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Enhancing Contrast and Resolution for Electron-Beam Lithography on Insulating Substrates 提高绝缘基板上电子束光刻的对比度和分辨率
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-10-14 DOI: 10.1109/TNANO.2025.3621301
Deepak Kumar;Cooper Meyers;RJ L. Smith;J. Todd Hastings
We report on the effect of ambient gas on the contrast and the resolution of electron beam lithography (EBL) in gaseous environments on insulating substrates. Poly(methyl methacrylate) (PMMA) films were exposed in an environmental scanning electron microscope using a 30 keV electron-beam under 1 mbar pressure of helium, water, nitrogen, and argon. We found that the choice of ambient gas results in significant variations in contrast, and the clearing dose increases with the gases’ molecular weight and proton number, consistent with the increase in scattering cross-section. Significantly higher contrast values are obtained for exposure under helium and are accompanied by improved sensitivity. Despite higher sensitivity, helium exhibited the best resolution with 20-nm half-pitch dense lines and spaces. However, water vapor offered a larger process window, particularly on fused silica substrates. We also provide evidence to support our hypothesis that higher sensitivity stems from effective charge dissipation. Thus, for EBL on insulating substrates, helium and water vapor may be desirable choices for charge dissipation depending on the substrate and process conditions.
本文报道了环境气体对气体环境下电子束光刻(EBL)在绝缘衬底上的对比度和分辨率的影响。聚甲基丙烯酸甲酯(PMMA)薄膜在1mbar压力的氦、水、氮和氩气下,用30 keV电子束在环境扫描电子显微镜下暴露。我们发现,环境气体的选择导致了对比度的显著变化,并且清除剂量随着气体分子量和质子数的增加而增加,这与散射截面的增加相一致。在氦气下曝光获得明显更高的对比度值,并伴随着灵敏度的提高。尽管灵敏度更高,但氦在20 nm的半间距密集线和空间上表现出最好的分辨率。然而,水蒸气提供了更大的处理窗口,特别是在熔融硅基板上。我们还提供了证据来支持我们的假设,即更高的灵敏度源于有效的电荷耗散。因此,对于绝缘衬底上的EBL,根据衬底和工艺条件,氦和水蒸气可能是理想的电荷耗散选择。
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引用次数: 0
Directional Spin Transport in Zigzag GeC Nanoribbons via Edge Engineering: A DFT-NEGF Perspective 基于边缘工程的z形GeC纳米带的定向自旋输运:DFT-NEGF视角
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-10-13 DOI: 10.1109/TNANO.2025.3620755
Varun Sharma;Neha Bhardwaj;Pankaj Srivastava;Banti Yadav
Density functional theory (DFT) and non-equilibrium Green’s function (NEGF) formalism have been employed to investigate the prospects of zigzag germanium carbide nanoribbons (ZGeCNR) for spin filtering applications. We have considered total four possible configurations; firstly, symmetric edge-terminated configurations (H-ZGeCNR-H, 2H-ZGeCNR-2H) and secondly, asymmetric edge-terminated configurations (2H-ZGeCNR-H, H-ZGeCNR-2H). Based on energy calculation, we have predicted that 2H-GeCNR-H exhibits magnetic ground state with preferred ferromagnetic (FM) coupling $Delta$E = 0.137 meV. Calculated spin-polarized $E-k$ diagram and DOS profile calculation for 2H-GeCNR-H configuration implies a unique semi-metallic character for spin-down, whereas spin-up posses a wide bandgap of 2.33eV. This interesting half-metallic (HM) behaviour of compounded group-IV nanomaterials (such as SiC, GeC) are different from group-IV elemental counterparts such as (silicene, germanene), which exhibit bipolar magnetic semiconducting behaviour upon asymmetric termination. To demonstrate the behaviour of 2H-GeCNR-H as a spin-filter, $I-V$ calculations using two probe device model was performed with both parallel (P-case) and antiparallel (AP-case) spin orientation of the electrodes. The recorded values of $I-V$, transmission spectra clearly highlight the presence of only spin-down current in the channel for both P and AP cases, indicating almost 100% spin filtering efficiency. These results warrant 2H-ZGeCNR-H applicability for high-efficiency spin filters.
