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Phonon dispersion in gallium nitride 氮化镓中的声子色散
Pub Date : 1996-04-29 DOI: 10.1109/SIM.1996.570889
F. Demangeot, J. Frandon, M. Renucci, B. Beaumont, P. Gibart
GaN layers grown on sapphire (0001) substrates were studied at room temperature by Raman Spectroscopy. Directional dependance of frequency and polarization properties of the extraordinary modes, resulting from the anisotropic wurtzite, was evidenced by macro- and micro-Raman measurements. Second order Raman spectra were recorded and their completely symmetric component was analyzed in terms of phonon density of states. Due to the lack of phonon spectrum calculations, use was made of available q-dispersion curves of the closely related ZnO compound for phonon assignment.
用拉曼光谱在室温下研究了在蓝宝石(0001)衬底上生长的氮化镓层。各向异性纤锌矿导致的异常模式的频率和极化特性的方向依赖性通过宏观和微观拉曼测量得到了证明。记录了二阶拉曼光谱,并从态声子密度的角度分析了其完全对称分量。由于缺乏声子谱计算,我们利用了密切相关的ZnO化合物的q色散曲线进行声子分配。
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引用次数: 1
Point defects in undoped semi-insulating GaAs: correlation between thermally stimulated current and positron annihilation spectroscopies 未掺杂半绝缘砷化镓中的点缺陷:热激发电流与正电子湮没光谱之间的关系
Pub Date : 1996-04-29 DOI: 10.1109/SIM.1996.570928
Z. Fang, D. Look, S. Kuisma, K. Saarinen, P. Hautojarvi
Point defects and the main electron traps in undoped semi-insulating GaAs grown by vertical gradient freeze and high- and low-pressure liquid encapsulated Czochralski techniques have been studied by positron annihilation (PAS) and thermally stimulated current (TSC) spectroscopies, respectively. We find good correlations between the concentrations of the TSC traps T/sub 2/ (0.63 eV) and T/sub 5/ (0.35 eV), and the PAS identified-defects As/sub Ga/ and V/sub As/, respectively. A good correlation between the concentration of intrinsic acceptors (V/sub Ga/ and Ga/sub As/) measured by PAS, and the total acceptor concentration measured by infrared absorption, is also found.
用正电子湮灭(PAS)和热激发电流(TSC)分别研究了垂直梯度冻结法和高压、低压液体封装法生长的未掺杂半绝缘GaAs中的点缺陷和主电子陷阱。我们发现TSC捕集体浓度T/sub 2/ (0.63 eV)和T/sub 5/ (0.35 eV)与PAS识别缺陷As/sub Ga/和V/sub As/之间存在良好的相关性。本征受体(V/sub Ga/和Ga/sub As/)浓度与红外吸收测定的总受体浓度之间存在良好的相关性。
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引用次数: 3
Noise performance of Si/Si/sub 1-x/Ge/sub x/ n-channel HEMTs and p-channel FETs Si/Si/sub - 1-x/Ge/sub -x/ n沟道hemt和p沟道fet的噪声性能
Pub Date : 1996-04-29 DOI: 10.1109/SIM.1996.571084
Kuo-Wei Liu, A. Anwar
Noise characteristics are evaluated for SiGe/Si based n-channel HEMTs and p-channel MOSFETs. The analysis is based on a self-consistent solution of Schroedinger and Poisson's equations. The model predicts a superior minimum noise figure for an n-channel HEMT at 77 K. p-channel MOSFETs behave similar to n-channel devices operating at 300 K. The minimum noise figure decreases with increasing quantum well (QW) width for both n- and p-channel devices. However, the p-channel devices are less sensitive to QW width variation. Minimum noise temperature behaves similarly. As observed, a range of doped epilayer thickness exists where the minimum noise figure is a minimum for both n- and p-channel FETs.
对基于SiGe/Si的n沟道hemt和p沟道mosfet的噪声特性进行了评估。分析是基于薛定谔方程和泊松方程的自洽解。该模型预测了77 K时n沟道HEMT的最小噪声系数,p沟道mosfet的性能与工作在300 K时的n沟道器件相似。对于n通道和p通道器件,最小噪声系数随量子阱宽度的增加而减小。然而,p通道器件对QW宽度变化不太敏感。最小噪声温度表现类似。观察到,对于n沟道和p沟道场效应管,存在一个最小噪声系数最小的掺杂薄膜厚度范围。
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引用次数: 0
Be diffusion in InGaAs epitaxial layers during rapid thermal annealing: an effective diffusivity approach and a nonequilibrium model 快速退火过程中InGaAs外延层中的Be扩散:有效扩散率方法和非平衡模型
Pub Date : 1996-04-29 DOI: 10.1109/SIM.1996.570937
J. Marcon, S. Koumetz, K. Ketata, M. Ketata, P. Launay
Be diffusion during post-growth annealing has been studied in InGaAs epitaxial layers. To explain the observed concentration profiles, two models have been proposed. A good agreement has been obtained between experimental and calculated data. The point defect concentration in epitaxial layers during diffusion in InGaAs is also discussed.
