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Improvement of Surface Roughness in SiO2 Thin Films via Deuterium Annealing at 300 °C 300℃氘退火改善SiO2薄膜表面粗糙度的研究
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-12-31 DOI: 10.1109/TNANO.2024.3524567
Ju-Won Yeon;Hyo-Jun Park;Eui-Cheol Yun;Moon-Kwon Lee;Tae-Hyun Kil;Yong-Sik Kim;Jun-Young Park
Recently, deuterium annealing at a reduced temperature range of 300 °C has been proposed to enhance SiO2 gate dielectrics and the Si/SiO2 interface, thereby improving device reliability. As a further investigation into deuterium annealing, for the first time this study compared deuterium absorption characteristics with various SiO2 dielectrics formed by wet oxidation, dry oxidation, low-pressure chemical vapor deposition (LPCVD), and plasma-enhanced chemical vapor deposition (PECVD). Deuterium annealing can also be used to reduce the roughness and improve the uniformity of SiO2 dielectric films. Surface roughness of various samples was measured and quantitatively compared using atomic force microscopy (AFM) after deuterium annealing.
最近,有人提出在300°C的低温范围内进行氘退火,以增强SiO2栅极电介质和Si/SiO2界面,从而提高器件的可靠性。作为对氘退火的进一步研究,本研究首次比较了湿氧化、干氧化、低压化学气相沉积(LPCVD)和等离子体增强化学气相沉积(PECVD)形成的不同SiO2介电体的氘吸收特性。氘退火也可以用于降低SiO2介电膜的粗糙度和提高均匀性。采用原子力显微镜(AFM)对不同样品在氘退火后的表面粗糙度进行了测量和定量比较。
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引用次数: 0
On the Importance of the Metal Catalyst Layer to the Performance of CNT-Based Supercapacitor Electrodes 金属催化剂层对碳纳米管超级电容器电极性能的重要性
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-12-26 DOI: 10.1109/TNANO.2024.3523412
Kingshuk Chatterjee;Vinay Kumar;Prabhat Kumar Agnihotri;Sumit Basu;Nandini Gupta
The power and energy densities of a Supercapacitor (SC) is largely dictated by the accessibility of the nano-porous area of the electrode to the electrolyte ions. Carbon nanotubes (CNT) have high electrical conductivity, and more importantly, may be grown into architectures with high surface area. However, this is not easy to achieve in practice. CNT electrodes are fabricated by chemical vapor deposition (CVD), after a metal catalyst layer is coated on a current collector. In this work, the control of the metal catalyst layer, by varying the dip-coating time and CVD process parameters, is shown to be crucial to pore morphology and consequent SC performance. The dip-coating time is adjusted to obtain thin and uniform coating. Further, optimum reduction of the nickel layer with hydrogen is required to produce thin CNTs with adequate inter-tube separation that facilitate ion accessibility within the pores. The height of the CNT forest is also optimized to prevent decrease in specific capacitance due to reduced accessibility. Proper optimization of the process parameters results in a pore morphology conductive to ion diffusion, and simultaneous improvement in energy and power density.
