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RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics最新文献

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The properties of P-type copper (I) iodide (CuI) as a hole conductor for solid-state dye sensitized solar cells p型碘化铜(CuI)作为固态染料敏化太阳能电池空穴导体的性能
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706535
M. Amalina, M. Rusop
This research demonstrated the effect of solution concentration of copper (I) iodide (CuI) to the thin films properties and photovoltaic performance. The CuI concentration was varied from 0.01M to 0.09M. The CuI solution was prepared by mixing the CuI powder with 50 ml of acetonitrile as a solvent. A novel method of mist atomization technique has been used for the deposition of CuI materials. For the thin film properties, the surface morphology and electrical properties of CuI thin films which was deposited on the glass substrates were investigated. The result shows the CuI thin film properties strongly depends on its precursor concentration. The nano size CuI particles were observed for all thin films. The electrical properties indicates the increased of conductivity until optimum point of 0.05M. The highest device efficiency obtained in this research is 1.05%. The pore filling issues and electrical conductivity of hole conductor were the main factors contributed to the overall performance of solar cells.
本研究证明了碘化铜溶液浓度对薄膜性能和光伏性能的影响。崔浓度在0.01M ~ 0.09M之间变化。将CuI粉末与50ml乙腈作为溶剂混合制备CuI溶液。本文提出了一种新型的雾雾化沉积方法。在薄膜性能方面,研究了在玻璃基板上沉积的CuI薄膜的表面形貌和电学性能。结果表明,CuI薄膜的性能与前驱体浓度密切相关。在所有薄膜上都观察到纳米级的CuI颗粒。电学性能表明,在最佳点0.05M之前,电导率有所提高。本研究获得的器件效率最高为1.05%。孔导体的孔隙填充问题和导电性是影响太阳能电池整体性能的主要因素。
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引用次数: 6
Lithography method for selective area of CNTs growth 光刻法用于碳纳米管的选择性生长区域
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706552
Aishah Fauthan, M. Hamidon, B. Majlis, Z. Yunuza
This paper presents the processes of fabrication method in the selective area of growth Carbon Nanotubes (CNTs) on the substrate with an Interdigitated (IDE) electrodes pattern using resist AZ1500. The substrate used in this work was Gallium Phosphate with Chromium (0.021μm) and Platinum (0.11μm) as the metal layer. The CNTS was grown in two different temperatures using chemical vapor deposition (CVD) with hydrogen as the process gas and benzene as the hydrocarbon. The most suitable temperature growth for CNTs in this work was found to be 800oC. In this study, CNTs were produced by CVD impregnated with iron nitrate (Fe(NO3)3·9H2O) solution and Resist AZ1500 as the mask for the selective area grown. Maximum temperature for Resist AZ1500 was at 120oC. Therefore Iron Nitrate was used as the protector to protect the resist to be evaporated. The Resist AZ1500 and the Iron Nitrate were coated in different layer on the substrate using standard lithography method.
本文介绍了利用抗蚀剂AZ1500在衬底上生长具有交错电极图案的碳纳米管(CNTs)的选择性区域的制备方法。本文采用的衬底为磷酸镓,金属层为铬(0.021μm)和铂(0.11μm)。采用化学气相沉积法(CVD),以氢气为工艺气体,苯为碳氢化合物,在两种不同温度下生长CNTS。在本研究中,CNTs最适宜的生长温度为800oC。在本研究中,用硝酸铁(Fe(NO3)3·9H2O)溶液浸渍CVD制备碳纳米管,并以Resist AZ1500作为选择性生长区域的掩膜。抗蚀剂AZ1500的最高温度为120℃。因此,采用硝酸铁作为保护剂来保护抗蚀剂的蒸发。采用标准光刻法在基体上涂覆抗蚀剂AZ1500和硝酸铁。
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引用次数: 1
Design of CMOS based Programmable Gain Operational Amplifier 基于CMOS的可编程增益运算放大器设计
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706492
Sparsh Raut Dessai, Pramath Keny, U. Gaitonde, M. S. Chandra
Variable Gain Amplifier (VGA) is an integral part of Analog Systems, a special class of VGA called the Programmable Variable Gain Amplifier (PVGA) has revolutionized modern electronic systems. In this paper a highly specific Programmable Gain Operational Amplifier (PGOA) is presented. The Op-Amp design is based on a low distortion source coupled differential amplifier model. The gain of the Op-Amp is varied by adjusting an array of internal series and feedback resistors; to facilitate this setting, three 8-bit programmable registers are provided using which a gain of 24 dB can be attained. Additionally, the design also features two 8-bit registers for status read back operation of the Op-Amp. The overall gain of the Op-Amp varies from -12dB to 12dB for a single stage. The design is embedded application interface compatible. The PGOA is an ideal solution to systems which require variable gain in real time applications and in signal processing. The modeling of the PGOA is made using CMOS device technology and the detailed analysis is summarized.
