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MXene-based flexible electronic materials for wound infection detection and treatment 用于检测和治疗伤口感染的基于 MXene 的柔性电子材料
IF 14.6 1区 材料科学 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-05-11 DOI: 10.1038/s41528-024-00312-4
Yanling Hu, Fangfang Wang, Hui Ye, Jingai Jiang, Shengke Li, Baoying Dai, Jiahui Li, Jun Yang, Xuejiao Song, Junjie Zhang, Yannan Xie, Li Gao, Dongliang Yang
Wound infection is a worldwide health issue that not only brings large detrimental effects to people’s physical and mental health, but also causes substantial economic burdens to society. By using traditional surgical debridement and antibiotic therapy, patients generally suffer more pain and are at risk of recurring infections. Thus, the development of non-antibiotic treatment methods is desperately needed. Currently, the emerging of flexible wound dressings with physiological signal detection, inactivated infectious pathogen, and wound-healing promoting properties has exhibited immense potential for the treatment of infected wound. Among various dressings, MXene‐based flexible electronic materials as wound dressings with special electroactive, mechanical, photophysical, and biological performances possess a broad application prospect in healthcare. In this review, the challenges of infected wound management are introduced. Next, the types of MXene-based flexible materials and wound infection features are outlined. Then the recent advance of MXene-based flexible materials for infected wound detection and treatment is summarized. Lastly, the predicaments, prospects, and future directions of MXene-based flexible materials for infected wound management are discussed.
伤口感染是一个世界性的健康问题,不仅给人们的身心健康带来极大的危害,也给社会造成了巨大的经济负担。采用传统的手术清创和抗生素治疗,患者一般会承受更多的痛苦,并有反复感染的风险。因此,迫切需要开发非抗生素治疗方法。目前,具有生理信号检测、灭活感染病原体和促进伤口愈合特性的柔性伤口敷料在治疗感染性伤口方面展现出了巨大的潜力。在各种敷料中,基于 MXene 的柔性电子材料作为伤口敷料,具有特殊的电活性、机械、光物理和生物学性能,在医疗保健领域具有广阔的应用前景。本综述首先介绍了感染性伤口管理所面临的挑战。接着,概述了基于 MXene 的柔性材料的类型和伤口感染特征。然后总结了用于感染性伤口检测和治疗的 MXene 基柔性材料的最新进展。最后,讨论了用于感染性伤口处理的 MXene 基柔性材料的困境、前景和未来发展方向。
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引用次数: 0
Synergistic polarization engineering of dielectric towards low-voltage high-mobility solution-processed ultraflexible organic transistors 电介质的协同极化工程,实现低电压高移动性溶液加工超柔性有机晶体管
IF 14.6 1区 材料科学 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-05-10 DOI: 10.1038/s41528-024-00316-0
Mingxin Zhang, Xue Wang, Jing Sun, Yanhong Tong, Cong Zhang, Hongyan Yu, Shanlei Guo, Xiaoli Zhao, Qingxin Tang, Yichun Liu
The emerging wearable skin-like electronics require the ultra-flexible organic transistor to operate at low voltage for electrical safety and energy efficiency and simultaneously enable high field-effect mobility to ensure the carrier migration ability and the switching speed of circuits. However, the currently reported low-voltage organic transistors generally present low mobility, originating from the trade-off between molecular polarity and surface polarity of the dielectrics. In this work, the orientation polarization of the dielectric is enhanced by introducing a flexible quaternary ammonium side chain, and the surface polarity is weakened by the shielding effect of the nonpolar methyl groups on the polar nitrogen atom. The resulting antisolvent QPSU dielectric enables the high-dielectric constant up to 18.8 and the low surface polarity with the polar component of surface energy only at 2.09 mJ/m2. Such a synergistic polarization engineering between orientation polarization and surface polarity makes the solution-processed ultraflexible transistors present the ultralow operational voltage down to −3 V, the ultrahigh charge-carrier mobility up to 8.28 cm2 V−1 s−1 at 1 Hz, excellent cyclic operational stability and long-term air stability. These results combined with the ultrathin thickness of transistor as low as 135 nm, the ultralight mass of 0.5 g/m2, the conformal adherence capability on human skin and 1-μm blade edge, and the strong mechanical robustness with stable electrical properties for 30,000 bending cycles, open up an available strategy to successfully realize low-voltage high-mobility solution-processed organic transistor, and presents the potential application of QPSU dielectric for the next-generation wearable imperceptible skin-like electronics.