采用密度泛函理论(DFT)和非平衡格林函数(NEGF)形式分析了锯齿形碳化锗纳米带(ZGeCNR)自旋过滤的应用前景。我们总共考虑了四种可能的配置;第一种是对称端边构型(H-ZGeCNR-H、2H-ZGeCNR-2H),第二种是不对称端边构型(2H-ZGeCNR-H、H-ZGeCNR-2H)。基于能量计算,我们预测了2H-GeCNR-H具有优先铁磁耦合的磁性基态$Delta$E = 0.137 meV。2H-GeCNR-H结构的自旋极化$E-k$图和DOS曲线计算表明,自旋向下具有独特的半金属性质,而自旋向上具有2.33eV的宽带隙。复合第四族纳米材料(如SiC, GeC)的这种有趣的半金属(HM)行为与第四族元素对应物(如硅烯,锗烯)不同,后者在不对称终止时表现出双极磁性半导体行为。为了证明2H-GeCNR-H作为自旋滤波器的行为,使用双探针器件模型对电极的平行(p -情况)和反平行(ap -情况)自旋方向进行了$I-V$计算。在P和AP两种情况下,透射光谱的记录值清楚地表明通道中只存在自旋向下电流,表明自旋滤波效率几乎为100%。这些结果证明2H-ZGeCNR-H适用于高效自旋过滤器。
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引用次数: 0
sETNM: Soft-Error-Tolerant Nonvolatile MRAM for Space Applications 用于空间应用的软容错非易失性MRAM
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-10-02 DOI: 10.1109/TNANO.2025.3617228
Govind Prasad;Sankalp Tattwadarshi Swain
Static random access memory (SRAM) is widely used for its infinite configurability and high performance. However, magnetic RAM (MRAM) is gaining importance in the industry due to its zero leakage, non-volatility, and high radiation reliability. SRAM is susceptible to radiation-induced soft errors, a problem that MRAM mitigates due to its inherent resistance to such errors. Previously, MRAM has been used in various applications, including data storage, but challenges remained in optimizing its design for radiation resilience. In this paper, we have proposed MRAM structure for radiation applications featuring an advanced sense amplifier and precharge circuit. This new MRAM structure provides enhanced radiation hardening with better performance, making it suitable for critical applications in space and other radiation-prone environments.
静态随机存取存储器(SRAM)以其无限可配置性和高性能得到了广泛的应用。然而,磁性RAM (MRAM)由于其零泄漏、无挥发性和高辐射可靠性而在行业中越来越重要。SRAM容易受到辐射引起的软错误的影响,MRAM由于其固有的对这种错误的抵抗力而减轻了这个问题。此前,MRAM已用于各种应用,包括数据存储,但在优化其辐射弹性设计方面仍然存在挑战。在本文中,我们提出了具有先进感测放大器和预充电电路的辐射应用MRAM结构。这种新型MRAM结构提供了更好的性能增强的辐射硬化,使其适用于空间和其他辐射易发环境中的关键应用。
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引用次数: 0
Oblique Angle Deposition of Slanted TiO2 Columnar for UV Photodetector Application 倾斜TiO2柱状物的斜角度沉积在紫外光电探测器中的应用
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-10-01 DOI: 10.1109/TNANO.2025.3616005
Salam Surjit Singh;Naorem Khelchand Singh;Sapam Bikesh;Biraj Shougaijam
With the advancement of optoelectronic technology, a new evaluation of photodetectors’ (PDs’) performance is necessary for next-generation sensing applications. This study uses the e-beam evaporation approach to produce slanted titanium dioxide columnar (TiO2-COL) on the Si substrate, with a constant deposition angle of ∼ 61°. The morphology, structural, and optical properties of the fabricated TiO2-COL samples were examined. Successful growth of the slanted TiO2-COL structure is demonstrated by field emission scanning electron microscopy (FE-SEM). Furthermore, XRD analyses reveal that TiO2-COL has an amorphous nature. Optical characterization reveals that the fabricated sample exhibits high absorption intensity in the UV region, for demonstrating a potential UV photodetector application. The TiO2-COL based PD that was deposited obliquely displayed I-V curves that demonstrated a distinct photovoltaic mode and an extremely low dark current of a few nanoamperes. Moreover, at ∼ 320 nm, the device exhibits a self-powered UV light response with a responsivity value of around ∼ 1.3 mA/W. In addition, this TiO2-COL based photodetector device demonstrates a remarkable detectivity and noise-equivalent-power (NEP) and rise time/fall time of ∼ 4.63 × 1010 Jones, ∼ 6.06 × 10−11 W and ∼ 0.305/0.184 sec, respectively, at −0.1 V. Therefore, this novel idea of a slanted TiO2-COL structure promotes effective light management and offers a reliable route for creating Low-powered UV PDs.
