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RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics最新文献

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Effect of annealing temperature on electrical and optical properties of ZnO thin films prepared by sol gel method 退火温度对溶胶-凝胶法制备ZnO薄膜电学和光学性能的影响
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706515
M. Hannas, A. Manut, Nurul Hafizah A. Rahman, A. B. Rosli, M. Rusop
In this work, ZnO thin films were deposited on glass substrates using spin coating method. Different annealing temperature from 400 to 550°C significantly distresses the nature of electrical and optical properties of ZnO thin films have been investigated. The effect of annealing temperature on optical and electrical properties of nanostuctured ZnO thin films deposited by spin coating method has been studied. The optical properties were characterized by ultraviolet visible (UV-VIS-NIR) spectrophotometer. The electrical properties were analyzed using I-V measurement (CEP 2000). Gold (Au) was used as a metal contact using electron beam thermal evaporator (ULVAC). The optical transmittance spectrums showed the average transmittance of ZnO thin film with different annealing temperature higher than 90% in visible wavelength region. The optical band properties of the nanostructured ZnO thin films were analyzed by UV Vis and Tauc method was accepted to estimate the optical gap and absorption coefficient. The resistivity of the film decreased as the annealing temperature increased from 400 to 550oC. The highest conductivity values of ZnO thin film was obtained at 500°C with value 0.000197 Scm-1. Moreover, the higher porosity was found at 400oC with value 57.5%. The higher porosity of ZnO thin film can be expected the high sensitivity for gas sensor due to the material has a comparatively large surface area.
本研究采用自旋镀膜法在玻璃基板上沉积ZnO薄膜。研究了400 ~ 550℃不同退火温度对ZnO薄膜电学和光学性质的影响。研究了退火温度对自旋镀膜法制备纳米ZnO薄膜光电性能的影响。用紫外可见分光光度计(UV-VIS-NIR)表征了其光学性质。利用I-V测量(CEP 2000)分析了其电性能。利用电子束热蒸发器(ULVAC),采用金(Au)作为金属触点。透射光谱显示,不同退火温度下ZnO薄膜在可见光区的平均透射率均高于90%。采用紫外可见光谱分析了纳米结构ZnO薄膜的光学带性质,并采用tac法估计了其光隙和吸收系数。从400℃到550℃,薄膜的电阻率随退火温度的升高而降低。ZnO薄膜在500℃时电导率最高,为0.000197 cm-1。在400℃时孔隙率较高,为57.5%。由于ZnO薄膜具有较大的表面积,因此其孔隙率越高,气体传感器的灵敏度越高。
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引用次数: 6
Spherical to polyhedral Pt nanocrystal formation assisted with methylamine 甲胺辅助形成球形到多面体的铂纳米晶体
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706542
M. Ooi, A. Aziz
Nanocrystalline Pt particles synthesized by solvothermal technique assisted with methylamine were investigated. The effect of different amounts of methylamine on the formation of Pt nanocrystal were characterized and elaborated. Small and spherical - like particles were observed for Pt synthesized under the low amount (0.10 mL) of methylamine whilst, concave polyhedral Pt nanocrystal with high - index {411} facets were observed for Pt synthesized under high amount (0.20 mL) of methylamine. The synthesized concave Pt nanocrystal exhibit high absorption peak at 215 nm corresponding to colloidal Pt. The synthesized concave polyhedral structures could be used as a potential catalyst in fuel cells application.
研究了甲胺辅助溶剂热法制备纳米晶铂颗粒。研究了不同量的甲胺对铂纳米晶形成的影响。在低剂量(0.10 mL)甲胺条件下,合成的Pt呈小球形颗粒;在高剂量(0.20 mL)甲胺条件下,合成的Pt呈凹形多面体纳米晶体,具有高折射率{411}切面。所合成的凹形Pt纳米晶体在215 nm处具有较高的吸收峰,与胶体Pt相对应。所合成的凹形多面体结构可作为一种潜在的燃料电池催化剂应用。
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引用次数: 1
Design and optimization of magnetic particles embedded in PDMS membrane PDMS膜中磁性微粒的设计与优化
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706463
M. Said, J. Yunas, B. Majlis, B. Bais, A. A. Hamzah
A design and optimization of the magnetic particles embedded inside a flexible membrane and factors contributing to the membrane performance have been studied. In this work, Nickel (Ni) is used as magnetic particles and Polydimethylsiloxane (PDMS) is used for membrane material which is considered a matrix component of the flexible membrane. Ni particles with various particle sizes, arrangement and spaces between Ni particles are simulated by using Comsol Multiphysics 4.2. As a result, the optimum design of magnetic particles embedded in membrane for large deflection is by having circular shape membrane with low density of tiny magnetic particles in planar distribution. A preliminary simulation result has been also compared with the theoretical calculation to validate the analysis.