新兴的可穿戴类皮肤电子产品要求超柔性有机晶体管在低电压下工作,以确保电气安全和能源效率,同时实现高场效应迁移率,以确保载流子迁移能力和电路开关速度。然而,目前报道的低压有机晶体管普遍存在迁移率低的问题,这源于电介质的分子极性和表面极性之间的权衡。在这项工作中,通过引入柔性季铵侧链,增强了电介质的取向极性,而非极性甲基对极性氮原子的屏蔽作用则削弱了表面极性。由此产生的反溶剂 QPSU 电介质实现了高达 18.8 的高介电常数和低表面极性,表面能的极性分量仅为 2.09 mJ/m2。这种取向极化和表面极性之间的协同极化工程使溶液加工的超柔性晶体管具有低至 -3 V 的超低工作电压、1 Hz 时高达 8.28 cm2 V-1 s-1 的超高电荷载流子迁移率、出色的循环工作稳定性和长期空气稳定性。这些结果与低至 135 nm 的超薄晶体管厚度、0.5 g/m2 的超轻质量、在人体皮肤和 1-μm 叶片边缘上的保形附着能力,以及在 30,000 次弯曲循环中保持稳定电特性的强大机械鲁棒性相结合,为成功实现低电压高迁移率溶液加工有机晶体管开辟了一种可用的策略,并展示了 QPSU 电介质在下一代可穿戴、不易察觉的类肤电子产品中的潜在应用。
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引用次数: 0
Evaporation-induced self-assembled ultrathin AgNW networks for highly conformable wearable electronics 蒸发诱导自组装超薄 AgNW 网络,用于高适配性可穿戴电子设备
IF 14.6 1区 材料科学 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-05-07 DOI: 10.1038/s41528-024-00314-2
Chu Qin, Qingyin Sun, Yu Chen, Shah Fahad, Jiaxin Wu, Yuxuan Dong, Hongyu Yu, Min Wang
The flexibility and stability of transparent electrodes play a crucial role in the growing popularity of flexible devices, especially in potential wearable electronics. To date, various solution-coating techniques have been developed for fabricating silver nanowire (AgNW) flexible bioelectronics. However, achieving the orderly distributed patterns of AgNW without undesirable aggregations still poses a grand challenge. Here, an approach to realize regular patterned ultrathin AgNW networks on a freestanding electrospun PVDF-TrFE frame by evaporation-induced self-assembly is proposed. The patterning mechanism of evaporating AgNW colloidal suspension is investigated from experimental and theoretical analysis. The influence of evaporation-induced flow inside colloidal freestanding membranes on forming regular square hole-shaped arrays, selective deposition of AgNW, and aligning them along the artificial pinning array are addressed. Owing to the orderly arrangement of AgNW networks, the resultant flexible electrode achieves ultrathin thickness (about 5 μm), high optical transmittance (87.8%), and low sheet resistance (8.4 Ω·sq−1) with a relatively low dosage of AgNW (9 μg·cm−2). The electrode exhibits excellent durability during cyclic bending (50,000 times) and stretching (50% strain). The resistance remains virtually unchanged during 200 days in everyday environments. Furthermore, the excellent conformability and breathability of the flexible transparent electrode attached to the human skin demonstrates its potential application as an e-skin sensor. Our findings reliably urge a simple approach to underscore better outcomes with effective patterns by self-assembly of AgNW for highly conformal wearable electronics.