可变增益放大器(VGA)是模拟系统的一个组成部分,一类特殊的VGA称为可编程可变增益放大器(PVGA)已经彻底改变了现代电子系统。本文提出了一种高专用可编程增益运算放大器(PGOA)。运算放大器设计基于低失真源耦合差分放大器模型。运算放大器的增益是通过调整一系列内部串联和反馈电阻来改变的;为了方便这种设置,提供了三个8位可编程寄存器,使用它们可以获得24 dB的增益。此外,该设计还具有两个8位寄存器,用于运算放大器的状态回读操作。运算放大器的整体增益在单级-12dB到12dB之间变化。该设计与嵌入式应用接口兼容。PGOA是实时应用和信号处理中需要可变增益的系统的理想解决方案。利用CMOS器件技术对PGOA进行了建模,并对其进行了详细分析。
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引用次数: 3
Improvement in dielectric properties of bilayer ZnO/MgO films deposited by Sol-Gel technique 溶胶-凝胶法制备双层ZnO/MgO薄膜的介电性能
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706531
Z. Habibah, M. Wahid, L. N. Ismail, R. A. Bakar, M. Rozana, M. Rusop
Magnesium oxide and bilayer ZnO/MgO dielectrics film were successfully deposited using spin coating technique. The effect of MgO layer thickness towards prepared dielectric films behaviour was determined by controlling the deposition time. The comparison of the MgO and ZnO/MgO dielectrics film properties shows that the bilayer ZnO/MgO with 238nm MgO layer thickness shows better dielectrics properties compared to others. This was due to its small surface roughness which resulted in better electrical properties that have high resistivity and low leakage current. Optimized bilayer ZnO/MgO film was then used as the dielectrics film for fabrication of organic capacitor. Capacitor performance was determined via capacitance-voltage (C-V) analysis at different frequency applied and it revealed that, the capacitance value increased from 2.4pF to 10pF with addition of PVDF-TrFE organic ferroelectric layer on bilayer ZnO/MgO film caused by high polarization produced in the film.
采用自旋镀膜技术成功地制备了氧化镁和ZnO/MgO双层介质薄膜。通过控制沉积时间来确定MgO层厚度对制备的介电膜性能的影响。MgO和ZnO/MgO介质薄膜性能的比较表明,MgO层厚度为238nm的双层ZnO/MgO具有较好的介电性能。这是由于其表面粗糙度小,从而产生了更好的电学性能,具有高电阻率和低漏电流。采用优化后的ZnO/MgO双层膜作为介质膜制备有机电容器。通过不同施加频率下的电容电压(C-V)分析确定了电容器的性能,结果表明,在ZnO/MgO双层膜上添加PVDF-TrFE有机铁电层,由于薄膜产生高极化,电容值从2.4pF提高到10pF。
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引用次数: 1
The study on the aspect ratio of Atomic Force Microscope (AFM) measurements for triangular silicon nanowire 原子力显微镜(AFM)测量三角形硅纳米线长宽比的研究
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706514
N. F. Za'bah, Kelvin S. K. Kwa, A. O'Neill
A top-down silicon nanowire fabrication using a combination of optical lithography and orientation dependent etching (ODE) has been developed using <;100> Silicon-on Insulator (SOI) as the starting substrate. The use of ODE etchant such as potassium hydroxide (KOH) and Tetra-Methyl Ammonium Hydroxide (TMAH) is known to create geometrical structures due to its anisotropic mechanism of etching. In this process flow, using the <;100> SOI substrate, a triangular shape silicon nanowire is successfully fabricated. The triangle silicon nanowire has <;111> planes on each side which theoretically produces an angle of 54.7° with the <;100> horizontal plane. One of the geometrical characterizing methods that were used to confirm the fabrication of the silicon nanowire is by using Atomic Force Microscope (AFM). In this paper, the study on the aspect ratio of the AFM measurements is presented. This experimental study would demonstrate the importance of having a high aspect ratio cantilever when a nanowire with a thickness of less than 200 nm is concerned.
