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2010 IEEE International Conference on Semiconductor Electronics (ICSE2010)最新文献

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CMOS implementation of envelope detector circuit in 0.18µm Process 0.18µm工艺中包络检测器电路的CMOS实现
Pub Date : 2010-06-28 DOI: 10.1109/SMELEC.2010.5549383
P. Fahsyar, N. Soin
This paper presents an envelope detector circuit design for RFID applications implemented in 0.18µm CMOS technology. Towards the design compatibility with standard digital CMOS process, the doubler cell, diode connected PMOS and low transconductance transistor are chosen to place in the rectifier section and to replace the conventional diode as well as the resistor. The proposed envelope detector circuit was simulated with a 150mV – 250mV input signal. With 0.2 modulation index at 900MHz carrier frequency, the power dissipation is found to be 18.8µW at 27°C.
本文提出了一种采用0.18µm CMOS技术实现的RFID应用包络检测器电路设计。为了与标准的数字CMOS工艺兼容,在整流部分选用了倍频单元、二极管连接的PMOS和低跨导晶体管,取代了传统的二极管和电阻。以150mV ~ 250mV的输入信号对所提出的包络检测器电路进行了仿真。在900MHz载波频率下,当调制指数为0.2时,27℃时的功耗为18.8µW。
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引用次数: 3
Low cost prototyping of microfluidic structure 微流控结构的低成本原型
Pub Date : 2010-06-28 DOI: 10.1109/SMELEC.2010.5549373
J. Alvankarian, B. Majlis
An elastomeric microfluidic structure was developed by polymerization of a liquid photopolymer using UV lithography process. Integration of different components of a microfluidic device including microchannel, micromixer, and microchamber, on one layer and by using one photomask is practiced. More complicated geometries and 2-layer chip was examined in this research and gives promising results. This process enables well control over the thicknesses of the layers, and dimensions of the components considering. The proposed simple process benefits from low cost in development time and expenses of the materials.
采用紫外光刻工艺聚合液体光聚合物,制备了弹性微流控结构。将微流控装置的不同组件,包括微通道、微混合器和微腔,集成在一层上,并使用一个光掩膜。对更复杂的几何形状和两层芯片进行了研究,并取得了令人满意的结果。这一过程可以很好地控制层的厚度和所考虑的组件的尺寸。所提出的简单工艺有利于降低开发时间和材料费用。
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引用次数: 3
Thermal stress test for PLED PLED热应力测试
Pub Date : 2010-06-28 DOI: 10.1109/SMELEC.2010.5549354
B. K. Yap, S. Koh, S. Tiong, C. N. Ong
This work presents thermal stability studies of PLEDs involving the comparison of electrical performance before and after thermal treatment. Two cycles of continuous thermal stress test from room temperature to 100 deg Celsius did not significantly affect the total photoluminescence intensity from the light-emitting polymer in the PLED suggesting that the layer of light-emitting polymer is intact. However, the rapid degradation of the electrical performance of the PLED right after the first cycle of thermal stress test suggests that the electrodes have degraded hence hindering charge injection into the polymeric layer.
这项工作提出了led的热稳定性研究,涉及热处理前后电气性能的比较。从室温到100℃连续两个循环的热应力测试对PLED中发光聚合物的总光致发光强度没有显著影响,表明发光聚合物层是完整的。然而,在热应力测试的第一个循环之后,PLED的电性能迅速下降,这表明电极已经退化,从而阻碍了电荷注入聚合物层。
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引用次数: 0
Chemical sensors fabricated in CMOS-MEMS technology 采用CMOS-MEMS技术制造的化学传感器
Pub Date : 2010-06-28 DOI: 10.1109/SMELEC.2010.5549499
I. Voiculescu
This presentation is an overview of standard Integrated Circuits technology that enables the integration of the chemical sensors with the necessary driving and signal conditioning circuitry on the same chip. A variety of Complementary Metal Oxide Semiconductor (CMOS)-based chemical sensors found in the literature and the microprocessing technologic steps necessary for the integration of microelectromechanical systems (MEMS) sensors in CMOS technology are explained in this presentation. CMOS technology has become the mainstream semiconductor technology over the last decade due to its high volume production capability and its circuit advantages. Silicon is a readily available material that is relatively inexpensive. In addition, circuits fabricated in CMOS are low cost. An important advantage of CMOS technology is the possibility of integrating electronic circuitry with the MEMS sensor. Although CMOS processes were originally not intended for MEMS devices, the CMOS technology in combination with additional pre or post fabrication micromachining steps allows for integration of MEMS sensors and CMOS circuitry on the same chip. The monolithic integration of CMOS MEMS chemical sensors is a promising approach that has been motivated by the rapid development in integrated-circuit and MEMS technology. The aim in utilizing CMOS technology for realizing chemical sensors is to create more intelligent, more autonomous, more integrated and more reliable chemical sensor systems at low costs in a generic approach. The integration of electronics with chemical sensors in one single chip improves the sensor signals in terms of robustness and signal-to-noise ratio. On-chip integration also improves the microsystem functionality, interconnection and facilitates a more efficient packaging. At high volumes of production, the monolithic solution presents economical advantages, and it is especially attractive for portable and high sensitivity systems. The main disadvantages of the monolithic CMOS–MEMS integration include the restriction to CMOS-compatible materials and the limited choice of micromachining processes. However, the use of CMOS–MEMS offers, on the other hand, unprecedented advantages over hybrid designs, especially with regard to signal quality, device performance, increased functionality and available standard packaging solutions. These advantages clearly outweigh the drawbacks and limitations. A large number of MEMS gas sensors fabricated in CMOS technology were recently researched and developed. Several important CMOS-MEMS gas sensors will be presented.
