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Iron doped semi-insulating GaInP lattice matched to GaAs for device fabrication 与GaAs匹配的铁掺杂半绝缘GaInP晶格用于器件制造
Pub Date : 1996-04-29 DOI: 10.1109/SIM.1996.570867
S. Lourdudoss, R. Holz
I-V curves of semi-insulating Ga/sub 0.51/In/sub 0.49/P:Fe (E/sub g/=1.9 eV) with various Fe concentrations obtained at 125/spl deg/C are presented, The shapes of these curves are characteristic of the measurements made at 100 to 200/spl deg/C. The I-V behaviour of the material is different if Fe concentration is below or above 1.5/spl times/10/sup 17/ cm/sup -3/. Differential resistivity derived from these curves also exhibits a maximum at Fe=1.5/spl times/10/sup 17/ cm/sup -3/. These observations indicate that the cause of semi-insulation may be different below and above this concentration. It is suggested that Fe may be mostly site incorporated in the low concentration regime and mostly in the form of Fe-P complexes in the high concentration regime, A GaInP/GaInAsP/GaAs buried heterostructure with semi-insulating Ga/sub 0.51/In/sub 0.49/P:Fe regrowth has been fabricated for the first time to demonstrate the usefulness of the investigated material in device fabrication.
给出了在125/spl℃下不同Fe浓度下半绝缘Ga/sub 0.51/In/sub 0.49/P:Fe (E/sub g/=1.9 eV)的I-V曲线,这些曲线的形状是在100 ~ 200/spl℃下测量的特征曲线。当铁浓度低于或高于1.5/spl倍/10/sup 17/ cm/sup -3/时,材料的I-V行为不同。由这些曲线得出的差分电阻率在Fe=1.5/spl倍/10/sup 17/ cm/sup -3/时也显示出最大值。这些观察结果表明,在此浓度以下和高于此浓度时,半绝缘的原因可能不同。本文首次制备了具有半绝缘Ga/sub 0.51/ in /sub 0.49/P的GaInP/GaInAsP/GaAs埋置异质结构,证明了该材料在器件制造中的应用价值。
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引用次数: 0
Study of structure of low-symmetry complexes in n-GaAs through investigation of integrated polarization of photoluminescence under uniaxial pressure 利用单轴压力下光致发光的积分偏振研究n-GaAs中低对称性配合物的结构
Pub Date : 1996-04-29 DOI: 10.1109/SIM.1996.571096
A. Gutkin, M. Reshchikov, V. Sedov, V.R. Sosnovskii
We have investigated the effect of uniaxial pressure on polarization of wide photoluminescence (PL) bands related to complexes in GaAs. It is shown that the V/sub Ga/Te/sub As/, V/sub Ga/Sn/sub Ga/ and V/sub Ga/Si/sub Ga/ complexes responsible for the 1.2 eV PL band and the Cu/sub Ga/Te/sub As/, Cu/sub Ga/S/sub As/ and Cu/sub Ga/Se/sub As/ complexes responsible for the 1.3 eV PL band have an additional distortion which can be reoriented and aligned by uniaxial pressure in conditions of PL observation at low temperature.
我们研究了单轴压力对GaAs中与配合物相关的宽光致发光(PL)带偏振的影响。结果表明,1.2 eV PL波段的V/sub Ga/Te/sub As/、V/sub Ga/Sn/sub Ga/和V/sub Ga/Si/sub Ga/配合物以及1.3 eV PL波段的Cu/sub Ga/Te/sub As/、Cu/sub Ga/S/sub As/和Cu/sub Ga/Se/sub As/配合物具有额外的畸变,在低温PL观测条件下,这种畸变可以通过单轴压力重新定向和排列。
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引用次数: 0
Hexagonal structures for two-dimensional photonic crystals 二维光子晶体的六边形结构
Pub Date : 1996-04-29 DOI: 10.1109/SIM.1996.571115
D. Cassagne, C. Jouanin, D. Bertho
Periodic dielectric structures have been recently proposed to inhibit spontaneous emission in semiconductors. From this suggestion, the new concepts of photonic band gap and photonic crystal have been developed. Zero-threshold lasers, waveguides, antenna substrates, filters and polarizers are promising applications. We propose a new class of two-dimensional periodic dielectric structures with hexagonal symmetry. We study the gap opening according to whether the dielectric constant of the cylinders is larger or smaller than that of the background. A potential application for the creation of photonic crystals in the optical domain is discussed.
