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Superalloys fracture process inference based on overlap analysis of 3D models 基于三维模型重叠分析的超级合金断裂过程推断。
Pub Date : 2024-08-06 DOI: 10.1038/s44172-024-00257-6
Xuecheng Zhang, Guanghao Guo, Zixin Li, Wenchao Meng, Yuefei Zhang, Qing Ye, Jin Wang, Shibo He, Xinbao Zhao, Jiming Chen, Ze Zhang
Superalloy materials exhibit susceptibility to fracture failures stemming from the influence of thermomechanical factors. To comprehensively understand the fracture mechanisms, material properties, root causes of failure, and the subsequent optimization of alloys, a detailed analysis of the internal fracture process and the morphological traits of the fracture surface is imperative. Traditional analysis of fracture surfaces solely relies on 2D images, thus lacking crucial 3D information. Although in situ experiments can capture the fracture process, their effectiveness is confined to the specimen’s surface, precluding insight into internal changes. Here we introduce an integrated framework encompassing the process of 3D reconstruction of fracture surfaces, aiming to enhance the visual information obtained with micron-level accuracy, visual intuitiveness and sense of depth. Additionally, this framework also facilitates the scrutiny and inference of internal fracture processes. These results demonstrate that under specific service conditions, material deformation fracture probably stems from a combination of surface cracking and internal cracking rather than exclusively one or the other. Overall, our description and analysis of internally initiated cracking due to defects within the specimens can be beneficial in guiding future alloy design and optimization efforts. Xuecheng Zhang, Guanghao Guo and colleagues present a characterization method for analyzing metallurgical fracture processes that addresses the limitations of conventional 2D imaging acquisition by providing a comprehensive visual depiction of fracture surfaces in 3D space. The method involves in situ tensile testing of IN718 alloy specimens at different temperatures, capturing real-time changes in morphology using high-resolution electron microscopy imaging, and reconstructing 3D models of the fracture surfaces.
超耐热合金材料易受热力学因素的影响而发生断裂失效。为了全面了解断裂机理、材料特性、失效根本原因以及合金的后续优化,必须对内部断裂过程和断裂表面的形态特征进行详细分析。传统的断裂表面分析仅依赖于二维图像,因此缺乏关键的三维信息。虽然原位实验可以捕捉断裂过程,但其效果仅限于试样表面,无法深入了解内部变化。在此,我们引入了一个包含断裂表面三维重建过程的集成框架,旨在提高所获得的视觉信息的微米级精度、视觉直观性和深度感。此外,该框架还有助于检查和推断内部断裂过程。这些结果表明,在特定的使用条件下,材料变形断裂可能源于表面开裂和内部开裂的结合,而非仅是其中之一。总之,我们对试样内部缺陷引起的内部开裂的描述和分析有助于指导未来的合金设计和优化工作。
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引用次数: 0
SRS-Net: a universal framework for solving stimulated Raman scattering in nonlinear fiber-optic systems by physics-informed deep learning SRS-Net:通过物理信息深度学习解决非线性光纤系统中受激拉曼散射问题的通用框架。
Pub Date : 2024-08-06 DOI: 10.1038/s44172-024-00253-w
Yuchen Song, Min Zhang, Xiaotian Jiang, Fan Zhang, Cheng Ju, Shanguo Huang, Alan Pak Tao Lau, Danshi Wang
As a crucial nonlinear phenomenon, stimulated Raman scattering (SRS) plays multifaceted roles involved in forward and inverse problems. In fibre-optic systems, these roles range from detrimental interference that impairs optical performance to beneficial effects that enables various devices such as Raman amplifier. To obtain solutions of SRS, various numerical methods customized for different scenarios have been proposed. However, these methods are time-consuming, low-efficiency, and experience-orientated, particularly in combined scenarios consisting of both forward and inverse problems. Inspired by physics-informed neural networks, we propose SRS-Net, which combines the efficient automatic differentiation and powerful representation ability of neural networks with the regularization of SRS physical laws, to obtain universal solutions for SRS of forward, inverse, and combined problems. We showcase the intuitive solving procedure and high-speed performance of SRS-Net through extensive simulations covering different scenarios. Additionally, we validate its capabilities in experiments involving the high-fidelity modelling of a wavelength division multiplexing system spanning the C + L-band with approximately 10 THz. The versatility of the SRS-Net framework extends beyond SRS, indicating its potential as a promising universal solution in other engineering problems with nonlinear dynamics governed by partial differential equations. Yuchen Song and colleagues develop a neural network-based framework for solving both forward and inverse problems of stimulated Raman scattering. This physics-informed framework called SRS-Net helps wideband power prediction, Raman pump optimization, and physical parameter identification in fibre optics.
