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2023 35th International Symposium on Power Semiconductor Devices and ICs (ISPSD)最新文献

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Enhanced Design Architecture to Suppress Leakage Current of High-Voltage (HV) Lateral nMOSFETs in 4H-SiC 4H-SiC中抑制高压(HV)侧置nmosfet漏电流的改进设计架构
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147724
S. Isukapati, S. Jang, Woongje Sung
This paper demonstrates and presents an enhanced design architecture to suppress the leakage from the high-voltage (HV) lateral MOSFETs in 4H-SiC. The demonstrated MOSFETs were fabricated on an N-epi/P-epi/N+ substrate. A comparative analysis was conducted between the performance of the improved design architecture and the conventional architecture, and the outcomes exhibit a notable decrease in the magnitude of the leakage current. The proposed device architecture possesses the capability to effectively fulfill the design specifications of a durable lateral power MOSFET to be used in silicon carbide (SiC) power integrated circuits (ICs).
本文演示并提出了一种增强的设计架构,以抑制4H-SiC中高压(HV)侧mosfet的泄漏。所演示的mosfet是在N-epi/P-epi/N+衬底上制备的。将改进后的结构与传统结构的性能进行了对比分析,结果表明泄漏电流的大小明显减小。所提出的器件架构能够有效地满足用于碳化硅(SiC)功率集成电路(ic)的耐用横向功率MOSFET的设计规范。
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引用次数: 0
3D simulation study of 375V partial SOI SJ LDNMOS BDS limitation 375V部分SOI SJ LDNMOS北斗系统限制的三维仿真研究
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147409
Elizabeth Kho Ching Tee, M. Antoniou, D. Green, A. Hölke, F. Udrea
This paper investigates novel techniques of extending the breakdown voltage (BDS) capability of the partial silicon-on-insulator SJ LDNMOS up to 460V. This is based on a unique combination of two different concepts and technologies, namely the Partial Silicon-On-Insulator (PSOI) and Superjunction (SJ) to achieve a highly effective platform for Power Integrated Circuit. The device BDS sensitivity to the handle wafer diode voltage is mitigated by using a novel 3D design based on “domain decomposition” 3D TCAD simulations. The hot spot location in the complex termination area, which is due to out-of-plane (90°) bending of electrostatic potential lines towards the midpoint of the device area, is successfully identified and eliminated.
本文研究了将部分绝缘体上硅的SJ LDNMOS的击穿电压(BDS)能力提高到460V的新技术。这是基于两种不同概念和技术的独特组合,即部分绝缘体上硅(PSOI)和超结(SJ),以实现高效的功率集成电路平台。采用基于“区域分解”三维TCAD仿真的新颖三维设计,降低了器件BDS对手柄晶圆二极管电压的灵敏度。在复杂的端接区内,由于静电电位线向器件区域中点方向发生了90°的面外弯曲而产生的热点位置被成功识别并消除。
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引用次数: 0
Gate Impedance Analysis of SiC power MOSFETs with SiO2 and High-k Dielectric 高k介电介质SiC功率mosfet的栅极阻抗分析
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147725
S. Race, Piyush Kumar, P. Natzke, Ivana Kovacevic-Badstuebner, M. E. Bathen, U. Grossner, G. Romano, Y. Arango, Sami Bolat, S. Wirths, L. Knoll, A. Mihaila
This paper shows how the gate impedance $Z_{text{gg}}$ characterization of a SiC-power MOSFET can be used to investigate its dielectric-semiconductor interface quality distinguishing the channel and JFET contributions. The $Z_{text{gg}}$ characterization is performed for SiC power MOSFETs with SiO2 and with high-k gate dielectrics. Different voltage- and temperature-dependencies of $Z_{text{gg}}$ are identified in the respective SiC MOSFETs. The newer designs show an improvement with respect to the near semiconductor interface-traps. Experimental characterization and TCAD device simulations are carried out to support the conclusions.
