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2018 IEEE 68th Electronic Components and Technology Conference (ECTC)最新文献

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Wide-Range 2D InP Chip-to-Fiber Alignment Through Bimorph Piezoelectric Actuators 通过双晶片压电驱动器的宽范围二维InP芯片到光纤校准
Pub Date : 2018-08-07 DOI: 10.1109/ECTC.2018.00172
S. Cardarelli, N. Calabretta, R. Stabile, K. Williams, Xiao Luo, J. Mink
A method to relax opto-electronic packaging tolerances is proposed and demonstrated using a low-power, bimorph, piezo-electric alignment system capable of compensating the misalignment between an InP waveguide and a lensed optical fiber in a 100 µm2 misalignment range. This is expected to enable the use of relaxed tolerance pick and place tools.
提出并演示了一种放松光电封装公差的方法,该方法使用低功耗、双晶圆、压电校准系统,该系统能够在100 μ m2的误差范围内补偿InP波导和透镜光纤之间的误差。这有望使使用宽松公差的拾取和放置工具。
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引用次数: 3
Accurate Core Alignment for Polymer Optical Waveguide in the Mosquito Method for High-Efficient Coupling 基于蚊子法的聚合物光波导精确芯对准高效耦合
Pub Date : 2018-08-07 DOI: 10.1109/ECTC.2018.00368
Y. Morimoto, Kumi Date, T. Ishigure
We demonstrate the importance of vertical position accuracy of formed core in the polymer optical waveguides fabricated using the Mosquito method for 3-dimensional wiring. We theoretically confirm the core vertical position deviation from the designed position is caused by the several fabrication parameters, the needle size and the needle-scanning speed. As an example of 3-dimensional wiring, we focus on the optical path conversion by 45-degree mirrors, and experimentally investigate the influence of the core vertical position on the coupling efficiency to other components via a 45-degree mirror. By forming the cores on appropriate height in the cladding, graded-index core optical waveguides exhibit a slight loss increment as low as 0.2 dB due to mirror structure, realizing the high efficient coupling via a 45-degree mirror.
我们证明了用蚊子法制作三维布线的聚合物光波导中形成芯的垂直位置精度的重要性。从理论上证实了芯的垂直位置偏离设计位置是由几个加工参数、针的尺寸和针的扫描速度引起的。以三维布线为例,重点研究了45度反射镜的光路转换,并通过实验研究了核心垂直位置对45度反射镜与其他组件耦合效率的影响。通过在包层的适当高度上形成芯,由于镜面结构,梯度折射率芯光波导的损耗增量低至0.2 dB,实现了45度镜面的高效耦合。
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引用次数: 0
Physical Aging of Epoxy Molding Compound and Its Influences on the Warpage of Reconstituted Wafer 环氧成型复合材料的物理老化及其对复合薄片翘曲的影响
Pub Date : 2018-08-07 DOI: 10.1109/ECTC.2018.00277
T. Chiu, Wei-Jie Yin, En-Yu Yeh, Yu-Ting Yang, Dao-Long Chen, Y. Tseng
Epoxy molding compound (EMC) is a key constituent in large overmolded panel or wafer. During various packaging thermal processes, the thermal expansion mismatch between EMC and Si die and the shrinkage of EMC due to chemical or physical aging would lead to residual stress and warpage. For accurately predicting warpage in fan-out reconstituted wafer, the viscoelastic constitutive behavior and the physical aging characteristics were investigated. The viscoelastic behavior of the EMC were measured by quasi-static relaxation and creep experiments. Consistency of the viscoelastic behaviors measured from these two experiments were examined and compared to the viscoelastic model constructed from time-harmonic dynamic experiment. From the comparisons of these test results, it was found that the viscoelastic behavior measured by creep and relaxation tests are highly consistent, and the presence of physical aging in the dynamic test specimen delays the viscoelastic relaxation. In addition, physical aging leads to stress-free shrinkage comparable to the chemical-aging induced shrinkage. The chemical-thermomechanical constitutive model was also implemented to simulate warpage evolution of a reconstituted wafer.