透明电极的柔韧性和稳定性对柔性设备,尤其是潜在的可穿戴电子设备的日益普及起着至关重要的作用。迄今为止,已开发出多种溶液涂层技术用于制造银纳米线(AgNW)柔性生物电子器件。然而,如何实现银纳米线的有序分布而不产生不良聚集仍然是一个巨大的挑战。本文提出了一种通过蒸发诱导自组装在独立电纺 PVDF-TrFE 框架上实现规则图案化超薄 AgNW 网络的方法。通过实验和理论分析,研究了蒸发AgNW胶体悬浮液的图案化机理。探讨了蒸发诱导胶体独立膜内部流动对形成规则方孔阵列、AgNW 选择性沉积以及沿人工针阵列排列的影响。由于 AgNW 网络的有序排列,所得到的柔性电极实现了超薄厚度(约 5 μm)、高透光率(87.8%)和低薄片电阻(8.4 Ω-sq-1),而 AgNW 的用量相对较少(9 μg-cm-2)。该电极在循环弯曲(50,000 次)和拉伸(50% 应变)过程中表现出卓越的耐久性。在日常环境中使用 200 天后,其电阻值几乎保持不变。此外,附着在人体皮肤上的柔性透明电极具有极佳的保形性和透气性,这表明它具有作为电子皮肤传感器的应用潜力。我们的研究结果有力地推动了一种简单的方法,即通过 AgNW 的自组装,以有效的模式为高度保形的可穿戴电子产品强调更好的结果。
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引用次数: 0
On non-von Neumann flexible neuromorphic vision sensors 关于非冯诺依曼柔性神经形态视觉传感器
IF 14.6 1区 材料科学 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-05-07 DOI: 10.1038/s41528-024-00313-3
Hao Wang, Bin Sun, Shuzhi Sam Ge, Jie Su, Ming Liang Jin
The structure and mechanism of the human visual system contain rich treasures, and surprising effects can be achieved by simulating the human visual system. In this article, starting from the human visual system, we compare and discuss the discrepancies between the human visual system and traditional machine vision systems. Given the wide variety and large volume of visual information, the use of non-von Neumann structured, flexible neuromorphic vision sensors can effectively compensate for the limitations of traditional machine vision systems based on the von Neumann architecture. Firstly, this article addresses the emulation of retinal functionality and provides an overview of the principles and circuit implementation methods of non-von Neumann computing architectures. Secondly, in terms of mimicking the retinal surface structure, this article introduces the fabrication approach for flexible sensor arrays. Finally, this article analyzes the challenges currently faced by non-von Neumann flexible neuromorphic vision sensors and offers a perspective on their future development.
人类视觉系统的结构和机理蕴含着丰富的宝藏,模拟人类视觉系统可以获得令人惊喜的效果。本文从人类视觉系统出发,比较和讨论了人类视觉系统与传统机器视觉系统之间的差异。鉴于视觉信息种类繁多、数量庞大,使用非冯-诺依曼结构、灵活的神经形态视觉传感器可以有效弥补基于冯-诺依曼架构的传统机器视觉系统的局限性。首先,本文针对视网膜功能的仿真,概述了非冯-诺依曼计算架构的原理和电路实现方法。其次,在模拟视网膜表面结构方面,本文介绍了柔性传感器阵列的制造方法。最后,本文分析了非冯诺依曼柔性神经形态视觉传感器目前面临的挑战,并对其未来发展提出了展望。
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引用次数: 0
Ultrasensitive textile strain sensors redefine wearable silent speech interfaces with high machine learning efficiency 超灵敏织物应变传感器重新定义了可穿戴式无声语音接口,具有极高的机器学习效率
IF 14.6 1区 材料科学 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-05-07 DOI: 10.1038/s41528-024-00315-1
Chenyu Tang, Muzi Xu, Wentian Yi, Zibo Zhang, Edoardo Occhipinti, Chaoqun Dong, Dafydd Ravenscroft, Sung-Min Jung, Sanghyo Lee, Shuo Gao, Jong Min Kim, Luigi Giuseppe Occhipinti
This work introduces a silent speech interface (SSI), proposing a few-layer graphene (FLG) strain sensing mechanism based on thorough cracks and AI-based self-adaptation capabilities that overcome the limitations of state-of-the-art technologies by simultaneously achieving high accuracy, high computational efficiency, and fast decoding speed while maintaining excellent user comfort. We demonstrate its application in a biocompatible textile-integrated ultrasensitive strain sensor embedded into a smart choker, which conforms to the user’s throat. Thanks to the structure of ordered through cracks in the graphene-coated textile, the proposed