本文展示了如何使用硅基功率MOSFET的栅极阻抗表征来研究其介电-半导体接口质量,从而区分沟道和JFET的贡献。$Z_{text{gg}}$表征是对具有SiO2和高k栅极电介质的SiC功率mosfet进行的。$Z_{text{gg}}$在各自的SiC mosfet中确定了不同的电压和温度依赖性。较新的设计在近半导体界面陷阱方面有了改进。实验表征和TCAD装置仿真验证了上述结论。
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引用次数: 1
Demonstration of Fundamental Characteristics for Power Switching Application in Planer Type E-mode MOS-HEMT Using Normally Depleted AlGaN GaN Epitaxial Layer On Si Substrate 在Si衬底上使用常耗尽AlGaN GaN外延层的Planer型E-mode MOS-HEMT中功率开关应用的基本特性演示
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147503
T. Nanjo, S. Yamamoto, T. Imazawa, A. Kiyoi, T. Shinagawa, T. Watahiki, N. Miura, M. Furuhashi, K. Nishikawa, T. Egawa
Planer-type HEMTs using fully depleted AlGaN/GaN epitaxial layers called EID (Extrinsically electron Induced by Dielectric) AlGaN/GaN MOS-HEMTs are expected to be stable and reliable E-mode operation thanks to its damage-less fabrication process. Fundamental characteristics of the EID-HEMTs for power switching applications were investigated in this study. The fabricated EID-HEMTs exhibited E-mode operation with threshold voltage of 0.5 V, on-resistance of $210 mathrm{m}Omega$ and break-down voltage of 1.1 kV. Furthermore, clear 400 V/10 A switching operation without any harmful symptoms was also demonstrated.
使用完全耗尽的AlGaN/GaN外延层(称为EID (extrically electron Induced by Dielectric))的平板型hemt,由于其无损伤的制造工艺,有望实现稳定可靠的e模式操作。本文研究了用于功率开关应用的eid - hemt的基本特性。所制备的eid - hemt具有e模式工作,阈值电压为0.5 V,导通电阻为210 mathrm{m}Omega$,击穿电压为1.1 kV。此外,还演示了清晰的400v / 10a开关操作,没有任何有害症状。
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引用次数: 0
Protection of SiC MOSFET from Negative Gate Voltage Spikes with a Low-Voltage GaN HEMT 用低压GaN HEMT保护SiC MOSFET免受负栅电压尖峰的影响
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147444
Ji Shu, Jiahui Sun, Zheyang Zheng, K. J. Chen
The false turn-on induced by the gate loop parasitic and Miller capacitance during the fast switching transient of SiC MOSFET leads to increased switching loss, circuit oscillation and even shoot-through. Using a negative OFF-state gate voltage $V_{text{GS}-} text{off}$ can effectively mitigate the false turn-on issue. However, this approach also raises the magnitude of negative gate voltage spikes that occur during the fall of $V_{text{DS}}$, leading to unwanted negative gate overstress. In this work, a simple GaN-HEMT-based gate clamping circuit (GCC) is designed for SiC MOSFET negative gate voltage spike clamping. Thanks to the fast switching speed of GaN HEMT, GCC can clamp the negative spike effectively even at a high slew rate of $V_{text{DS}}$ (120 V/ns), protecting the gate from overstress when negative $V_{text{GS}-text{off}}$ is applied to suppress false turn-on.
在SiC MOSFET的快速开关瞬态过程中,门环寄生和米勒电容诱发的误导通导致开关损耗增大、电路振荡甚至通断。使用负的关断状态栅极电压$V_{text{GS}-} text{off}$可以有效地缓解误导通问题。然而,这种方法也提高了在$V_{text{DS}}$下降期间发生的负栅极电压尖峰的幅度,导致不必要的负栅极过应力。本文设计了一种简单的基于gan - hemt的栅极箝位电路(GCC),用于SiC MOSFET负栅极电压尖峰箝位。由于GaN HEMT的快速开关速度,即使在$V_{text{GS}-text{off}}$的高压转率下,GCC也能有效箝位负尖峰,保护栅极在施加负$V_{text{GS}-text{off}}$抑制假导通时免受过应力的影响。
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引用次数: 0
Threshold Voltage Instability of Schottky-type p-GaN Gate HEMT down to Cryogenic Temperatures 低温下肖特基型p-GaN栅极HEMT的阈值电压不稳定性
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147433
Xinyu Wang, Zuoheng Jiang, Junting Chen, Junlei Zhao, Han Wang, Chengcai Wang, Haohao Chen, Jun Ma, Xiaolong Chen, M. Hua
The frozen trap effect can influence the threshold voltage of $p$-GaN gate HEMT when the temperature decreases to 15 K. The freezing of hole traps occurs at a higher temperature since their energy levels are deeper than that of electron traps, leading to a turning point of the threshold voltage and gate capacitance depending on temperatures. A high gate bias facilitates the emission of frozen carriers, which has a barrier-lowering effect, counteracting the frozen trap effect. At cryogenic temperatures, the threshold voltage of $p$-GaN gate HEMT becomes stable after long-time gate stress, showing promising potential for cryogenic applications.