环氧成型复合材料(EMC)是大型复模板或硅片的关键组成部分。在各种封装热过程中,EMC与Si模之间的热膨胀失配以及EMC因化学或物理老化而收缩会导致残余应力和翘曲。为了准确预测扇形重构硅片的翘曲,研究了扇形重构硅片的粘弹性本构行为和物理老化特性。通过准静态弛豫和蠕变实验,对电磁干扰材料的粘弹性特性进行了测试。对这两种实验所测得的粘弹性行为的一致性进行了检验,并与时谐动力学实验所建立的粘弹性模型进行了比较。从这些试验结果的比较中发现,蠕变试验和松弛试验测量的粘弹性行为高度一致,动态试样中物理老化的存在延迟了粘弹性松弛。此外,物理老化导致的无应力收缩与化学老化引起的收缩相当。采用化学-热-机械本构模型模拟了复合晶圆的翘曲演变过程。
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引用次数: 3
Electrochemical Analysis of Mechanically Flexible Magnesiumion Battery Electrodes in a Polymer Gel Perchlorate Electrolyte 聚合物凝胶高氯酸盐电解质中机械柔性镁离子电池电极的电化学分析
Pub Date : 2018-08-07 DOI: 10.1109/ECTC.2018.00215
Todd Houghton, Hongbin Yu
Over the past decade, rechargeable batteries based on lithium metal ion chemistries have enabled the practical development of many new products and technologies. Today, Li-ion batteries are often the primary means of providing electrical power to a diverse and growing number of devices, from mobile phones to electric vehicles. Despite many advances, Li-ion battery technologies suffer from some limitations that can prevent their use in emerging market sectors such as wearables, IoT, and grid-scale energy storage. While still in the research and development phase, it is anticipated that divalent metal-ion battery chemistries based on zinc or magnesium will present viable alternatives to conventional lithium-ion cells in these markets. Lithium ion batteries have a high theoretical gravimetric capacity of 3829mAh/g but only a modest volumetric capacity of 2044mAh/cm3. By comparison, divalent batteries based on zinc or magnesium ions have theoretical volumetric capacities of 5854mAh/cm3 and 3882mAh/cm3 respectively. Volumetric capacity is especially important in IoT devices and wearables, where thin, flexible batteries which can cover large areas are ideal. In addition to a somewhat low volumetric capacity, lithium is far less common in the earth's crust than magnesium or zinc and possesses higher reactivity. Because of this, lithium-ion batteries are anticipated to be less environmentally friendly and cost effective than divalent metal-ion batteries in applications requiring many large battery cells. In this proceeding, we study the components of an experimental magnesium ion half-cell constructed from solid, flexible materials. A magnesium-ion cell was chosen due to its low material cost, good theoretical volumetric capacity, simple fabrication steps, and separator-free reaction chemistry. Flexible, insertion-type anodes and cathodes were fabricated using bismuth nanotubes and tungsten disulfide respectively. A polymer-based electrolyte made of PVDF-HFP and magnesium perchlorate was chosen for its demonstrated high ionic conductivity and mechanical flexibility. Each interface of the half-cell was characterized though the use of cyclic voltammetry. Cell fabrication, component/interface electrochemistry, electrode materials and packaging, will be described in detail.
