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63rd Device Research Conference Digest, 2005. DRC '05.最新文献

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Broad-band superluminescent light emitting diodes incorporating quantum dots in compositionally modulated quantum wells 在组合调制量子阱中包含量子点的宽带超发光二极管
Pub Date : 2005-06-20 DOI: 10.1109/DRC.2005.1553060
S. Ray, K. Groom, H. Liu, M. Hopkinson, R. Hogg
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引用次数: 7
Interface and gate line edge roughness effects on intra die variance in mos device characteristics 界面和栅极线边缘粗糙度对mos器件特性中模内变化的影响
Pub Date : 2005-06-20 DOI: 10.1109/DRC.2005.1553066
N. Gunther, E. Hamadeh, D. Niemann, M. Rahman
Random fluctuations in fabrication process outcomes such as Si-SiO2 interface surface roughness (SR) and gate line edge roughness (LER) give rise to corresponding fluctuations in scaled down MOS device characteristics. These fluctuations are intra-die and inherent even to ideal processes. As such, they represent fiudamental limitations to the die-level uniformity of the properties of otherwise identical devices. Modeling based on statistical characterization of fluctuations in the characteristics of small 3D devices is becoming increasingly important to understand the implications for product designers and process engineers. [1-5] Presently, TCAD numerical simulation is the only tool available for investigating the complex interaction of these issues. In this work, we employ a novel device modeling approach based on thennodynamics and on variational mathematical methods. [6] We obtain closed-form expressions for threshold voltage (Vth), and device capacitance (C) at Onset of Strong Inversion (OSI) for MOS devices in the deep sub-0.1 micron regime. In our model SR is assumed to affect only the gate area whereas LER affects only the gate perimeter of the device. Figure 1 shows the SEM of the fabricated line used in our analysis of SR and LER. [7-8] We take the roughness of this line to be representative and characterize it by Fourier transforming the digitized data. By choosing a pdf to represent the entire spectrm we can then identify the average frequency and the variance. Figure 2 shows the FFT of the digitized data (circles) from Fig. 1, together with the lognormal pdf (solid line) used to fit the data. We have looked in some detail at three possible candidate pdfs: exponential, gaussian, and lognormal. For a combination of reasons we prefer the lognormal. [9] Our variational model predicts that the random deviation of threshold voltage due to LER should increase as the square of the roughness amplitude. Figure 3 shows this variation for a MOSCAP of gate length 35 nm and a width of 50 nm. Our results are compared here with results from Kim et al. [10] In both cases the variation appears to be quadratic in roughness amplitude. Figure 4 shows our prediction of the random deviation of total capacitance of the device at OSI for both LER and SR against standard deviation of roughness