周期性介电结构最近被提出用于抑制半导体中的自发发射。由此,提出了光子带隙和光子晶体的新概念。零阈值激光器、波导、天线基板、滤波器和偏振器是有前途的应用。提出了一类具有六方对称的二维周期性介电结构。根据圆柱体的介电常数是否大于或小于背景的介电常数来研究间隙的开度。讨论了光子晶体在光学领域的潜在应用。
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引用次数: 0
Surface modification of SiC thin films by pulsed electron and ion beams 脉冲电子束和离子束对SiC薄膜的表面改性
Pub Date : 1996-04-29 DOI: 10.1109/SIM.1996.571092
S. Korenev, J. Huran, A. Kobzev
The results of experimental investigation of surface modification of silicon carbide thin films by pulsed electron and ion beams are presented in this report. For experiments we use electron and ion beams with following parameters: kinetic energy 200-400 keV, pulse duration 300 ns, beam current for electrons 100-300 A, for ions 1-20 A. The presented results were obtained from RBS, ERD (elastic recoil detection) and IR spectroscopy.
本文报道了用脉冲电子束和离子束对碳化硅薄膜进行表面改性的实验研究结果。在实验中,我们使用电子和离子束,其参数如下:动能200-400 keV,脉冲持续时间300 ns,电子束电流100-300 A,离子1-20 A。结果由RBS, ERD(弹性后坐力检测)和IR光谱得到。
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引用次数: 0
On relation between detection parameters of SI GaAs particle detectors and physical properties of starting materials SI - GaAs粒子探测器检测参数与起始材料物理性质的关系
Pub Date : 1996-04-29 DOI: 10.1109/SIM.1996.570881
F. Dubecký, J. Darmo, M. Krempaský, J. Betkó, I. Bešše, M. Pikna, A. Šatka, J. Oswald, P. Pelfer
The role of deep levels and material inhomogeneities is studied in regard to their influence on the parameters of Cr-doped and undoped bulk semi-insulating GaAsb-based particle detectors. It is shown that the charge collection efficiency and the energy resolution of detectors is strongly affected by physical properties of starting material.
研究了深能级和材料不均匀性对掺cr和未掺cr半绝缘gaasb粒子探测器参数的影响。结果表明,探测器的电荷收集效率和能量分辨率受起始材料的物理性质的影响较大。
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引用次数: 0
Donor doping calibration in 4H-SiC using photoluminescence spectroscopy 用光致发光光谱法标定4H-SiC供体掺杂
Pub Date : 1996-04-29 DOI: 10.1109/SIM.1996.570944
I. Ivanov, C. Hallin, A. Henry, O. Kordina, E. Janzén
The relative intensity of the intrinsic and impurity-related luminescence lines reflects the impurity concentration. A calibration procedure is presented for the nitrogen donor impurity in 4H-SiC. The calibration is valid for a large range of n-type doping from 10/sup 14/ cm/sup -3/ to 3.10/sup 16/ cm/sup -3/. Above this level the free-exciton related emission is not observable and below careful attention regarding the compensation of the material should be noted.
本征发光线和杂质相关发光线的相对强度反映了杂质浓度。提出了一种校正4H-SiC中氮供体杂质的方法。该校准方法适用于10/sup 14/ cm/sup -3/至3.10/sup 16/ cm/sup -3/的n型掺杂范围。在此水平以上,自由激子相关的发射是不可观察到的,低于此水平时,应注意材料的补偿。
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引用次数: 0
On deep levels in high-resistivity LEC-GaAs investigated by means of photo induced current transient spectroscopy 用光感应电流瞬态光谱法研究了高电阻率lecaas的深层特性
Pub Date : 1996-04-29 DOI: 10.1109/SIM.1996.570927
D. Seghier, H. Gíslason
In order to study deep defects in undoped LEC-grown GaAs, photo induced current transient spectroscopy (PICTS) has been carried out on materials with a depletion region. Five main traps were observed. In addition to positions in the gap, it is shown that the nature of carrier traps can also be identified. Contributions from the surface and the bulk of the material in the PICTS signal, are compared. Also, effects from the excitation light wavelength on PICTS spectra, are reported.