在过去的十年中,基于锂金属离子化学的可充电电池使许多新产品和新技术的实际发展成为可能。如今,从移动电话到电动汽车,锂离子电池通常是为各种各样且数量不断增长的设备提供电力的主要手段。尽管取得了许多进步,但锂离子电池技术仍存在一些局限性,这些局限性可能会阻碍其在可穿戴设备、物联网和电网规模储能等新兴市场领域的应用。虽然仍处于研发阶段,但预计基于锌或镁的二价金属离子电池将在这些市场上成为传统锂离子电池的可行替代品。锂离子电池的理论重量容量高达3829mAh/g,但体积容量只有2044mAh/cm3。相比之下,锌离子和镁离子二价电池的理论容量分别为5854mAh/cm3和3882mAh/cm3。体积容量在物联网设备和可穿戴设备中尤为重要,可以覆盖大面积的薄而灵活的电池是理想的选择。除了体积容量稍低外,锂在地壳中的含量远低于镁或锌,而且具有更高的反应活性。正因为如此,在需要许多大型电池的应用中,锂离子电池预计比二价金属离子电池更不环保,成本效益也更低。在本研究中,我们研究了由固体柔性材料构建的实验性镁离子半电池的组成。由于镁离子电池材料成本低、理论容量大、制作步骤简单、反应化学无分离器等优点,选择了镁离子电池。采用铋纳米管和二硫化钨分别制备了柔性插入式阳极和阴极。选择了PVDF-HFP和高氯酸镁组成的聚合物电解质,因为它具有高离子导电性和机械柔韧性。利用循环伏安法对半电池各界面进行了表征。电池制造,组件/界面电化学,电极材料和包装,将详细描述。
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引用次数: 0
Warpage and Thermal Stress under Thermal Cycling Test in SiC and Si Power Device Structures Using Direct Chip-Bonding with Ag Sintered Layer on Cu Plate Cu板上银烧结层直接芯片键合SiC和Si功率器件结构热循环试验中的翘曲和热应力
Pub Date : 2018-08-07 DOI: 10.1109/ECTC.2018.00049
Masaki Kanemoto, M. Aoki, A. Mochizuki, Y. Murakami, M. Tsunoda, N. Nakano
This work clarifies the warpage and thermal stress under thermal cycling test (TCT) by 3D multi-physics solver for SiC and Si power device chip systems using direct Ag sintering chip-attachment on Cu plate. We compare the simulated warpages to the warpage results measured at room temperature for SiC/Si test structures. Measured warpages were in good agreement with our simulation values, and the simulation accuracy at Cu thickness of 1 mm was within 10 percentages for SiC structure. It was also found that the warpage in SiC structure is considerably larger than that in Si structure due to larger Young's modulus of SiC. Our simulations also showed that the warpage and displacement difference become smaller, and the thermal stress becomes stronger as the Cu plate thickness increases for both SiC/Si structures. The simulated maximum stress values under TCT decrease as Ta increases and approaches the stress free temperature. It was found that thermal stress values do not vary linearly with Ta. This nonlinearity is thought to be caused by the temperature dependence of Young's modulus of Ag sintered layer. We also clarified that the maximum stress point in the whole system is at the corner of Ag sintered bonding layer at low temperatures, and shifts to the chip center for both SiC/Si structures as Ta increases.
本文利用三维多物理场求解器对Cu板上直接Ag烧结芯片的SiC和Si功率器件芯片系统在热循环测试(TCT)下的翘曲和热应力进行了澄清。我们将模拟的翘曲与SiC/Si测试结构在室温下测量的翘曲结果进行了比较。实测翘曲量与模拟值吻合良好,在Cu厚度为1 mm时,SiC结构的模拟精度在10%以内。由于SiC的杨氏模量较大,因此SiC结构中的翘曲量比Si结构中的翘曲量大得多。模拟结果还表明,随着Cu板厚度的增加,SiC/Si结构的翘曲和位移差变小,热应力变强。TCT模拟的最大应力值随着Ta的增大而减小,并逐渐接近无应力温度。热应力值不随Ta的变化呈线性变化。这种非线性被认为是由银烧结层的杨氏模量对温度的依赖引起的。在低温下,整个系统的最大应力点位于Ag烧结键合层的角落,随着Ta的增加,SiC/Si结构的最大应力点都移向芯片中心。
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引用次数: 1
A Study on the Curing Properties and Viscosities of Non-Conductive Films (NCFs) for Sn-Ag Solder Bump Flip Chip Assembly 锡银凸点倒装芯片用非导电薄膜的固化性能和粘度研究
Pub Date : 2018-06-01 DOI: 10.1109/ECTC.2018.00371
Hanmin Lee, Seyong Lee, Jongho Park, C. Chung, Kyung-Woon Jang, I. Kim, Seo-Yoon Choi, K. Paik
In this study, flip chip assembly using NCFs was evaluated in Sn-Ag solder bump structure. Thermo-Compression (TC) flip chip bonding was performed within 5 seconds using an isothermal TC bonding method. Solder joint morphology was evaluated by adjusting curing properties of NCFs such as curing onset and peak temperature and degree of curing and also viscosities, and the best NCFs properties were optimized. In addition, bonding process conditions were also optimized in terms of solder gap heights and daisy chain electrical resistances. Finally, 85°C/85RH% test and temperature cycling (T/C) reliability test were performed to evaluate the thermo-mechanical and hygroscopic reliability performance of solder joint using NCFs.