wavenumber. Figure 5 shows the random deviation of Vt for LER and SR against average roughness wavenumber according to our model. These statistical characteristics are extremely difficult to capture using TCAD. In contrast, the novelty and strong advantage of our modeling approach is that it allows us to treat the situation with less difficulty by explicitly incorporating these statistical quantities. Oxide thickness is one of the key parameters that affect the variance in Vh. Figure 6 shows the effect of variation in the oxide thickness on the random deviation of Vh according to our model. The model predicts that the deviation is greater for LER than for SR. Interestin
Si-SiO2界面表面粗糙度(SR)和栅极线边缘粗糙度(LER)等制造工艺结果的随机波动会导致相应的缩小MOS器件特性的波动。这些波动是模内的,甚至是理想工艺所固有的。因此,它们代表了对其他相同器件的性能的模级均匀性的基本限制。基于小型3D设备特性波动的统计特征建模对于了解产品设计师和工艺工程师的影响变得越来越重要。[1-5]目前,TCAD数值模拟是唯一可用于研究这些问题复杂相互作用的工具。在这项工作中,我们采用了一种基于非动力学和变分数学方法的新型器件建模方法。[6]我们得到了深亚0.1微米范围内MOS器件的阈值电压(Vth)和器件电容(C)在强反转(OSI)开始时的封闭表达式。在我们的模型中,假设SR只影响栅极面积,而LER只影响器件的栅极周长。图1显示了我们在SR和LER分析中使用的装配线的SEM。[7-8]我们将这条线的粗糙度作为代表性,并对数字化数据进行傅里叶变换表征。通过选择一个pdf来表示整个频谱,我们可以确定平均频率和方差。图2显示了图1中数字化数据(圆)的FFT,以及用于拟合数据的对数正态pdf(实线)。我们详细研究了三种可能的pdf格式:指数格式、高斯格式和对数正态格式。出于多种原因,我们更喜欢对数正态。[9]我们的变分模型预测,由于LER引起的阈值电压的随机偏差应随着粗糙度幅度的平方而增加。图3显示了栅极长度为35 nm,宽度为50 nm的MOSCAP的变化。我们的结果在这里与Kim等人的结果进行了比较。[10]在这两种情况下,粗糙度幅度的变化似乎是二次的。图4显示了我们对LER和SR在OSI下器件总电容随粗糙度波数标准偏差的随机偏差的预测。图5显示了根据我们的模型,LER和SR的Vt对平均粗糙度波数的随机偏差。使用TCAD很难捕捉到这些统计特征。相比之下,我们的建模方法的新颖性和强大优势在于,它允许我们通过显式地合并这些统计量来更容易地处理情况。氧化层厚度是影响Vh变化的关键参数之一。图6显示了根据我们的模型,氧化物厚度的变化对Vh随机偏差的影响。该模型预测LER的偏差大于sr。有趣的是,当氧化物厚度小于4 nm时,由粗糙度引起的Vh偏差急剧减小。
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引用次数: 5
Integration of III-V nanowires in Si technology III-V纳米线在Si技术中的集成
Pub Date : 2005-06-20 DOI: 10.1109/DRC.2005.1553136
O. Wunnicke, S. Serafin, M. V. van Kouwen, A. Roest, E. Bakkers
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引用次数: 0
Time and temperature dependence of the drain current of PF-based OFETs 基于pf的ofet漏极电流的时间和温度依赖性
Pub Date : 2005-06-20 DOI: 10.1109/DRC.2005.1553093
M. Hamilton, J. Kanicki
We have studied the effects of bias temperature stress (BTS) on organic field-effect transistors (OFETs) in accumulation (negative stress bias) and depletion (positive stress bias) using both dc and ac stress biases. The device studied is an inverted, gate-planarized, co-planar thin-film transistor that has been previously described [1]. Indium tin oxide (ITO) was used for the source and drain contacts and benzocyclobutene (BCB) / amorphous silicon nitride was used for the gate-planarization / insulator. The organic semiconductor F8T2 (poly 9,9-dioctylfluorene-co-bithiophene) was deposited by spin-coating from xylenes solution. These devices exhibit typical p-type field-effect transistor behavior. Typical values of the linear regime field-effect mobility, threshold voltage, and subthreshold swing for these devices are: 5x10-3 cm2/Vs, -20 V, and 3.0 V/decade respectively. All measurements were performed in the dark and in air using an HP4156 