strain gauge achieves a gauge factor of 317 with <5% strain, corresponding to a 420% improvement over existing textile strain sensors fabricated by printing and coating technologies reported to date. Its high sensitivity allows it to capture subtle throat movements, simplifying signal processing and enabling the use of a computationally efficient neural network. The resulting neural network, based on a one-dimensional convolutional model, reduces computational load by 90% while maintaining a remarkable 95.25% accuracy in speech decoding. The synergy in sensor design and neural network optimization offers a promising solution for practical, wearable SSI systems, paving the way for seamless, natural silent communication in diverse settings.
这项工作介绍了一种无声语音接口(SSI),提出了一种基于彻底裂纹和基于人工智能的自适应能力的几层石墨烯(FLG)应变传感机制,克服了最先进技术的局限性,同时实现了高精度、高计算效率和快速解码速度,并保持了极佳的用户舒适度。我们展示了其在生物兼容纺织品集成超灵敏应变传感器中的应用,该传感器被嵌入到一个智能颈圈中,与用户的喉咙相适应。由于石墨烯涂层纺织品中的有序裂缝结构,所提出的应变计在<5%应变下的测量系数达到了317,与迄今为止报道的通过印刷和涂层技术制造的现有纺织品应变传感器相比,提高了420%。它的高灵敏度使其能够捕捉到细微的喉部运动,简化了信号处理,并能够使用计算效率高的神经网络。由此产生的神经网络以一维卷积模型为基础,将计算负荷减少了 90%,同时在语音解码方面保持了 95.25% 的出色准确率。传感器设计和神经网络优化的协同作用为实用的可穿戴式 SSI 系统提供了一种前景广阔的解决方案,为在各种环境中进行无缝、自然的无声交流铺平了道路。
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引用次数: 0
Active electronic skin: an interface towards ambient haptic feedback on physical surfaces 有源电子皮肤:实现物理表面环境触觉反馈的界面
IF 14.6 1区 材料科学 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-05-02 DOI: 10.1038/s41528-024-00311-5
Yuan Guo, Yun Wang, Qianqian Tong, Boxue Shan, Liwen He, Yuru Zhang, Dangxiao Wang
In the era of ubiquitous computing with flourished visual displays in our surroundings, the application of haptic feedback technology still remains in its infancy. Bridging the gap between haptic technology and the real world to enable ambient haptic feedback on various physical surfaces is a grand challenge in the field of human-computer interaction. This paper presents the concept of an active electronic skin, characterized by three features: richness (multi-modal haptic stimuli), interactivity (bi-directional sensing and actuation capabilities), and invisibility (transparent, ultra-thin, flexible, and stretchable). By deploying this skin on physical surfaces, dynamic and versatile multi-modal haptic display, as well as tactile sensing, can be achieved. The potential applications of this skin include two categories: skin for the physical world (such as intelligent home, intelligent car, and intelligent museum), and skin for the digital world (such as haptic screen, wearable device, and bare-hand device). Furthermore, existing skin-based haptic display technologies including texture, thermal, and vibrotactile feedback are surveyed, as well as multidimensional tactile sensing techniques. By analyzing the gaps between current technologies and the goal of ambient haptics, future research topics are proposed, encompassing fundamental theoretical research on the physiological and psychological perception mechanisms of human skin, spatial-temporal registration among multimodal haptic stimuli, integration between sensing and actuation, and spatial-temporal registration between visual and haptic display. This concept of active electronic skin is promising for advancing the field of ambient haptics, enabling seamless integration of touch into our digital and physical surroundings.