超级电容器(SC)的功率和能量密度在很大程度上取决于电极的纳米孔区域对电解质离子的可及性。碳纳米管(CNT)具有高导电性,更重要的是,可以生长成具有高表面积的结构。然而,这在实践中并不容易实现。碳纳米管电极采用化学气相沉积(CVD)技术,在集流器上涂覆金属催化剂层。在这项工作中,通过改变浸涂时间和CVD工艺参数来控制金属催化剂层,对孔隙形态和随后的SC性能至关重要。调整浸涂时间,获得薄而均匀的涂层。此外,需要用氢对镍层进行最佳还原,以产生具有足够管间分离的薄碳纳米管,从而促进孔内离子的可及性。碳纳米管森林的高度也进行了优化,以防止由于可达性降低而导致比电容的降低。适当优化工艺参数,可以形成有利于离子扩散的孔隙形态,同时提高能量和功率密度。
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引用次数: 0
Improvement of the Enhancement-Mode GaN MIS-HEMTs by Fluorine Doping in the Dielectric Gate Stack 介质栅层中氟掺杂对增强模式GaN mishemt的改进
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-12-25 DOI: 10.1109/TNANO.2024.3522371
Tsung-Ying Yang;Mei-Yan Kuo;Jui-Sheng Wu;Yan-Kui Liang;Rahul Rai;Shivendra K. Rathaur;Edward Yi Chang
This study tested fluorine doping on various regions of the ferroelectric charge trap gate stack (FEG stack). Fluorine doping effectively reduces oxygen vacancies in the dielectric layer, thus reducing leakage current and stabilizing charge in the dielectric layer. Moreover, fluorine doping can passivate the dangling bonds at the interface and increase the ability of trapping carriers in the trap layer. The FEG stack comprises a tunnel oxide layer (TL), a charge trap layer (CTL), and a ferroelectric layer (FE). Four types of devices were fabricated: undoped, doping in TL, doping in CTL, and doping in both TL and CTL, to investigate the impact of fluorine doping on the FEG gate stack. Devices doping in TL and CTL demonstrated superior performance, achieving the highest Vth of 5.4 V with a retention time of 70.42% after 10, 000 seconds. The off-state and gate leakage tests revealed impressive breakdown voltages of 735 V and 24.55 V, respectively. Furthermore, the device exhibited a high operation voltage of 14.3 V for a 10-year lifetime prediction, enabling a wide operating range.
本研究测试了氟在铁电电荷阱栅极堆叠(FEG堆叠)不同区域的掺杂。氟掺杂有效地减少了介电层中的氧空位,从而降低了漏电电流,稳定了介电层中的电荷。此外,氟的掺杂可以钝化界面上的悬空键,提高捕获载流子的能力。FEG堆叠包括隧道氧化层(TL)、电荷阱层(CTL)和铁电层(FE)。制备了四种类型的器件:未掺杂、TL掺杂、CTL掺杂和TL和CTL同时掺杂,以研究氟掺杂对FEG栅堆的影响。在TL和CTL中掺杂的器件表现出优异的性能,最高Vth为5.4 V,在10,000秒后保持时间为70.42%。断开状态和栅极泄漏测试显示击穿电压分别为735 V和24.55 V。此外,该器件具有14.3 V的高工作电压,预测寿命为10年,实现了较宽的工作范围。
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引用次数: 0
IEEE Transactions on Nanotechnology Publication Information IEEE纳米技术出版信息汇刊
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-12-25 DOI: 10.1109/TNANO.2024.3517997
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引用次数: 0
Enhanced Hydrogen Gas Sensing Performance of Gold Nanoparticle Decorated Nitrogen-Doped ZnO Nanomaterials for Improved Sensitivity and Rapid Response 金纳米粒子修饰氮掺杂ZnO纳米材料的氢气传感性能提高灵敏度和快速响应
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-12-25 DOI: 10.1109/TNANO.2024.3522368
Sanjana Devi VS;Balraj B;Amuthameena S;Joby Titus T
This study investigates the enhancement of hydrogen (H2) gas sensing in nitrogen-doped Zinc Oxide (ZnO) nanomaterials through the decoration of gold (Au) nanoparticles. ZnO nanoparticles were synthesized via a wet chemical method, doped with nitrogen at 0.5%, 1.0%, and 1.5% concentrations, and decorated with Au nanoparticles. Characterization using X-ray diffraction (XRD) revealed that the ZnO structure remained intact, with the addition of a peak corresponding to Au at 38.19°. Transmission electron microscopy (TEM) confirmed the uniform distribution of spherical Au nanoparticles on the ZnO surfaces. UV-Vis spectroscopy showed an enhanced absorption peak at 532 nm due to surface plasmon resonance. Photoluminescence (PL) spectra indicated reduced emission intensity, suggesting effective charge transfer between ZnO and Au. Gas sensing tests revealed that Au-decorated 1.0 wt. % N exhibited a maximum H2 gas response of 89% at 200 °C, significantly higher than the 46% response of non-decorated 1.0 wt. % N. Additionally, the Au-decorated N sensors demonstrated a rapid response time of 10 sec and a recovery time of 15 sec. These results highlight the potential of Au-decorated N-doped nanomaterials as highly efficient H2 gas sensors, combining enhanced sensitivity with fast response kinetics.