connected to a Karl Suss PM-8 probe station with a temperature-controlled chuck. For the case of negative dc BTS over long time scales (>104sec), we have used both interrupted and noninterrupted stress methods measured over a range of temperatures (293K < T < 353K). The major observable effect is a shift of the threshold voltage to more negative values as the stress time accumulates, causing a decrease in the drain current at a specific applied gate bias. The observed dependence on stress temperature is analyzed in terms of the kinetics of the stress mechanism. This analysis is performed by unifying the threshold voltage shift curves through either the normalization of the accumulated stress time by a thermally activated time constant for the stress or by using the thermalization energy [2,3]. We note that the values of both the activation energy of the time constant and the thermalization energy are approximately 0.25eV. We propose that this energy corresponds to the peak of a density of trap states above the valence band/HOMO level of F8T2. The observed bias stress effects are reversible at room temperature in the dark. However, recovery of the device is accelerated at elevated temperatures and by illumination with strongly absorbed illumination, as has been observed by others [4], indicating charge trapping/de-trapping as the general stress/recovery mechanism. For the case of positive dc BTS, we observe an unexpected shift of the threshold voltage towards more negative values as well as a significant degradation of the subthreshold swing, while the field-effect mobility is left unchanged throughout the duration of the positive BTS. The effects of the positive BTS are also reversible and we have observed that the recovery of the threshold voltage lags the recovery of the subthreshold swing. This is a possible indication that there are at least two competing stress mechanisms occurring in this device for positive BTS. We propose that there is an additional threshold voltage shift due to the movement of charge
我们使用直流和交流应力偏置研究了偏置温度应力(BTS)对有机场效应晶体管(ofet)在积累(负应力偏置)和耗尽(正应力偏置)下的影响。所研究的器件是一种倒置的、栅极平面化的、共面薄膜晶体管,以前被描述为[1]。源极和漏极触点采用氧化铟锡(ITO),栅极-平面化/绝缘子采用苯并环丁烯(BCB) /非晶氮化硅。采用自旋镀膜的方法,在二甲苯溶液中沉积了有机半导体F8T2(聚9,9-二辛基芴-二噻吩)。这些器件表现出典型的p型场效应晶体管行为。这些器件的线性区场效应迁移率、阈值电压和亚阈值摆幅的典型值分别为:5 × 10-3 cm2/Vs、-20 V和3.0 V/ 10年。所有测量都在黑暗和空气中进行,使用HP4156连接到带有温控卡盘的Karl Suss PM-8探针站。对于长时间尺度(bbb104sec)的负直流BTS,我们使用了在温度范围(293K < T < 353K)内测量的中断和非中断应力方法。可观察到的主要效应是,随着应力时间的积累,阈值电压向更负的值移动,导致在特定施加的栅极偏压处漏极电流减少。从应力机制的动力学角度分析了观察到的对应力温度的依赖性。这种分析是通过统一阈值电压位移曲线来完成的,要么通过热激活时间常数对应力的累积应力时间进行归一化,要么使用热化能[2,3]。我们注意到时间常数的活化能和热化能的值都约为0.25eV。我们认为这个能量对应于F8T2价带/HOMO能级以上的陷阱态密度峰值。观察到的偏置应力效应在室温下是可逆的。然而,正如其他人所观察到的那样,在高温和强吸收照明下,器件的恢复会加速,这表明电荷捕获/去捕获是一般的应力/恢复机制。对于正直流BTS,我们观察到阈值电压意外地向负值移动,以及亚阈值摆幅的显著退化,而场效应迁移率在正BTS的整个持续时间内保持不变。正BTS的影响也是可逆的,我们已经观察到阈值电压的恢复滞后于亚阈值摆幅的恢复。这是一个可能的迹象,至少有两个竞争的压力机制发生在该装置的阳性BTS。我们提出,在正施加应力偏压的影响下,由于绝缘体中带电物质的运动(可能在BCB中),存在额外的阈值电压位移。我们还研究了脉冲(交流)BTS在脉冲频率(10至100Hz)范围内的积累和耗尽机制的影响,其基本值为OV,占空比为50%。在每种情况下,观察到的效应都是阈值电压移动,而场效应迁移率保持不变。对于负交流BTS,如果考虑到有效应力时间,则阈值电压位移与直流BTS相似。对于正交流BTS,我们观察到,对于该器件,存在一个较小的负阈值电压位移,其相对较快地达到最大值(与负BTS情况相比)。在短时间后,阈值电压位移开始向正的阈值电压位移回摆。对于这里使用的脉冲频率范围,阈值电压移位似乎不表现出任何可察觉的依赖于脉冲频率。值得注意的是,虽然阈值电压位移描述了这些器件的不稳定性,但对于所有交流BTS测量,阈值下摆幅似乎随着应力的增加而减少,尽管需要进一步的实验来充分描述这种影响及其对交流偏置应力条件的依赖。总之,我们已经使用交流和直流应力偏置信号执行和分析了正(耗尽)和负(积累)BTS。对于每种情况,主要观察到的效应是由有机半导体中载流子的捕获引起的阈值电压位移,或者在正极BTS的情况下,有机绝缘体中带电物质的运动变得可疑。结果已经成功地使用热化能和动力学概念进行了分析。