作为一种重要的非线性现象,受激拉曼散射(SRS)在正向和反向问题中发挥着多方面的作用。在光纤系统中,这些作用既包括损害光学性能的有害干扰,也包括实现拉曼放大器等各种设备的有益效应。为了获得 SRS 的解决方案,人们提出了针对不同情况定制的各种数值方法。然而,这些方法耗时长、效率低,而且以经验为导向,特别是在由正向和反向问题组成的组合场景中。受物理信息神经网络的启发,我们提出了 SRS-Net,它将神经网络高效的自动微分和强大的表示能力与 SRS 物理定律的正则化相结合,从而获得正向、反向和组合问题的 SRS 通用解。我们通过大量涵盖不同场景的模拟,展示了 SRS-Net 直观的求解过程和高速性能。此外,我们还在实验中验证了 SRS-Net 的能力,实验涉及对波分复用系统进行高保真建模,该系统跨越 C + L 波段,频率约为 10 太赫兹。SRS-Net 框架的多功能性超出了 SRS 的范围,表明它有潜力成为其他工程问题的通用解决方案,解决由偏微分方程控制的非线性动态问题。
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引用次数: 0
Automatic renal carcinoma biopsy guidance using forward-viewing endoscopic optical coherence tomography and deep learning 利用前视内窥镜光学相干断层扫描和深度学习自动引导肾癌活检。
Pub Date : 2024-08-02 DOI: 10.1038/s44172-024-00254-9
Chen Wang, Haoyang Cui, Qinghao Zhang, Paul Calle, Yuyang Yan, Feng Yan, Kar-Ming Fung, Sanjay G. Patel, Zhongxin Yu, Sean Duguay, William Vanlandingham, Ajay Jain, Chongle Pan, Qinggong Tang
Percutaneous renal biopsy is commonly used for kidney cancer diagnosis. However, the biopsy procedure remains challenging in sampling accuracy. Here we introduce a forward-viewing optical coherence tomography probe for differentiating tumor and normal tissues, aiming at precise biopsy guidance. Totally, ten human kidney samples, nine of which had malignant renal carcinoma and one had benign oncocytoma, were used for system evaluation. Based on their distinct imaging features, carcinoma could be efficiently distinguished from normal renal tissues. Additionally, oncocytoma could be differentiated from carcinoma. We developed convolutional neural networks for tissue recognition. Compared to the conventional attenuation coefficient method, convolutional neural network models provided more accurate carcinoma predictions. These models reached a tissue recognition accuracy of 99.1% on a hold-out set of four kidney samples. Furthermore, they could efficiently distinguish oncocytoma from carcinoma. In conclusion, our convolutional neural network-aided endoscopic imaging platform could enhance carcinoma diagnosis during percutaneous renal biopsy procedures. Chen Wang and colleagues develop a forward-viewing optical coherence tomography endoscope for differentiating tumor tissues in renal biopsy. In conjunction with a convolutional neural network developed by the team, tissue recognition rates of over 99% were achieved.