当温度降至15 K时,冻结阱效应会影响p -GaN栅极HEMT的阈值电压。空穴阱的冻结发生在更高的温度下,因为它们的能级比电子阱深,导致阈值电压和栅极电容的转折点取决于温度。高栅极偏置有利于冻结载流子的发射,其具有降低势垒效应,抵消了冻结陷阱效应。在低温条件下,p -GaN栅极HEMT的阈值电压在长时间栅极应力后趋于稳定,具有良好的低温应用前景。
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引用次数: 0
A New Generation 700 V BCD Technology that Integrates Quadruple-RESURF LDMOS with Best-in-Class Specific On-Resistance 新一代700 V BCD技术,集成了具有最佳特定导通电阻的四层复路LDMOS
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147667
M. Qiao, Dican Hou, Yue Gao, Dingxiang Ma, Jiawei Wang, Bo Zhang
A new generation 700 V Bipolar-CMOS-DMOS (BCD) technology is reported in this work, which integrates quadruple-RESURF LDMOS with best-in-class specific on-resistance ($R_{text{on},text{sp}}$). By introducing PNPN layer in the drift region to locally increase the doping concentration of deep N-type well (DNW) and provide lower on-resistance conduction paths, the quadruple-RESURF LDMOS with PNPN layer (PNPN LDMOS) can achieve low $R_{text{on},text{sp}}$ of 62.5 m Ω.cm2 and high breakdown voltage (BV) of 739 V, whose $R_{text{on},text{sp}}$ is 40.8% lower than that of the mass-produced triple-RESURF LDMOS. The corresponding analytical silicon limit of PNPN LDMOS is derived as $R_{text{on},text{sp}}= 5.93times 10^{-6}times 153times BV^{l.67}$, which is well verified by simulated and measured results at 500 to 700 V breakdown level. Besides, parasitic or independent JFET with competitive saturation drain current ($I_{text{Dsat}}$) is also fabricated in the BCD technology. The measured results indicate that the fabricated JFET can achieve competitive $I_{text{Dsat}}$ of 66.5 µA/µm.
本文报道了新一代700 V双极cmos - dmos (BCD)技术,该技术集成了具有同类最佳特定导通电阻($R_{text{on},text{sp}}$)的四极cmos - dmos。通过在漂移区引入PNPN层,局部增加深n型井(DNW)的掺杂浓度,并提供更低导通电阻的导通路径,具有PNPN层的四层重熔LDMOS (PNPN LDMOS)可以实现62.5 m的低$R_{text{on},text{sp}}$ Ω。击穿电压(BV)高达739 V,其$R_{text{on},text{sp}}$比量产的三路复极LDMOS低40.8%。相应的PNPN LDMOS分析硅极限为$R_{text{on},text{sp}}= 5.93乘以10^{-6}乘以153乘以BV^{1。在500 ~ 700 V击穿水平下的模拟和实测结果很好地验证了这一结论。此外,还采用BCD技术制备了具有竞争饱和漏极电流($I_{text{Dsat}}$)的寄生或独立JFET。测量结果表明,所制备的JFET可以达到具有竞争力的66.5µA/µm。
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引用次数: 0
A Novel IGBT with Variable Conductance Path Realizing Both Low $V_{on}$ and Turn-off Loss 一种可实现低导通损耗和关断损耗的新型变导通IGBT
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147482
Yuxiao Yang, Wanjun Chen, Xinqi Sun, Xiaorui Xu, Yun Xia, Chao Liu, Zhaoji Li, Bo Zhang, Meng Wei, Ping Zhang, Zhong Ren
A novel low loss Insulated Gate Bipolar Transistor (IGBT) with variable conductance path (VCP) is proposed in this paper. The conductance of P-doped VCP is controlled by the depletion region generated around the depletion gate (DG). In the blocking state, VCP has high conductance and shorts P-well to the emitter. In the on-state, VCP has low conductance and the current can hardly flow through. Accordingly, the highly doped carrier stored (CS) layer would not affect the breakdown voltage (BV) of VCP-IGBT while it can effectively form the hole barrier to obtain low on-state voltage ($V_{on}$). In addition, when VCP-IGBT is turning off, the depletion region near DG vanished. VCP changes to the high-conductance state and extracts carriers directly out of the device, contributing to a low turn-off loss ($E_{off}$). Simulation results show that, under the same $E_{off}$, VCP-IGBT reduces $V_{on}$ by 20% compared to CSTBT and 17% compared to SBL-IGBT without decreasing static and dynamic blocking capability.