本报告概述了标准集成电路技术,该技术能够将化学传感器与必要的驱动和信号调理电路集成在同一芯片上。本文介绍了文献中发现的各种基于互补金属氧化物半导体(CMOS)的化学传感器,以及在CMOS技术中集成微机电系统(MEMS)传感器所必需的微处理技术步骤。CMOS技术由于其高批量生产能力和电路优势,在过去十年中已成为主流半导体技术。硅是一种容易获得且相对便宜的材料。此外,用CMOS制造的电路成本低。CMOS技术的一个重要优点是可以将电子电路与MEMS传感器集成在一起。虽然CMOS工艺最初并不用于MEMS器件,但CMOS技术与额外的前置或后加工微加工步骤相结合,可以将MEMS传感器和CMOS电路集成在同一芯片上。随着集成电路和MEMS技术的飞速发展,CMOS MEMS化学传感器的单片集成是一种很有前途的方法。利用CMOS技术实现化学传感器的目的是在通用方法中以低成本创建更智能,更自主,更集成和更可靠的化学传感器系统。将电子与化学传感器集成在一个芯片上,提高了传感器信号的鲁棒性和信噪比。片上集成还提高了微系统的功能,互连和促进更有效的封装。在大批量生产中,单片解决方案具有经济优势,对于便携式和高灵敏度系统尤其具有吸引力。单片CMOS-MEMS集成的主要缺点包括对cmos兼容材料的限制和微加工工艺的选择有限。然而,另一方面,与混合设计相比,CMOS-MEMS的使用提供了前所未有的优势,特别是在信号质量、器件性能、增强的功能和可用的标准封装解决方案方面。这些优点显然超过了缺点和局限性。近年来,大量采用CMOS技术制造的MEMS气体传感器得到了研究和开发。本文将介绍几种重要的CMOS-MEMS气体传感器。
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引用次数: 0
Analyze and optimize the silicide thickness in 45nm CMOS technology using Taguchi method 采用田口法对45nm CMOS工艺硅化物厚度进行分析和优化
Pub Date : 2010-06-28 DOI: 10.1109/SMELEC.2010.5549488
F. Salehuddin, I. Ahmad, F. A. Hamid, A. Zaharim
Taguchi method was used to analyze the experimental data in order to get the optimum average of silicide thickness in 45nm devices. The virtually fabrication of the devices was performed by using ATHENA module. While the electrical characterization of the devices was implemented by using ATLAS module. These two modules were used as design tools and helps to reduce design time and cost. In this paper, both modules and Taguchi method was combined to aid in design and optimizer the process parameters. There are four process parameters (factors), namely Halo Implantation, Source/Drain (S/D) Implantation, Oxide Growth Temperature and Silicide Anneal temperature. These factors were varied for 3 levels to perform 9 experiments. Threshold voltage (VTH) results were used as the evaluation variables. Then, the results were subjected to the Taguchi method for determine the optimal process parameters and to produce predicted values. The predicted values of the process parameters were successfully verified with ATHENA and ATLAS's simulator. The results show that the average of silicide thickness after optimizations approaches was 30.66nm and 30.58nm for NMOS and PMOS devices respectively. In this research, Halo Implantation was identified as one of the process parameters that has the strongest effect on the response characteristics. While the S/D Implantation was identified as an adjustment factor to get the nominal values of threshold voltage for PMOS and NMOS devices equal to −0.1501V and +0.150047V respectively.