经皮肾活检是诊断肾癌的常用方法。然而,活检程序在取样准确性方面仍面临挑战。在此,我们引入了一种用于区分肿瘤和正常组织的前视光学相干断层成像探针,旨在精确引导活检。我们共使用了十个人体肾脏样本进行系统评估,其中九个为恶性肾癌,一个为良性肿瘤细胞瘤。根据其独特的成像特征,癌细胞可与正常肾组织有效区分开来。此外,肿瘤细胞瘤也能与癌区分开来。我们开发了用于组织识别的卷积神经网络。与传统的衰减系数法相比,卷积神经网络模型能提供更准确的癌预测。这些模型在四个肾脏样本的暂留集上达到了 99.1% 的组织识别准确率。此外,它们还能有效区分肿瘤细胞瘤和癌。总之,我们的卷积神经网络辅助内窥镜成像平台能在经皮肾活检过程中提高癌症诊断率。
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引用次数: 0
Structural integrity of aging steel bridges by 3D laser scanning and convolutional neural networks 通过三维激光扫描和卷积神经网络分析老化钢桥的结构完整性。
Pub Date : 2024-08-01 DOI: 10.1038/s44172-024-00255-8
Georgios Tzortzinis, Angelos Filippatos, Jan Wittig, Maik Gude, Aidan Provost, Chengbo Ai, Simos Gerasimidis
For steel bridges, corrosion has historically led to bridge failures, resulting in fatalities and injuries. To enhance public safety and prevent such incidents, authorities mandate in-situ evaluation and reporting of corroded members. The current inspection and evaluation protocol is characterized by intense labor, traffic delays, and poor capacity predictions. Here we combine full-scale experimental testing of a decommissioned girder, 3D laser scanning, and convolutional neural networks (CNNs) to introduce a continuous inspection and evaluation framework. Classification and regression CNNs are trained on a databank of 1,421 naturally inspired corrosion scenarios, generated computationally based on point clouds of three corroded girders collected in lab conditions. Results indicate low errors of up to 2.0% and 3.3%, respectively. The methodology is validated on eight real corroded ends and implemented for the evaluation of an in-service bridge. This framework promises significant advancements in assessing aging bridge infrastructure with higher accuracy and efficiency compared to analytical or semi-analytical approaches. Dr Georgios Tzortzinis and colleagues use a combination of experimental testing and 3D laser scanning to describe the corrosion profile of bridge girders. Their results demonstrate how laser scanners and convolutional neural networks can provide accurate predictions on the structural capacity of ageing steel bridges.
对于钢结构桥梁而言,锈蚀历来是导致桥梁垮塌并造成人员伤亡的原因。为了加强公共安全并防止此类事故的发生,有关部门强制要求对锈蚀构件进行现场评估和报告。目前的检查和评估方案的特点是劳动强度大、交通延误和能力预测差。在这里,我们将退役大梁的全尺寸实验测试、三维激光扫描和卷积神经网络(CNN)结合起来,引入了一个连续检查和评估框架。根据在实验室条件下采集的三根被腐蚀大梁的点云,通过计算生成了 1421 种自然启发的腐蚀情况数据库,并在此数据库中对分类和回归 CNN 进行了训练。结果表明,误差分别低至 2.0% 和 3.3%。该方法在八个真实的腐蚀端上进行了验证,并用于评估一座在役桥梁。与分析或半分析方法相比,该框架有望以更高的准确性和效率评估老化的桥梁基础设施。
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引用次数: 0
Self-adaptive rotational electromagnetic energy generation as an alternative to triboelectric and piezoelectric transductions 自适应旋转电磁能生成,替代三电和压电转换。
Pub Date : 2024-07-31 DOI: 10.1038/s44172-024-00249-6
Pedro Rolo, João V. Vidal, Andrei L. Kholkin, Marco P. Soares dos Santos
Triboelectric and piezoelectric energy harvesters can hardly power most microelectronic systems. Rotational electromagnetic harvesters are very promising alternatives, but their performance is highly dependent on the varying mechanical sources. This study presents an innovative approach to significantly increase the performance of rotational harvesters, based on dynamic coil switching strategies for optimization of the coil connection architecture during energy generation. Both analytical and experimental validations of the concept of self-adaptive rotational harvester were carried out. The adaptive harvester was able to provide an average power increase of 63.3% and 79.5% when compared to a non-adaptive 16-coil harvester for harmonic translation and harmonic swaying excitations, respectively, and 83.5% and 87.2% when compared to a non-adaptive 8-coil harvester. The estimated energy conversion efficiency was also enhanced from ~80% to 90%. This study unravels an emerging technological approach to power a wide range of applications that cannot be powered by other vibrationally driven harvesters. Pedro Rolo and colleagues designed a rotational electromagnetic harvester using an adaptive coil-switching architecture. This adaptability significantly enhances the energy efficiency and power density, as demonstrated analytically and experimentally.