随着光电技术的进步,对光电探测器(pd)的性能进行新的评估是下一代传感应用的必要条件。本研究使用电子束蒸发方法在Si衬底上产生倾斜的二氧化钛柱状(TiO2-COL),其恒定沉积角为~ 61°。研究了制备的TiO2-COL样品的形貌、结构和光学性能。场发射扫描电镜(FE-SEM)证实了TiO2-COL倾斜结构的成功生长。XRD分析表明,TiO2-COL具有非晶态性质。光学表征表明,制备的样品在紫外区具有高的吸收强度,证明了紫外光电探测器的潜在应用。斜沉积的TiO2-COL基PD显示出明显的光伏模式和极低的几纳米安培暗电流的I-V曲线。此外,在~ 320 nm处,该器件表现出自供电的紫外光响应,响应度值约为~ 1.3 mA/W。此外,这种基于TiO2-COL的光电探测器装置在−0.1 V下表现出显著的探测性和噪声等效功率(NEP)和上升/下降时间分别为~ 4.63 × 1010琼斯,~ 6.06 × 10−11 W和~ 0.305/0.184秒。因此,这种倾斜TiO2-COL结构的新想法促进了有效的光管理,并为制造低功率UV pd提供了可靠的途径。
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引用次数: 0
Memristor-Based Circuit Demonstration of Hybrid Gated Recurrent Unit for Edge Computing 边缘计算混合门控循环单元的忆阻电路演示
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-25 DOI: 10.1109/TNANO.2025.3614198
Xiangrong Pu;Haoming Qi;Gang Liu;Zhang Zhang
In industrial IoT and distributed computing environments, edge computing devices empowered by AI have seen increasing deployment in large-scale scenarios, thereby accelerating the demand for time-series data processing. The gated recurrent unit (GRU) outperforms conventional artificial neural networks (ANNs) in tasks such as natural language processing, speech recognition, and machine translation, due to its superior capability in modeling long-range dependencies in sequential data. However, the GRU model is limited by its large parameter count and structural complexity, which presents a bottleneck in hardware circuit implementation. To this end, a memristor-based hybrid gated recurrent unit (HGRU) is proposed, which reduces the parameter count to 67% of the original GRU and shortens the single-step computation latency by 50%, while maintaining complete circuit functionality. Finally, the proposed memristor-based HGRU circuit model is evaluated on the MNIST digit recognition and IMDB sentiment analysis tasks, achieving recognition accuracies of 97% and 86.2%, respectively. Under equivalent parameter settings, it achieves runtime reductions of 37% and 52% compared to the standard GRU, thereby significantly enhancing computational efficiency.