采用田口法对实验数据进行分析,得到45nm器件中硅化物厚度的最佳平均值。利用ATHENA模块实现了器件的虚拟制造。同时利用ATLAS模块对器件进行电学表征。这两个模块被用作设计工具,有助于减少设计时间和成本。本文将模块和田口法相结合,以帮助设计和优化工艺参数。工艺参数(因素)有四个,分别是晕注入、源/漏(S/D)注入、氧化物生长温度和硅化物退火温度。这些因素在3个水平上变化,进行9个试验。阈值电压(VTH)结果作为评价变量。然后,将结果应用田口法确定最佳工艺参数并产生预测值。利用ATHENA和ATLAS的仿真器对工艺参数的预测值进行了验证。结果表明:采用优化方法后,NMOS器件和PMOS器件的硅化物平均厚度分别为30.66nm和30.58nm;在本研究中,光晕注入被认为是对响应特性影响最大的工艺参数之一。而S/D注入被确定为调整因子,PMOS和NMOS器件的阈值分别为- 0.1501V和+0.150047V。
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引用次数: 13
Synthesis and characterization of sn doped ZnO nanowires 锡掺杂ZnO纳米线的合成与表征
Pub Date : 2010-06-28 DOI: 10.1109/SMELEC.2010.5549526
A. Ismardi, T. Y. Tiong, C. Dee, A. A. Hamzah, B. Majlis
This paper reports on synthesis and characterizations of Sn doped ZnO nanowires. Sn doped ZnO nanowires was successfully been grown using carbothermal reduction method. Morphological and structures were characterized using FESEM, revealed that nanowires grown on random direction with diameter around 30 – 60 nm. EDX analysis was used to confirm composition element, Sn element was found in the nanowires in less than 1% of total composition. XRD was applied to examine structure quality of Sn doped ZnO nanowires, XRD spectra shown the structure have high crystallinity and it is wurtzite structure. No contrast different were found between pure and Sn doped ZnO nanowires. I-V measurement shown that using Sn as dopant may decrease the resistance of ZnO nanowires.
本文报道了锡掺杂氧化锌纳米线的合成和表征。采用碳热还原法制备了锡掺杂ZnO纳米线。利用FESEM对纳米线的形态和结构进行了表征,发现纳米线的生长方向是随机的,直径在30 ~ 60 nm之间。通过EDX分析确定了纳米线的组成元素,发现纳米线中Sn元素的含量不到总成分的1%。采用XRD对锡掺杂ZnO纳米线的结构质量进行了表征,XRD光谱显示其结构结晶度高,为纤锌矿结构。纯ZnO纳米线与掺锡ZnO纳米线之间没有对比差异。I-V测量结果表明,使用Sn作为掺杂剂可以降低ZnO纳米线的电阻。
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引用次数: 2
Carbon nanotube conductance model in parabolic band structure 抛物线带结构的碳纳米管电导模型
Pub Date : 2010-06-28 DOI: 10.1109/SMELEC.2010.5549582
M. Ahmadi, Z. Johari, N. A. Amin, S. Mousavi, R. Ismail
Fermi dirac integral is applied to study the parabolic band structure of Carbon Nanotube (CNT) which is in the range of minimum band energy. In this letter electronic transport property of one dimensional carbon nanotube with parabolic band structures near the charge neutrality point is investigated. The temperature dependent conductance model which shows minimum conductance near the charge neutrality point and decreases by decreasing the temperature is presented. CNTs with micrometer length exhibit nondegenerate behavior on fundamental band structure similar to the conventional long channel devices.
应用费米狄拉克积分研究了碳纳米管(CNT)在最小能带范围内的抛物带结构。本文研究了在电荷中性点附近具有抛物带结构的一维碳纳米管的电子输运性质。给出了在电荷中性点附近电导最小并随温度的降低而减小的温度相关电导模型。微米长度的碳纳米管在基本能带结构上表现出与传统长通道器件相似的非简并行为。
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引用次数: 17
A folded cascode OTA using current-mode gain-boost amplifier 采用电流型增益-升压放大器的折叠级联码OTA
Pub Date : 2010-06-28 DOI: 10.1109/SMELEC.2010.5549417
Ma Lei, Ding Ying-tao, Wang Xing-hua
In this report, an OTA which is used in fully differential pipelined ADC was described. Using gain-boost architecture with current-mode single-ended amplifier, this OTA reduce parasitic taking by gain-boost amplifier to achieve high-gain and high-speed. Besides, a dual phase SC-CMFB circuit is introduced, and some methods are concerned to improve the performance. Then, by optimization the layout design, OTA's mismatch was reduced. This design was using SMIC 0.35um CMOS process and simulation both schematic and layout in Cadence. The result of the simulation shows that the OTA has a gain up to 105dB, a unity gain bandwidth of about 937MHz for a 2pF load, a settling time of about 4.4ns, a Common-Mode Range is 0.6V∼3.3V, a output swing is 0.6V∼3.1V, with the power supply of 3.3V, the dissipation is 39mW. This amplifier was used in a 10bit 100MHz pipelined ADC.