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引用次数: 0
Simulation of hole transport in p-channel Si MOSFETs p沟道Si mosfet中空穴输运的模拟
Pub Date : 2005-06-20 DOI: 10.1109/DRC.2005.1553070
S. Krishinan, D. Vasileska, M. Fischetti
Abstract. Electron transport in Si inversion layers has been the primary subject ofresearch for many years now [1], but hole transport has been relegated to the background mainly due to the highly complicated valence band-structure in Si. Hole transport is affected by the warping and anisotropy of the valence bands and the band-structure cannot be approximated with an effective mass picture or with an analytical band model. The advent of alternate device structures [2,3&4] aimed at boosting the speed and density ofVLSI circuits however, seems to have revived interest.
摘要多年来,硅反转层中的电子输运一直是研究的主要课题[1],但空穴输运一直处于次要地位,主要是由于硅中高度复杂的价带结构。空穴输运受价带翘曲和各向异性的影响,其能带结构不能用有效质量图或解析能带模型来近似。然而,旨在提高超大规模集成电路的速度和密度的替代器件结构[2,3&4]的出现似乎重新引起了人们的兴趣。
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引用次数: 0
Device scaling in COSMOS architecture COSMOS架构中的设备缩放
Pub Date : 2005-06-20 DOI: 10.1109/DRC.2005.1553071
A. Al-Ahmadi, S. Kaya
The Si nanoelectronic engineering have recently reached a level of capability, which make 3D processing and strain engineering on silicon-on-insulator (SOI) substrates not only possible [1,2], but also a necessity in order to surmount practical limitations of conventional planar CMOS [3]. Thus, device designers are presented with a multitude of options in exploring new designs, as evident in the proliferation of alternative architectures, including multi-gated, strained Si/SiGe channel, Schottky and Tunneling MOSFETs. While these structures have unique features superior to conventional bulk devices, nonetheless, they still retain the redundancy inherent to CMOS operation, namely building two devices even though only one operates at a given stable output. In this paper we demonstrate and design, through the use of 1/2/3D device simulations, a novel symmetrically operating CMOS device pair with a single gate structure having a unique device layout and ultra-thin strained channels [4]. The new architecture, named complementary orthogonal stacked MOS (COSMOS), places the n and pMOSFETs perpendicular to one another under a single gate, integrating them vertically (see Figs.1&2). Thus COSMOS can eliminate the aforementioned redundancy in CMOS and may result in dramatic savings (>50%) not only in active device area of a conventional digital CMOS layout, but also in R-C device parasitics associated with building and wiring two sets of devices for a single