在无处不在的计算时代,我们周围的视觉显示已经非常发达,但触觉反馈技术的应用仍处于起步阶段。如何弥合触觉技术与现实世界之间的差距,在各种物理表面上实现环境触觉反馈,是人机交互领域的一大挑战。本文提出了有源电子皮肤的概念,它具有三个特点:丰富性(多模态触觉刺激)、交互性(双向传感和执行能力)和隐蔽性(透明、超薄、柔韧和可伸缩)。通过在物理表面部署这种皮肤,可以实现动态和多功能的多模态触觉显示以及触觉传感。这种皮肤的潜在应用包括两类:物理世界的皮肤(如智能家居、智能汽车和智能博物馆)和数字世界的皮肤(如触觉屏幕、可穿戴设备和裸手设备)。此外,还调查了现有的基于皮肤的触觉显示技术,包括纹理、热和振动反馈,以及多维触觉传感技术。通过分析现有技术与环境触觉目标之间的差距,提出了未来的研究课题,包括人类皮肤生理和心理感知机制的基础理论研究、多模态触觉刺激之间的时空注册、传感与执行之间的整合,以及视觉与触觉显示之间的时空注册。这种有源电子皮肤概念有望推动环境触觉领域的发展,使触觉与我们的数字和物理环境无缝融合。
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引用次数: 0
Stroke-volume-allocation model enabling wearable sensors for vascular age and cardiovascular disease assessment 卒中量分配模型使可穿戴传感器用于血管年龄和心血管疾病评估
IF 14.6 1区 材料科学 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-04-16 DOI: 10.1038/s41528-024-00307-1
Shirong Qiu, Bryan P. Y. Yan, Ni Zhao
Frequent and unobtrusive monitoring of cardiovascular conditions with consumer electronics is a widely pursued goal, since it provides the most economic and effective way of preventing and managing cardiovascular diseases (CVDs) ─ the leading causes of death worldwide. However, most current wearable and flexible devices can only support the measurement of one or two types of vital signs, such as heart rate and blood oxygen level, due to the lack of physiological models to link the measured signals to cardiovascular conditions. Here, we report a stroke-volume allocation (SVA) model to quantify the cushioning function of arteries and empower nearly all existing cardiac sensors with new functions, including arterial stiffness evaluation, dynamic blood pressure tracking and classification of CVD-related heart damage. Large-scale clinical data testing involving a hybrid dataset taken from 6 hospitals/research institutes (9 open databases and 4 self-built databases from 878 subjects in total) and diverse measurement approaches was carried out to validate the SVA model. The results show that the SVA-based parameters correlate well with the gold-standard measurements in arterial stiffness and blood pressure and outperform the commonly used vital sign (e.g., blood pressure) alone in detecting abnormalities in cardiovascular systems.