在工业物联网和分布式计算环境中,人工智能支持的边缘计算设备在大规模场景中的部署越来越多,从而加速了对时间序列数据处理的需求。门控循环单元(GRU)在自然语言处理、语音识别和机器翻译等任务中优于传统的人工神经网络(ann),因为它在序列数据的远程依赖关系建模方面具有优越的能力。然而,GRU模型受限于其庞大的参数数量和结构复杂性,这给硬件电路实现带来了瓶颈。为此,提出了一种基于忆阻器的混合门控循环单元(HGRU),在保持完整电路功能的同时,将参数数量减少到原GRU的67%,将单步计算延迟缩短50%。最后,基于记忆电阻的HGRU电路模型在MNIST数字识别和IMDB情感分析任务上进行了评估,识别准确率分别达到97%和86.2%。在同等参数设置下,与标准GRU相比,运行时间分别减少37%和52%,显著提高了计算效率。
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引用次数: 0
An Ultra-Low Power 1.2 pJ/Spike Fully CMOS Spiking Neuron and Its Application 超低功耗1.2 pJ/Spike全CMOS Spike神经元及其应用
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-23 DOI: 10.1109/TNANO.2025.3613362
Prashant Kumar;Rajeev Kumar Ranjan;Sung-Mo Kang
Electronic neurons, such as integrate-and-fire models and memristor synapses, are key components of energy-efficient spiking neural network (SNN) systems. Current silicon-based models face challenges due to high transistor counts, large footprints, and excessive energy consumption. This brief presents a low-transistor count, energy-efficient neuron design. Our spiking signal-generating circuit consumes approximately 1.2 pJ per spike and uses a single capacitor as its only passive element, while occupying a layout area of 66.93 $mathrm{mu }$m × 36.12 $mathrm{mu }$m and operating on a 1 V power supply. We also highlight the driving capability and pattern recognition application of our proposed neuron model.
电子神经元,如集成-放电模型和忆阻突触,是节能尖峰神经网络(SNN)系统的关键组成部分。目前基于硅的模型面临着挑战,由于高晶体管数量,大足迹,和过度的能源消耗。本简报介绍一种低晶体管数、高能效的神经元设计。我们的尖峰信号产生电路每个尖峰消耗约1.2 pJ,并使用单个电容器作为其唯一的无源元件,而占用的布局面积为66.93 $ mathm {mu}$m × 36.12 $ mathm {mu}$m,工作在1v电源上。我们还强调了我们所提出的神经元模型的驱动能力和模式识别应用。
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引用次数: 0
Statistical Investigation of Al$_{2}$O$_{3}$ Insertion Layer on the Endurance of Hf$_{0.5}$Zr$_{0.5}$O$_{2}$ Films: Abrupt Endurance Degradation and Mechanism Al$_{2}$O$_{3}$插入层对Hf$_{0.5}$Zr$_{0.5}$O$_{2}$薄膜耐久性的统计研究:耐久性突然退化及其机理
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-18 DOI: 10.1109/TNANO.2025.3611601
Heng Ye;Xiaomin Lai;Xinzhong Zhu;Jing Liu;Xiaoshan Pan;Yuanlu Xie;Lanlong Ji;Kai Xi;Tiancheng Gong;Yuan Qiu
In this work, the effect of ultrathin Al$_{bm {2}}$O$_{bm {3}}$ insertion layer on the endurance characteristics of Hf$_{bm {0.5}}$Zr$_{bm {0.5}}$O$_{bm {2}}$ (HZO) layer is statistically investigated. It was found that the ultrathin Al$_{bm {2}}$O$_{bm {3}}$ insertion layer will not improve or reduce the endurance of HZO devices within the low operation voltage range. However, an abrupt endurance degradation phenomenon is observed when increasing the operation voltage to a specific value and the endurance of HZO/Al$_{bm {2}}$O$_{bm {3}}$ layer is sharply lower than HZO device. This phenomenon is finally explained by the leakage-current-assist polarization switching mechanism after quantitatively extracting the continuous charge density during the polarization switching by pulse measurement. The findings of this work provide a deep understanding of the endurance failure mechanism of Ferroelectric/Dielectric (FE/DE) devices and are helpful for the reliability investigation of the gate stack in Fe-FET.
