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2007 IEEE Compound Semiconductor Integrated Circuits Symposium最新文献

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Recent Advances in GaN-on-SiC HEMT Reliability and Microwave Performance within the DARPA WBGS-RF Program DARPA WBGS-RF项目中GaN-on-SiC HEMT可靠性和微波性能的最新进展
Pub Date : 2007-11-19 DOI: 10.1109/CSICS07.2007.13
M. Rosker
The Wide Band Gap Semiconductor for RF Applications (WBGS-RF) program, supported by the Defense Advanced Research Projects Agency (DARPA), is developing microwave and millimeter-wave gallium nitride-based devices on silicon carbide substrates. Recent advances within Phase II of the Program include excellent results for both performance and reliability. Significant progress has been made towards developing manufacturable wide-bandgap devices that provide outstanding performance at reliability levels that will allow their use in a wide variety of high frequency, high power applications.
宽带隙射频应用半导体(WBGS-RF)项目由美国国防高级研究计划局(DARPA)支持,正在开发基于碳化硅衬底的微波和毫米波氮化镓器件。该计划第二阶段的最新进展包括性能和可靠性方面的优异结果。在开发可制造的宽带隙器件方面取得了重大进展,这些器件在可靠性水平上提供了出色的性能,这将允许它们在各种高频、高功率应用中使用。
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引用次数: 7
The Future of Compound Semiconductors 化合物半导体的未来
Pub Date : 2007-11-19 DOI: 10.1109/CSICS07.2007.59
R. Quinsey
The compound semiconductor industry, which showed great promise in the 90's, struggled with the disappointment of over supply and commoditization in the "post bubble" period and lost share to improving performance of silicon solutions. Our industry is now re-emerging as a critical technology for achieving the promise of ubiquitous wireless connectivity. While MESFET technology dominated industry volume ten years ago, it now plays an inferior role to HBT and pHEMT. New technologies, such as E/D pHEMT and BiHEMT, are emerging as the future workhorses. These technologies provide greater functionality and performance than their predecessors. At the same time, GaN technology for RF applications has moved from experimental to early commercialization. As our industry matures we are seeing changes in how compound semiconductors are taken to market. High performance packaging is making inroads where MMIC die have been the historical choice. Low-cost modules have become the preferred solution for high volume RF applications. The overall availability of compound semiconductors is consolidating as the supply and demand ratio comes back into balance. It is an exciting time for compound semiconductor development.
化合物半导体行业,在90年代显示出巨大的希望,在“后泡沫”时期挣扎于供应过剩和商品化的失望之中,并在改进硅解决方案的性能方面失去了份额。我们的行业现在正重新成为实现无处不在的无线连接承诺的关键技术。虽然MESFET技术在十年前主导了工业产量,但现在它的作用不如HBT和pHEMT。E/D pHEMT和BiHEMT等新技术正在成为未来的主力。这些技术提供了比它们的前辈更好的功能和性能。与此同时,用于射频应用的氮化镓技术已经从实验阶段转向早期商业化阶段。随着我们行业的成熟,我们看到了化合物半导体如何进入市场的变化。高性能封装正在进入MMIC芯片一直是历史选择的领域。低成本模块已成为大批量射频应用的首选解决方案。随着供需比例恢复平衡,化合物半导体的整体可用性正在巩固。这是化合物半导体发展的一个激动人心的时刻。
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引用次数: 1
A Miniature Low Current Fully Integrated Front End Module for WLAN 802.11b/g Applications 用于WLAN 802.11b/g应用的微型低电流全集成前端模块
Pub Date : 2007-11-19 DOI: 10.1109/CSICS07.2007.51
Rohit Vaidya, Deepak Gupta, Manish Bhakuni, Rupert Prince
In the fast evolving wireless communication market, the need to have a fully integrated RF front end module (FEM) is highly felt where in all the blocks of FEM are on a single chip. For the vendors the reduced firm factor and availability of a complete integrated solution enables rapid market entry and the freedom to focus on value added branding. RF arrays has developed a single chip 802.11b/g FEM in 2.4-2.5-GHz frequency range, which consists of a integrated PA, LNA and SPDT switch with on-chip bias circuits and power detector delivering linear power of 16 dam at 4% EVM for 802.11g having OFDM 54 Mbps data rate and 20 dBm at 1.2% EVM for 802.11b having CCK 11 Mbps data rate. The transmit chain have 28 dB of gain and 23.5 dBm of PI dB. The receive chain have 2.2 dB of noise figure, 14 dBm of P1 dB and 15 dB of gain The quiescent current of PA is 56 mA in TX path while LNA is 8 mA in receive path and packaged in 3 times 3 times 0.7 mm3 16 pin QFN.