以绝缘体上硅(SOI)为起始衬底,采用光学光刻和取向相关蚀刻(ODE)相结合的方法制备了自顶向下的硅纳米线。利用氢氧化钾(KOH)和四甲基氢氧化铵(TMAH)等ODE蚀刻剂,由于其各向异性的蚀刻机制,可以产生几何结构。在此工艺流程中,利用SOI衬底,成功制备了三角形硅纳米线。三角形硅纳米线的每边都有平面,理论上与水平面的夹角为54.7°。利用原子力显微镜(AFM)对硅纳米线进行几何表征是验证硅纳米线制备的一种方法。本文对原子力显微镜测量的纵横比进行了研究。该实验研究将证明,当厚度小于200nm的纳米线时,具有高纵横比悬臂梁的重要性。
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引用次数: 5
Highly sensitive porous PtSi/Si UV detector with high selectivity 高灵敏度高选择性多孔PtSi/Si紫外探测器
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706506
K. Kamran, Khatami Saeid, Raissi Farshid, Khorramshahi Fatemeh
Novel porous structure on silicon is proposed for selective ultra violet detection with high quantum efficiency. In order to exploit the single electron effect for this goal, Pt-Si schottky barrier was formed. N-type silicon was electro chemically etched and pores with the height of less than 1 micron were fabricated followed by electrochemical deposition of Platinum. Distinctive and highly responsive behavior of the detector to 365-380 nm wave lengths compared to that of visible range is assumed to be in close relationship with its structural characterizations which is justified through the manner of the shift in breakdown voltage in reverse bias, as the respondent parameter, presented in this report.
提出了一种新型的硅孔结构,用于高量子效率的选择性紫外检测。为了利用单电子效应实现这一目标,形成了Pt-Si肖特基势垒。首先对n型硅进行电化学刻蚀,制备高度小于1微米的孔,然后电化学沉积铂。与可见范围相比,探测器对365-380 nm波长的独特和高响应行为被认为与其结构特征密切相关,这是通过本报告中提出的反向偏置击穿电压位移作为应答参数的方式来证明的。
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引用次数: 3
Effect of source-drain metal shield in FET structure on drain leakage current FET结构中源漏金属屏蔽对漏漏电流的影响
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706482
K. A. Yusof, Nurul Izzati Mohammad Noh, S. H. Herman, A. Abdullah, M. Hussin, W. Abdullah
This study presents the effect of source-drain metal shield in FET structure on drain leakage current. The FET structure was fabricated on the wafer by using MIMOS's standard fabrication process. Aluminum (Al) was sputtered with thickness of 400 nm as metal shield layer at the source and drain area of FET structure. There are four different layout designs of source-drain metal shield that were tested by Keithley 236 current-voltage sourcing under light and dark conditions. The measurements were carried out in a dark box with controllable light intensity. Besides the drain leakage current investigation, this study also investigates the light effect of various layout designs with source-drain metal shield on FET structure. It was found that the layout design with source-drain metal shield has lower drain leakage current compared to the layout design without source-drain metal shield. However, the various layout design of source-drain metal shield cannot eliminate the light effect.
