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SOI sensing technologies for harsh environment 恶劣环境SOI传感技术
Pub Date : 2012-10-01 DOI: 10.1109/SMICND.2012.6400708
F. Udrea, S. Z. Ali, M. Brezeanu, V. Dumitru, O. Buiu, I. Poenaru, M. F. Chowdhury, A. De Luca, J. Gardner
This paper reviews and addresses certain aspects of Silicon-On-Insulator (SOI) technologies for a harsh environment. The paper first describes the need for specialized sensors in applications such as (i) domestic and other small-scale boilers, (ii) CO2 Capture and Sequestration, (iii) oil & gas storage and transportation, and (iv) automotive. We describe in brief the advantages and special features of SOI technology for sensing applications requiring temperatures in excess of the typical bulk silicon junction temperatures of 150oC. Finally we present the concepts, structures and prototypes of simple and smart micro-hotplate and Infra Red (IR) based emitters for NDIR (Non Dispersive IR) gas sensors in harsh environments.
本文回顾并解决了恶劣环境下绝缘体上硅(SOI)技术的某些方面。本文首先描述了在以下应用中对专用传感器的需求:(i)家用和其他小型锅炉,(ii)二氧化碳捕获和封存,(iii)石油和天然气储存和运输,以及(iv)汽车。我们简要地描述了SOI技术在温度要求超过150℃的典型体硅结温度的传感应用中的优势和特点。最后,我们提出了用于恶劣环境下NDIR(非色散红外)气体传感器的简单智能微热板和红外发射器的概念、结构和原型。
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引用次数: 12
Cuspidine-type Solid Oxides for Fuel Cell applications 用于燃料电池的cuspidin型固体氧化物
Pub Date : 2012-10-01 DOI: 10.1109/SMICND.2012.6400767
N. Cioateră
Cuspidine-type solid oxides having the compositions La4(Ti2O8)O2 and La4(Ti1.5Al0.5O8-δ)O2 were synthesized using a modified Pechini method at much lower temperature than the one corresponding to the state of the art ceramic method. Their thermal behaviour was evaluated using TG/DSC techniques. Reduction-oxidation processes were evidenced on both heating and cooling stages, their amplitude depending on gas atmosphere and sample composition.
采用改进的Pechini法在较低的温度下合成了具有La4(Ti2O8)O2和La4(Ti1.5Al0.5O8-δ)O2的cuspidin型固体氧化物。用TG/DSC技术评价了它们的热行为。还原-氧化过程在加热和冷却阶段均得到证实,其幅度取决于气体气氛和样品成分。
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引用次数: 0
Manipulating ballistic electrons by refraction at an interface between isotropic and anisotropic media 在各向同性和各向异性介质之间的界面上通过折射操纵弹道电子
Pub Date : 2012-10-01 DOI: 10.1109/SMICND.2012.6400682
A. Radu, S. Iftimie, D. Dragoman
Electron beams can be steered or collimated after refraction at an interface between an isotropic medium and an isotropic one. In this situation the refraction can be negative or positive as a function of the incidence angle. The materials' parameters influence the steering angle, whereas the energy of the ballistic electrons determines the degree of collimation.
电子束在各向同性介质和各向同性介质之间的界面发生折射后可以被引导或准直。在这种情况下,折射可以是负的或正的,作为入射角的函数。材料参数影响转向角,而弹道电子的能量决定准直程度。
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引用次数: 1
Charging and discharging processes in ALN dielectric films deposited by plasma assisted molecular beam epitaxy 等离子体辅助分子束外延沉积ALN介电膜的充放电过程
Pub Date : 2012-10-01 DOI: 10.1109/SMICND.2012.6400785
M. Koutsoureli, A. Adikimenakis, L. Michalas, E. Papandreou, A. Pantazis, G. Konstantinidis, A. Georgakilas, G. Papaioannou
In the present work the electrical properties of AlN polycrystalline films deposited at low temperatures by plasma-assisted molecular beam epitaxy (PA-MBE) are investigated. The polarization build-up during constant current injection as well as the depolarization process after the current stress have been investigated through monitoring voltage transients in Metal-Insulator-Metal (MIM) capacitors, in temperature range from 300 K to 400 K. Moreover, current-voltage characteristics obtained at different temperatures revealed that charge collection at low fields in these films occurs through variable range hopping.