Boolean output function. We argue that the COSMOS structure is a natural candidate for very dense, low-power circuitry required in sub-5Onm scale. The proposed COSMOS architecture relies for operation on a conventional silicon electron channel grown atop a strained-SiGe channel for holes, as shown in Fig.2. To facilitate threshold tuning, reduce parallel conduction and eliminate need for doping, Ge concentration in the strained channel must be high. In accordance, the gate material may be a mid-gap metal, poly-SiGe alloy or polySi, depending on the choice of Ge concentration or background doping. The channel layers must be grown [5] or bonded [6] on a SOI substrate to allow isolation of both MOSFETs, while also keeping with the general scaling trends associated with low-leakage and low-parasitic SOI substrates. For a sample layer structure with a 4nm strained-Si03Ge0.7 hole channel and 3nm Si electron channel under a mid-gap metal gate, ID self-consistent Poisson-Schrodinger simulations (see Fig.3) indicate that symmetric population of both channels is possible with a threshold of IVTI=0.4±0.2 V. We also find that there is no significant parallel conduction in this layer structure, removing concerns for isolation in the stacked channels. Even for this non-optimum layer example, the carriers in both channels of COSMOS layers are well confined and have quite similar distributions. The use of large Ge concentration in the buried strained channel should improve hole mobility considerably over that of electr
硅纳米电子工程最近已经达到了一定的能力水平,这使得在绝缘体上硅(SOI)衬底上进行三维加工和应变工程不仅成为可能[1,2],而且是克服传统平面CMOS实际限制的必要条件[3]。因此,器件设计人员在探索新设计时提供了多种选择,如替代架构的激增,包括多门控,应变Si/SiGe通道,肖特基和隧道mosfet。虽然这些结构具有优于传统批量器件的独特功能,但它们仍然保留了CMOS操作固有的冗余性,即即使只有一个器件在给定的稳定输出下工作,也可以构建两个器件。在本文中,我们通过使用1/2/3D器件模拟演示和设计了一种具有独特器件布局和超薄应变通道的单栅极结构的新型对称操作CMOS器件对[4]。新的结构,称为互补正交堆叠MOS (COSMOS),将n和pmosfet垂直放置在一个栅极下,垂直集成它们(见图1和图2)。因此,COSMOS可以消除CMOS中的上述冗余,不仅可以节省传统数字CMOS布局的有源器件面积(>50%),还可以节省与为单个布尔输出功能构建和连接两组器件相关的R-C器件寄生。我们认为COSMOS结构是sub-5Onm尺度下所需的非常密集、低功耗电路的自然候选。所提出的COSMOS架构依赖于传统的硅电子通道来运行,该通道生长在应变sige孔道之上,如图2所示。为了便于阈值调谐,减少平行传导和消除掺杂的需要,应变通道中的Ge浓度必须很高。根据锗浓度或背景掺杂的选择,栅极材料可以是中隙金属、聚sige合金或多晶硅。沟道层必须在SOI衬底上生长[5]或键合[6],以允许两个mosfet隔离,同时也保持与低漏和低寄生SOI衬底相关的一般缩放趋势。对于在中隙金属栅下具有4nm应变si03ge0.7孔道和3nm Si电子通道的样品层结构,ID自一致泊松-薛定谔模拟(见图3)表明,当阈值为IVTI=0.4±0.2 V时,两个通道可以对称填充。我们还发现在该层结构中没有明显的平行传导,消除了对堆叠通道隔离的担忧。即使对于这个非最优层的例子,COSMOS层的两个通道中的载流子也受到很好的限制,并且具有非常相似的分布。在埋藏应变沟道中使用高浓度的Ge,将大大提高电子在Si反转沟道中的空穴迁移率。因此,当x.0.3时,应变Sii-的空穴迁移率。Gex层应相当于或大于未掺杂Si反转层中的电子迁移率[7]。通过将p-MOSFET沿[011]方向对齐[8],可以进一步提高空穴迁移率,从而恢复p-MOSFET由于与栅极分离较大而产生的跨导亏损。在COSMOS中,有几个独立的层结构参数,包括层组成、厚度和顺序,可以用来优化对称器件阈值。在图4中,我们演示了如何独立定制这些参数以防止并联导通并准确设置VT。单个MOSFET特性的3D TCAD仿真(图5)验证了上面的ID分析,进一步支持了用单栅极对称控制两个通道的能力。为了证明COSMOS在数字电路中的实用性,我们在3D中模拟了40nm COSMOS NOT门对输入脉冲的瞬态响应(图6)。该栅极在sub-SOnm尺度下使用的低驱动电压(VDD+IVssl< . ov)下具有可观的延迟(lO00ps)和噪声裕度数字。这些结果说明了COSMOS逻辑在低功耗和高密度应用中的独特潜力,可以通过优化结构和选择对称VT进一步增强。栅极的延迟可以以静态泄漏为代价得到改善(图7),这是由于寄生p-i-n器件在高驱动条件下开启造成的。为了抑制这种情况,在COSMOS结构的制造过程中需要两个额外的蚀刻步骤[4]。此外,COSMOS栅极具有特殊的缩放趋势,由于正交器件布局中栅极长度和宽度的相互依赖,栅极长度越小,阈值越大,20nm以下节点的ON电流越小(图8)。本研究旨在介绍新型COSMOS架构如何在50nm以下操作、优化和利用。 我们说明了这种迄今为止尚未开发的COSMOS架构的设计原则,以获得最佳的泄漏和开关性能。这项工作表明,通过独特的布局和通道工程组合,可以在CMOS逻辑电路中获得显着的面积和性能增益。