利用消费类电子产品对心血管状况进行频繁而不显眼的监测是人们普遍追求的目标,因为它是预防和控制心血管疾病(CVDs)--全球主要死亡原因--的最经济、最有效的方法。然而,由于缺乏将测量信号与心血管状况联系起来的生理模型,目前大多数可穿戴设备和柔性设备只能支持心率和血氧水平等一两种生命体征的测量。在此,我们报告了一种卒中量分配(SVA)模型,该模型可量化动脉的缓冲功能,并赋予几乎所有现有心脏传感器新的功能,包括动脉僵化评估、动态血压跟踪和心血管疾病相关心脏损伤分类。为了验证 SVA 模型,我们进行了大规模临床数据测试,其中包括来自 6 家医院/研究机构的混合数据集(9 个开放数据库和 4 个自建数据库,共计 878 名受试者)以及不同的测量方法。结果表明,基于 SVA 的参数与动脉僵化和血压的黄金标准测量值具有良好的相关性,在检测心血管系统异常方面优于常用的单独生命体征(如血压)。
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引用次数: 0
Kirigami-inspired, three-dimensional piezoelectric pressure sensors assembled by compressive buckling 受桐木启发、通过压缩屈曲组装的三维压电压力传感器
IF 14.6 1区 材料科学 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-04-11 DOI: 10.1038/s41528-024-00310-6
Yi Zhang, Changbo Liu, Ben Jia, Dongqin Ma, Xuecheng Tian, Yuanyuan Cui, Yuan Deng
Piezoelectric sensors whose sensing performances can be flexibly regulated hold significant promise for efficient signal-acquisition applications in the healthcare field. The existing methods for regulating the properties of polyvinylidene fluoride (PVDF) films mainly include material modification and structural design. Compared to material modification, which has a long test period and an unstable preparation process, structural design is a more efficient method. The irigami structure combined with compressive buckling can endow the flexible film with rich macrostructural features. Here, a method is fabricated to modulate the sensing performance by employing distinct 3D structures and encapsulation materials with varying Young’s moduli. The relationship among the aspect ratio (α), pattern factor (η), elastic modulus of encapsulation materials, and equivalent stiffness is obtained by finite element simulation, which provides theoretical guidance for the design of the 2D precursor and the selection of encapsulation materials. In the demonstration applications, the sensor accurately captures pulse waveforms in multiple parts of the human body and is employed for the pressure monitoring of different parts of the sole under various posture states. This method of structure design is efficient, and the preparation process is convenient, providing a strategy for the performance control of piezoelectric pressure sensors.
传感性能可灵活调节的压电传感器在医疗保健领域的高效信号采集应用中大有可为。调节聚偏二氟乙烯(PVDF)薄膜性能的现有方法主要包括材料改性和结构设计。与测试周期长、制备过程不稳定的材料改性相比,结构设计是一种更为有效的方法。虹膜结构与压缩屈曲相结合,可以赋予柔性薄膜丰富的宏观结构特征。在此,我们采用不同的三维结构和不同杨氏模量的封装材料,制作了一种调节传感性能的方法。通过有限元模拟获得了长宽比 (α)、图案系数 (η)、封装材料弹性模量和等效刚度之间的关系,为二维前驱体的设计和封装材料的选择提供了理论指导。在示范应用中,该传感器能准确捕捉人体多个部位的脉搏波形,用于监测各种姿势状态下脚底不同部位的压力。这种结构设计方法效率高,制备过程方便,为压电压力传感器的性能控制提供了一种策略。
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引用次数: 0
Wireless pressure monitoring system utilizing a 3D-printed Origami pressure sensor array 利用 3D 打印折纸压力传感器阵列的无线压力监测系统
IF 14.6 1区 材料科学 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-04-03 DOI: 10.1038/s41528-024-00309-z
Hadi Moeinnia, Danielle Jaye Agron, Carl Ganzert, Loren Schubert, Woo Soo Kim
We present here a 3D-printed pressure mapping mat, equipped with customizable architecture sensors, that offers a cost-effective and adaptable solution, overcoming the size constraints and sensing accuracy issues commonly associated with existing commercial pressure mats across various fields, such as healthcare and sports applications. Leveraging a pillar-origami structure, the demonstrated sensor offers multifaceted stiffness properties, effectively filtering skin deformations and enabling capacitive pressure sensing. Notably, the sensor’s detection range can be finely tuned, spanning from 70 to 2500 kPa, with a sensitivity range between 0.01 kPa-1 and 0.0002 kPa-1, and an impressive response time of just 800 milliseconds. Furthermore, the inclusion of a modular sensor array enhances maintenance and allows for greater flexibility in shaping and enhancing the device’s resolution. This technology finds practical applications in wireless foot pressure mapping and sports protection pads, marking a significant milestone in the advancement of flexible and custom-shaped pressure sensor technology.
