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RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics最新文献

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High density printing paper quality investigation 高密度印刷纸质量调查
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706528
O. T. Say, Z. Sauli, V. Retnasamy
Light has been used to examine the quality of the products or surface finishing of most products by the industries in recent times. In this research, a lab module tester was designed and built to investigation on the different type of printing paper quality which available commercially was done. Laser light was utilized as a manipulator to distinguish the quality of printing paper and the light reflectance element was used. The photodiode was used as sensing element to detect the reflected light from the surface of printing paper. The both of laser diode and photodiode were placed in a light box. The laser was used to emit light on the sample and the photodiode detects light intensity from the surface printing paper in the light box. Different level of intensity correlates to different voltage output. The investigation on the different type of printing paper including of 70 g/m2, 80 g/m2 and 100 g/m2 were done respectively. The result showed that the 100 g/m2 printing paper has a higher reflected voltage output compared to 80 g/m2 and 70 g/m2 printing paper.
近年来,光已被工业用于检验产品质量或大多数产品的表面光洁度。在本研究中,设计并构建了一个实验室模块测试仪,用于对市售的不同类型的印刷纸质量进行测试。采用激光作为机械臂来判别纸张质量,并采用光反射元件。利用光电二极管作为传感元件,检测印刷纸表面的反射光。将激光二极管和光电二极管置于一个灯箱中。激光在样品上发光,光电二极管在灯箱中检测表面打印纸的光强。不同的强度对应不同的电压输出。分别对70 g/m2、80 g/m2和100 g/m2不同类型的印刷纸进行了研究。结果表明,与80 g/m2和70 g/m2的印刷纸相比,100 g/m2的印刷纸具有更高的反射电压输出。
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引用次数: 2
15 GHz medium power amplifier design based On 0.15 μm p-HEMT GaAs technology for wideband applications 基于0.15 μm p-HEMT GaAs技术的15 GHz宽带中功率放大器设计
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706486
S. Rasidah, N. Samsuri, N. Kushairi, N. A. Ngah
This paper presents a thorough design of 15 GHz Ku-Band medium Power Amplifier (MPA). The technology used for this design is 0.15 μm GaAs p-HEMT technology from WIN semiconductor. The type of active device selected for this design is from the depletion mode p-HEMT. The device consumes 4.5 V of voltage supply and -0.2 V of DC bias. At operating frequency of 15 GHz, the circuit is design to have optimum power with 50 Ω impedance matching for both input and output network, high input and output return loss, high small signal gain, linear output power and high power aided efficiency (PAE).
本文详细介绍了一种15ghz ku波段中功率放大器(MPA)的设计。本设计采用WIN半导体0.15 μm GaAs p-HEMT技术。本设计选用的有源器件类型为耗尽型p-HEMT。该器件消耗4.5 V电压电源和-0.2 V直流偏置。在工作频率为15 GHz时,电路设计为输入输出网络阻抗匹配50 Ω的最佳功率,高输入输出回波损耗,高小信号增益,线性输出功率和高功率辅助效率(PAE)。
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引用次数: 2
Effect of [6,6]-Phenyl-C61 butyric acid methyl ester (PCBM) agglomerated nanostructure on device performance in organic thin-film transistors [6,6]-苯基- c61丁酸甲酯(PCBM)凝聚纳米结构对有机薄膜晶体管器件性能的影响
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706502
K. A. Mohamad, A. Alias, I. Saad, B. Gosh, K. Uesugi, H. Fukuda
The influence of [6,6]-phenyl C61-butyric acid methyl ester (PCBM) agglomerated nanostructure on device performance of pentacene-based organic thin-film transistors (OTFTs) were reported. The presence of PCBM layers on a SiO2 gate dielectric resulted in a good electrical characteristics of pentacene-based OTFTs, including a relatively high mobility (μ = 0.95-2.2 cm2 V-1 s-1), low threshold voltages (Vth = -1.1 - -5.4 V), a high on/off current ratio (Ion/Ioff = 104), and a high value of subthreshold slope (SS = 6.5 V/decade). The surface topography studies reveal that the PCBM nanostructure could favor the reduction of grain boundaries, which resulted in a better transistor performance of pentacene-based OTFTs. The influence of PCBM on the molecular microstructure of pentacene thin films elucidates a reasonable explanation for higher performance on OTFTs.
