Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607885
N. Quack, Philipp Rust, S. Blunier, J. Dual, F. Felder, M. Arnold, M. Rahim, M. Fill, H. Zogg
Results on a tunable resonant cavity enhanced detector (RCED) in the mid-infrared employing a vertically moving, comb-drive actuated micromirror are presented. A wide tuning range of 0.7 mum and a low order configuration have been achieved with a micromirror displacement range of 2.5 mum and a reduction of the optical cavity length respectively.
{"title":"Mid-infrared tunable Resonant Cavity Enhanced Detectors employing vertically moving comb drive actuated MEMS micromirrors","authors":"N. Quack, Philipp Rust, S. Blunier, J. Dual, F. Felder, M. Arnold, M. Rahim, M. Fill, H. Zogg","doi":"10.1109/OMEMS.2008.4607885","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607885","url":null,"abstract":"Results on a tunable resonant cavity enhanced detector (RCED) in the mid-infrared employing a vertically moving, comb-drive actuated micromirror are presented. A wide tuning range of 0.7 mum and a low order configuration have been achieved with a micromirror displacement range of 2.5 mum and a reduction of the optical cavity length respectively.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130889925","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607845
P. Waibel, D. Mader, D. Lammle, A. Seifert, H. Zappe
Simulation and measurements of achromatic variable-focus multi-chamber micro-lenses are presented. By using three liquid-filled chambers with well-defined dispersion behavior, separated by highly elastic silicone membranes, this achromatic optical system can be tuned in focal length by adjusting the pressures inside the chambers. Tunable achromatic micro-lenses are thus feasible.
{"title":"Simulation and characterization of tunable achromatic micro-lenses","authors":"P. Waibel, D. Mader, D. Lammle, A. Seifert, H. Zappe","doi":"10.1109/OMEMS.2008.4607845","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607845","url":null,"abstract":"Simulation and measurements of achromatic variable-focus multi-chamber micro-lenses are presented. By using three liquid-filled chambers with well-defined dispersion behavior, separated by highly elastic silicone membranes, this achromatic optical system can be tuned in focal length by adjusting the pressures inside the chambers. Tunable achromatic micro-lenses are thus feasible.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"70 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134351277","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607832
O. Spahn, L. Phinney, C.C. Wong, W. Cowan, D. Adams, G. Grossetete
A number of applications require optical MEMS devices to handle high optical power. We present theoretical and experimental results for SUMMiTtrade fabricated mirrors and other structures illustrating performance limitations and several mitigation strategies.
{"title":"Impact of high optical power on optical MEMS","authors":"O. Spahn, L. Phinney, C.C. Wong, W. Cowan, D. Adams, G. Grossetete","doi":"10.1109/OMEMS.2008.4607832","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607832","url":null,"abstract":"A number of applications require optical MEMS devices to handle high optical power. We present theoretical and experimental results for SUMMiTtrade fabricated mirrors and other structures illustrating performance limitations and several mitigation strategies.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129242570","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607852
T. Hsieh, Yao-tien Chang, Sheng-jie Chiou, J. Tsai, D. Hah, M. Wu
A symmetric cross-bar spring structure is employed to improve the performance of a two-axis gimbal-less micromirror driven by radial vertical combdrive actuators. The actuators are hidden underneath the mirror to minimize the device form factor. The device is fabricated by the SUMMiT-V surface micromachining process. The entire improved cross-bar spring structure is made of the same layer with a 1-mum thickness and the torsion springs are shortened to suppress the lateral instability. The mechanical rotation angles are plusmn5.33deg (50.7 V) and plusmn6.04deg (52.8 V) for rotation about the x- and y-axes, respectively.