三电和压电能量收集器难以为大多数微电子系统提供动力。旋转电磁能量收集器是非常有前途的替代方案,但其性能高度依赖于不同的机械源。本研究提出了一种创新方法,基于动态线圈切换策略,优化能量产生过程中的线圈连接结构,从而显著提高旋转式能量收集器的性能。对自适应旋转式收割机的概念进行了分析和实验验证。与非自适应 16 线圈收割机相比,自适应收割机在谐波平移和谐波摇摆激励下的平均功率分别提高了 63.3% 和 79.5%;与非自适应 8 线圈收割机相比,平均功率分别提高了 83.5% 和 87.2%。估计的能量转换效率也从 ~80% 提高到 90%。这项研究揭示了一种新兴的技术方法,可为其他振动驱动式收割机无法提供动力的各种应用提供动力。
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引用次数: 0
Annotation-efficient deep learning for breast cancer whole-slide image classification using tumour infiltrating lymphocytes and slide-level labels 利用肿瘤浸润淋巴细胞和幻灯片级标签,为乳腺癌全幻灯片图像分类提供高效的深度学习注释
Pub Date : 2024-07-25 DOI: 10.1038/s44172-024-00246-9
Rashindrie Perera, Peter Savas, Damith Senanayake, Roberto Salgado, Heikki Joensuu, Sandra O’Toole, Jason Li, Sherene Loi, Saman Halgamuge
Tumour-Infiltrating Lymphocytes (TILs) are pivotal in the immune response against cancer cells. Existing deep learning methods for TIL analysis in whole-slide images (WSIs) demand extensive patch-level annotations, often requiring labour-intensive specialist input. To address this, we propose a framework named annotation-efficient segmentation and attention-based classifier (ANSAC). ANSAC requires only slide-level labels to classify WSIs as having high vs. low TIL scores, with the binary classes divided by an expert-defined threshold. ANSAC automatically segments tumour and stroma regions relevant to TIL assessment, eliminating extensive manual annotations. Furthermore, it uses an attention model to generate a map that highlights the most pertinent regions for classification. Evaluating ANSAC on four breast cancer datasets, we demonstrate substantial improvements over three baseline methods in identifying TIL-relevant regions, with up to 8% classification improvement on a held-out test dataset. Additionally, we propose a pre-processing modification to a well-known method, enhancing its performance up to 6%. Perera et al. developed a machine-learning approach for classifying whole-slide images into binary categories of tumour-infiltrating lymphocytes. They have benchmarked it against two established models and made the entire processing pipeline available as open source.