本研究通过金纳米粒子的修饰,研究了氮掺杂氧化锌(ZnO)纳米材料中氢(H2)气敏的增强。采用湿法合成ZnO纳米粒子,分别以0.5%、1.0%和1.5%浓度的氮掺杂,并以Au纳米粒子装饰。x射线衍射(XRD)表征表明,ZnO结构保持完整,并在38.19°处添加了Au对应的峰。透射电镜(TEM)证实了球形金纳米颗粒在ZnO表面的均匀分布。紫外可见光谱显示,由于表面等离子体共振,532 nm处的吸收峰增强。光致发光(PL)光谱显示发射强度降低,表明ZnO和Au之间存在有效的电荷转移。气体传感测试表明,在200°C下,1.0 wt. % N的au修饰的H2气体响应率为89%,显著高于未修饰的1.0 wt. % N的46%的响应率。此外,au修饰的N传感器显示出10秒的快速响应时间和15秒的恢复时间。这些结果突出了au修饰的N掺杂纳米材料作为高效H2气体传感器的潜力,结合了增强的灵敏度和快速的响应动力学。
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引用次数: 0
Reduction of Joule Losses in Memristive Switching Using Optimal Control 利用最优控制降低忆阻开关的焦耳损耗
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-12-13 DOI: 10.1109/TNANO.2024.3517161
Valeriy A. Slipko;Yuriy V. Pershin
This theoretical study investigates strategies for minimizing Joule losses in resistive random access memory (ReRAM) cells, which are also referred to as memristive devices. Typically, the structure of ReRAM cells involves a nanoscale layer of resistance-switching material sandwiched between two metal electrodes. The basic question that we ask is what is the optimal driving protocol to switch a memristive device from one state to another. In the case of ideal memristors, in the most basic scenario, the optimal protocol is determined by solving a variational problem without constraints with the help of the Euler-Lagrange equation. In the case of memristive systems, for the same situation, the optimal protocol is found using the method of Lagrange multipliers. We demonstrate the advantages of our approaches through specific examples and compare our results with those of switching with constant voltage or current. Our findings suggest that voltage or current control can be used to reduce Joule losses in emerging memory devices.
本理论研究探讨了最小化电阻随机存取存储器(ReRAM)单元焦耳损耗的策略,也被称为记忆器件。通常,ReRAM电池的结构包括一个纳米级的电阻开关材料层,夹在两个金属电极之间。我们要问的基本问题是什么是最优的驱动协议来切换记忆器件从一种状态到另一种。在理想忆阻器的情况下,在最基本的情况下,通过借助欧拉-拉格朗日方程求解无约束的变分问题来确定最优方案。对于记忆系统,在相同的情况下,使用拉格朗日乘子法找到了最优协议。我们通过具体的例子证明了我们的方法的优点,并将我们的结果与恒压或恒流开关的结果进行了比较。我们的研究结果表明,电压或电流控制可用于减少新兴存储器件的焦耳损耗。
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引用次数: 0
Polarization Insensitive Graphene Based Tunable Metasurface Terahertz Dual-Band Absorber 偏振不敏感石墨烯基可调谐超表面太赫兹双频吸收器
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-12-11 DOI: 10.1109/TNANO.2024.3515459
Niten Kumar Panda;Sraddhanjali Mohapatra;Sudhakar Sahu
This article presents an electronically tunable metasurface wideband absorber with a graphene-based unit cell designed for the lower terahertz (0.1 THz– 10 THz) region. Surface plasmonics and the controllable conductance of graphene make it ideal for this purpose. Dual wideband absorption ($ >$90% absorptivity) was observed from 0.682 to 1.798 THz (90% fractional bandwidth) and 4.187 to 4.947 THz (16% fractional bandwidth). The absorber is insensitive to polarizations and oblique incidences up to 45°. The unit cell comprises a double elliptical-cross graphene monolayer on a polyimide substrate (dielectric constant: 3.5, loss tangent: 0.0024) backed by an ultra-thin gold layer. Plasmonic resonance, introduced by four semicircular slots, causes absorption from 4.15 to 4.95 THz. Absorption properties were verified through a transmission line model and finite element method (FEM) simulations. Tunability is investigated via gating potential, carrier relaxation time, and Fermi energy variations.