在快速发展的无线通信市场中,需要一个完全集成的射频前端模块(FEM),而FEM的所有模块都在单个芯片上。对于供应商来说,公司因素的减少和完整集成解决方案的可用性使他们能够快速进入市场,并自由地专注于增值品牌。射频阵列开发了一种2.4-2.5 ghz频率范围内的单芯片802.11b/g FEM,该FEM由集成的PA, LNA和SPDT开关组成,带有片上偏置电路和功率检测器,对于具有OFDM 54 Mbps数据速率的802.11g和具有CCK 11 Mbps数据速率的802.11b,在4% EVM时提供16 dam的线性功率,在1.2% EVM时提供20 dBm。发射链的增益为28db, PI dB为23.5 dBm。接收链的噪声系数为2.2 dB, P1 dB为14 dBm,增益为15 dB, PA在发送路径的静态电流为56 mA, LNA在接收路径的静态电流为8 mA,封装在3 × 3 × 0.7 mm3 16引脚QFN中。
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引用次数: 5
A 77-79-GHz Doppler Radar Transceiver in Silicon 77-79 ghz硅基多普勒雷达收发器
Pub Date : 2007-11-19 DOI: 10.1109/CSICS07.2007.58
S. Nicolson, P. Chevalier, A. Chantre, B. Sautreuil, S. Voinigescu
This paper presents the first 77 GHz single-chip direct-conversion transceiver in silicon. The transceiver, fabricated in a 0.13 mum SiGe BiCMOS technology with fT/fMAX of 170/200 GHz, consumes 740 mW, and occupies 1.3 mm x 0.9 mm. The receiver achieves 25.6 dB conversion gain, 9 dB noise figure, 90 dB dynamic range, and an IP1dB of -24 dBm. The transmitter provides +5.8 dBm of saturated output power at 77 GHz, and a divide14, static frequency divider is included on-die. A tuned, 77 GHz clock distribution network is used to distribute the VCO signal to the divider, power amplifier, and down-conversion mixer. Successful detection of a Doppler shift of 55 Hz at a range of 4 m is shown. The phase noise at IF is shown to be superior to the VCO, suggesting noise correlation between the transmitter and receiver.
本文提出了第一个77ghz硅片直接转换收发器。该收发器采用0.13 SiGe BiCMOS技术,fT/fMAX为170/200 GHz,功耗为740 mW,尺寸为1.3 mm x 0.9 mm。该接收机的转换增益为25.6 dB,噪声系数为9 dB,动态范围为90 dB, IP1dB为-24 dBm。发射器在77 GHz时提供+5.8 dBm的饱和输出功率,并在片上包含一个静态分频器。经过调谐的77ghz时钟分配网络用于将VCO信号分配给分频器、功率放大器和下变频混频器。在4米范围内成功检测到55赫兹的多普勒频移。中频处的相位噪声优于VCO,表明发射机和接收机之间存在噪声相关性。
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引用次数: 22
Thermal Properties and Reliability of GaN Microelectronics: Sub-Micron Spatial and Nanosecond Time Resolution Thermography GaN微电子的热性能和可靠性:亚微米空间和纳秒时间分辨率热成像
Pub Date : 2007-11-19 DOI: 10.1109/CSICS07.2007.32
Martin Kuball, J. Pomeroy, R. Simms, G. Riedel, H. Ji, A. Sarua, M. Uren, T. Martin
We review our latest developments in the field of Raman thermography and its application to GaN microelectronics. Device self-heating, the temperature rise in a device generated by electrical power dissipation, plays an important role for device performance and reliability, however, is difficult to assess as it occurs on sub-micrometer length scales in most devices, not observable using traditional thermography techniques. The new technique of Raman thermography enables to gain unprecedented insight into device self-heating with sub-micron spatial and with nanosecond time resolution. Thermal resistance of GaN electronic devices on different substrates and with different layouts are compared, interface thermal resistance between the GaN and the substrate was determined. Temperature measurements in the device plane and three dimensionally from the device into the substrate are discussed. Temperature in devices operated in pulsed mode as function of time, dependent on duty cycle and pulse length was studied. A comparison to temperature measurements performed using electrical methods illustrates that care must be taken when identifying junction temperatures using electrical methods.