我们在此介绍一种三维打印压力绘图垫,它配备了可定制的结构传感器,提供了一种具有成本效益和适应性的解决方案,克服了现有商业压力垫在医疗保健和体育应用等各个领域普遍存在的尺寸限制和传感精度问题。利用支柱原形结构,所展示的传感器具有多方面的刚度特性,可有效过滤皮肤变形,实现电容式压力传感。值得注意的是,该传感器的检测范围可以微调,从 70 千帕到 2500 千帕不等,灵敏度在 0.01 千帕-1 和 0.0002 千帕-1 之间,响应时间仅为 800 毫秒,令人印象深刻。此外,模块化传感器阵列的加入增强了维护性,并能更灵活地塑造和增强设备的分辨率。这项技术可实际应用于无线脚压绘图和运动保护垫,是灵活和定制形状压力传感器技术发展的一个重要里程碑。
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引用次数: 0
Water-based direct photopatterning of stretchable PEDOT:PSS using amphiphilic block copolymers 使用两亲性嵌段共聚物对可拉伸 PEDOT:PSS 进行水基直接光图案化
IF 14.6 1区 材料科学 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-04-03 DOI: 10.1038/s41528-024-00308-0
Soon Joo Yoon, Jeongdae Ha, Hyeokjun Lee, Jin Tae Park, Bin Hyung Lee, Kyung-In Jang, Anna Yang, Yoon Kyeung Lee
The use of water-based chemistry in photolithography during semiconductor fabrication is desirable due to its cost-effectiveness and minimal environmental impact, especially considering the large scale of semiconductor production. Despite these benefits, limited research has reported successful demonstrations of water-based photopatterning, particularly for intrinsically water-soluble materials such as Poly(3,4-ethylenedioxythiophene):poly(styrene sulfonate) (PEDOT:PSS) due to significant challenges in achieving selective dissolution during the developing process. In this paper, we propose a method for the direct patterning of PEDOT:PSS in water by introducing an amphiphilic Poly(ethylene glycol)-block-poly(propylene glycol)-block-poly(ethylene glycol) (PEO-PPO-PEO, P123) block copolymer to the PEDOT:PSS film. The addition of the block copolymer enhances the stretchability of the composite film and reduces the hydrophilicity of the film surface, allowing for water absorption only after UV exposure through a photoinitiated reaction with benzophenone. We apply this technique to fabricate tactile and wearable biosensors, both of which benefit from the mechanical stretchability and transparency of PEDOT:PSS. Our method represents a promising solution for water-based photopatterning of hydrophilic materials, with potential for wider applications in semiconductor fabrication.
在半导体制造过程中使用水基化学光刻技术具有成本效益高、对环境影响小等优点,特别是考虑到半导体生产的大规模化,因此是非常理想的。尽管有这些优点,但由于在显影过程中实现选择性溶解的重大挑战,成功演示水基光刻的研究有限,特别是对于聚(3,4-亚乙二氧基噻吩):聚(苯乙烯磺酸)(PEDOT:PSS)等内在水溶性材料。在本文中,我们提出了一种在 PEDOT:PSS 薄膜中引入两亲性聚(乙二醇)-嵌段-聚(丙二醇)-嵌段-聚(乙二醇)(PEO-PPO-PEO,P123)嵌段共聚物,从而在水中直接图案化 PEDOT:PSS 的方法。嵌段共聚物的加入增强了复合薄膜的拉伸性,并降低了薄膜表面的亲水性,只有在紫外线照射下与二苯甲酮发生光引发反应后才能吸水。我们将这种技术应用于制造触觉和可穿戴生物传感器,这两种传感器都受益于 PEDOT:PSS 的机械伸展性和透明度。我们的方法为亲水性材料的水基光图案化提供了一种前景广阔的解决方案,有望在半导体制造领域得到更广泛的应用。
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引用次数: 0
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