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2017 IEEE 67th Electronic Components and Technology Conference (ECTC)最新文献

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28nm CPI (Chip/Package Interactions) in Large Size eWLB (Embedded Wafer Level BGA) Fan-Out Wafer Level Packages 大尺寸eWLB(嵌入式晶圆级BGA)扇出晶圆级封装中的28nm CPI(芯片/封装相互作用)
Pub Date : 2017-05-01 DOI: 10.1109/ECTC.2017.237
Kang Chen, Linda Chua, Won Kyung Choi, Seng Guan Chow, S. Yoon
To meet the continued demand for form factor reduction and functional integration of electronic devices, Wafer Level Packaging (WLP) is an attractive packaging solution with many advantages in comparison with standard Ball Grid Array (BGA) packages. The advancement of fan-out WLP has made it a more promising solution as compared with fan-in WLP, because it can offer greater flexibility in enabling more IO's, multi-chips, heterogeneous integration and 3D SiP. In particular, Embedded Wafer Level BGA (eWLB) is a fan-out WLP solution which can enable applications that require higher input/output (I/O) density, smaller form factor, excellent heat dissipation, and thin package profile, and it has the potential to evolve in various configurations with proven integration flexibility, process robustness, manufacturing capacity and production yield. It also provides integration of multiple dies vertically and horizontally in a single package without substrates. For eWLB fan-out WLP, the structural design as well as selection of materials is very important in determining the process yield and long term reliability. Therefore it is necessary to investigate the key design factors affecting the reliability comprehensively. This work is focused on an experimental study on the chip-package interactions in 10x10~15x15mm 28nm eWLB fan-out WLP with multiple redistribution layers (RDLs). Standard JEDEC component and board level tests were carried out to investigate reliability, and both destructive and non-destructive analyses were performed to investigate potential structural defects. Electrical characterization was also studied for both simulation and experimental works. The influence of structural design on the package reliability will be demonstrated. Thermal characterization and thermo-mechanical simulation results will also be discussed.
为了满足电子器件外形尺寸减小和功能集成的持续需求,晶圆级封装(WLP)是一种有吸引力的封装解决方案,与标准球栅阵列(BGA)封装相比,它具有许多优势。与扇入式WLP相比,扇出式WLP的进步使其成为更有前途的解决方案,因为它可以提供更大的灵活性,支持更多的IO,多芯片,异构集成和3D SiP。特别是,嵌入式晶圆级BGA (eWLB)是一种扇形输出的WLP解决方案,可以实现需要更高输入/输出(I/O)密度、更小的外形、出色的散热和更薄的封装外形的应用,并且它具有在各种配置中发展的潜力,具有成熟的集成灵活性、工艺稳稳性、制造能力和生产良率。它还可以在没有基板的情况下在单个封装中垂直和水平集成多个模具。对于eWLB扇出式WLP,结构设计和材料选择对工艺良率和长期可靠性的影响非常重要。因此,有必要对影响可靠性的关键设计因素进行综合研究。本文主要研究了10x10~15x15mm 28nm具有多重分布层(RDLs)的eWLB扇出WLP中芯片封装相互作用的实验研究。进行了标准JEDEC组件和板级测试以调查可靠性,并进行了破坏性和非破坏性分析以调查潜在的结构缺陷。并对电特性进行了仿真和实验研究。分析了结构设计对封装可靠性的影响。热表征和热力学模拟结果也将讨论。
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引用次数: 8
Aerosol-Jet Printed Quasi-Optical Terahertz Filters 气溶胶喷射打印准光学太赫兹滤波器
Pub Date : 2017-05-01 DOI: 10.1109/ECTC.2017.233
Christopher Oakley, A. Kaur, J. Byford, P. Chahal
This paper presents the design, simulation, and characterization of metamaterial-inspired terahertz filters, fabricated by aerosol-jet printing. Filters are designed for operation at 230, 245, and 510 GHz, for both band-pass and bandstop operation. Operation of each printed filter is compared to structures fabricated from copper metal using a photolithographic process. Each of the aerosol jet printed filters are found to have performance comparable to those fabricated using lithographic techniques, demonstrating the applicability of aerosol-jet printing to the fabrication of components operating in the terahertz regime.