{"title":"Performance improvement of a two-axis radial-vertical-combdrive scanner by using a symmetric spring design","authors":"T. Hsieh, Yao-tien Chang, Sheng-jie Chiou, J. Tsai, D. Hah, M. Wu","doi":"10.1109/OMEMS.2008.4607852","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607852","url":null,"abstract":"A symmetric cross-bar spring structure is employed to improve the performance of a two-axis gimbal-less micromirror driven by radial vertical combdrive actuators. The actuators are hidden underneath the mirror to minimize the device form factor. The device is fabricated by the SUMMiT-V surface micromachining process. The entire improved cross-bar spring structure is made of the same layer with a 1-mum thickness and the torsion springs are shortened to suppress the lateral instability. The mechanical rotation angles are plusmn5.33deg (50.7 V) and plusmn6.04deg (52.8 V) for rotation about the x- and y-axes, respectively.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115410822","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607843
Hyunkyu Park, D. Horsley
A MEMS-based deformable mirror constructed using single-crystal PMN-PT for use in ophthalmologic adaptive optics is presented. The fabrication process and the results of characterization of the DM are described. A large stroke and high operating bandwidth assure that the DM can be a promising wavefront corrector.
{"title":"MEMS deformable mirrors for adaptive optics using single crystal PMN-PT","authors":"Hyunkyu Park, D. Horsley","doi":"10.1109/OMEMS.2008.4607843","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607843","url":null,"abstract":"A MEMS-based deformable mirror constructed using single-crystal PMN-PT for use in ophthalmologic adaptive optics is presented. The fabrication process and the results of characterization of the DM are described. A large stroke and high operating bandwidth assure that the DM can be a promising wavefront corrector.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122454431","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607798
Y. Arakawa
We discuss recent advances in quantum dots for nanophotonics and quantum information devices, including high-performance quantum dot lasers and single photon emitters. Moreover, controlled light emission from quantum dots embedded in 2D/3D photonic crystal nanocavity is demonstrated.
{"title":"Advances in quantum dots and 2D/3D photonic crystal nanocavity based on micro-machining technology","authors":"Y. Arakawa","doi":"10.1109/OMEMS.2008.4607798","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607798","url":null,"abstract":"We discuss recent advances in quantum dots for nanophotonics and quantum information devices, including high-performance quantum dot lasers and single photon emitters. Moreover, controlled light emission from quantum dots embedded in 2D/3D photonic crystal nanocavity is demonstrated.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"257 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122661906","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607865
T. Kusserow, R. Zamora, J. Sonksen, N. Dharmarasu, H. Hillmer, T. Nakamura, T. Hayakawa, B. Vengatesan
We present a tunable photodetector MEMS device consisting of an InP/air-gap Fabry-Perot filter combined with a pin-photodiode structure. Epitaxial growth and advanced surface micromachining are used for the monolithic integration of both devices. Special process steps regarding detector geometry, photo current and signal quality have been investigated to assure high performance.
{"title":"Monolithic integration of a tunable photodetector based on InP/air-gap Fabry-Pérot filters","authors":"T. Kusserow, R. Zamora, J. Sonksen, N. Dharmarasu, H. Hillmer, T. Nakamura, T. Hayakawa, B. Vengatesan","doi":"10.1109/OMEMS.2008.4607865","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607865","url":null,"abstract":"We present a tunable photodetector MEMS device consisting of an InP/air-gap Fabry-Perot filter combined with a pin-photodiode structure. Epitaxial growth and advanced surface micromachining are used for the monolithic integration of both devices. Special process steps regarding detector geometry, photo current and signal quality have been investigated to assure high performance.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125317585","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607867
E. Dunbar, M. Leone, S. Lukes, D. Dickensheets
Large stroke deformable membrane mirrors are designed for primary focus control and compensation of focus-induced spherical aberration. SU-8 2002 epoxy membranes 2 mum thick and up to 1 cm diameter, with symmetric aluminum coatings, are described.