肿瘤浸润淋巴细胞(TIL)在针对癌细胞的免疫反应中起着关键作用。现有的全切片图像(WSI)TIL分析深度学习方法需要大量的斑块级注释,通常需要劳动密集型的专家输入。为了解决这个问题,我们提出了一个名为 "高效注释分割和基于注意力的分类器(ANSAC)"的框架。ANSAC 只需要玻片级标签就能将 WSI 划分为 TIL 分数高与低,二元类别由专家定义的阈值划分。ANSAC 自动分割与 TIL 评估相关的肿瘤和基质区域,省去了大量的人工标注。此外,它还利用注意力模型生成地图,突出显示最相关的分类区域。我们在四个乳腺癌数据集上对 ANSAC 进行了评估,结果表明,与三种基线方法相比,ANSAC 在识别 TIL 相关区域方面有了实质性的改进,在保留的测试数据集上,分类改进率高达 8%。此外,我们还对一种著名的方法提出了预处理修改建议,将其性能提高了 6%。Perera 等人开发了一种机器学习方法,用于将整张切片图像划分为肿瘤浸润淋巴细胞的二元类别。他们将该方法与两个成熟的模型进行了比对,并将整个处理管道作为开放源代码提供。
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引用次数: 0
Holistic analysis of a gliding arc discharge using 3D tomography and single-shot fluorescence lifetime imaging 利用三维断层扫描和单次荧光寿命成像对滑弧放电进行整体分析
Pub Date : 2024-07-24 DOI: 10.1038/s44172-024-00250-z
Sebastian Nilsson, David Sanned, Adrian Roth, Jinguo Sun, Edouard Berrocal, Mattias Richter, Andreas Ehn
Gliding arc plasmas, a versatile form of non-thermal plasma discharges, hold great promise for sustainable chemical conversion in electrified industrial applications. Their relatively high temperatures compared to other non-thermal plasmas, reactive species generation, and efficient energy transfer make them ideal for an energy-efficient society. However, plasma discharges are transient and complex 3D entities influenced by gas pressure, mixture, and power, posing challenges for in-situ measurements of chemical species and spatial dynamics. Here we demonstrate a combination of innovative approaches, providing a comprehensive view of discharges and their chemical surroundings by combining fluorescence lifetime imaging of hydroxyl (OH) radicals with optical emission 3D tomography. This reveals variations in OH radical distributions under different conditions and local variations in fluorescence quantum yield with high spatial resolution from a single laser shot. Our results and methodology offer a multidimensional platform for interdisciplinary research in plasma physics and chemistry. Sebastian Nilsson and colleagues capture the 3D structure of a gliding arc plasma and simultaneously apply a single shot fluorescence lifetime imaging from which the physical properties linked to the chemistry and molecular collision dynamics can be extracted.
滑动电弧等离子体是一种多用途的非热等离子体放电形式,在电气化工业应用的可持续化学转换方面大有可为。与其他非热等离子体相比,滑弧式等离子体具有相对较高的温度、反应性物种生成和高效的能量传递等特点,是实现高能效社会的理想选择。然而,等离子体放电是受气体压力、混合物和功率影响的瞬态复杂三维实体,给化学物种和空间动态的现场测量带来了挑战。在这里,我们展示了一种创新方法的组合,通过将羟基(OH)自由基的荧光寿命成像与光发射 3D 层析成像相结合,提供了放电及其周围化学环境的全面视图。这揭示了羟基自由基在不同条件下的分布变化以及荧光量子产率的局部变化,单次激光发射即可实现高空间分辨率。我们的成果和方法为等离子体物理和化学的跨学科研究提供了一个多维平台。Sebastian Nilsson 及其同事捕捉了滑弧等离子体的三维结构,并同时应用了单次荧光寿命成像,从中提取了与化学和分子碰撞动力学相关的物理特性。
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引用次数: 0
Genetically synthesized supergain broadband wire-bundle antenna 基因合成超增益宽带线束天线
Pub Date : 2024-07-23 DOI: 10.1038/s44172-024-00235-y
Dmytro Vovchuk, Gilad Uziel, Andrey Machnev, Jurgis Porins, Vjaceslavs Bobrovs, Pavel Ginzburg
High-gain antennas are essential hardware devices, powering numerous daily applications, including distant point-to-point communications, safety radars, and many others. While a common approach to elevate gain is to enlarge an antenna aperture, highly resonant subwavelength structures can potentially grant high gain performances. The Chu-Harrington limit is a standard criterion to assess electrically small structures and those surpassing it are called superdirective. Supergain is obtained in a case when internal losses are mitigated, and an antenna is matched to radiation, though typically in a very narrow frequency band. Here we develop a concept of a spectrally overlapping resonant cascading, where tailored multipole hierarchy grants both high gain and sufficient operational bandwidth. Our architecture is based on a near-field coupled wire bundle. Genetic optimization, constraining both gain and bandwidth, is applied on a 24-dimensional space and predicts 8.81 dBi realized gain within a half-wavelength in a cube volume. The experimental gain is 8.22 dBi with 13% fractional bandwidth. The developed approach can be applied across other frequency bands, where miniaturization of wireless devices is highly demanded. Vovchuk et al. utilized generic algorithms to demonstrate a multi-wire superdirective antenna. The small device not only surpasses common directivity bounds but also demonstrates a superbandwidth, thus making it useful for wireless communications.