本文介绍了一种用于全差分流水线ADC的OTA。该OTA采用增益-升压结构和电流型单端放大器,减少增益-升压放大器的寄生占用,实现高增益和高速。此外,还介绍了一种双相SC-CMFB电路,并提出了一些改进电路性能的方法。然后,通过优化布局设计,减少OTA的错配。本设计采用中芯0.35um CMOS工艺,并在Cadence中对原理图和版图进行仿真。仿真结果表明,在2pF负载下,OTA的增益可达105dB,单位增益带宽约为937MHz,稳定时间约4.4ns,共模范围为0.6V ~ 3.3V,输出摆幅为0.6V ~ 3.1V,电源为3.3V,功耗为39mW。该放大器用于一个10位100MHz的流水线ADC。
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引用次数: 4
Investigation of short channel immunity of fully depleted double gate MOS with vertical structure 垂直结构全耗尽双栅MOS短通道抗扰度研究
Pub Date : 2010-06-28 DOI: 10.1109/SMELEC.2010.5549479
M. Riyadi, J. E. Suseno, Z. Napiah, A. Hamid, I. Saad, R. Ismail
The electrical performance of fully depleted double gate MOSFET devices with vertical structure feature were evaluated with the implementation of oblique rotating implantation (ORI) method for several silicon pillar thicknesses using virtual wafer tool. The difference in the subthreshold performance is well noticed, as well as the potentials across the channel for different geometries. The implication of channel length reduction shows that in fully depleted feature, thinner pillar will result in better subthreshold performances than the thicker structure while maintaining the high on-current. As a result, thinner pillar delivers better short channel characteristic control in further channel scaling up to 20 nm.
利用虚拟晶圆工具对具有垂直结构特征的全耗尽双栅MOSFET器件进行了不同硅柱厚度的倾斜旋转注入(ORI)方法,对器件的电学性能进行了评价。阈下性能的差异很明显,以及不同几何形状的通道电位。沟道长度减小的含义表明,在完全耗尽特征下,薄柱比厚柱具有更好的亚阈值性能,同时保持高导通电流。因此,在进一步的通道缩放到20nm时,更薄的柱提供了更好的短通道特性控制。
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引用次数: 1
Comparison on I-V performances of Silicon PIN diode towards width variations 宽度变化下硅PIN二极管I-V性能的比较
Pub Date : 2010-06-28 DOI: 10.1109/SMELEC.2010.5549491
N. I. Shuhaimi, M. Mohamad, W. M. Jubadi, Ruzaini Tugiman, N. Zinal, Rosnah Mohd Zin
The performance of the PIN diode is very much depends on the chip geometry and the semiconductor material used, especially in the intrinsic region. The biasing voltage applied to the PIN diode determines the amount of holes and electrons injected into the intrinsic region and the values of its resistivity. This will give effect to the I-V performance of the PIN diode. This research studied the effects of width (and subsequently area) variations of intrinsic region of Silicon PIN diode on its I-V performance. The two dimensional structures and recipes of PIN diode are designed and simulated using Sentaurus TCAD tools. The thickness of PIN diode is kept at 40 µm while only the width is varied accordingly. Three variations of width have been chosen which are 90 µm, 80 µm, and 70 µm in order to study the impacts of width variation has on the I-V performance. Based on the simulation results, it is found that the current level is proportional to the PIN structure width.
PIN二极管的性能在很大程度上取决于芯片的几何形状和所使用的半导体材料,特别是在本禀区。施加到PIN二极管上的偏置电压决定了注入本征区域的空穴和电子的数量及其电阻率值。这将对PIN二极管的I-V性能产生影响。本研究研究了硅PIN二极管本征区的宽度(以及随后的面积)变化对其I-V性能的影响。利用Sentaurus TCAD工具对PIN二极管的二维结构和配方进行了设计和仿真。PIN二极管的厚度保持在40µm,只改变宽度。为了研究宽度变化对I-V性能的影响,我们选择了90µm、80µm和70µm三种宽度变化。仿真结果表明,电流电平与PIN结构宽度成正比。
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引用次数: 10
期刊
2010 IEEE International Conference on Semiconductor Electronics (ICSE2010)
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