研究了FET结构中源漏金属屏蔽对漏极漏电流的影响。采用MIMOS的标准工艺在晶圆上制备了FET结构。在FET结构源极和漏极处溅射厚度为400 nm的铝(Al)作为金属屏蔽层。采用Keithley 236电流电压源对四种不同的源漏金属屏蔽层进行了明暗两种条件下的测试。测量是在一个具有可控光强的暗箱中进行的。除了漏极漏电流的研究外,本研究还研究了各种源漏金属屏蔽层布局设计对FET结构的光效应。研究发现,带源漏金属屏蔽的布局设计漏电流较不带源漏金属屏蔽的布局设计低。然而,源漏金属屏蔽的各种布局设计并不能消除光的影响。
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引用次数: 0
Acoustic wavelength effects on the propagation of SAW on piezo-crystal and polymer substrates 声波波长对声表面波在压电晶体和聚合物衬底上传播的影响
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706501
A. F. Malik, Z. A. Burhanudin, V. Jeoti, U. Hashim, K. L. Foo, M. Ismail
The design, fabrication and characterization of Surface Acoustic Wave (SAW) delay lines on piezo-crystalline and polymer substrate is outlined in this paper. The SAW delay lines consist of two sets of Inter-Digital Transducers (IDT) separated by a certain distance on the surface of the piezoelectric substrate. Initially, the design parameters of the SAW delay lines are obtained using Impulse Response model. Then, the device is fabricated using conventional lithography process. The transmission coefficients (S21) of the SAW devices fabricated on 500 μm-thick Lithium Niobate (LiNbO3) and on 110 μm-thick polyvinyldeneflouride (PVDF) substrates are then observed using vector network analyzer. It is found that SAW devices designed to operate at 55-196 MHz on LiNbO3 has S21 with losses within 10-20 dB. On the other hand, SAW devices designed to operate on PVDF, do not show any credible signal. The successful transmission of SAW on LiNbO3 shows that appropriate design, fabrication and characterization methodology has been adopted. Unfortunately, due to the thin PVDF layer, the acoustic signal transverse downward beyond the thickness of the PVDF rendering the SAW devices non-operational. From the data collected, it is therefore believed that successful generation of SAW on piezo-crystal and polymer substrate could only be realized if the thickness of the PVDF is at least six times the acoustic wavelength of the SAW itself.
本文概述了压电晶体和聚合物衬底表面声波延迟线的设计、制作和性能表征。SAW延迟线由压电衬底表面间隔一定距离的两组数字间换能器(IDT)组成。首先,利用脉冲响应模型得到SAW延迟线的设计参数。然后,采用常规光刻工艺制作该器件。利用矢量网络分析仪测量了在500 μm厚的铌酸锂(LiNbO3)和110 μm厚的聚偏氟乙烯(PVDF)衬底上制备的SAW器件的透射系数S21。研究发现,在LiNbO3上工作在55-196 MHz的SAW器件具有S21,损耗在10-20 dB之间。另一方面,设计用于PVDF的SAW设备不会显示任何可靠的信号。SAW在LiNbO3上的成功传输表明采用了合适的设计、制造和表征方法。不幸的是,由于PVDF层很薄,声信号横向向下超过PVDF的厚度,使得SAW设备无法工作。因此,从收集到的数据来看,只有PVDF的厚度至少是SAW本身声波波长的6倍,才能在压电晶体和聚合物衬底上成功产生SAW。
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引用次数: 2
Modeling and simulation of microscopic defects in CIS-based solar cell thin film using silvaco TCAD 基于硅基TCAD的太阳能电池薄膜微观缺陷建模与仿真
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706487
R. A. Bakar, S. H. Herman, H. Hassan, W. Ahmad, F. Mohamad, M. Aminuddin
Reactively sputtered copper indium sulfide (CIS) chalcopyrite semiconductor has been actively studied as the potential absorber layer for solar cell thin film application. Using sputtering technique however could result in the formation of several types of defects for example microscopic defects. Microscopic defects are formed within the absorber layer due to the formation of pinholes after surface treatment process. Since the effects of the formation of pinholes in CIS-based thin film solar cell is not well understood yet, a detail study is therefore necessary. In this work, a solar cell model was developed and simulated using Silvaco TCAD tools. Cylindrical pinholes of various diameters and depths were created and analyzed. The simulation results predicted that the number and depth of the pinholes affect the performance of the CIS-based thin film solar cell. The variation of pinhole diameter however did not exhibit any significant effect. It was found that the increases in the number of the pinholes resulted in the increases of solar cell efficiency. The efficiency was predicted to be of around 17.5% when ten pinholes existed within the CIS layer. No significant effect was found as the diameter of the pinhole became wider. Deeper the pinhole depth into the layer however produced the solar cell efficiency of only 1.37%.