提出了一种新型的低损耗变导通径绝缘栅双极晶体管(IGBT)。掺p的VCP电导受耗尽栅(DG)周围产生的耗尽区控制。在阻塞状态下,VCP具有高电导和短p阱。在导通状态下,VCP电导低,电流难以通过。因此,高掺杂的载流子存储层(CS)不会影响VCP-IGBT的击穿电压(BV),但它可以有效地形成空穴势垒以获得低导通电压($V_{on}$)。此外,当VCP-IGBT关闭时,DG附近的耗尽区消失。VCP转变为高导状态,直接从器件中提取载流子,有助于降低关断损耗($E_{off}$)。仿真结果表明,在相同的E_{off}$下,VCP-IGBT在不降低静态和动态阻塞能力的情况下,比CSTBT减少了20%的V_{on}$,比SBL-IGBT减少了17%的V_{on}$。
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引用次数: 0
10 A/950 V switching of GaN-channel HFETs with non-doped AlN buffer 非掺杂AlN缓冲gan沟道hfet的10a / 950v开关
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147681
O. Hilt, F. Brunner, M. Wolf, Eldad Bahat Treidel, J. Würfl, A. Thies, A. Mogilatenko
AlN-based semiconductor devices are considered to outperform lateral AlGaN/GaN HFETs for power-electronic switching applications due to the high AlN-material breakdown field strength. We present an AlGaN/GaN /AlN-HFET transistor without any compensation doping in the AlN-buffer layer. Breakdown voltage scaling as function of the gate-drain separation of 140 V/µm and power figure-of-merit of 2.4 GW/cm2 were achieved which is superior to most other GaN device technologies. 120 m Ω power transistors demonstrated 10 A switching transients up to 950 V off-state voltage and thus meet basic requirements for kW-range power switching. The origin of still present dispersion effects during high voltage switching could be attributed to a high structural defect density at the AlN-buffer / GaN channel material interface.
由于高aln材料击穿场强,基于aln的半导体器件被认为在电力电子开关应用中优于横向AlGaN/GaN hfet。我们提出了一种在aln缓冲层中没有任何补偿掺杂的AlGaN/GaN /AlN-HFET晶体管。击穿电压随栅漏分离的变化可达到140 V/µm,功率优值为2.4 GW/cm2,优于大多数其他GaN器件技术。120m Ω功率晶体管的开关瞬态电压可达10a,断态电压可达950 V,满足kw范围功率开关的基本要求。在高压开关过程中仍然存在的色散效应的起源可归因于aln缓冲液/ GaN通道材料界面处的高结构缺陷密度。
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引用次数: 0
Gate Driver IC with Fully Integrated Overcurrent Protection Function by Measuring Gate-to-Emitter Voltage During IGBT Conduction 具有全集成过流保护功能的栅极驱动IC,可测量IGBT导通过程中栅极-发射极电压
Pub Date : 2023-05-28 DOI: 10.1109/ISPSD57135.2023.10147568
Haifeng Zhang, Dibo Zhang, Hiromu Yamasaki, Katsuhiro Hata, K. Wada, Kan Akatsu, I. Omura, M. Takamiya
To achieve low-cost overcurrent protection for IGBTs without using external components such as high-voltage diodes, a gate driver IC with a fully integrated overcurrent protection function by measuring gate-to-emitter voltage ($V_{text{GE}}$) during IGBT conduction is proposed. In the proposed gate driver IC, while the IGBTs are ON, constant gate charge is periodically discharged and charged, and when $V_{text{GE}}$ dropped by each discharge is less than the reference voltage, it is detected as the overcurrent and the IGBTs are immediately turned off to protect from the overcurrent. In a single-pulse test of an inductive load at 300 V for an IGBT with a pulse rating of 200 A, the proposed gate driver IC fabricated with 180-nm BCD process successfully protected the overcurrent of 370 A with the protection delay of 810 ns.
为了在不使用高压二极管等外部元件的情况下实现IGBT的低成本过流保护,提出了一种通过测量IGBT导通过程中栅极到发射极电压($V_{text{GE}}$)来实现完全集成过流保护功能的栅极驱动IC。在本文提出的栅极驱动IC中,当igbt处于导通状态时,定时放电并充电,当每次放电下降的$V_{text{GE}}$小于参考电压时,检测到过电流,igbt立即关断以保护过电流。在脉冲额定值为200 a的300 V感应负载单脉冲测试中,采用180 nm BCD工艺制作的栅极驱动器IC成功地保护了370 a的过流,保护延迟为810 ns。
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引用次数: 0
期刊
2023 35th International Symposium on Power Semiconductor Devices and ICs (ISPSD)
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