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引用次数: 0
Optimization of sb-heterostructure diode for low noise detection sb-异质结构二极管的低噪声检测优化
Pub Date : 2005-06-20 DOI: 10.1109/DRC.2005.1553149
H. Moyer, T. Hsu, R. Bowen, Y. Boegeman, P. Deelman, S. Thomas, A. Hunter, J. Schulman
Current millimeter wave imaging cameras based on square-law detector diodes require an RF low noise amplifier (LNA) to boost the signal above the detector noise floor. Sb-heterostructure diodes, fabricated from epitaxial layers of InAs and AlGaSb, have shown very high zero-biased sensitivities at W-band, but the devices studied were not optimized for low noise [1-3]. Zero-biased devices have an important a priori advantage over the commonly used biased Schottky diode detector because removing the bias eliminates 1/fnoise and provides the potential for ultra-low noise performance without the need for pre-amplification. The remaining noise is predominantly Johnson noise, Sv =4kTRj (per Hz), where RJ is the junction resistance. A key figure of merit is the Noise Equivalent Power (NEP), a measure of the minimum detectable power, given by SV"I2/S, where S is the sensitivity in volts per watt. To lower the noise, RJ can be decreased from the -1OKQ value of the previous diodes. The basic diode active region contains highly doped n-type InAs, an AlSb barrier, an un-doped AlGaSb layer, followed by a highly doped GaSb (p) to InAs (n) tunnel junction [1-3]. The key layer being altered here is the AlSb layer. It controls the overall current flow through the device and thus the junction resistance. We have thinned it from its previous values of 32-39A to 1 5-20A to lower the junction resistance. The I-V curve of a typical 2x2 [m2 diode with a 15iA AlSb barrier is shown in Fig. 1. A polynomial fit to the important figure of merit y, the I-V curvature divided by the slope [4], is found to be 23V'. This is somewhat less than the ~40V-1 curvature found with the thicker AlSb barriers. The diode with a 20A AlSb produced an intermediate curvature of 27V-', illustrating the expected trend of approaching ohmic behavior as the barrier is thinned. Sparameters measured to 40 GHz are used to extract a standard equivalent circuit model. Figure 2 shows a table ofthe extracted results for the diodes with 15A and 20A barrier thicknesses. The values differ by about 10-15% across a wafer due to variations in epitaxy, processing tolerances, and measurement uncertainties. These values, along with the polynomial, are utilized in a user defined non-linear model in Microwave Offi1ce [5] with the results being displayed in Fig. 3. This result is similar to the measured data in Fig. 4. for which the diode was placed in a housing with 5 mil alumina circuits and tuned for optimum sensitivity. In both cases, the maximum sensitivity is close to 2500 V/W. An open X/4 line at 36 GHz was added to reflect the RF signal back into the diode to offset the effects from capacitor loss on the DC output side. As the line acts as a narrowband bandstop filter, the bandwidth of the circuit was reduced. Associated measured low frequency noise of the diode is shown in Fig. 5. The best fit is to a Johnson noise power equivalent to that of a 630Q resistor, quite close to the junction resistance plus -38Q o