报道了[6,6]-苯基c61 -丁酸甲酯(PCBM)凝聚纳米结构对五苯基有机薄膜晶体管(OTFTs)器件性能的影响。在SiO2栅极介质上存在PCBM层,使得五苯基OTFTs具有较高的迁移率(μ = 0.95 ~ 2.2 cm2 V-1 s-1)、较低的阈值电压(Vth = -1.1 ~ -5.4 V)、较高的通断电流比(Ion/Ioff = 104)和较高的亚阈值斜率(SS = 6.5 V/decade)。表面形貌研究表明,PCBM纳米结构有利于晶界的减小,从而使五苯基otft具有更好的晶体管性能。PCBM对并五苯薄膜分子微观结构的影响为在otft上获得更高的性能提供了合理的解释。
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引用次数: 0
Parametric analysis for designing low voltage and low frequency energy harvester booster 低压低频能量采集器升压器设计的参数分析
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706488
Nurul Arfah Che Mustapha, A. Alam, Sheroz Khan, A. Azman
This work presents an ultra-low voltage DC-DC boost converter vibration-based energy harvesting. A switching gate controlled concept is used which is well suited for low vibration-based frequency and voltage applications. The 0.1-0.5 V input voltage range is linearly increased with the increase of output voltage range, 4-22 V. The transient analysis is simulated to verify the optimum value of the inductive resistance, switching rise and fall times circuit under test. The 10 kΩ load circuit is using 160 μH inductor and 10 μF load capacitor. This voltage converter is suitable for energy harvesting applications in automotive, buried electronic devices for broadband frequency range from 1 kHz to 10 kHz.
本文提出了一种基于振动的超低电压DC-DC升压变换器。采用开关门控制概念,非常适合基于低振动的频率和电压应用。0.1-0.5 V的输入电压范围随输出电压范围的增大而线性增大,4- 22v。通过模拟暂态分析,验证了被测电路的感应电阻、开关升降次数的最佳值。10 kΩ负载电路采用160 μH的电感和10 μF的负载电容。该电压转换器适用于1 kHz至10 kHz宽带频率范围内的汽车、地埋电子设备的能量收集应用。
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引用次数: 6
Fabrication of nanodiodes using atomic-force microscope lithography 利用原子力显微镜光刻技术制造纳米二极管
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706534
S. R. Kasjoo, U. Hashim, A. Song
Unipolar nanodiodes, known as the self-switching diodes (SSDs), have recently been demonstrated as terahertz (THz) detectors at room temperature. The SSDs have also shown promising properties as THz emitters and nanomemory devices. Here, we report the fabrication of SSDs on a GaAs/AlGaAs substrate using an atomic-force microscope (AFM) lithography which utilizes AFM-tip ploughing technique and the use of a suitable polymethyl methacrylate layer with thermal-annealing treatment. This approach has successfully overcome some typical problems associated with the tip-ploughing method including the refilling of the SSD's trenches by debris generated during the ploughing process. In this report, all SSDs defined using the AFM lithoghraphy have shown standard diode-like I-V characteristics, indicating the reproducibility of the abovementioned approach. In addition, this method might be useful to realize electronic devices in nanoscale dimensions.
单极纳米二极管,被称为自开关二极管(ssd),最近被证明是室温下的太赫兹(THz)探测器。固态硬盘还显示出作为太赫兹发射器和纳米存储设备的有前途的特性。在这里,我们报告了利用原子力显微镜(AFM)光刻技术在GaAs/AlGaAs衬底上制造固态硬盘,该光刻技术利用AFM尖端犁削技术并使用合适的聚甲基丙烯酸甲酯层进行热退火处理。该方法成功地克服了一些与尖耙方法相关的典型问题,包括在犁削过程中产生的碎片重新填充SSD沟槽。在本报告中,使用AFM光刻技术定义的所有ssd都显示出标准的二极管样I-V特性,表明上述方法的可重复性。此外,该方法还可用于实现纳米尺度的电子器件。
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引用次数: 6
Dielectric property of lead titanate thin films prepared on glass substrate at low temperature 低温制备钛酸铅薄膜的介电性能
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706507
Z. Nurbaya, M. Rusop
Lead based titanate (PbTiO3) is one of ferroelectric ceramic family that has been widely investigated of its dielectric property towards high capacitance passive device, i.e. capacitor. It has been known that high annealing temperature is needed to perform perfect crystal level of ferroelectric ceramic that is averagely 650°C done by using crystalline Si substrate with Pt/Ti as intermediate layer. This had been confirmed as the ideal process to have perfectly distribution of uniform grain size with tendency of stable dipole moment. However, high temperature does affect the nucleation site of domain wall where here lays the factor contributes to Pb volatilization and yields to thin films degradation. Further investigation of PbTiO3 thin films preparation at relatively lower temperature was at least 200°C could be the most desirable thin films ever to answer the limitation of source. Therefore, these temperatures make deposition of PbTiO3 possible for glass substrate which has low melting temperature. The current study investigates preparation of PbTiO3 thin films on platinum coated glass substrate through sol-gel spin coating method. The optimum thickness of thin films was achieved by five times of depositions and punctuated with drying process about 200°C for 10mins for each layer. Annealing process was carried out in hot furnace at temperature 300°C to 500°C for 30mins. The prepared thin films were then being measured by impedance analyzer under low frequency about 1000Hz for the dielectric property investigation. It was found that the dielectric constant have linear relationship with annealing temperature. Nevertheless, high dielectric constant resulted to the factor of high dielectric loss that plays a role as in AC signal. In addition, the capacitance value of PbTiO3 thin films is being obtained under low frequency of dielectric constant measurement. Concisely, both dielectric constant and nanometer scaled thin films had influenced much to the capability for high energy storage which will be discussed later in future investigation.