在本研究中,我们评估了nfc在锡银凸点结构下的倒装芯片组装。采用等温热压缩(TC)键合方法在5秒内完成热压缩(TC)倒装芯片键合。通过调整nfc的固化起始温度、峰值温度、固化程度和粘度等特性,对焊点形貌进行了评价,并优化了nfc的最佳性能。此外,还从焊隙高度和菊花链电阻两个方面对焊接工艺条件进行了优化。最后,通过85°C/85 rh %试验和温度循环(T/C)可靠性试验,对nfc焊点的热力学和吸湿可靠性性能进行了评价。
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引用次数: 4
Extremely Flexible (1mm Bending Radius) Biocompatible Heterogeneous Fan-Out Wafer-Level Platform with the Lowest Reported Die-Shift (<6 µm) and Reliable Flexible Cu-Based Interconnects 极灵活的(1mm弯曲半径)生物相容性异质扇出晶圆级平台,具有最低的模移(<6µm)和可靠的柔性cu基互连
Pub Date : 2018-06-01 DOI: 10.1109/ECTC.2018.00229
A. Hanna, A. Alam, T. Fukushima, S. Moran, William Whitehead, SivaChandra Jangam, Saptadeep Pal, G. Ezhilarasu, R. Irwin, A. Bajwa, S. Iyer
A flexible fan-out wafer-level packaging (FOWLP) process for heterogeneous integration of high performance dies in a flexible and biocompatible elastomeric package (FlexTrateTM) was used to assemble >600 dies with co-planarity and tilt <1µm, average die-shift of 3.28 µm with ? < 2.23 µm. We have also engineered a novel corrugated topography of a stress buffer layer for metal interconnects on FlexTrateTM to mitigate the buckling phenomenon of metal films deposited on elastomeric substrates. Corrugated interconnects were then tested for their mechanical bending reliability and have shown less than 0.4% change in resistance after bending at 1 mm radius for 1,000 cycles. Finally, we demonstrate integration of an array of 25 dielets interconnected in a daisy chain configuration at 40 µm interconnect pitch.
采用柔性扇出晶圆级封装(FOWLP)工艺,将高性能芯片异质集成到柔性和生物相容性弹性体封装(FlexTrateTM)中,共平面度和倾角<1 μ m,平均模移为3.28 μ m,平均模移为1 μ m。< 2.23µm。我们还设计了一种新颖的波纹状应力缓冲层,用于FlexTrateTM上的金属互连,以减轻沉积在弹性体衬底上的金属膜的屈曲现象。然后对波纹互连进行了机械弯曲可靠性测试,在以1mm半径弯曲1000次后,电阻变化小于0.4%。最后,我们展示了在40µm互连间距的菊花链配置中互连的25个dielets阵列的集成。
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引用次数: 13
Piezoelectric Ceramics and Flexible Printed Circuits (FPCs) Interconnection Using Anisotropic Conductive Films (ACFs) for Ultrasound Transducers Assembly 利用各向异性导电膜(ACFs)组装超声换能器的压电陶瓷与柔性印刷电路(FPCs)互连
Pub Date : 2018-06-01 DOI: 10.1109/ECTC.2018.00374
Jae-Hyeong Park, K. Paik
For several decades, non-conductive pastes (NCPs) have been widely used for the mass production of ultrasound transducers assembly using piezoelectric ceramics and FPCs. The NCPs interconnection is established through direct metal to metal contact. In more details, the surface of piezoelectric ceramics is roughly grinded to make point contacts before metallization. And the NCPs are filled in non-contacted area between metallized piezoelectric ceramics and metal electrodes of FPCs. However, the point contacts result in higher electrical resistance. Also, the electrical conduction and the reliability of NCP interconnection can be deteriorated especially in moisture and at high temperature environment due to the polymer expansion. In addition, the piezoelectric ceramics such as PZT cannot maintain the polarization above its Curie temperature. Therefore, the curing temperature should be below 150°C. Therefore, longer curing times at 150°C are required for NCPs to avoid the depolarization of piezoelectric ceramics. Furthermore, sometimes surface grinding of piezoelectric ceramics may produce cracks which lead to the reduction of production yield. Therefore, it is desirable for lowering the electrical resistances, increasing the reliability and shorter curing time without grinding process. As a result, low temperature anisotropic conductive films (ACFs), which consist of adhesive polymer resin and conductive particles, were introduced in order to increase