在InGaAs外延层中研究了生长后退火过程中Be的扩散。为了解释观测到的浓度分布,提出了两个模型。实验结果与计算结果吻合较好。讨论了InGaAs扩散过程中外延层中的点缺陷浓度。
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引用次数: 0
Raman scattering analysis of SiGe annealed and implanted layers SiGe退火和注入层的拉曼散射分析
Pub Date : 1996-04-29 DOI: 10.1109/SIM.1996.571086
M. Valakh, B. N. Romaniuk, V. Artamonov, N. Klyui, A. Pérez‐Rodríguez, L. Calvo‐Barrio, C. Serre, J. Morante, B. Dietrich
The effect of thermal annealing and C/sup +/ implantation on the Raman spectra of Si/sub 1-x/Ge/sub x/ (x=0.22, 0.29) strained layers grown on Si is investigated. For the annealed samples, relaxation is only observed after annealing at temperatures higher than 800/spl deg/C. However, full relaxation is not achieved even after annealing at 1050/spl deg/C. Samples annealed at this temperature show a residual stress in the range of 8 Kbars. For the implanted samples (with C peak concentration close to 2%), there is not a substantial shift of the Si-Si mode, in spite of the significant stress compensation in the layers. The strong lattice microdistortion near the C atoms is likely the main reason of this effect.
研究了热退火和C/sup +/注入对Si/sub 1-x/Ge/sub x/ (x=0.22, 0.29)应变层拉曼光谱的影响。对于退火后的样品,只有在高于800/spl℃的温度下退火后才观察到弛豫。然而,即使在1050/spl℃退火后,也不能实现完全弛豫。在此温度下退火的样品显示残余应力在8kbar范围内。对于植入的样品(C峰浓度接近2%),尽管层内存在明显的应力补偿,但Si-Si模式并未发生实质性的转变。C原子附近强烈的晶格微畸变可能是造成这种效应的主要原因。
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引用次数: 1
First results of s.i. GaAs single crystal growth applying the vapour pressure controlled Czochralski method 应用蒸气压控制的Czochralski法生长砷化镓单晶的初步结果
Pub Date : 1996-04-29 DOI: 10.1109/SIM.1996.570868
M. Neubert, M. Seifert, P. Rudolph, K. Trompa, M. Pietsch
The purpose of this paper is to show the current stage of development of the Vapour Pressure Controlled Czochralski Method (VCZ) at the Institute of Crystal Growth (IKZ) in Berlin. First 3" s.i. GaAs crystals, grown in our laboratory, will be presented. The paper briefly summarizes investigations on i) crystal perfection i.e., etch pit density (EPD), cell structure, precipitates and, ii) electrical data, The properties of the crystals are acceptable for s.i. GaAs. An average EPD in the range from 1 to 2/spl times/10/sup 4/ cm/sup -2/ is just achieved but, does not yet match the requirements of very low EPD material.
本文的目的是展示柏林晶体生长研究所(IKZ)蒸汽压力控制的Czochralski方法(VCZ)的当前发展阶段。将展示在我们实验室中生长的第一个3英寸si砷化镓晶体。本文简要总结了晶体完美性,即蚀刻坑密度(EPD),电池结构,沉淀物和ii)电学数据的研究,晶体的性能可用于si GaAs。平均EPD范围为1至2/spl倍/10/sup 4/ cm/sup -2/,但尚未达到极低EPD材料的要求。
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引用次数: 2
Characterisation of deep-level defects in semi-insulating GaAs and InP by high resolution photoinduced transient spectroscopy (HRPITS) 半绝缘GaAs和InP中深能级缺陷的高分辨率光致瞬态光谱表征
Pub Date : 1996-04-29 DOI: 10.1109/SIM.1996.570926
P. Kamiński, M. Pawłowski, R. Cwirko, M. Palczewska, R. Kozłowski
Deep levels in undoped semi-insulating (SI) GaAs and Fe-doped SI InP investigated by photoinduced transient spectroscopy (PITS). It is demonstrated that the resolution of this method can be improved by direct computer fitting of digitally recorded photocurrent decays.