本文研究了等离子体辅助分子束外延(PA-MBE)低温沉积AlN多晶薄膜的电学性能。通过监测金属-绝缘子-金属(MIM)电容器在300 ~ 400 K温度范围内的电压瞬变,研究了恒流注入过程中的极化形成和电流应力后的去极化过程。此外,在不同温度下获得的电流-电压特性表明,这些薄膜在低场下的电荷收集是通过变范围跳变进行的。
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引用次数: 1
A model of the voltage barrier in the channel of 4H-SiC normally-off JFET's 4H-SiC常关断JFET沟道中的电压势垒模型
Pub Date : 2012-10-01 DOI: 10.1109/SMICND.2012.6400762
L. Di Benedetto, S. Bellone
A model of the potential barrier in the channel of normally-off 4H-SiC JFET's is shown. It allows to evaluate the barrier height and the minority carrier density in the center of the channel for an arbitrary geometry and bias condition. The validity of the model is justified by comparing the model with numerical simulations carried out on various channel topologies.
给出了正常关断的4H-SiC JFET通道中的势垒模型。它允许在任意几何和偏置条件下评估通道中心的势垒高度和少数载流子密度。通过与各种信道拓扑的数值模拟结果进行比较,验证了该模型的有效性。
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引用次数: 4
Damping effects in MEMS resonators MEMS谐振器中的阻尼效应
Pub Date : 2012-10-01 DOI: 10.1109/SMICND.2012.6400695
M. Gologanu, C. Bostan, V. Avramescu, O. Buiu
Damping effects are very important in MEMS-based sensors and actuators. In this paper we use analytical models and finite element (FE) computations to quantify the energy losses due to viscous fluid damping, acoustic radiation and thermo-elastic damping. To treat the case where squeeze/slide film models can not be applied, we have implemented in a commercial FE package a new incompressible flow solver based on a gauge formulation. We are thus able to solve for full flows around complex 3D geometries in the frequency domain and predict viscous damping of resonant MEMS structures. The full methodology is exemplified on the response of a MEMS silicon resonator, including acoustic driving and piezoelectric sensing.
阻尼效应在基于mems的传感器和执行器中非常重要。本文采用解析模型和有限元计算来量化粘性流体阻尼、声辐射和热弹性阻尼所造成的能量损失。为了处理不能应用挤压/滑动膜模型的情况,我们在商业有限元软件包中实现了一种新的基于压力表公式的不可压缩流动求解器。因此,我们能够在频域中求解复杂三维几何形状周围的全流,并预测谐振MEMS结构的粘性阻尼。以MEMS硅谐振器的响应为例说明了完整的方法,包括声驱动和压电传感。
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引用次数: 15
Experimental observations in 2D phononic structure with granular crystals 颗粒晶体二维声子结构的实验观察
Pub Date : 2012-10-01 DOI: 10.1109/SMICND.2012.6400779
C. Pachiu
The author deal with a two-dimensional phononic structure (PC) composed by a matrix of nylon with cylindrical holes filled with air. The fabrication process is 3D selective laser sintering where a pulsed laser is used to raise a powder at the temperature of diffusion to a solid state. A piezoelectric transducer emits a longitudinal wave and another transducer acts as a receiver, this basic set-up leads to the experimental spectrum of the transmission coefficient in the PC. The results are compared with the numerical dates and dispersion curves (ω, k), the existences of forbidden frequency bands are experimentally shown. The extension of this experimental study into other phononic crystals could lead to new physical phenomena at different scales and novel design of engineering devices.