本文研究了超薄Al$_{bm {2}}$O$_{bm{3}}$插入层对Hf$_{bm {0.5}}$Zr$_{bm {0.5}}$O$_{bm {2}}$ (HZO)层续航性能的影响。研究发现,超薄Al$_{bm {2}}$O$_{bm{3}}$插入层不会提高或降低HZO器件在低工作电压范围内的续航能力。然而,当工作电压增加到一定值时,HZO/Al$_{bm {2}}$O$_{bm{3}}$层的寿命明显低于HZO器件。通过脉冲测量定量提取极化开关过程中的连续电荷密度,最后用漏电流辅助极化开关机理解释了这一现象。本文的研究结果有助于深入理解铁电/介电(FE/DE)器件的耐久性失效机理,并有助于FE - fet栅极堆的可靠性研究。
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引用次数: 0
Numerical Modeling and Analysis of Photoresponse in Graphene-Based PIN Junction Devices 基于石墨烯的PIN结器件光响应的数值模拟与分析
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-16 DOI: 10.1109/TNANO.2025.3610119
Vinod Sharma;Jinal Kiran Tapar;Oves Badami;Naresh Kumar Emani
This work presents a comprehensive numerical framework for modeling the photoresponse of monolayer graphene-based photodetectors, by solving Poisson’s and current continuity equations self-consistently. The framework accurately captures both electrostatic potential and carrier transport phenomena in graphene-metal junctions and is validated against experimental data. By implementing a PIN junction architecture, a “staircase” potential profile is formed in the device leading to local electric fields on the order of 105 V/cm, significantly enhancing carrier separation and drift current. Our simulation results indicate that the PIN junction yields a 40x increase in responsivity compared to conventional sheet-based graphene devices. This highlights the potential of the PIN junction-based approach for developing advanced, tunable, broadband graphene photodetectors. The developed numerical framework offers a powerful tool for photodetector optimization, enabling systematic exploration of structural parameters and operating conditions.
本工作通过自一致地求解泊松方程和电流连续性方程,提出了一个全面的数值框架来模拟单层石墨烯基光电探测器的光响应。该框架准确地捕获了石墨烯-金属结中的静电势和载流子输运现象,并通过实验数据进行了验证。通过实现PIN结结构,在器件中形成“阶梯”电位分布,导致105v /cm量级的局部电场,显著增强载流子分离和漂移电流。我们的模拟结果表明,与传统的基于薄片的石墨烯器件相比,PIN结的响应率提高了40倍。这突出了基于PIN结的方法在开发先进的、可调谐的宽带石墨烯光电探测器方面的潜力。开发的数值框架为光电探测器优化提供了一个强大的工具,可以系统地探索结构参数和操作条件。
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引用次数: 0
Linear, Non-Linear, and Ferroelectric Behavior in 0–3 Nanoparticle-Polymer Dielectrics of Ba(Ti, MV)O3 (M = Nb, Ta) 0-3纳米粒子- Ba(Ti, MV)O3 (M = Nb, Ta)聚合物介电体的线性、非线性和铁电行为
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-05 DOI: 10.1109/TNANO.2025.3606832
Julien Lombardi;Fariha Reza;Nasim Farahmand;Rajinder Deol;Nitika Batra;Jonathan E. Spanier;Christine K. McGinn;Ioannis Kymissis;Stephen O’Brien
Nanodielectrics based upon nanoscale Ba(Ti, MV)O3, where M = Nb or Ta, were prepared and electrically characterized for their potential use as a high permittivity dielectric layer. Nanocrystals of Ba(Ti, Nb)O3 (BTNO) and Ba(Ti, Ta)O3 (BTTO) of average size 20 nm (range 10–50 nm) with a non-centrosymmetric (polarizable) crystal structure were synthesized, dispersed in alcohol solvents and blended with three polymers of known but differing dielectric and electromechanical behavior: Polyvinylpyrrolidone (PVP), Polyfurfuryl alcohol (PFA) and Polyvinylidene fluoride–trifluoroethylene (PVDF-TrFE). 0–3 nanoparticle-polymer pressed pellets, films and metal-insulator-metal devices were prepared for electrical characterization. Analysis of the Ba(Ti, MV)O3-PVP and Ba(Ti, MV)O3 -PFA composites showed a high effective permittivity, low loss, low leakage and voltage tolerance, demonstrating the capability for high energy density capacitance. Effective permittivity, of 52 (BTNO-PFA) and 42 (BTTO-PFA) for pellet nanocomposites and 32 (BTNO-PVP) and 20 (BTNO-PVP) film nanocomposites were observed at 1 MHz respectively. Voltage breakdown strengths of 2133 V/mm (BTNO) and 833 V/mm (BTTO) were demonstrated respectively (threshold 0.1 μA). Linear and non-linear dielectric behavior was studied by polarization-electric field (P-E) hysteresis measurements. Nanocomposites of BTNO-PVDF-TrFE were prepared to assess the viability of making ferroelectric nanocomposites over a range of polymer-nanoparticle volume fractions.