钛酸铅(PbTiO3)是铁电陶瓷家族中的一种,其作为高电容无源器件(即电容器)的介电性能得到了广泛的研究。以晶硅为衬底,以Pt/Ti为中间层制备铁电陶瓷,需要较高的退火温度才能达到平均650℃的完美结晶度。这是晶粒尺寸均匀均匀且偶极矩趋于稳定的理想工艺。然而,高温确实会影响畴壁的成核位置,这是导致Pb挥发和薄膜降解的因素。进一步研究在相对较低的温度下制备PbTiO3薄膜,至少200°C可能是最理想的薄膜,以回答源的限制。因此,这些温度使得PbTiO3在熔融温度较低的玻璃基板上沉积成为可能。本研究采用溶胶-凝胶自旋镀膜的方法在铂镀膜玻璃基底上制备PbTiO3薄膜。通过5次沉积和每层约200°C 10min的干燥过程,获得了最佳薄膜厚度。在300 ~ 500℃的热炉中退火30min。然后用阻抗分析仪在约1000Hz的低频下测量所制备的薄膜的介电性能。发现介电常数与退火温度呈线性关系。然而,高介电常数导致了高介电损耗的因素,在交流信号中起着类似的作用。此外,还得到了PbTiO3薄膜在低频介电常数测量下的电容值。简而言之,介电常数和纳米尺度薄膜对高能量存储能力的影响很大,这将在以后的研究中讨论。
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引用次数: 1
Fabrication and characterization of metal microwire transducer for biochip application 应用于生物芯片的金属微丝传感器的制造与表征
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706465
V. Perumal, N. Amil, N. Aiman, U. Hashim
Microwire makes good sensors because their small dimensions which enhance their sensitivity. To be useful, microelectrode sensors must be integrated with electronic capable of processing those signal. In this research, we demonstrated a method to fabricated and characterize metal microwire device for biosensing application. Using conventional photolithography technique and other experimental techniques, we developed a reliable procedure for producing aluminium wires with micron-scale features. Significantly, in micro fabrication the critical dimension (CD) of wafers in photolithography is the most important parameter that determines the final performance of devices. Hence, it is paramount to have high resolution, high sensitivity and precise alignment to successfully transfer the original pattern to wafer. The process was optimized by control the spin speed for photoresist (PR) coating, spin time, post exposure bake time, developer concentration ratio, hard bake and aluminium etch time so as to achieve the possible fabrication process and get the expected microwire size. The process begins with the photoresists coating and spinning at 3000 rpm to form a thin and uniform layer. Subsequently, the PR coated substrates were exposed to UV light for 10s. After the alignment and exposure, the substrate were developed using the resists developer with 25:10 ratio in which 25 parts of developer and 10 parts of deionized water. Eventually, the post exposure bake and hard bake time were optimized for a better throughput on the pattern transfer process. The aluminium microwire has been successfully fabricated with the contact pads. The wires range in thickness from 1 μm-4μm to achieve a resistivity as low as possible for nano range limit of detection. This microelectrodes transducer will be eventually used as biomolecule detection kit. The fabricated microwire was morphologically characterized using Atomic force microscope (AFM), Scanning electron microscope (SEM), High power microscope (HPM). Besides that, the electrical properties of the fabricated aluminium microwire were studied using source meter.
