Pub Date : 2013-09-12DOI: 10.1109/OMN.2013.6659107
M. Wapler, J. Brunne, U. Wallrabe
We present a new type of tunable mirror with sharply-featured freeform displacement profiles, large displacements of several 100μm and high operating frequencies close to the kHz range at 15mm diameter. The actuation principle is based on a recently explored “topological” displacement mode of piezo sheets. The prototypes presented here include a rotationally symmetric axicon, a hyperbolic sech-icon and a non-symmetric pyram-icon and are scalable to smaller dimensions. The fabrication process is economic and cleanroom-free, and the optical quality is sufficient to demonstrate the diffraction patterns of the optical elements.
{"title":"Freeform high-speed large-amplitude deformable piezo mirrors","authors":"M. Wapler, J. Brunne, U. Wallrabe","doi":"10.1109/OMN.2013.6659107","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659107","url":null,"abstract":"We present a new type of tunable mirror with sharply-featured freeform displacement profiles, large displacements of several 100μm and high operating frequencies close to the kHz range at 15mm diameter. The actuation principle is based on a recently explored “topological” displacement mode of piezo sheets. The prototypes presented here include a rotationally symmetric axicon, a hyperbolic sech-icon and a non-symmetric pyram-icon and are scalable to smaller dimensions. The fabrication process is economic and cleanroom-free, and the optical quality is sufficient to demonstrate the diffraction patterns of the optical elements.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-09-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77311817","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/OMN.2013.6659091
M. Motosuke, Hideharu Kotari
This study investigates a potential of the optical scattering force as a practical particle sorting technology in a lab-on-a-chip platform. To avoid a tiny focused spot resulting in severe damage or heat generation in a polymer device, a 2D-focused irradiation with relatively low energy density to ensure the net retention distance was utilized. A SU-8 layer was used for a channel structure and planar waveguide for NIR laser beam. Our experimental results showed the effective particle transportation in the polymer chip instead of the irradiation of 2W beam that could easily damage the chip with the normally focused condition.
{"title":"Colloidal particle sorting with scattering force via planar waveguide","authors":"M. Motosuke, Hideharu Kotari","doi":"10.1109/OMN.2013.6659091","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659091","url":null,"abstract":"This study investigates a potential of the optical scattering force as a practical particle sorting technology in a lab-on-a-chip platform. To avoid a tiny focused spot resulting in severe damage or heat generation in a polymer device, a 2D-focused irradiation with relatively low energy density to ensure the net retention distance was utilized. A SU-8 layer was used for a channel structure and planar waveguide for NIR laser beam. Our experimental results showed the effective particle transportation in the polymer chip instead of the irradiation of 2W beam that could easily damage the chip with the normally focused condition.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74353244","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/OMN.2013.6659087
T. Takeshita, Takuma Iwasaki, E. Higurashi, Tatsuya Miyazaki, R. Sawada
Using nano-imprint technology we have developed a rotary diffraction grating scale, which is used for micro rotary encoding. The off-center error between the center of the trough-hole for a rotational axis and the center of the high-precision micro-pattern on the periphery of the scale is less than 3 μm because we are able to shape the through-hole and the grating pattern simultaneously. The use of nano-imprinting is epoch-making, in view of the traditionally poor centering precision of grating scale through-holes fabricated using the conventional photolithography coupled with machining of the through-hole.
{"title":"Application of nano-imprint technology to grating scale for a rotary microencoder","authors":"T. Takeshita, Takuma Iwasaki, E. Higurashi, Tatsuya Miyazaki, R. Sawada","doi":"10.1109/OMN.2013.6659087","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659087","url":null,"abstract":"Using nano-imprint technology we have developed a rotary diffraction grating scale, which is used for micro rotary encoding. The off-center error between the center of the trough-hole for a rotational axis and the center of the high-precision micro-pattern on the periphery of the scale is less than 3 μm because we are able to shape the through-hole and the grating pattern simultaneously. The use of nano-imprinting is epoch-making, in view of the traditionally poor centering precision of grating scale through-holes fabricated using the conventional photolithography coupled with machining of the through-hole.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79669609","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/OMN.2013.6659103
Minhee Kang, K. Jeong
This work report the modified Plasmon Ruler equation for quasi-ordered nanoislands using deformable nanoplasmonic membrane that able to modulate interstitial gap between neighboring nanoislands. Depending on interstitial gap, the plasmon resonance wavelength shift was achieved by averaging the plasmon resonance shift of individual nanoislands that reflects the size distribution of nanoislands. This distance dependence of plasmon coupling in quasi-ordered nanoislands provides a useful guideline to expect the plasmon resonance wavelength for surface-enhanced Raman scattering (SERS).