本文提出了一种电子可调谐的超表面宽带吸收器,其石墨烯基单元电池设计用于较低太赫兹(0.1太赫兹- 10太赫兹)区域。石墨烯的表面等离子体和可控电导使其成为这一目的的理想选择。在0.682 ~ 1.798 THz(90%分数带宽)和4.187 ~ 4.947 THz(16%分数带宽)范围内观察到双宽带吸收($ >$90%吸收率)。吸收器对偏振光和45°以内的斜入射不敏感。该单元电池包括聚酰亚胺衬底(介电常数:3.5,损耗正切:0.0024)上的双椭圆交叉石墨烯单层,背面是超薄金层。等离子体共振由四个半圆槽引入,引起4.15到4.95太赫兹的吸收。通过传输线模型和有限元仿真验证了吸光性能。通过门控电位、载流子弛豫时间和费米能量变化来研究可调性。
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引用次数: 0
Iron-Ion Nanoparticles for Smart and Cost-Effective Energy Storage Cell Electrode Integration Using Novel Nano-Sedimentation Method 新型纳米沉积法用于智能和经济高效储能电池电极集成的铁离子纳米颗粒
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-12-04 DOI: 10.1109/TNANO.2024.3510757
Himanshu Priyadarshi;Ashish Shrivastava;Dhaneshwar Mishra;Kulwant Singh
In this article, a cost-effective technique for the synthesis of gamma iron oxide nanoparticles has been proposed for intelligent maghemite electrode applications pitched in the context of smart and efficient energy storage solution. A facile process-optimized technique for synthesis of gamma iron oxide nanoparticles has been designed in order to investigate the optimum temperature, doping and pH of the sodium hydroxide. By dint of morphological investigation, it has been established that the samples have high surface area, crystalline structure, and size in the range of fifty to hundred angstrom. The linearity of the magnetization feature coupled with its doping sensitivity points towards its usage for state estimation technology of the energy storage device management. The nano-scaled samples witness an increase of 75%–110% in the direct bandgap in comparison to its bulk existence. This band gap modulation establishes that the conductivity can be improved for electrode application by doping. High surface area for the active material ingredient nano-particles has also been confirmed by BET surface area of up to 75 m2/g. Thermal analyses of the samples establish the fidelity of the samples’ constitution over a desirably wide temperature range. The cost-effectiveness of gamma-iron oxide batteries will be a crucial factor for faster adoption of indigenous renewable energy storage solutions.
在本文中,提出了一种具有成本效益的合成γ氧化铁纳米颗粒的技术,用于智能磁铁矿电极的应用,在智能和高效储能解决方案的背景下。为了研究氢氧化钠的最佳温度、掺杂和pH值,设计了一种简便的工艺优化合成纳米氧化铁的工艺。通过形态学研究,已经确定样品具有高表面积,晶体结构和尺寸在50至100埃范围内。磁化特性的线性特性及其掺杂灵敏度使其可用于储能设备管理的状态估计技术。纳米尺度样品的直接带隙比其块状样品的直接带隙增加了75%-110%。这种带隙调制确定了通过掺杂可以改善电极应用的电导率。活性材料成分纳米颗粒的高表面积也被证实,BET表面积可达75 m2/g。样品的热分析在理想的宽温度范围内建立了样品结构的保真度。伽马-氧化铁电池的成本效益将是更快采用本土可再生能源存储解决方案的关键因素。
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引用次数: 0
Ultra-High Quality Factor NOMS Device Incorporating Photonic Crystal Cavity for Femto-Gram Sensing 基于光子晶体腔的飞克传感超高质量因数NOMS器件
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-29 DOI: 10.1109/TNANO.2024.3509444
Saurabh Agarwal;Kurmendra;Chandra Prakash;Sumar Kumar Mitra;Amitesh Kumar
A label-free platform based on integration of cantilever and photonic crystal cavity resonator is reported with both high sensitivity and ultra-high quality factor for femto-gram detection of chemicals. The proposed chemical sensor shows sharp resonant frequency with quality factor of 12800, displacement and wavelength shift is obtained as 29.9425 μm and 7.15625 nm with chemical weight of 100 fg. The proposed sensor shows a high confinement factor of 62%, with an average sensitivity of 1.62 nm/fg manifested its promising applications for detection of various virus present in chemicals. The device shows capability to work in various fluids for chemical sensing purposes.