本文介绍了超材料启发的太赫兹滤波器的设计、仿真和特性,该滤波器是由气溶胶喷射打印制造的。滤波器设计用于在230、245和510 GHz工作,用于带通和带阻操作。每个印刷过滤器的操作与使用光刻工艺从铜金属制造的结构进行比较。每个气溶胶喷射印刷过滤器都被发现具有与使用平版印刷技术制造的过滤器相当的性能,证明了气溶胶喷射印刷在太赫兹状态下操作的组件制造中的适用性。
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引用次数: 17
Cu-SnAg Interconnects Evaluation for the Assembly at 10µm and 5µm Pitch 10µm和5µm间距下组件的Cu-SnAg互连评估
Pub Date : 2017-05-01 DOI: 10.1109/ECTC.2017.154
D. Taneja, M. Volpert, G. Lasfargues, B. Chambion, B. Bouillard, Sylvie Jarjayes, T. Chaira, A. Vandeneynde, Y. Goiran, D. Henry, F. Hodaj
Several types of interconnects for the finer pitch assembly are currently being investigated across the globe. Here in this paper, a new type of interconnect Ni3Sn4 Interconnect is proposed and evaluated for assembly at 10 pitch and below. The proposed interconnect is compared to traditional solder interconnect. The comparison is done on the basis of shape of the joints in interconnects, the electric yield and mechanical properties. Later, Ni3Sn4 IMC interconnect is also compared to known Cu3Sn IMC Interconnect.
目前,全球正在研究用于更细间距组装的几种类型的互连。本文提出了一种新型的互连Ni3Sn4互连,并对其在10节距及以下的组装进行了评估。并与传统的焊料互连进行了比较。根据连接接头的形状、电导率和力学性能进行了比较。随后,Ni3Sn4 IMC互连也与已知的Cu3Sn IMC互连进行了比较。
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引用次数: 5
Mechanical Characterization of SAC Solder Joints at High Temperature Using Nanoindentation 纳米压痕法研究SAC焊点的高温力学特性
Pub Date : 2017-05-01 DOI: 10.1109/ECTC.2017.336
Sudan Ahmed, M. Hasnine, J. Suhling, P. Lall
In this work, we have used nanoindentation methods to explore the creep behavior, and aging effects of SAC305 solder joints at several elevated testing temperatures from 25 to 125 oC. A special high temperature stage and test protocol was used within the nanoindentation system to carefully control the testing temperature, and make the measurements insensitive to thermal drift problems. Solder joints were extracted from 14 × 14 mm PBGA assemblies (0.8 mm ball pitch, 0.46 mm ball diameter) that were built as part of the iNEMI Characterization of Pb-Free Alloy Alternatives Project. Since the properties of SAC solder joints are highly dependent on crystal orientation, polarized light microscopy was utilized to determine the orientation of the tested joints. For all the experiments, only single grain solder joints were used to avoid introducing any unintentional variation from changes in the crystal orientation across the joint cross-section. After extraction, the single grain solder joints were subjected to various aging conditions. Nanoindentation testing was then performed on the aged specimens at five different testing temperatures (T = 25, 50, 75, 100, and 125 oC). In order to understand creep response of the solder joints at different temperatures, a constant force at max indentation was applied for 900 sec while the creep displacements were monitored. With this approach, we were able to measure the creep strain rate as a function of both temperature and prior aging conditions. As expected, our results have shown that indent/testing temperature has a significant impact on the mechanical properties and creep strain rate of solder joints. The measured data have also shown that the effects of aging on solder joints properties become much more significant as the testing temperature increases. In particular, the aging induced degradation rates at high temperatures (100-125 oC) were more than 100X those seen at room temperature. Nanoindentation pile-up effects, although insignificant at room temperature, were observed during high-temperature testing and corrections were made to limit their influence on the test results.