{"title":"A modified Plasmon Ruler equation for quasi-ordered plasmonic nanoislands","authors":"Minhee Kang, K. Jeong","doi":"10.1109/OMN.2013.6659103","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659103","url":null,"abstract":"This work report the modified Plasmon Ruler equation for quasi-ordered nanoislands using deformable nanoplasmonic membrane that able to modulate interstitial gap between neighboring nanoislands. Depending on interstitial gap, the plasmon resonance wavelength shift was achieved by averaging the plasmon resonance shift of individual nanoislands that reflects the size distribution of nanoislands. This distance dependence of plasmon coupling in quasi-ordered nanoislands provides a useful guideline to expect the plasmon resonance wavelength for surface-enhanced Raman scattering (SERS).","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78955497","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/OMN.2013.6659059
S. Ogawa, Junya Komoda, K. Masuda, Yousuke Takagawa, M. Kimata
A wavelength selective uncooled infrared (IR) sensor was developed using triangular-lattice plasmonic absorbers (PLA). The triangular-lattice PLA has a Au-based two-dimensional periodic dimple-array with a triangular lattice, where photons can be manipulated using the spoof surface plasmon. A microelectromechanical system (MEMS)-based uncooled IR sensor with triangular-lattice PLA was fabricated using complementary metal oxide semiconductor (CMOS) and micromachining techniques. Measurement of the spectral responsivity demonstrated that selective enhancement of the responsivity can be achieved and that the detection wavelength of the triangular-lattice PLA was shorter than that of the square-lattice PLA due to the differences in lattice structure.
{"title":"Wavelength selective uncooled infrared sensor using triangular-lattice plasmonic absorbers","authors":"S. Ogawa, Junya Komoda, K. Masuda, Yousuke Takagawa, M. Kimata","doi":"10.1109/OMN.2013.6659059","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659059","url":null,"abstract":"A wavelength selective uncooled infrared (IR) sensor was developed using triangular-lattice plasmonic absorbers (PLA). The triangular-lattice PLA has a Au-based two-dimensional periodic dimple-array with a triangular lattice, where photons can be manipulated using the spoof surface plasmon. A microelectromechanical system (MEMS)-based uncooled IR sensor with triangular-lattice PLA was fabricated using complementary metal oxide semiconductor (CMOS) and micromachining techniques. Measurement of the spectral responsivity demonstrated that selective enhancement of the responsivity can be achieved and that the detection wavelength of the triangular-lattice PLA was shorter than that of the square-lattice PLA due to the differences in lattice structure.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90653522","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/OMN.2013.6659106
Joo-Young Jin, S. Yoo, Jaeseok Bae, Yong-Kweon Kim
This research proposes a silicon rim for an optically flat mirror and a vertical comb actuator in a silicon nitride (SiN) microscanner. A wafer-level vacuum packaging was also successfully implemented for large angular deflections with low driving voltage. Radius of curvature (ROC) of a SiN mirror of 1 μm-thickness and 1 mm-diameter was measured to be 0.357 m. Optical experiment showed optical tilt angle of 22° at driving voltage of 53 Vrms and resonant frequency of 14.8 kHz, respectively.
{"title":"Silicon-rim-reinforced silicon nitride microscanner with vertical comb actuator and wafer-level vacuum packaging","authors":"Joo-Young Jin, S. Yoo, Jaeseok Bae, Yong-Kweon Kim","doi":"10.1109/OMN.2013.6659106","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659106","url":null,"abstract":"This research proposes a silicon rim for an optically flat mirror and a vertical comb actuator in a silicon nitride (SiN) microscanner. A wafer-level vacuum packaging was also successfully implemented for large angular deflections with low driving voltage. Radius of curvature (ROC) of a SiN mirror of 1 μm-thickness and 1 mm-diameter was measured to be 0.357 m. Optical experiment showed optical tilt angle of 22° at driving voltage of 53 Vrms and resonant frequency of 14.8 kHz, respectively.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84012996","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1541/IEEJSMAS.134.253
Takashi Sasaki, Daiki Sato, K. Hane
We describe a displacement-amplified dynamic varifocal mirror using mechanical resonance. An electrostatically actuated varifocal mirror was fabricated from single crystalline silicon. The diameter and thickness of the mirror were 1 mm and 2 μm, respectively. The estimated ratio of the dynamic to the static displacement was about 50 in the vacuum range from 2 Pa to 50 Pa at the resonance. The laser beam focusing was also demonstrated using the varifocal mirror under the resonance operation.