微丝尺寸小,灵敏度高,是一种很好的传感器。为了发挥作用,微电极传感器必须与能够处理这些信号的电子设备集成在一起。在本研究中,我们展示了一种用于生物传感应用的金属微丝器件的制造和表征方法。利用传统的光刻技术和其他实验技术,我们开发了一种生产具有微米尺度特征的铝线的可靠方法。值得注意的是,在微加工中,光刻晶圆的临界尺寸(CD)是决定器件最终性能的最重要参数。因此,高分辨率、高灵敏度和精确对准是将原始图案成功转移到晶圆上的关键。通过控制光刻胶(PR)涂层的旋转速度、旋转时间、曝光后烘烤时间、显影剂浓度比、硬烘烤和铝蚀刻时间对工艺进行优化,以达到可能的制备工艺和预期的微细线尺寸。该工艺从光抗胶涂层开始,并以3000转/分的速度旋转,形成一层薄而均匀的层。随后,将PR涂层的基材暴露在紫外光下10s。对准曝光后,用25份显影剂和10份去离子水的25:10比例的抗蚀剂显影剂显影。最后,对曝光后烘烤时间和硬烘烤时间进行了优化,以提高图案传递过程的吞吐量。铝制微丝已成功地与接触垫制成。导线的厚度范围为1 μm-4μm,以达到尽可能低的电阻率,以达到纳米范围的检测极限。这种微电极传感器最终将被用作生物分子检测试剂盒。利用原子力显微镜(AFM)、扫描电镜(SEM)、高倍显微镜(HPM)对制备的微丝进行了形貌表征。此外,利用源计对制备的铝微线的电学性能进行了研究。
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引用次数: 3
Finite element analysis on magnetic force generation of electromagnetic microactuator for micropump 微泵电磁微执行器磁力产生的有限元分析
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706464
R. Pawinanto, J. Yunas, B. Majlis, A. A. Hamzah
In this work, a theoretical analysis on the magnetic force generation of micro-actuator driven by planar microcoil is reported. The actuator design is optimized to increase the magnetic force and flux density that is useful for mechanical membrane deformation of an actuator. Therefore, this work is focused on the design and simulation of actuator material and structure using a finite element analysis method. As the results, the obtained magnetic force of maximum 11.4 mN has been observed for the actuator design having coil geometry of width w = 100 μm, space s =100 μm, turn N = 20 and thickness t =20 μm with NdFeB as magnet material. Hence, the optimized design geometry of the coil can be used as reference for the fabrication of electromagnetic actuator for micropump application.
本文对平面微线圈驱动微作动器的磁力产生进行了理论分析。优化了致动器的设计,提高了致动器的磁力和磁通密度,有利于致动器的机械膜变形。因此,本工作重点是利用有限元分析方法对执行器的材料和结构进行设计和仿真。结果表明,以钕铁硼为磁体材料,当线圈几何尺寸为宽度w =100 μm,空间s =100 μm,匝数N =20,厚度t =20 μm时,所获得的磁力最大为11.4 mN。因此,优化设计的线圈几何形状可为微泵电磁致动器的制造提供参考。
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引用次数: 16
Two-stage MMIC medium power amplifier using depletion mode PHEMT for 5.8GHz applications 采用耗尽模式PHEMT的两级MMIC中功率放大器,用于5.8GHz应用
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706512
A. Rasmi, A. Marzuki, M. Ismail, N. A. Ngah, A. Rahim
The design and performances of two-stage monolithic microwave integrated circuit (MMIC) medium power amplifier (MPA) for 5.8 GHz applications are presented using a 0.5um commercial GaAs pseudomorphic high electron mobility transistor (PHEMT) technology. The simulated performance shows a two-stage MPA are achieves an associated gain of 16.39dB, P1dB of 20.18dBm, power gain of 15.18 dB and the PAE of 25.30%. While, the measured performance shows a two-stage MPA is achieves an associated gain of 8.33dB. At 5.0V of drain voltage, VDS and 0V of gate voltage, VGS; this MPA consume 111mA of simulated total current and 200.2mA of measured total current. The chip size is 1.7 × 0.85 mm2.