报道了一种基于悬臂和光子晶体腔谐振腔集成的无标签平台,该平台具有高灵敏度和超高质量因子,可用于化学物质的飞克检测。该传感器谐振频率高,质量因子为12800,位移和波长位移分别为29.9425 μm和7.15625 nm,化学质量为100 fg。该传感器具有62%的高约束因子,平均灵敏度为1.62 nm/fg,在检测化学品中存在的各种病毒方面具有广阔的应用前景。该装置显示出在各种流体中用于化学传感目的的能力。
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引用次数: 0
Analysis of Random Discrete Dopants Embedded Nanowire Resonant Tunnelling Diodes for Generation of Physically Unclonable Functions 嵌入纳米线共振隧道二极管的随机离散掺杂分析及其物理不可克隆功能的产生
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-22 DOI: 10.1109/TNANO.2024.3504963
Pranav Acharya;Ali Rezaei;Amretashis Sengupta;Tapas Dutta;Naveen Kumar;Patryk Maciazek;Asen Asenov;Vihar Georgiev
In this work, we have performed quantum mechanical simulations of current flow in double-barrier III-V (GaAs/AlGaAs) nanowire resonant tunneling diodes (RTDs). Our simulations are based on the non-equilibrium Green's function (NEGF) quantum transport formalism implemented within our in-house simulator called NESS (Nano-Electronics Simulation Software). The NEGF formalism allows us to capture the detailed physical picture of quantum mechanical effects such as electrostatic quantum confinement, resonant tunneling of electrons through barriers in such structures and negative differential resistance. Also, by using NESS capabilities, we have simulated RTDs with Random Discrete Dopants (RDDs) as a source of statistical variability in the device. Our work shows that there is a direct correlation between the positions and the numbers of RDDs and main device output characteristics such as resonant-peak voltage and current (V$_text{r}$ and I$_text{r}$) variations. Such V$_text{r}$ and I$_text{r}$ variability in RTDs is shown to be independent and yet also correlated. Hence, both parameters can be used together to encode information. This provides the opportunity and possibility for using a single or multiple RTDs as Physical Unclonable Functions (PUFs).
在这项工作中,我们对双势垒III-V (GaAs/AlGaAs)纳米线谐振隧道二极管(rtd)中的电流进行了量子力学模拟。我们的模拟基于非平衡格林函数(NEGF)量子输运形式,在我们的内部模拟器NESS(纳米电子模拟软件)中实现。NEGF的形式使我们能够捕捉到量子力学效应的详细物理图像,如静电量子约束、电子穿过这种结构中的势垒的共振隧道和负微分电阻。此外,通过使用NESS功能,我们用随机离散掺杂剂(rdd)模拟rtd,作为设备中统计变异性的来源。我们的工作表明,rdd的位置和数量与主要器件输出特性(如谐振峰值电压和电流(V$_text{r}$和I$_text{r}$)变化之间存在直接相关性。在rtd中,这种V$_text{r}$和I$_text{r}$的变异是独立的,但也是相关的。因此,这两个参数可以一起用于对信息进行编码。这为使用单个或多个rtd作为物理不可克隆功能(puf)提供了机会和可能性。
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引用次数: 0
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IEEE Transactions on Nanotechnology
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