反应溅射硫化铜铟(CIS)黄铜矿半导体作为太阳能电池薄膜的潜在吸收层得到了积极的研究。然而,使用溅射技术可能导致几种类型的缺陷的形成,例如微观缺陷。表面处理后,由于针孔的形成,吸收层内部形成微观缺陷。由于对cis基薄膜太阳能电池中针孔形成的影响尚不清楚,因此有必要进行详细的研究。在这项工作中,开发了太阳能电池模型,并使用Silvaco TCAD工具进行了仿真。创建并分析了不同直径和深度的圆柱针孔。仿真结果预测了针孔的数量和深度对cis基薄膜太阳能电池性能的影响。针孔直径的变化对其影响不显著。研究发现,针孔数量的增加导致太阳能电池效率的提高。当CIS层内存在10个针孔时,效率约为17.5%。随着针孔直径的增大,没有发现明显的影响。而针孔深度越深,太阳能电池效率仅为1.37%。
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引用次数: 0
Analysis on electrical and optical properties of nitrogen incorporated amorphous carbon prepared by aerosol-assisted CVD method 气溶胶辅助CVD法制备氮掺杂非晶碳的电学和光学性质分析
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706505
A. N. Fadzilah, K. Dayana, L. N. Ismail, M. Rusop
We have successfully deposit the a-C and nitrogen doped a-C (a-C:N) using the custom-made Aerosol-assisted CVD (AACVD). Natural precursor, camphor oil (C10H16O) was selected as the carbon source. The electrical and optical properties were characterized by BUKOH KEIKI CEP2000 solar simulator system and Perkin Elmer LAMBDA 750 UV-vis-NIR spectroscope respectively. Five samples were prepared for the a-C and a-C: N respectively, with the deposition temperatures ranging from 400°C to 600°C. An ohmic contact was acquired between the carbon/metal configurations from the current-voltage solar simulator system. Higher conductivity at a-C: N, ~x10-2 Scm-1 is due to the decrease in defects since the spin density gap decrease with the nitrogen addition. Pure a-C exhibit absorption coefficient, a of 10 cm-1, whereas for a-C:N, a is of 10 cm-1. The high σ value is at a-C:N is due to the presence of more graphitic component (sp2 carbon bonding) in the carbon films.
我们使用定制的气溶胶辅助CVD (AACVD)成功沉积了a-C和氮掺杂的a-C (a-C:N)。选择天然前驱体樟脑油(C10H16O)作为碳源。利用BUKOH KEIKI CEP2000太阳模拟器系统和Perkin Elmer LAMBDA 750紫外-可见光-近红外光谱仪分别对其电学和光学性质进行了表征。分别制备了a-C和a-C: N的5个样品,沉积温度为400℃~ 600℃。从电流-电压太阳模拟器系统中获得了碳/金属结构之间的欧姆接触。在a-C: N, ~x10-2 cm-1处电导率较高是由于自旋密度间隙随着氮的加入而减小,缺陷减少。纯a- c的吸收系数a为10 cm-1,而a- c:N的吸收系数a为10 cm-1。在a-C:N处的高σ值是由于碳膜中存在较多的石墨成分(sp2碳键)。
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引用次数: 0
期刊
RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics
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