在这项工作中,我们使用纳米压痕方法来探索SAC305焊点在25至125℃的几种升高的测试温度下的蠕变行为和老化效应。在纳米压痕系统中采用了特殊的高温阶段和测试方案,以仔细控制测试温度,使测量不受热漂移问题的影响。焊点是从14 × 14 mm PBGA组件(0.8 mm球间距,0.46 mm球直径)中提取的,该组件是iNEMI无铅合金替代品表征项目的一部分。由于SAC焊点的性能高度依赖于晶体取向,因此利用偏振光显微镜来确定被测焊点的取向。在所有的实验中,只使用了单晶粒焊点,以避免在接头横截面上由于晶体取向的变化而引起任何无意的变化。提取后的单晶粒焊点进行了不同的时效处理。然后在5种不同的测试温度(T = 25、50、75、100和125℃)下对老化样品进行纳米压痕测试。为了了解焊点在不同温度下的蠕变响应,在最大压痕处施加恒定力900秒,同时监测蠕变位移。通过这种方法,我们能够测量蠕变应变率作为温度和先前老化条件的函数。正如预期的那样,我们的结果表明,压痕/测试温度对焊点的力学性能和蠕变应变率有显著影响。测试数据还表明,随着测试温度的升高,老化对焊点性能的影响更为显著。特别是,在高温(100-125℃)下,老化引起的降解率是室温下的100倍以上。纳米压痕堆积效应虽然在室温下不显著,但在高温测试中观察到,并进行了修正以限制其对测试结果的影响。
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引用次数: 29
Novel, High-Throughput, Fiber-to-Chip Assembly Employing Only Off-the-Shelf Components 新颖,高通量,光纤到芯片组装只使用现成的组件
Pub Date : 2017-05-01 DOI: 10.1109/ECTC.2017.185
N. Boyer, Alexander Janta-Polczynski, J. Morissette, S. Martel, Ted W. Lichoulas, S. Kamlapurkar, S. Engelmann, P. Fortier, T. Barwicz
Cost-efficient assembly of single-mode fibers to silicon chips is a significant challenge for large-scale deployment of Si photonics. We have previously demonstrated a fully automated approach to parallelized assembly of fiber arrays to nanophotonic chips meant to be performed with standard high-throughput microelectronic tooling. Our original approach required a customization of a standard fiber component, which could limit cost-efficiency and scalability. Here, we demonstrate a novel approach to fiber assembly employing off-the-shelf fiber components only. The new concept employs a dual vacuum pick-tip that can be integrated in standard high-throughput microelectronic tooling. We validate this approach with assemblies of standard 12-fiber interfaces to nanophotonic chips. The assembly performance is assessed via x-ray tomography cross-sections, polished mechanical cross-sections, and optical coupling measurements.
单模光纤到硅芯片的成本效益组装是硅光子学大规模部署的重大挑战。我们之前已经展示了一种完全自动化的方法来并行组装光纤阵列到纳米光子芯片,这意味着用标准的高通量微电子工具来执行。我们最初的方法需要定制标准光纤组件,这可能会限制成本效率和可扩展性。在这里,我们展示了一种仅使用现成光纤组件的光纤组装新方法。新概念采用双真空pick-tip,可以集成在标准的高通量微电子工具。我们用纳米光子芯片的标准12光纤接口组件验证了这种方法。通过x射线断层扫描横截面、抛光机械横截面和光学耦合测量来评估装配性能。
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引用次数: 14
Phototriggerable Transient Electronics: Materials and Concepts 光触发瞬态电子学:材料与概念
Pub Date : 2017-05-01 DOI: 10.1109/ECTC.2017.174
O. Phillips, J. Schwartz, A. Engler, Gerald Gourdin, P. Kohl
Transient electronics is an emerging field oftechnology where the controlled, programmable vaporizationof a device is needed because retrieval is not possible or adifferent form of disposal is desired. Decomposable polymersare of interest and may be used to form electronic componentsand packages. The ability to trigger these polymers todepolymerize and vaporize at ambient conditions can lead tomany applications. Low ceiling temperature polyaldehydeshave been evaluated for transience. Incorporation of morevolatile monomer units significantly increase the evaporationrate of decomposition products. The stimulus fordisappearance is a photochemical reaction that has beenextended from the ultraviolet to the visible region. Chemicalamplification of the trigger source has been demonstrated withacid amplifiers.