本文研究了一种二维声子结构(PC),它是由尼龙矩阵和充满空气的圆柱形孔组成的。制造过程是三维选择性激光烧结,其中脉冲激光被用来在扩散温度下将粉末提升到固体状态。一个压电换能器发射纵波,另一个换能器作为接收器,这种基本设置导致PC中透射系数的实验频谱。结果与数值数据和色散曲线(ω, k)进行了比较,实验证明了禁频带的存在。将实验研究扩展到其他声子晶体中,可能会在不同尺度上产生新的物理现象和新的工程器件设计。
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引用次数: 1
The influence of parasitic substrate diodes on load transient response of three-terminal adjustable voltage regulators 寄生衬底二极管对三端可调稳压器负载瞬态响应的影响
Pub Date : 2012-10-01 DOI: 10.1109/SMICND.2012.6400727
A. Bajenaru, L. Radoias, G. Dilimot, G. Brezeanu
This paper presents a detailed analysis of the influence of parasitic substrate diodes on the load transient response of three-terminal adjustable voltage regulators with the substrate connected to the output. Two simple solutions for improving the transient behaviour are then presented. A 1A voltage regulator was implemented in a single metal layer BCD technology. Using no additional chip area, the undershoot has been reduced from 250mV to less than 30mV, for an output voltage of 5V. The duration of the undershoot is accordingly reduced.
本文详细分析了寄生基板二极管对输出端接基板的三端可调稳压器负载暂态响应的影响。然后提出了改善暂态性能的两种简单方法。采用单金属层BCD技术实现了1A稳压器。在没有额外芯片面积的情况下,输出电压为5V时,欠冲从250mV降低到30mV以下。下降的持续时间也相应减少。
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引用次数: 0
Effects of electron irradiation on photoluminescence from 1-eV GaInNAs epilayers subject to thermal annealing 电子辐照对热退火后1 ev GaInNAs薄膜光致发光的影响
Pub Date : 2012-10-01 DOI: 10.1109/SMICND.2012.6400677
E. Pavelescu, R. Kudrawiec, N. Bǎlţǎţeanu, S. Spânulescu, M. Guina
We have investigated the influence of 7-MeV electron irradiation to the dose of 1.8×1016 cm-2 and subsequent rapid thermal annealing on luminescence performance of lattice-matched 1-eV GaInNAs-on-GaAs epilayers, grown by molecular beam epitaxy. The study has been done by means of 9-K photoluminescence (PL) in conjunction with 300-K photoreflectance (PR) spectroscopy and x-ray diffraction measurements. A drastic deterioration in PL has been seen upon the electron irradiation. When rapid thermally annealed at 800 oC for 1 min an enhancement in PL has been observed as compared to the reference non-irradiated sample. The irradiation-promoted enhancement in PL upon annealing has been accompanied by a small additional blue shift (BS) of the PL. This additional annealing-induced BS has been found to be mainly due to an irradiation-promoted enhancement in In-N bonds formation.
我们研究了7-MeV电子辐照对1.8×1016 cm-2剂量和随后的快速热退火对分子束外延生长的晶格匹配1-eV gaas -on- gaas涂层发光性能的影响。该研究是通过9-K光致发光(PL)结合300-K光反射(PR)光谱和x射线衍射测量来完成的。在电子辐照下,PL急剧恶化。当在800℃快速热退火1分钟时,与参考未辐照样品相比,观察到PL的增强。退火后辐照促进的PL增强伴随着PL的一个小的额外蓝移(BS)。这种额外的退火诱导的BS已被发现主要是由于辐照促进的in - n键形成的增强。
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引用次数: 0
A High performance piezoceramic material for a vibration transducer for balancing of rotating parts 一种用于平衡旋转部件的振动传感器的高性能压电陶瓷材料
Pub Date : 2012-10-01 DOI: 10.1109/SMICND.2012.6400781
C. Miclea, M. Cioangher, C. Miclea, L. Trupina, C. Miclea, L. Amarande, S. Spânulescu, R. Faibis
A high performance piezoceramic material of PZT type, doped with 6 atomic % W, was prepared in order to be used as sensing element for a vibration transducer used to equilibrate the motor-fan group of auto vehicles. The piezoelectric parameters of material showed high values which recommended it for the vibration transducer. The transducer consists of a ring shaped active element sandwiched between two steel blocks. The transducer works in quasistatic regime, at frequencies much lower than the resonance frequency, being tightly screwed in the measurement system by a metallic cover attached at the back end.
制备了一种掺6原子W的PZT型高性能压电陶瓷材料,用于汽车电机-风扇组平衡振动传感器的传感元件。材料的压电参数值较高,可作为振动传感器使用。换能器由夹在两个钢块之间的环形有源元件组成。换能器工作在准静态状态下,频率远低于共振频率,通过后端附着的金属盖紧紧地拧在测量系统中。
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CAS 2012 (International Semiconductor Conference)
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