研究了柔性膜内磁性微粒的设计与优化,以及影响柔性膜性能的因素。在这项工作中,镍(Ni)被用作磁性颗粒,聚二甲基硅氧烷(PDMS)被用作膜材料,被认为是柔性膜的基质成分。利用Comsol Multiphysics 4.2软件模拟了不同粒径、不同排列方式和不同间距的Ni粒子。因此,大挠度磁颗粒嵌入膜的最佳设计是采用圆形膜,微磁颗粒密度低,呈平面分布。初步的仿真结果与理论计算结果进行了比较,验证了分析的正确性。
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引用次数: 4
Emulation of double gate transistor in ultra-thin body with thin buried oxide SOI MOSFETs 超薄体双栅晶体管与薄埋氧化SOI mosfet的仿真
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706494
M. K. MdArshad, U. Hashim
Thin body Silicon-on-Insulator (SOI) devices are promising technology for extending the device scalability as projected in ITRS, thanks to immunity to short channel effects. Further improvement can be achieved when the device incorporated with thin buried oxide (BOX) since it allows suppression of fringing electric fields through the BOX thus improving front-gate-to-channel controllability and reducing DIBL. Thin BOX is also suitable for emulation of double-gate (implementing back-gate biasing) schemes used for tuning device characteristics. Thus, in this paper, from the advantages of double gate transistor, we investigate by using ATLAS 2D-simulations the emulation of double gate transistor with bottom contact (underneath the substrate) and top contact (from the top through the silicon and BOX) for both digital and analog/RF figures of merit in ultra-thin body and thin buried oxide (UTBB) SOI MOSFETs. Improvement in performance simply can be achieved with such configurations.
薄体绝缘体硅(SOI)器件是一种很有前途的技术,可以扩展ITRS中预计的器件可扩展性,这要归功于其对短信道效应的免疫。当器件与薄埋氧化物(BOX)结合时,可以进一步改进,因为它可以通过BOX抑制边缘电场,从而提高前门到通道的可控性并降低DIBL。Thin BOX也适用于用于调谐器件特性的双栅(实现后门偏置)方案的仿真。因此,在本文中,从双栅晶体管的优点出发,我们通过ATLAS 2d仿真研究了具有下触点(衬底下方)和上触点(从顶部穿过硅和BOX)的双栅晶体管在超薄体和薄埋氧化物(UTBB) SOI mosfet中的数字和模拟/RF优点的仿真。这样的配置可以简单地提高性能。
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引用次数: 4
Determination of pulverized material permittivity for microwave absorber application 微波吸收器用粉碎材料介电常数的测定
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706479
E. Baharudin, A. Ismail, A. Alhawari, E. S. Zainudin, D. L. Majid, F. Seman, N. Khamis
This paper presents the material characterization of agricultural waste by determining its dielectric properties for microwave absorber application. Three proposed materials, which are empty fruit bunch, oil palm frond and rice husk were investigated for the frequency ranging from 10 GHz to 20 GHz. The methodology was developed using the combination of three techniques involving coaxial probe technique, material density measurement and dielectric mixture model. It is found that the material density and air-particle permittivity have the impact on the wave absorption of the material. The result shows that all three agricultural wastes are capable to absorb electromagnetic signal. The average dielectric constant for solid pulverized agricultural waste are 3.49, 4.06 and 3.31 for empty fruit bunch, oil palm frond and rice husk respectively. Furthermore, at of 15.0 GHz, the solid pulverized empty fruit bunch, oil palm frond and rice husk indicate the highest loss tangent with value of 0.2201, 0.2579 and 0.2218 respectively which contributed from the loss factor of the material complex permittivity.