为了研究未掺杂的lec生长GaAs中的深度缺陷,对具有耗尽区的材料进行了光诱导电流瞬态光谱(PICTS)研究。观察到五个主要圈闭。除了在间隙中的位置外,还可以识别载流子陷阱的性质。比较了PICTS信号中表面和大块材料的贡献。此外,还报道了激发光波长对PICTS光谱的影响。
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引用次数: 0
Accurate flux estimation during molecular beam epitaxy growth of vertical-cavity surface-emitting lasers 垂直腔面发射激光器分子束外延生长过程中通量的精确估计
Pub Date : 1996-04-29 DOI: 10.1109/SIM.1996.571114
L. Couturier, P. Grosse, A. Grouillet, A. Chenevas-Paule
We report an in-situ method for accurate flux monitoring in gas-source molecular-beam epitaxy (GSMBE) growth of vertical-cavity surface-emitting lasers (VCSELs). The method uses a single reflectivity spectrum measurement on the incomplete structure to estimate the values of the effusion cell fluxes (and therefore the thickness and the composition of the different layers) used for the growth of the first part of the device. The flux values are extracted using a simulated annealing algorithm. Before completing the structure, corrections are made in order to centre the cavity resonance of the final device at the desired wavelength.
本文报道了垂直腔面发射激光器(VCSELs)气源分子束外延(GSMBE)生长过程中精确通量监测的原位方法。该方法使用不完整结构上的单一反射率光谱测量来估计用于设备第一部分生长的积液池通量的值(从而估计不同层的厚度和组成)。利用模拟退火算法提取磁通值。在完成结构之前,进行校正以使最终器件的腔谐振在所需波长的中心。
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引用次数: 0
Semi-insulating InP grown with a CCl/sub 4/ doping source 用CCl/sub - 4/掺杂源生长半绝缘InP
Pub Date : 1996-04-29 DOI: 10.1109/SIM.1996.570863
G. Stillman, N. Gardner, Q. Hartmann, S. A. Stockman, J. Baker
Recently we have demonstrated the growth of epitaxial layers of highly resistive InP (/spl rho//spl ges/10/sup 9/ /spl Omega/ cm) by low-pressure MOCVD at low substrate temperature (<550/spl deg/C) using a CCl/sub 4/ doping source. The effect of substrate temperature and CCl/sub 4/ flow rate on the electrical properties of this material have been studied, and the results indicate that the SI behavior is most likely due to CCl/sub 4/-mediated enhancement of native defect incorporation during growth. Device results show that SI InP grown with a CCl/sub 4/ doping source is suitable for application as a Schottky-barrier-enhancement layer on n-In/sub 0.53/Ga/sub 0.47/As.
最近,我们已经证明了在低衬底温度(<550/spl度/C)下,使用CCl/sub - 4/掺杂源,通过低压MOCVD生长高阻InP (/spl rho//spl ges/10/sup 9/ /spl Omega/ cm)外延层。研究了衬底温度和CCl/sub - 4流速对该材料电性能的影响,结果表明,SI行为很可能是由于CCl/sub - 4介导的生长过程中天然缺陷掺入的增强。器件结果表明,用CCl/sub - 4/掺杂源生长的SI InP适于在n-In/sub 0.53/Ga/sub 0.47/ as上作为肖特基势垒增强层。
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引用次数: 0
Photoelastic characterization of undoped semi-insulating GaAs wafers with a high-spatial-resolution infrared polariscope 用高空间分辨率红外偏振镜表征未掺杂半绝缘GaAs晶圆的光弹性
Pub Date : 1996-04-29 DOI: 10.1109/SIM.1996.570934
M. Yamada, K. Ito, M. Fukuzawa
In order to measure a small amount and spatial variation of birefringence induced by residual strains in III-V compound materials, we have developed a high-sensitivity high-spatial-resolution computer-controlled scanning infrared polariscope. Several characterization results on commercial GaAs wafers are presented to demonstrate its performance. It is found that local strain fields accompanied by crystal defects such as slip dislocations, lineages, inclusions, and voids can be observed.
为了测量III-V复合材料中残余应变引起的少量双折射和空间变化,我们研制了一种高灵敏度、高空间分辨率的计算机控制扫描红外偏光仪。在工业GaAs晶圆上的几个表征结果证明了它的性能。发现局部应变场中存在滑移位错、线形、夹杂和空洞等晶体缺陷。
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引用次数: 4
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Proceedings of Semiconducting and Semi-Insulating Materials Conference
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