制备了基于纳米级Ba(Ti, MV)O3的纳米介电体,其中M = Nb或Ta,并对其作为高介电常数介电层的潜在用途进行了电学表征。合成了Ba(Ti, Nb)O3 (BTNO)和Ba(Ti, Ta)O3 (BTTO)纳米晶体,平均尺寸为20 nm(范围10-50 nm),具有非中心对称(可极化)的晶体结构,分散在醇类溶剂中,并与三种已知但介电和机电行为不同的聚合物:聚乙烯吡罗烷酮(PVP)、聚呋喃醇(PFA)和聚偏氟乙烯-三氟乙烯(PVDF-TrFE)混合。制备了0-3纳米颗粒-聚合物压粒、薄膜和金属-绝缘体-金属器件进行电学表征。对Ba(Ti, MV)O3- pvp和Ba(Ti, MV)O3 -PFA复合材料的分析表明,复合材料具有较高的有效介电常数、低损耗、低漏损和耐压性能,具有高能量密度电容的性能。在1 MHz下,颗粒纳米复合材料的有效介电常数分别为52 (BTNO-PFA)和42 (BTTO-PFA),薄膜纳米复合材料的有效介电常数分别为32 (BTNO-PVP)和20 (BTNO-PVP)。电压击穿强度分别为2133 V/mm (BTNO)和833 V/mm (BTTO)(阈值0.1 μA)。通过极化电场(P-E)滞回测量研究了线性和非线性介电行为。制备了BTNO-PVDF-TrFE纳米复合材料,以评估在聚合物纳米颗粒体积分数范围内制备铁电纳米复合材料的可行性。
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引用次数: 0
Oxide-Trapped-Charge-Induced Gate-Diagonal Tunneling Suppression of Gate-Normal Tunnel Field-Effect Transistors 栅极-法向隧道场效应晶体管的氧化俘获电荷诱导栅极-对角隧道抑制
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-02 DOI: 10.1109/TNANO.2025.3605557
Kyung Min Koo;Jae Seung Woo;Woo Young Choi
We analyze the suppression of gate-diagonal tunneling by an oxide-trapped charge in gate-normal tunneling field effect transistors (TFETs). It is observed that the gate-diagonal tunneling occurring ahead of gate-normal tunneling can be alleviated by trapping electrons in the gate insulator over the channel region. Oxide-trapped charges can be generated by process technologies or hot carrier injections. Because the trapped electrons screen the gate voltage effectively and weaken the gate controllability over the gate-diagonal tunneling region, the achieved subthreshold swing and on-current are 27-% lower and 2.89x higher than those of conventional gate-normal TFETs, respectively.
本文分析了在栅极-法向隧道场效应晶体管(tfet)中,氧化捕获电荷对栅极-对角隧道效应的抑制作用。观察到栅极-对角隧穿发生在栅极-正常隧穿之前,可以通过在栅极绝缘体上捕获电子来缓解通道区域上的栅极-对角隧穿。氧化电荷可以通过工艺技术或热载流子注入产生。由于捕获的电子有效地屏蔽了栅极电压,减弱了栅极对角隧穿区域的可控性,实现的亚阈值摆幅和导通电流分别比传统的栅极-正态tfet低27%和高2.89倍。
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引用次数: 0
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IEEE Transactions on Nanotechnology
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