{"title":"Displacement-amplified dynamic varifocal mirror using mechanical resonance","authors":"Takashi Sasaki, Daiki Sato, K. Hane","doi":"10.1541/IEEJSMAS.134.253","DOIUrl":"https://doi.org/10.1541/IEEJSMAS.134.253","url":null,"abstract":"We describe a displacement-amplified dynamic varifocal mirror using mechanical resonance. An electrostatically actuated varifocal mirror was fabricated from single crystalline silicon. The diameter and thickness of the mirror were 1 mm and 2 μm, respectively. The estimated ratio of the dynamic to the static displacement was about 50 in the vacuum range from 2 Pa to 50 Pa at the resonance. The laser beam focusing was also demonstrated using the varifocal mirror under the resonance operation.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75602534","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/OMN.2013.6659115
F. Tian, Guangya Zhou, Y. Du, F. Chau
An approach to experimentally measure the optomechanical coupling coefficients of the coupled cavities is developed, which is based on the ultra-fine positioning capability of nanoelectromechanical system (NEMS) actuators. In addition, with the same nanophotonic device, we report a novel NEMS approach to control the optical bistability in the double-coupled photonic crystal cavities. In this approach, the gap spacing between two coupled cavities is scanned by the NEMS actuator. Hysteresis loops characterizing the optical bistability are experimentally observed.
{"title":"Applications of nanoelectromechanical actuators in nano optomechanics","authors":"F. Tian, Guangya Zhou, Y. Du, F. Chau","doi":"10.1109/OMN.2013.6659115","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659115","url":null,"abstract":"An approach to experimentally measure the optomechanical coupling coefficients of the coupled cavities is developed, which is based on the ultra-fine positioning capability of nanoelectromechanical system (NEMS) actuators. In addition, with the same nanophotonic device, we report a novel NEMS approach to control the optical bistability in the double-coupled photonic crystal cavities. In this approach, the gap spacing between two coupled cavities is scanned by the NEMS actuator. Hysteresis loops characterizing the optical bistability are experimentally observed.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77017211","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/OMN.2013.6659097
Kuang-Li Lee, Jhih-Bin Huang, Shuhan Wu, P. Wei
Nanostructure-based sensors are capable of sensitive and label-free detection for biomedical applications. However, plasmonic sensors capable of multiplexed highly sensitive detection with high-throughput and low-cost fabrication techniques are desirable. Here, we utilize a thermal-annealed template-stripping method to fabricate large-area double-layer gold nanostructures on polymer films with low cost and high SPR sensitivities. We found that a transverse magnetic-polarized wave in these gold nanostructures generated sharp and asymmetric Fano resonances in transmission spectra. The full width at half-maximum bandwidth was 3.84 nm and the wavelength sensitivity was 560 nm/RIU. In addition, it has a higher intensity sensitivity up to 44381 %/RIU.
{"title":"Ultrasensitive biosensors using Fano resonances in double-layer gold nanostructures","authors":"Kuang-Li Lee, Jhih-Bin Huang, Shuhan Wu, P. Wei","doi":"10.1109/OMN.2013.6659097","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659097","url":null,"abstract":"Nanostructure-based sensors are capable of sensitive and label-free detection for biomedical applications. However, plasmonic sensors capable of multiplexed highly sensitive detection with high-throughput and low-cost fabrication techniques are desirable. Here, we utilize a thermal-annealed template-stripping method to fabricate large-area double-layer gold nanostructures on polymer films with low cost and high SPR sensitivities. We found that a transverse magnetic-polarized wave in these gold nanostructures generated sharp and asymmetric Fano resonances in transmission spectra. The full width at half-maximum bandwidth was 3.84 nm and the wavelength sensitivity was 560 nm/RIU. In addition, it has a higher intensity sensitivity up to 44381 %/RIU.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81130811","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/OMN.2013.6659077
T. Abaya, M. Diwekar, S. Blair, P. Tathireddy, L. Rieth, F. Solzbacher
Optical neural control requires light delivery techniques dependent on the experimental goal and biological model. Several light sources and neural interfaces have been implemented featuring one or more of the following criteria: deep illumination, specific and/or comprehensive access, spectral control, temporal precision, high resolution patterning. We've developed 3D needle-type waveguide arrays as potentially compact neural interfaces for light transmission of as much as 90% of input light to depths >1mm in tissue; various experimental paradigms are easily accommodated as the arrays can be modified to project different illumination volumes at defined depths, wavelengths and patterns.
{"title":"Implantable devices for optical neural interfaces","authors":"T. Abaya, M. Diwekar, S. Blair, P. Tathireddy, L. Rieth, F. Solzbacher","doi":"10.1109/OMN.2013.6659077","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659077","url":null,"abstract":"Optical neural control requires light delivery techniques dependent on the experimental goal and biological model. Several light sources and neural interfaces have been implemented featuring one or more of the following criteria: deep illumination, specific and/or comprehensive access, spectral control, temporal precision, high resolution patterning. We've developed 3D needle-type waveguide arrays as potentially compact neural interfaces for light transmission of as much as 90% of input light to depths >1mm in tissue; various experimental paradigms are easily accommodated as the arrays can be modified to project different illumination volumes at defined depths, wavelengths and patterns.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75819755","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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