高增益天线是必不可少的硬件设备,为众多日常应用提供动力,包括远距离点对点通信、安全雷达等。虽然提高增益的常见方法是扩大天线孔径,但高度谐振的亚波长结构也有可能带来高增益性能。朱-哈灵顿极限是评估电性小结构的标准,超过这一极限的结构被称为超导结构。超增益是在内部损耗得到缓解、天线与辐射相匹配的情况下获得的,但通常是在非常窄的频段内。在这里,我们提出了一个频谱重叠谐振级联的概念,在这个概念中,定制的多极层次结构既能获得高增益,又能提供足够的工作带宽。我们的架构基于近场耦合线束。遗传优化对增益和带宽都有限制,应用于 24 维空间,预测立方体体积内半波长范围内的实现增益为 8.81 dBi。实验增益为 8.22 dBi,带宽为 13%。所开发的方法可应用于对无线设备微型化要求很高的其他频段。Vovchuk 等人利用通用算法展示了一种多线超导天线。这种小型设备不仅超越了常见的指向性界限,而且还展示了超宽带,从而使其在无线通信中大显身手。
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引用次数: 0
A tunable multi-timescale Indium-Gallium-Zinc-Oxide thin-film transistor neuron towards hybrid solutions for spiking neuromorphic applications 面向尖峰神经形态应用混合解决方案的可调多时标铟镓锌氧化物薄膜晶体管神经元
Pub Date : 2024-07-23 DOI: 10.1038/s44172-024-00248-7
Mauricio Velazquez Lopez, Bernabe Linares-Barranco, Jua Lee, Hamidreza Erfanijazi, Alberto Patino-Saucedo, Manolis Sifalakis, Francky Catthoor, Kris Myny
Spiking neural network algorithms require fine-tuned neuromorphic hardware to increase their effectiveness. Such hardware, mainly digital, is typically built on mature silicon nodes. Future artificial intelligence applications will demand the execution of tasks with increasing complexity and over timescales spanning several decades. The multi-timescale requirements for certain tasks cannot be attained effectively enough through the existing silicon-based solutions. Indium-Gallium-Zinc-Oxide thin-film transistors can alleviate the timescale-related shortcomings of silicon platforms thanks to their bellow atto-ampere leakage currents. These small currents enable wide timescale ranges, far beyond what has been feasible through various emerging technologies. Here we have estimated and exploited these low leakage currents to create a multi-timescale neuron that integrates information spanning a range of 7 orders of magnitude and assessed its advantages in larger networks. The multi-timescale ability of this neuron can be utilized together with silicon to create hybrid spiking neural networks capable of effectively executing more complex tasks than their single-technology counterparts. Mauricio Velazquez Lopez and colleagues fabricate a neuromorphic node with a response time that spans a range of 7 orders of magnitude. Their technology is compatible with complementary metal-oxide semiconductors, which makes it suitable for a variety of machine learning tasks.