{"title":"Polymer deformable membrane mirrors for focus control using SU-8 2002","authors":"E. Dunbar, M. Leone, S. Lukes, D. Dickensheets","doi":"10.1109/OMEMS.2008.4607867","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607867","url":null,"abstract":"Large stroke deformable membrane mirrors are designed for primary focus control and compensation of focus-induced spherical aberration. SU-8 2002 epoxy membranes 2 mum thick and up to 1 cm diameter, with symmetric aluminum coatings, are described.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125407805","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607847
Y. Du, Guangya Zhou, K. Cheo, Qingxin Zhang, H. Feng, F. Chau
A novel MEMS based in-plane vibratory sub-wavelength diffraction grating scanner is reported. Diffraction efficiency of more than 75%, optical scan angle of 13.7deg and scanning frequency of 20.35 kHz are experimentally achieved.
{"title":"A micromachined vibratory sub-wavelength diffraction grating laser scanner","authors":"Y. Du, Guangya Zhou, K. Cheo, Qingxin Zhang, H. Feng, F. Chau","doi":"10.1109/OMEMS.2008.4607847","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607847","url":null,"abstract":"A novel MEMS based in-plane vibratory sub-wavelength diffraction grating scanner is reported. Diffraction efficiency of more than 75%, optical scan angle of 13.7deg and scanning frequency of 20.35 kHz are experimentally achieved.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"136 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121843988","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607829
E. Higurashi, D. Chino, T. Suga, R. Sawada
The hybrid integration of multiple chips in three dimensions is an important technology for realizing highly functional, compact optoelectronic microsystems. In this study, three-dimensional integration of optical chips was successfully performed using Au-Au surface-activated bonding (bonding temperature: 150degC). The fabricated microsystem consists of two elements: i) a micromachined silicon optical bench incorporating a bonded laser diode, micromirrors, and through-hole electrodes; and ii) a glass substrate incorporating bonded photodiodes, electrical interconnections, and refractive microlenses. The silicon optical bench and the glass substrate were vertically stacked by surface-activated bonding. The size of the fully integrated microsystem is only 2.6 mm times 2.6 mm times 1 mm thick. The design and fabrication process allow chip-scale and wafer-level packaging. In addition, application for laser Doppler velocimeter sensor is discussed.
多芯片的三维混合集成是实现高功能、紧凑的光电微系统的重要技术。本研究利用Au-Au表面活化键合(键合温度150℃)成功实现了光学芯片的三维集成。所制备的微系统由两个元素组成:i)一个微加工硅光学平台，包含一个键合激光二极管、微镜和通孔电极;以及ii)包含键合光电二极管、电互连和折射微透镜的玻璃基板。采用表面活化键合的方法将硅光学平台与玻璃基板垂直堆叠。完全集成微系统的尺寸仅为2.6 mm × 2.6 mm × 1mm厚。设计和制造过程允许芯片级和晶圆级封装。此外，还讨论了激光多普勒测速传感器的应用。
{"title":"Three-dimensional integration of optical multi-chips using surface-activated bonding for high-density microsystems packaging","authors":"E. Higurashi, D. Chino, T. Suga, R. Sawada","doi":"10.1109/OMEMS.2008.4607829","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607829","url":null,"abstract":"The hybrid integration of multiple chips in three dimensions is an important technology for realizing highly functional, compact optoelectronic microsystems. In this study, three-dimensional integration of optical chips was successfully performed using Au-Au surface-activated bonding (bonding temperature: 150degC). The fabricated microsystem consists of two elements: i) a micromachined silicon optical bench incorporating a bonded laser diode, micromirrors, and through-hole electrodes; and ii) a glass substrate incorporating bonded photodiodes, electrical interconnections, and refractive microlenses. The silicon optical bench and the glass substrate were vertically stacked by surface-activated bonding. The size of the fully integrated microsystem is only 2.6 mm times 2.6 mm times 1 mm thick. The design and fabrication process allow chip-scale and wafer-level packaging. In addition, application for laser Doppler velocimeter sensor is discussed.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"SE-4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126573289","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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