目前基于平方律检测器二极管的毫米波成像相机需要一个射频低噪声放大器(LNA)来将信号提升到检测器噪声底限以上。由InAs和AlGaSb外延层制成的sb异质结构二极管在w波段显示出非常高的零偏灵敏度,但所研究的器件并未针对低噪声进行优化[1-3]。与常用的偏置肖特基二极管检测器相比,零偏置器件具有重要的先验优势,因为去除偏置可消除1/f噪声,并且在不需要预放大的情况下提供超低噪声性能的潜力。剩余的噪声主要是约翰逊噪声,Sv =4kTRj(每Hz),其中RJ是结电阻。一个关键的优点是噪声等效功率(NEP),这是对最小可检测功率的测量,由SV I2/S给出,其中S是灵敏度,单位是伏特每瓦。为了降低噪声,RJ可以从先前二极管的- 10okq值减小。基本二极管有源区包含高掺杂的n型InAs、AlSb势垒、未掺杂的AlGaSb层,以及高掺杂的GaSb (p)与InAs (n)的隧道结[1-3]。这里被改变的关键层是AlSb层。它控制通过器件的总电流,从而控制结电阻。我们已经将其从之前的32-39A减薄到15 - 20a,以降低结电阻。具有15iA AlSb势垒的典型2x2 [m2二极管的I-V曲线如图1所示。一个多项式拟合的重要图形的优点y, I-V曲率除以斜率[4],是23V'。这比较厚的AlSb屏障的~40V-1曲率要小一些。具有20A AlSb的二极管产生了27V-'的中间曲率,说明了当屏障变薄时接近欧姆行为的预期趋势。使用测量到40 GHz的参数提取标准等效电路模型。图2显示了15A和20A势垒厚度二极管的提取结果表。由于外延、加工公差和测量不确定度的变化,晶圆上的值相差约10-15%。在微波办公软件[5]中,将这些值与多项式一起用于用户自定义的非线性模型中,结果如图3所示。该结果与图4的实测数据相似。为此,二极管被放置在具有5密耳氧化铝电路的外壳中,并调谐到最佳灵敏度。在这两种情况下,最大灵敏度接近2500 V/W。在36 GHz增加了一条开放的X/4线,将射频信号反射回二极管,以抵消直流输出侧电容损耗的影响。由于线路作为窄带带阻滤波器,电路的带宽降低。相关测量的二极管低频噪声如图5所示。最合适的是约翰逊噪声功率相当于一个630Q电阻,相当接近结电阻加上串联电阻的-38Q。这表明在零偏条件下,噪声遵循预测的简单行为。使用此噪声功率和峰值测量灵敏度2700v /W的NEP方程产生1.2 pW/Hz。我们认为我们的r值可以大大降低,因为扫描电镜照片显示明显的削弱。这加上进一步缩小二极管面积和电容应导致NEP值远低于1 pW/Hz12。
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引用次数: 1
Nanocrystal lasing in the single-exciton regime using engineered exciton-exciton interactions 利用工程激子-激子相互作用的单激子体制下的纳米晶体激光
Pub Date : 2005-06-20 DOI: 10.1109/DRC.2005.1553142
V. Klimov, S. Ivanov, J. Nanda, I. Bezel, M. Achermann, L. Balet
Because of size-controlled emission color, good photostability, and chemical flexibility, colloidal semiconductor nanocrystals (NCs) are promising building blocks for new types of colorselectable optical gain media [1]. One factor limiting optical gain performance ofNCs is highly efficient multiexciton Auger recombination that leads to short picosecond optical gain life times [2]. Recent attempts to suppress Auger recombination utilized NC shape control [3, 4]. Using elongated CdSe NCs (quantum rods) it was possible to extend optical gain life times by almost an order of magnitude, which further allowed a many-fold reduction of the excitation threshold for amplified spontaneous emission (ASE) [4]. For both spherical and elongated particles, Auger recombination times rapidly shorten as the particle dimensions are decreased. Therefore, it becomes progressively more difficult to achieve the ASE regime for shorter wavelengths that require the use of NCs of small sizes. In particular, while demonstrating strong optical-gain performance in the red-yellow spectral ranges, CdSe NCs do not show efficient ASE in the range of green and particularly blue colors that correspond to extremely small NC sizes (< 3nm).