瞬态电子学是一个新兴的技术领域,由于无法回收或需要另一种处理方式,因此需要对设备进行可控的、可编程的汽化。可分解聚合物是我们感兴趣的,可用于形成电子元件和封装。触发这些聚合物在环境条件下解聚和汽化的能力可以导致许多应用。低温聚醛的暂态性已被评估。加入可动性单体显著提高了分解产物的蒸发速率。消失的刺激是一种光化学反应,从紫外线延伸到可见光区域。化学放大的触发源已证明与酸性放大器。
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引用次数: 4
Co-Design for Low Warpage and High Reliability in Advanced Package with TSV-Free Interposer (TFI) 基于TSV-Free Interposer (TFI)的先进封装低翘曲高可靠性协同设计
Pub Date : 2017-05-01 DOI: 10.1109/ECTC.2017.31
F. Che, M. Kawano, M. Ding, Y. Han, S. Bhattacharya
TSV-Free Interposer (TFI) technology eliminates TSV fabrication and reduces manufacturing and material cost. Co-design modelling methodology is established for TFI technology with considering wafer process, package assembly and package/board level reliability and thermal performance to optimize structure design, wafer process, assembly process and material selection. Experimental results are used for validating warpage modelling results. Through wafer level modelling, suitable carrier wafer and EMC materials are recommended to control wafer warpage less than 2mm. Effects of package substrate coefficient of thermal expansion (CTE) and stiffener on assembly induced package warpage are simulated to reduce package warpage. The recommended materials and geometry design based on reliability are aligned with that from wafer and package warpage simulation results. The final test vehicle (TV) design and material selection are determined based on co-design modelling results for achieving successful TFI wafer process and package assembly process and long term package/board level reliability.
TSV- free Interposer (TFI)技术消除了TSV制造,降低了制造和材料成本。建立了TFI技术的协同设计建模方法,考虑晶圆工艺、封装封装和封装/板级可靠性和热性能,优化结构设计、晶圆工艺、封装工艺和材料选择。实验结果用于验证翘曲建模结果。通过晶圆级建模,推荐合适的载流子晶圆和EMC材料,以控制晶圆翘曲小于2mm。为了减小封装翘曲,模拟了封装衬底热膨胀系数(CTE)和加强筋对封装翘曲的影响。基于可靠性的推荐材料和几何设计与晶圆和封装翘曲模拟结果一致。最终的测试车(TV)设计和材料选择是根据共同设计建模结果确定的,以实现成功的TFI晶圆工艺和封装组装工艺以及长期封装/板级可靠性。
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引用次数: 13
Micro-Hermetic Packaging Technology for Active Implantable Neural Interfaces 主动植入式神经接口的微密封封装技术
Pub Date : 2017-05-01 DOI: 10.1109/ECTC.2017.340
K. Nagarkar, Xiaoxiao Hou, N. Stoffel, E. Davis, Jeffrey M. Ashe, D. Borton
In this paper, we propose a fused silica packaging platform with a micro-cavity designed to house and protect active electronics for neural interfaces. Proof-of-concept test vehicles were specifically designed, fabricated, and packaged in order to evaluate the ability of the packaging to protect against water and ion incursion. Accelerated degradation testing of three test vehicles in physiological saline was performed in a custom-built encapsulation test system (ETS) at 57 °C for 16 days (nominally equivalent to 68 days at 37 °C). Leakage current, as well as gross functionality of the test circuit, was evaluated and is presented as preliminary results.
在本文中,我们提出了一个带有微腔的熔融硅封装平台,用于容纳和保护神经接口的有源电子器件。概念验证测试车辆是专门设计、制造和包装的,以评估包装防止水和离子侵入的能力。在定制的封装测试系统(ETS)中,在57°C下进行生理盐水加速降解测试16天(名义上相当于在37°C下进行68天)。泄漏电流以及测试电路的总体功能进行了评估,并作为初步结果提出。
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引用次数: 6
New Method to Separate Failure Modes by Transient Thermal Analysis of High Power LEDs 大功率led瞬态热分析分离失效模式的新方法
Pub Date : 2017-05-01 DOI: 10.1109/ECTC.2017.137
A. Hanss, E. Liu, M. Schmid, D. Müller, U. Karbowski, Robert Derix, G. Elger