采用0.5um商用砷化镓伪晶高电子迁移率晶体管(PHEMT)技术,设计了一种适用于5.8 GHz应用的两级单片微波集成电路(MMIC)中功率放大器(MPA)。仿真结果表明,两级MPA的相关增益为16.39dB, P1dB为20.18dBm,功率增益为15.18 dB, PAE为25.30%。然而,测量性能表明,两级MPA可获得8.33dB的相关增益。在漏极电压5.0V时,VDS和栅极电压0V时,VGS;该MPA的模拟总电流为111mA,实测总电流为200.2mA。芯片尺寸为1.7 × 0.85 mm2。
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引用次数: 2
Low power green electronic devices 低功耗绿色电子器件
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706565
A. Chin
Summary form only given. The IC chips consume a large amount of energy globally and will continue to increase in the near future. The present IC is a charge-based technology that has logic and memory functions to mimic the human brain. To operate the IC at higher speed, the CMOS inverter of logic IC needs to deliver higher current to charge the capacitors. Thus higher inversion charge (Qinv) is required in CMOS devices. The conventional method to increase Qinv in MOSFET is to scale down the gate oxide thickness (tox) that also improves the short channel effect. Unfortunately, the scaling tox has reached an ultra-thin thickness of ~1.2 nm at 65 nm node CMOS, which causes high gate leakage and DC power (PDC) consumption by direct quantum-mechanical tunneling. Alternatively, higher Qinv can also be obtained by using high dielectric constant (κ) from fundamental physics of Q=CV. We pioneered the high-κ gate dielectric CMOS starting 1998. Nevertheless, the unwanted high transistor threshold voltage (Vt) is the major challenge. Using unique dipole charge of La2O3 and Al2O3 high-κ dielectrics, low Vt n- and p-MOSFETs were achieved at 0.6~0.9 nm equivalent-oxide thickness (EOT). Such La2O3 and Al2O3 high-κ dielectrics have been successfully implemented in 32-nm gate-first CMOS manufacture. To further lower the AC power (PAC) of CV2/2, we invented the small EG defect-free Ge-on-Insulator (GOI or GeOI) MOSFET. The 2.5X higher hole mobility and 1.6X better electron mobility were reached in Ge CMOS at 1~1.4 nm EOT that enable the high-performance Ge logic at lower Vd and PAC. The PAC can be further lowered down by our initiated 3-dimensional (3D) IC based on the Ge CMOS. Low PAC non-volatile memory is also required for IC function. Applying high-κ dielectrics into flash memory, fast 100 μs speed and low write voltage of ~10 V were achieved and listed in the Intl. Technology Roadmap for Semiconductors (ITRS). Such high-κ layers can improve the controllability of charge-storage layer and realize simpler planar structure. At present, the high-κ flash memory has been successfully implemented at 20 nm 128 Gb array manufacture. These high-κ CMOS and flash memory realize the low power green electronic devices.
只提供摘要形式。在全球范围内,集成电路芯片消耗了大量的能源,并将在不久的将来继续增加。目前的集成电路是一种基于电荷的技术,具有模仿人脑的逻辑和记忆功能。为了使集成电路以更高的速度运行,逻辑集成电路的CMOS逆变器需要提供更高的电流给电容器充电。因此,在CMOS器件中需要更高的反转电荷(Qinv)。增加MOSFET中Qinv的传统方法是减小栅极氧化物厚度(tox),这也改善了短沟道效应。遗憾的是,在65 nm节点的CMOS上,结皮厚度已经达到了~1.2 nm的超薄厚度,这导致直接量子力学隧穿导致高栅极泄漏和直流功率(PDC)消耗。另外,根据Q=CV的基本物理原理,利用高介电常数(κ)也可以获得更高的Qinv。从1998年开始,我们率先开发了高κ栅极介电CMOS。然而,不需要的高晶体管阈值电压(Vt)是主要的挑战。利用La2O3和Al2O3高κ介电体的独特偶极电荷,在0.6~0.9 nm等效氧化厚度(EOT)下获得了低Vt n-和p- mosfet。这种La2O3和Al2O3高κ介电体已经成功地在32nm栅极优先CMOS制造中实现。为了进一步降低c02 /2的交流功率(PAC),我们发明了小型无EG缺陷的绝缘体上锗(GOI或GeOI) MOSFET。在1~1.4 nm EOT下,Ge CMOS的空穴迁移率提高了2.5倍,电子迁移率提高了1.6倍,从而实现了低Vd和PAC下的高性能Ge逻辑。基于Ge CMOS的三维(3D) IC可以进一步降低PAC。IC功能也需要低PAC非易失性存储器。将高κ介电体应用于快闪存储器,实现了快100 μs的速度和~10 V的低写入电压,并列入国际标准。半导体技术路线图(ITRS)。这种高κ层可以提高电荷存储层的可控性,实现更简单的平面结构。目前,高κ快闪存储器已在20nm 128gb阵列制造中成功实现。这些高κ CMOS和闪存实现了低功耗的绿色电子器件。
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引用次数: 0
期刊
RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics
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