本文通过测定农业废弃物的介电特性,介绍了农业废弃物的材料特性。对空果束、油棕叶和稻壳三种拟制材料进行了10 ~ 20 GHz频率范围内的研究。该方法结合了同轴探针技术、材料密度测量和介电混合物模型三种技术。研究发现,材料密度和空气粒子介电常数对材料的吸波性能有影响。结果表明,三种农业废弃物都有吸收电磁信号的能力。固体农业废弃物的平均介电常数分别为3.49、4.06和3.31,分别为空果束、油棕叶和稻壳。在15.0 GHz时,固体粉碎空果束、油棕叶和稻壳的损耗切线最高,分别为0.2201、0.2579和0.2218,这是由于材料复介电常数的损耗因素造成的。
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引用次数: 3
The effect of phosphate buffer solution (PBS) concentration on the ion sensitive field-effect transistor (ISFET) detection 磷酸盐缓冲溶液(PBS)浓度对离子敏感场效应晶体管(ISFET)检测的影响
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706508
Chong Soon Weng, U. Hashim, Wei‐Wen Liu
The effect of varying concentration of the phosphate buffer solution (PBS) on the ion sensitive field-effect transistor (ISFET) was studied. 5L of PBS solution was mixed in 20,30,40,50 and 60 L of deionized water (DI water) and tested with ISFET. The results show that the drain current of the ISFET decreases with the decreasing value of PBS solution concentration. The ISFET device tested has a sensitivity of 43.13mV/pH.
研究了不同浓度的磷酸盐缓冲溶液(PBS)对离子敏感场效应晶体管(ISFET)的影响。将5L PBS溶液与20、30、40、50、60 L去离子水(DI水)混合,用ISFET检测。结果表明,随着PBS溶液浓度的减小,ISFET的漏极电流减小。测试的ISFET器件灵敏度为43.13mV/pH。
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引用次数: 1
Effect of nitrogen concentrations on electrical properties of amorphous carbon thin films by using palm oil precursor 氮浓度对棕榈油前驱体制备的非晶碳薄膜电性能的影响
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706533
A. Ishak, K. Dayana, M. Rusop
Amorphous carbon thin films with thickness 39.6-990. 1nm on insulative glass substrates were deposited by bias-assisted pyrolysis-CVD using `green' renewable precursor palm oil. The effect of nitrogen concentrations used on electrical properties of amorphous carbon thin films was determined. The amorphous carbon thin films were characterized by current-voltage measurement, UV/VIS spectrophotometer, surface profiler, and atomic force microscopy. Most of thin films were formed linear region with difference respond of slopes. High slope of ohmic contact for sample 220 mL/min was obtained after nitrogen doping. The sample 220 mL/min showed the optimum slope and the highest current responding. The resistivity was decreased by nitrogen concentration used where samples 220 mL/min and 70 mL/min were the lowest and the highest resistivity, respectively. We found, doping with nitrogen were increased the conductivity and photo response and decreased the resistivity of a-C thin films as compared without use of nitrogen.
厚度为39.6 ~ 990的非晶碳薄膜。利用“绿色”可再生前体棕榈油,采用偏置辅助热解- cvd方法在绝缘玻璃衬底上沉积了1nm。测定了氮浓度对非晶碳薄膜电性能的影响。采用电流电压测量、紫外/可见分光光度计、表面轮廓仪和原子力显微镜对非晶碳薄膜进行了表征。大多数薄膜形成线性区域,斜率响应不同。氮掺杂后样品欧姆接触斜率较高,为220 mL/min。样品220 mL/min时斜率最佳,电流响应最大。电阻率随氮浓度的增加而降低,其中样品的电阻率最低为220 mL/min,最高为70 mL/min。我们发现,与不掺氮相比,掺氮提高了a-C薄膜的电导率和光响应,降低了a-C薄膜的电阻率。
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引用次数: 1
Sputtered titanium dioxide thin film for Extended-Gate FET sensor application 用于扩展栅场效应晶体管传感器的溅射二氧化钛薄膜
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706513
M. A. Rosdan, S. H. Herman, W. Abdullah, N. Kamarozaman, M. I. Syono
This paper presents an investigation on sputtered titanium dioxide (TiO2) thin film for application in the Extended-Gate Field Effect Transistor (EGFET) sensor application for pH detection. The TiO2 thin film was fabricated on conductive indium-tin oxide (ITO) covered glass by using RF Sputtering method. An EGFET proof-of-concept setup was constructed using a commercial FET as the transducer and the TiO2/ITO structure was used for the extended gate. The sensor measurement was taken using semiconductor device parametric analyzer, constant-current constant-voltage biasing interfacing circuit and data logger to obtain the sensitivity and the characteristics for output voltage with respect to time. TiO2 thin film on ITO glass as the sensing membrane was compared with a bare ITO glass substrate for the extended gate. The TiO2/ITO glass exhibited the sensitivity of 42.1 mV/pH and good linearity of 0.9997 in the sensing range pH4, pH7 and pH10 which was better than the bare ITO glass sensitivity of 31.3 mV/pH and the linearity of 0.9868.