the electrical conduction and reliability without grinding process. In this study, various ACFs, including 3 types of conductive particles (Sn58Bi solder, Au/Ni coated polymer and Ni balls) and 3 types of thermosetting polymer resins (cationic epoxy, imidazole epoxy and acrylic resins), were investigated with respect to mechanical/electrical properties and reliability. In order to lower the ACFs bonding temperature below 150°C, low melting temperature eutectic Sn58Bi solder particles with the melting point of 138°C was used. For the thermo-compression bonding, the piezoelectric ceramics were placed at the bottom and flexible printed circuits boards (FPCBs) were placed on the top of piezoelectric ceramics to guarantee the real temperature of the piezoelectric ceramics below 150°C. As a result, piezoelectric ceramics and metal electrodes interconnection was successfully performed below 150°C with stable contact resistance and solder joint formation even after reliability test and the dicing process. After dicing into FPCBs, no short circuit was found between neighboring electrodes. And ACFs with Sn58Bi solder particles and cationic epoxy resin showed the lowest electrical resistance after bonding, excellent mechanical and electrical performance among various ACFs.
几十年来,非导电浆料(ncp)被广泛应用于压电陶瓷和FPCs超声换能器组件的批量生产。ncp互连是通过金属对金属的直接接触建立的。更详细地说,在金属化之前,压电陶瓷的表面被粗略地磨成点接触。ncp填充在金属化压电陶瓷与FPCs金属电极之间的非接触区域。然而,点接触导致更高的电阻。此外,由于聚合物膨胀,特别是在潮湿和高温环境下,NCP互连的导电性和可靠性可能会恶化。此外,PZT等压电陶瓷在居里温度以上不能保持极化。因此,固化温度应低于150℃。因此,ncp需要在150°C下更长的固化时间来避免压电陶瓷的去极化。此外,压电陶瓷的表面磨削有时会产生裂纹,导致生产成品率降低。因此,降低电阻,提高可靠性和缩短固化时间是不需要研磨的。因此,为了提高导电性能和可靠性,引入了由粘接聚合物树脂和导电颗粒组成的低温各向异性导电膜(ACFs)。在本研究中,对3种导电颗粒(Sn58Bi焊料、Au/Ni包覆聚合物和Ni球)和3种热固性聚合物树脂(阳离子环氧树脂、咪唑环氧树脂和丙烯酸树脂)的ACFs进行了力学/电学性能和可靠性的研究。为了将ACFs的结合温度降低到150℃以下,采用熔点为138℃的低温共晶Sn58Bi焊料颗粒。在热压缩键合中,将压电陶瓷放置在底部,柔性印刷电路板(fpcb)放置在压电陶瓷的顶部,以保证压电陶瓷的实际温度低于150℃。结果表明,压电陶瓷和金属电极在150°C以下成功互连,即使经过可靠性测试和切割过程,也能保持稳定的接触电阻和焊点形成。切割成fpcb后,相邻电极之间没有发现短路。含Sn58Bi焊料颗粒和阳离子环氧树脂的ACFs粘接后电阻最低,力学性能和电性能优异。
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引用次数: 1
Electrical Characterization of High Performance Fine Pitch Interconnects in Silicon-Interconnect Fabric 硅互连结构中高性能细间距互连的电学特性
Pub Date : 2018-06-01 DOI: 10.1109/ECTC.2018.00197
SivaChandra Jangam, A. Bajwa, Kannan K Thankkappan, Premsagar Kittur, S. Iyer
The Silicon-Interconnect Fabric (Si-IF) is a highly scalable platform for heterogenous integration of dielets using a fine interconnect pitch (? 10 µm) and small inter-dielet spacing (? 100 µm) [1]. In our fine-pitch integration scheme, short links on Si-IF (? 500 µm) are used for inter-dielet communication, reducing the latency (? 35 ps) and energy /bit (? 0.04 pJ/b) [2]. In this paper, we demonstrate the excellent transfer characteristics of the Si-IF links, verified experimentally. The measured insertion loss in these short Si-IF links (? 500 µm) is ? 2 dB for frequencies up to 30 GHz. Further, the transfer characteristics show only a single pole, demonstrating an RC-link behavior. We show that assemblies on Si-IF have 16-25X lower parasitic inductance, and 6-40X lower parasitic capacitance compared to assemblies on interposers and PCBs. We illustrate that using the Simple Universal Parallel intERface for chips (SuperCHIPS) protocol [2] for data transfer, data rates of ? 10 Gbps/link are realizable at an energy/bit of ? 0.04 pJ/b. Subsequently, due to the high interconnect density, the overall bandwidth/mm is ? 8 Tbps/mm. This corresponds to an improvement of 120-300X in bandwidth/mm and a reduction of 100-500X in energy/bit compared to a conventional PCB-based integration.