A high reliability of light emitting diode (LED) light sources is essential for general and automotive lighting applications, where exchange of LED components is expensive. Thermal management of modern high power LEDs is crucial for their lifetime. An important aspect is the thermal path for heat conduction. Many different defects can have an influence on this path of an electronic system: on the one hand process failures during production, e.g. voids inside the solder joint, on the other hand typical failures induced by thermo-mechanical stress during their lifetime, like cracks in the solder joint or delamination in the package. The transient thermal analysis (TTA) is a powerful tool to detect changes in the thermal path. Due to improvements in the TTA method during the last years, not only cracks can be detected but also failure modes can be separated, and the root cause can be analyzed by support of transient finite element analysis. In this paper, transient thermal testing is applied and further developed, to monitor the structural integrity of new wafer level LED packages during thermal stress testing. Failure modes are defined and separated. For failure analysis the different defects are simulated by transient finite element analysis and correlated to the TTA results. The simulation results, that solder cracks increase the peak height of the derivative of the transient thermal curves (b(z)). A delamination of an inner layer of the LED package creates additionally to the increase of the peak height also a separation of the b(z) curves between 1 µs and 5 µs. Therefore a transient thermal measurement equipment with a dead time
发光二极管(LED)光源的高可靠性对于通用和汽车照明应用至关重要,因为LED元件的交换成本很高。现代大功率led的热管理对其使用寿命至关重要。一个重要的方面是热传导的热路径。许多不同的缺陷都会对电子系统的这条路径产生影响:一方面是生产过程中的故障,例如焊点内部的空洞;另一方面是在其使用寿命期间由热机械应力引起的典型故障,例如焊点的裂纹或封装中的分层。瞬态热分析(TTA)是检测热路径变化的有力工具。由于近年来TTA方法的改进,不仅可以检测裂纹,还可以分离失效模式,并且可以通过瞬态有限元分析来分析根本原因。在本文中,瞬态热测试的应用和进一步发展,以监测新的晶圆级LED封装在热应力测试中的结构完整性。失效模式被定义和分离。在失效分析中,采用瞬态有限元法对不同缺陷进行模拟,并与TTA结果进行关联。模拟结果表明,焊料裂纹增加了瞬态热曲线导数的峰值高度(b(z))。LED封装内层的分层除了增加峰值高度外,还会在1µs和5µs之间产生b(z)曲线的分离。因此暂态热测量设备具有死区时间
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引用次数: 2
Equivalent Thermal Conductivity Model Based Full Scale Numerical Simulation for Thermal Management in Fan-Out Packages 基于等效导热模型的扇出封装热管理全尺寸数值模拟
Pub Date : 2017-05-01 DOI: 10.1109/ECTC.2017.82
Ningyu Wang, Yudan Pi, Wei Wang, Yufeng Jin
Exploring along the road of More Moore with integration degree increasing significantly, different wafer level 3-D technologies are developed facing various circumstances. Thermal issue has become an important concern in IC designing and manufacturing. Fan-out wafer level package (FOWLP), as one of the most popular packaging trends lately, compared to high cost through silicon via (TSV) based 3D integration method, requires system level thermal management. Full scale numerical simulation as a critical procedure is facing huge difficulties, such as huge structure size variation, huge thermal properties variation, in-plane and off-plane displacement, etc. Equivalent thermal conductivity model (ETCM) based full scale numerical simulation for thermal management, which has already been applied to TSV based 3-D ICs with computation consumption significantly decreased, is applied to Fan-out packages in this paper. Equivalent and anisotropic thermal conductivity is calculated and modified concerning FOWLP structure and material thermal properties. A chip-first face-up fan-out package with 100 pads and 100 bumps is modeled and simulated, with mesh elements number drops from 874836 to 174810. With more than 80% computation consumption saved, less than 2% difference in total temperature rise is obtained compared with detail simulation.
随着集成度的显著提高,沿着摩尔之路探索,不同的晶圆级三维技术面临着不同的环境。热问题已成为集成电路设计和制造中的一个重要问题。扇出晶圆级封装(FOWLP)作为近年来最流行的封装趋势之一,与基于高成本的通硅孔(TSV) 3D集成方法相比,需要系统级热管理。全尺寸数值模拟作为一项关键程序,面临着巨大的结构尺寸变化、巨大的热性能变化、面内和面外位移等困难。基于等效导热模型(ETCM)的热管理全尺寸数值模拟方法已经应用于基于TSV的三维集成电路,计算量大大减少,本文将其应用于扇出封装。计算并修正了FOWLP结构和材料热性能的等效导热系数和各向异性导热系数。一个芯片优先的面朝上的扇形封装与100个垫和100个凸起进行建模和模拟,网格元素数从874836下降到174810。在节省80%以上的计算量的情况下,与详细模拟相比,总温升的差异小于2%。
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引用次数: 2
期刊
2017 IEEE 67th Electronic Components and Technology Conference (ECTC)
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