by component layout and constraint points which are application specific [1] [2] [3]. In this paper, a review of suitable prognostic techniques is undertaken and an approach proposed in which reliability testing results at component level matches more closely that undertaken at system level.
在汽车、军事和航空电子等高可靠性产品应用中,测试和验证的需求不断增长。这主要是由于车辆中安装的电子系统的使用和复杂性的增加,以及最终用户对可靠性的期望的提高。此外,产品开发周期不断缩短,导致进行加速寿命测试的可用时间减少。此外,测试持续时间的显著增加是可靠性期望提高的直接结果。汽车电子供应商尤其面临的挑战是在更短的时间内进行寿命测试,同时降低验证测试的总体相关成本。二分法是组件级别的可靠性测试不能复制预期的任务环境。这通常会导致组件供应商和最终用户之间的纠纷。许多元件供应商的重点是器件的热性能,但实际应用需要考虑其他因素,例如电路板制造和组装过程中的制造影响、机械应力和器件相互作用。此外,作者先前的工作表明,互连和系统级可靠性受到组件布局和约束点的显着影响,这些约束点是特定于应用的[1][2][3]。在本文中,对适当的预测技术进行了回顾,并提出了一种方法,其中组件级别的可靠性测试结果比系统级别的可靠性测试结果更接近。
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引用次数: 3
期刊
Proceedings of the 5th Electronics System-integration Technology Conference (ESTC)
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