本文研究了用于扩展门场效应晶体管(EGFET)传感器pH检测的溅射二氧化钛(TiO2)薄膜。采用射频溅射法在导电氧化铟锡玻璃表面制备了TiO2薄膜。使用商用FET作为换能器,构建EGFET概念验证装置,并使用TiO2/ITO结构作为扩展栅极。采用半导体器件参数分析仪、恒流恒压偏置接口电路和数据记录仪对传感器进行测量,获得传感器的灵敏度和输出电压随时间的特性。将ITO玻璃上的TiO2薄膜作为传感膜与裸露的ITO玻璃衬底作为扩展栅极进行了比较。TiO2/ITO玻璃在pH4、pH7和pH10范围内的灵敏度为42.1 mV/pH,线性度为0.9997,优于裸ITO玻璃的灵敏度31.3 mV/pH,线性度为0.9868。
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引用次数: 13
Nitrogenated amorphous carbon film by thermal chemical vapor deposition 热化学气相沉积法制备氮化非晶碳膜
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706517
F. Mohamad, M. Rusop
The comparison in term of both electrical and structural properties of amorphous carbon (a-C) thin film and nitrogenated amorphous carbon (a-C:N) thin film deposited at 750 °C has been done. The deposition of those films by thermal chemical vapour deposition (TCVD) technique involved argon (Ar) gas, nitrogen gas (N2) and camphor oil as carrier gas, dopant and carbon source respectively. The electrical and structural characterizations were based on Advantest R6243 DC Voltage Current Source/Monitor and SemiPro Curve Software and Scanning Electron Microscopy (SEM). There are significant changes in electrical properties and surface morphology for a-C and a-C:N thin films due to the arrangement of nitrogen atoms.
对750℃下沉积的非晶碳(a-C)薄膜和氮化非晶碳(a-C:N)薄膜的电学性能和结构性能进行了比较。采用热化学气相沉积(TCVD)技术分别以氩气(Ar)、氮气(N2)和樟脑油为载气、掺杂剂和碳源沉积这些薄膜。电学和结构表征基于Advantest R6243直流电压电流源/监视器和SemiPro曲线软件和扫描电子显微镜(SEM)。由于氮原子的排列,a-C和a-C:N薄膜的电学性能和表面形貌发生了显著的变化。
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引用次数: 0
A low voltage low power 3.5/5.8 GHz dual-band common gate Low Noise Amplifier 一种低压低功耗3.5/5.8 GHz双频共门低噪声放大器
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706481
A. Zokaei, A. Amirabadi
This paper presents the design and simulation results of a tunable multi-band Low Noise Amplifier (LNA) for mobile WiMAX (IEEE 802.16e) using 0.18μm CMOS process. The target frequency bands are considered to be (3.4~3.6) GHz and (5.2~5.9) GHz. A technique known as Active Post Distortion (APD) was used to improve the linearity and offers optimum noise figure for the system. It provides a third order intercept point of about -1.3 dBm and -5.2 dBm for lower and upper bands respectively. It provides a power gain of more than 12.9 dB, input reverse isolation and noise figure of below -10.3 dB and 3.3 dB respectively. Considering a power supply of 1 v it dissipates 9.12 mw.
介绍了一种基于0.18μm CMOS工艺的移动WiMAX (IEEE 802.16e)可调谐多频带低噪声放大器(LNA)的设计与仿真结果。目标频段考虑为(3.4~3.6)GHz和(5.2~5.9)GHz。采用一种称为有源后失真(APD)的技术来改善线性度,并为系统提供最佳的噪声系数。它提供了一个三阶截距点,分别约为-1.3 dBm和-5.2 dBm的上下波段。它提供超过12.9 dB的功率增益,输入反向隔离和噪声系数分别低于-10.3 dB和3.3 dB。考虑1 v的电源,它耗散9.12兆瓦。
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引用次数: 4
期刊
RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics
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