综述了喇曼热成像技术的最新进展及其在GaN微电子学中的应用。器件自热,即器件中由电力耗散产生的温升,对器件性能和可靠性起着重要作用,然而,由于它发生在大多数器件的亚微米长度尺度上,难以评估,使用传统的热成像技术无法观察到。拉曼热成像新技术使我们能够前所未有地深入了解亚微米空间和纳秒时间分辨率的器件自热。比较了不同衬底和不同布局下GaN电子器件的热阻,确定了GaN与衬底之间的界面热阻。讨论了器件平面和从器件到衬底的三维温度测量。研究了工作在脉冲模式下的器件温度随占空比和脉冲长度随时间的变化规律。与使用电学方法进行的温度测量的比较表明,在使用电学方法确定结温时必须小心。
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引用次数: 15
High Fmax GaN-HEMT with High Breakdown Voltage for Millimeter-Wave Applications 用于毫米波应用的高击穿电压GaN-HEMT
Pub Date : 2007-11-19 DOI: 10.1109/CSICS07.2007.10
T. Kikkawa, K. Makiyama, K. Imanishi, T. Ohki, M. Kanamura, N. Okamoto, N. Hara, K. Joshin
The state-of-the-art GaN high electron mobility transistors (GaN-HEMTs) technology for millimeter-wave amplifiers is described in this paper. A high maximum frequency of an oscillation (fmax) device with high breakdown voltage (BVgd) was focused on to improve the gain, efficiency, and reliability of the millimeter-wave amplifier. In this study, we demonstrated a high fmax of 180 GHz with a BVgd of 190 V using a novel Y-shaped Schottky gate and n-type doped GaN cap structure. The effects of the AlGaN layer, device dimensions, and sheet resistance were investigated to obtain a highly reliable W- band power amplifier. Index Terms — Semiconductor devices, Millimeter-wave FETs, power amplifiers.
介绍了用于毫米波放大器的GaN高电子迁移率晶体管(GaN- hemts)技术。为了提高毫米波放大器的增益、效率和可靠性,研究了一种高击穿电压(BVgd)振荡器件的最高频率。在这项研究中,我们使用了一种新型的y形肖特基栅极和n型掺杂GaN帽结构,展示了180 GHz的高fmax和190 V的BVgd。为了获得高可靠性的W波段功率放大器,研究了AlGaN层、器件尺寸和片电阻的影响。索引术语。半导体器件,毫米波场效应管,功率放大器
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引用次数: 7
Demonstration of a 3-D GaAs HEMT Phase Shifter MMIC Utilizing a Five Layer BCB Process with Seven Metal Layers 利用七金属层五层BCB工艺的三维GaAs HEMT移相器MMIC的演示
Pub Date : 2007-11-19 DOI: 10.1109/CSICS07.2007.55
D. Farkas, J. Uyeda, J. Wang, W. Luo, R. Elmadjian, D. Eaves, K. Luo, R. Lai, M. Barsky, M. Wojtowicz, A. Oki
In this paper, we demonstrate a vertically integrated 3-D MMIC phase shifter at 8 GHz that utilizes a 5-layer benzocyclobutene (BCB) process providing a total of 7 metal layers. This multi-layer technology is fully compatible with Northrop Grumman's 0.15 um GaAs HEMT technology and enables a high level of MMIC compaction which will substantially reduce the size and cost of MMICs. A key feature of this technology is the ability to isolate vertically integrated components of a MMIC' with separate ground planes allowing circuit compaction while maintaining high isolation.
在本文中,我们展示了一种垂直集成的3d MMIC移相器,该移相器采用5层苯并环丁烯(BCB)工艺,共提供7层金属层。这种多层技术与诺斯罗普·格鲁曼公司的0.15微米GaAs HEMT技术完全兼容,可以实现高水平的MMIC压缩,这将大大减少MMIC的尺寸和成本。该技术的一个关键特点是能够将MMIC的垂直集成组件与单独的接地面隔离开来,从而在保持高隔离的同时实现电路压缩。
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引用次数: 1
100-Gbit/s Full-ETDM Transmission Technologies 100gbit /s全etdm传输技术
Pub Date : 2007-11-19 DOI: 10.1109/CSICS07.2007.22
R. Derksen, M. Moller, C. Schubert
Current 100-Gbit/s full-electrical time division multiplex (ETDM) transmission technologies are examined. The focus is on the electrical and electro-optical components, the state-of-the-art and the still existing bottle necks, mainly regarding the formats on-off keying (OOK) and differential quadature-phase shift keying (DQPSK). But also a comparative look on a promising rival solution with non-full ETDM will be included, namely polarization-multiplexed QPSK with coherent detection (PQPSKC).