胶体半导体纳米晶体(NCs)具有尺寸控制的发射色、良好的光稳定性和化学柔韧性,是新型可选色光学增益介质的重要组成部分[1]。限制nc光学增益性能的一个因素是高效的多激子俄歇复合,这会导致短皮秒的光学增益寿命[2]。最近尝试利用数控形状控制来抑制螺旋钻复合[3,4]。使用细长的CdSe NCs(量子棒),可以将光学增益寿命延长近一个数量级,这进一步允许将放大自发发射(ASE)的激发阈值降低许多倍[4]。对于球形和细长颗粒,随着颗粒尺寸的减小,俄歇复合时间迅速缩短。因此,在需要使用小尺寸nc的较短波长的情况下,实现ASE变得越来越困难。特别是,虽然CdSe纳米在红-黄光谱范围内表现出强大的光学增益性能,但在绿色和蓝色范围内却没有表现出有效的ASE,这对应于极小的纳米尺寸(< 3nm)。
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引用次数: 0
High power AlGaN/GaN HEMTs for wireless base station application 用于无线基站应用的高功率AlGaN/GaN hemt
Pub Date : 2005-06-20 DOI: 10.1109/DRC.2005.1553108
K. Joshin, T. Kikkawa
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引用次数: 6
Cold and hot carrier effects on HfO/sub 2/ and HfSiO NMOSFETS with tin gate electrode 锡栅电极HfO/ sub2 /和HfSiO nmosfet的冷热载流子效应
Pub Date : 2005-06-20 DOI: 10.1109/DRC.2005.1553076
J. Sim, S.C. Song, R. Choi, C. Young, G. Bersuker, S. H. Bae, D. Kwong, B. Lee
Introduction Hafnium based high-k dielectrics and metal gate electrodes have been aggressively investigated in order to ensure continued scaling ofCMOS technology. Well known limitations of high-k dielectric devices such as low mobility, charge trapping, interfacial oxide quality have been improved significantly and will no longer be a show stopper for the implementation in 45nm node [1-4]. However, reliability characteristics of high-k dielectrics have not been fully understood yet. Since the transient charging effect, which is generally not observed in SiO2, complicates evaluation of the properties of high-k gate stacks [5-10]. Hot carrier effects of the high-k gate dielectrics should be investigated considering the effect from cold carriers [1114]. Even though the contribution of cold carrier are not separable from that of hot carrier during channel hot carrier stress, the reversibility of cold carrier effects can be carefully examined to differentiate the effect of cold carrier from hot carrier induced damage on the device, which is assumed to be permanent. In this paper, we investigate the effect of cold carrier and hot carrier on the HfO2 and HfSiO NMOSFETs transistor devices.
为了确保cmos技术的持续扩展,基于铪的高k电介质和金属栅电极已经得到了积极的研究。众所周知,高k介电器件的局限性,如低迁移率、电荷捕获、界面氧化物质量等,已经得到了显著改善,将不再是45nm节点实现的阻碍因素[1-4]。然而,高k介电体的可靠性特性尚未完全了解。由于在SiO2中通常没有观察到的瞬态充电效应,使得高k栅极堆性能的评估变得复杂[5-10]。考虑到冷载流子的影响,高k栅极介质的热载流子效应应该被研究[1114]。尽管在通道热载流子应力期间,冷载流子的贡献与热载流子的贡献是不可分离的,但冷载流子效应的可逆性可以仔细检查,以区分冷载流子的影响和热载流子对设备的损伤,这被认为是永久性的。本文研究了冷载流子和热载流子对HfO2和HfSiO nmosfet晶体管器件的影响。
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引用次数: 2
期刊
63rd Device Research Conference Digest, 2005. DRC '05.
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