硅互连结构(Si-IF)是一种高度可扩展的平台,用于使用精细互连间距(?10µm)和小的介子间距(?100µm)[1]。在我们的小间距集成方案中,Si-IF (?500µm)用于层间通信,减少延迟(?35ps)和能量/比特(?[2]。在本文中,我们证明了硅中频链路的优良传输特性,并通过实验进行了验证。在这些短Si-IF链路中测量到的插入损耗(?500µm)是?频率最高可达30ghz,为2db。此外,转移特性仅显示单极,显示出rc链接行为。我们表明,与中间层和pcb上的组件相比,Si-IF上的组件具有16-25倍的低寄生电感和6-40倍的低寄生电容。我们说明使用简单通用并行接口芯片(SuperCHIPS)协议[2]进行数据传输,数据速率为?10 Gbps/链路可以在能量/比特?0.04 pJ / b。随后,由于互连密度高,总体带宽/mm为?8真沸点/毫米。与传统的基于pcb的集成相比,这相当于带宽/mm提高120-300X,能量/比特降低100-500X。
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引用次数: 25
Demonstration of a Heterogeneously Integrated System-on-Wafer (SoW) Assembly 异构集成系统-晶圆(SoW)组装的演示
Pub Date : 2018-06-01 DOI: 10.1109/ECTC.2018.00288
A. Bajwa, SivaChandra Jangam, Saptadeep Pal, Boris Vaisband, R. Irwin, M. Goorsky, S. Iyer
This paper describes the integration of a System-on-Wafer (SoW) assembly using test dielets mounted on a Silicon Interconnect Fabric (Si-IF) with an inter-dielet spacing of 100 µm and using 10 µm interconnect pitch. The continuity within and across the dielet assembly is shown using daisy chains of Au-capped Cu-Cu thermal compression bonds. The daisy chains run not only through every dielet but also across all the adjacently mounted dielets on the Si-IF. The interconnections exhibited an effective contact resistivity of 0.8-0.9 ?-µm2 and an average shear strength of 125 MPa. Our investigations showed that Argon plasma pre-treatment improves the shear strength of the metal bonds by a factor of 5X. Thermal simulation of the SoW assembly showed superior heat spreading across the assembly in a checkerboard configuration of alternate hot (0.5 W/mm2) and cold (0.1 W/mm2) dielets with an average temperature of 82 °C & 78 °C respectively.
本文描述了系统单片(SoW)组件的集成,使用安装在硅互连结构(Si-IF)上的测试片,其间距为100 μ m,互连间距为10 μ m。用au包覆的Cu-Cu热压缩键的菊花链来显示dielet组件内部和之间的连续性。菊花链不仅贯穿每一个介面,而且也贯穿Si-IF上所有相邻安装的介面。互连体的有效接触电阻率为0.8 ~ 0.9 μ m2,平均抗剪强度为125 MPa。我们的研究表明,氩等离子体预处理使金属键的剪切强度提高了5倍。SoW组件的热模拟显示,在平均温度分别为82°C和78°C的情况下,热(0.5 W/mm2)和冷(0.1 W/mm2)交替的棋盘状结构中,整个组件的热量分布优越。
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引用次数: 12
期刊
2018 IEEE 68th Electronic Components and Technology Conference (ECTC)
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