利用光致瞬态光谱(PITS)研究了未掺杂半绝缘(SI) GaAs和掺铁SI InP的深能级。结果表明,通过直接对数字记录的光电流衰减进行计算机拟合,可以提高该方法的分辨率。
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引用次数: 0
Observations of low frequency admittance between isolated GaAs structures formed by ion implantation and by epitaxy on epitaxial buffer layers prepared at high and low temperatures 在高温和低温制备的外延缓冲层上,离子注入和外延形成的孤立GaAs结构之间低频导纳的观察
Pub Date : 1996-04-29 DOI: 10.1109/SIM.1996.570876
F. Boroumand, A. Khalid, M. Hopkinson, J. Swanson
Comparisons have been made of the frequency dependence of the backgate admittance of GaAs structures prepared by MBE on undoped buffer layers prepared at high and low temperatures and of ion implanted structures. A model is offered to explain extra capacitive currents at low frequencies. Inductive and negative resistance behaviours which appear to be related have not been explained. None of these phenomena were apparent in the LT based structures.
比较了高温、低温制备的未掺杂缓冲层和离子注入结构对MBE制备的GaAs结构的后门导纳的频率依赖性。给出了一个解释低频时额外电容电流的模型。感应和负电阻行为似乎是相关的,但尚未得到解释。这些现象在LT基结构中都不明显。
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引用次数: 1
Deep trap characterization of Al./sub 48/In./sub 52/As/In/sub .52/(Ga/sub .7/Al/sub .3/)/sub .48/As heterostructures al /sub 48/In深圈闭表征。/sub 52/As/In/sub .52/(Ga/sub .7/Al/sub .3/)/sub .48/As异质结构
Pub Date : 1996-04-29 DOI: 10.1109/SIM.1996.571102
K. Rezzoug, F. Ducroquet, G. Guillot, L. Giraudet, J.P. Praseuth
Electron traps in AlInAs/In/sub .52/(Ca/sub 1-x/Al/sub x/)/sub .48/As (x=0.3) heterostructures are investigated by deep level transient spectroscopy. Two dominant traps with activation energies of 0.31 and 0.59 eV are observed in quaternary and ternary layers respectively. Both these levels are supposed to be intrinsic defects from the same origin. Another defect at E/sub c/-0.4 eV is detected at the AlInAs/InCaAlAs interface. The concentration of this trap is found to be non uniformly distributed on the wafer and possible impurity contamination is suggested.
用深能级瞬态光谱研究了AlInAs/ in /sub .52/(Ca/sub - 1-x/Al/sub . x/)/sub .48/As (x=0.3)异质结构中的电子陷阱。在四元层和三元层中分别观察到活化能为0.31和0.59 eV的两个优势圈闭。这两个层次都被认为是同一根源的内在缺陷。在AlInAs/InCaAlAs接口处检测到E/sub c/-0.4 eV的另一个缺陷。发现该陷阱的浓度在晶圆上分布不均匀,可能存在杂质污染。
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引用次数: 2
Current-voltage and low frequency noise measurements on LT-InAlAs grown by MBE MBE生长的LT-InAlAs的电流-电压和低频噪声测量
Pub Date : 1996-04-29 DOI: 10.1109/SIM.1996.570932
C. Meva'a, P. Rojo-Romeo, X. Letartre
The properties of InAlAs layers grown lattice matched to InP by molecular beam epitaxy (MBE) were investigated. For a large range of growth conditions (temperature, V/III beam equivalent pressure ratio, doping level), we have detected 3 deep electron trap families E1, E2, and E3 in the material bandgap. The presence of these traps give rise to a defect-assisted tunneling current in the space-charge region of Schottky diodes at low forward and reverse biases. The observed low frequency l/fl in reverse bias is interpreted in terms of fluctuations of the Schottky barrier height.
用分子束外延法(MBE)研究了与InP晶格匹配的InAlAs层的性能。对于大范围的生长条件(温度,V/III光束等效压力比,掺杂水平),我们在材料带隙中检测到3个深电子陷阱族E1, E2和E3。这些陷阱的存在会在肖特基二极管的低正向和反向偏置的空间电荷区产生缺陷辅助的隧道电流。用肖特基势垒高度的波动来解释反向偏置下观测到的低频l/fl。
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Proceedings of Semiconducting and Semi-Insulating Materials Conference
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