对目前100gbit /s全电时分复用(ETDM)传输技术进行了研究。重点是电子和光电元件,最先进的和仍然存在的瓶颈,主要是关于格式的开关键控(OOK)和微分正交相移键控(DQPSK)。但也比较了一个有前途的非完全ETDM的竞争解决方案,即带相干检测的偏振复用QPSK (PQPSKC)。
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引用次数: 15
Ultra-Wideband Ultra-Low-DC-Power High Gain Differential-Input Low Noise Amplifier MMIC Using InAs/AlSb HEMT 基于InAs/AlSb HEMT的超宽带超低直流功率高增益差分输入低噪声放大器MMIC
Pub Date : 2007-11-19 DOI: 10.1109/CSICS07.2007.49
B. Ma, J. Bergman, P.S. Chen, J. Hacker, G. Sullivan, B. Brar
This paper reports an ultra-wideband ultra-low-DC power high gain MMIC low noise amplifier (LNA) with differential RF input using 0.1-mum gate length InAs/AlSb metamorphic HEMTs, fabricated and characterized on a GaAs substrate. For testing purpose and for generating a differential RF input, a 3-12 GHz wideband on-chip MMIC balun is connected to the differential input. Even with the loss of the balun included, the differential amplifier demonstrated 4 dB typical noise figure with associated gain of 22 dB from 3-12 GHz at a low DC dissipation of 23 mW. Additionally, a single-ended LNA, which the differential LNA is based on, is also fabricated for evaluation. The single-ended LNA demonstrated 1.5 dB typical noise figure with associated gain of 25 dB from 1-16 GHz at a low DC dissipation of 16 mW
本文报道了一种采用栅极长度为0.1 μ m的InAs/AlSb变形hemt,在GaAs衬底上制备并表征的超宽带超低直流功率高增益MMIC低噪声放大器(LNA)。为了测试目的和产生差分射频输入,将3-12 GHz宽带片上MMIC平衡器连接到差分输入。即使考虑到平衡器的损耗,差分放大器在3-12 GHz范围内的典型噪声系数为4 dB,相关增益为22 dB,直流功耗为23 mW。此外,差分LNA所基于的单端LNA也被制作用于评估。单端LNA的典型噪声系数为1.5 dB,在1-16 GHz范围内的相关增益为25 dB,直流功耗为16 mW
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引用次数: 9
CW 20-W AlGaN/GaN FET Power Amplifier for Quasi-Millimeter Wave Applications 准毫米波用连续波20瓦AlGaN/GaN场效应晶体管功率放大器
Pub Date : 2007-11-19 DOI: 10.1109/CSICS07.2007.12
Y. Murase, A. Wakejima, T. Inoue, K. Yamanoguchi, M. Tanomura, T. Nakayama, Y. Okamoto, K. Ota, Y. Ando, N. Kuroda, K. Matsunaga, H. Miyamoto
This paper describes an AlGaN/GaN FET power amplifier module delivering a continuous wave (CW) output power of more than 20 W at 26 GHz. To achieve high breakdown characteristics with reduced current collapse and high gain, we have developed a 0.2 µm-long recessed-gate AlGaN/GaN FET with a field-modulating plate (FP), achieving high operation voltage of 25 V even at quasi-millimeter wave frequencies. A single-ended AlGaN/GaN FP-FET amplifier module for quasi- millimeter wave frequency has been fabricated for the first time. The amplifier module developed using a 6.3-mm-wide single chip recessed-gate AlGaN/GaN FP-FET exhibited an output power of 20.7 W, a linear gain of 5.4 dB and a power-aided efficiency of 21.3% at 26 GHz. This is the highest output power in solid state power amplifiers at over 20 GHz.
本文介绍了一种AlGaN/GaN FET功率放大器模块,该模块在26 GHz时可提供超过20 W的连续波输出功率。为了实现高击穿特性,减少电流崩溃和高增益,我们开发了一个0.2微米长的嵌入式栅极AlGaN/GaN场效应管,带有场调制板(FP),即使在准毫米波频率下也能实现25 V的高工作电压。首次制备了准毫米波频率的单端AlGaN/GaN FP-FET放大器模块。采用6.3 mm宽的单片嵌入式栅极AlGaN/GaN FP-FET开发的放大器模块在26 GHz时输出功率为20.7 W,线性增益为5.4 dB,功率辅助效率为21.3%。这是固态功率放大器在20 GHz以上的最高输出功率。
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引用次数: 8
期刊
2007 IEEE Compound Semiconductor Integrated Circuits Symposium
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