尖峰神经网络算法需要经过微调的神经形态硬件来提高效率。这种硬件主要是数字硬件,通常建立在成熟的硅节点上。未来的人工智能应用需要执行复杂度越来越高、时间跨度长达数十年的任务。现有的硅基解决方案无法有效满足某些任务的多时间尺度要求。铟镓锌氧化物薄膜晶体管具有低至阿伏安培的漏电流,可以缓解硅平台在时间尺度方面的不足。这些小电流可实现较宽的时标范围,远远超出各种新兴技术的可行性。在这里,我们估算并利用这些低漏电流创建了一个多时标神经元,它能整合跨越 7 个数量级范围的信息,并评估了它在更大网络中的优势。这种神经元的多时标能力可与硅一起用于创建混合尖峰神经网络,能够有效地执行比其单一技术同行更复杂的任务。Mauricio Velazquez Lopez 及其同事制造的神经形态节点的响应时间跨越了 7 个数量级。他们的技术与互补金属氧化物半导体兼容,因此适用于各种机器学习任务。
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引用次数: 0
Fast in-line failure analysis of sub-micron-sized cracks in 3D interconnect technologies utilizing acoustic interferometry 利用声学干涉测量法对三维互连技术中的亚微米级裂纹进行快速在线故障分析
Pub Date : 2024-07-19 DOI: 10.1038/s44172-024-00247-8
Priya Paulachan, René Hammer, Joerg Siegert, Ingo Wiesler, Roland Brunner
More than Moore technology is driving semiconductor devices towards higher complexity and further miniaturization. Device miniaturization strongly impacts failure analysis (FA), since it triggers the need for non-destructive approaches with high resolution in combination with cost and time efficient execution. Conventional scanning acoustic microscopy (SAM) is an indispensable tool for failure analysis in the semiconductor industry, however resolution and penetration capabilities are strongly limited by the transducer frequency. In this work, we conduct an acoustic interferometry approach, based on a SAM-setup utilizing 100 MHz lenses and enabling not only sufficient penetration depth but also high resolution for efficient in-line FA of Through Silicon Vias (TSVs). Accompanied elastodynamic finite integration technique-based simulations, provide an in-depth understanding concerning the acoustic wave excitation and propagation. We show that the controlled excitation of surface acoustic waves extends the contingency towards the detection of nm-sized cracks, an essential accomplishment for modern FA of 3D-integration technologies. Dr Roland Brunner and colleagues demonstrate how acoustic interferometry can be used to conduct a non-destructive and high-resolution failure analysis of through-silicon vias. They analyse the detection of nanometre-scale cracks and discuss how the opening angle of the acoustic lens impacts on performance.
超越摩尔定律的技术正推动半导体器件向着更高的复杂性和进一步微型化的方向发展。器件微型化对故障分析(FA)产生了强烈的影响,因为它引发了对高分辨率、低成本、高效率的非破坏性方法的需求。传统的扫描声学显微镜(SAM)是半导体行业故障分析不可或缺的工具,但其分辨率和穿透能力受到换能器频率的严重限制。在这项工作中,我们基于利用 100 MHz 镜头的 SAM 设置,采用声学干涉测量方法,不仅能获得足够的穿透深度,还能获得高分辨率,从而对硅通孔(TSV)进行有效的在线故障分析。伴随着基于弹性动力学有限积分技术的模拟,我们对声波的激发和传播有了深入的了解。我们的研究表明,表面声波的受控激发扩展了对纳米级裂纹的检测能力,这是现代三维集成技术 FA 的一项重要成就。罗兰-布鲁纳(Roland Brunner)博士及其同事展示了如何利用声学干涉测量法对硅通孔进行非破坏性和高分辨率的故障分析。他们分析了纳米级裂纹的检测,并讨论了声透镜的开口角度对性能的影响。
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引用次数: 0
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