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Understanding the Nonlinear Behavior of a New z-Axis MEMS Accelerometer With In-Plane Readout 一种新型面内读出z轴MEMS加速度计的非线性特性研究
IF 2.2 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-12-01 DOI: 10.1109/LSENS.2025.3638964
Yassine Banani;Christian Padovani;Giacomo Langfelder;Gabriele Gattere;Valentina Zega
This letter presents a comprehensive study of the source of nonlinearities in a novel z-axis microelectromechanical systems (MEMS) accelerometer fabricated using a two-silicon-layer fabrication process. The device features a unique mechanical architecture that converts the out-of-plane motion of the proof mass into linear in-plane displacement of the sensing frames, enabling efficient capacitive readout. Initial experimental characterization revealed an unexpected nonlinearity, exceeding predictions of the ideal mechanical model. To investigate the origin of this behavior, a detailed 3-D finite element method (FEM) analysis was performed, incorporating fabrication-induced effects such as substrate deformation and residual stresses. Simulations demonstrated that substrate deformation has negligible impact within the operational range, while residual prestresses on the structural silicon layer strongly influence the device response, producing nonlinearity levels consistent with experimental measurements. The close agreement between FEM predictions and experimental data validates the model and identifies residual prestresses on the structural silicon layer as the dominant factor affecting the device linearity. These insights provide a clear pathway for future design optimization, suggesting that careful control of residual stress and potential structural modifications can significantly improve the performance, linearity, and reliability of subsequent generations of z-axis MEMS accelerometers.
本文介绍了一种新型z轴微机电系统(MEMS)加速度计非线性源的综合研究,该加速度计采用两硅层制造工艺制造。该设备具有独特的机械结构,可将检测质量的平面外运动转换为传感框架的平面内线性位移,从而实现高效的电容读出。最初的实验表征揭示了意想不到的非线性,超出了理想力学模型的预测。为了研究这种行为的根源,进行了详细的三维有限元方法(FEM)分析,包括制造引起的影响,如基材变形和残余应力。模拟表明,衬底变形在工作范围内的影响可以忽略不计,而结构硅层上的残余预应力强烈影响器件响应,产生与实验测量一致的非线性水平。有限元预测结果与实验数据吻合较好,验证了模型的正确性,并确定了结构硅层上的残余预应力是影响器件线性度的主要因素。这些见解为未来的设计优化提供了明确的途径,表明仔细控制残余应力和潜在的结构修改可以显着提高后续几代z轴MEMS加速度计的性能,线性度和可靠性。
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引用次数: 0
Accurate Radar-Based Detection of Sleep Apnea Using Overlapping Time-Interval Averaging 基于雷达的睡眠呼吸暂停的重叠时间间隔平均精确检测
IF 2.2 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-12-01 DOI: 10.1109/LSENS.2025.3639141
Kodai Hasegawa;Shigeaki Okumura;Hirofumi Taki;Hironobu Sunadome;Satoshi Hamada;Susumu Sato;Kazuo Chin;Takuya Sakamoto
Radar-based respiratory measurement is a promising tool for the noncontact detection of sleep apnea. Our team has reported that apnea events can be accurately detected using the statistical characteristics of the amplitude of respiratory displacement. However, apnea and hypopnea events are often followed by irregular breathing, reducing the detection accuracy. This study proposes a new method to overcome this performance degradation by repeatedly applying the detection method to radar data sets corresponding to multiple overlapping time intervals. Averaging the detected classes over multiple time intervals gives an analog value between 0 and 1, which can be interpreted as the probability of apnea and hypopnea events occurring. We show that the proposed method can mitigate the effect of irregular breathing that occurs after apnea and hypopnea events. The performance was validated using overnight recordings from seven patients, showing a 1.4-fold improvement in apnea and hypopnea event detection compared with the nonoverlapping method.
基于雷达的呼吸测量是一种很有前途的非接触检测睡眠呼吸暂停的工具。我们的团队已经报道,呼吸暂停事件可以使用呼吸位移幅度的统计特征准确地检测到。然而,呼吸暂停和低通气事件往往伴随着不规则的呼吸,降低了检测的准确性。本研究提出了一种克服这种性能下降的新方法,即对多个重叠时间间隔对应的雷达数据集重复应用该检测方法。在多个时间间隔内对检测到的类别进行平均,得到0到1之间的模拟值,这可以解释为发生呼吸暂停和呼吸不足事件的概率。我们表明,所提出的方法可以减轻呼吸暂停和低通气事件后发生的不规则呼吸的影响。使用来自7名患者的夜间记录验证了该性能,显示与非重叠方法相比,呼吸暂停和低通气事件检测改善了1.4倍。
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引用次数: 0
A Data-Driven Approach to Leak Identification and Severity Analysis in Pipelines Using Acoustic Sensing and Deep Learning 基于声学传感和深度学习的管道泄漏识别和严重程度分析数据驱动方法
IF 2.2 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-28 DOI: 10.1109/LSENS.2025.3638602
Mayukh Biswas;Aditya Narayan;Debaudh Ghosh;Samriddha Ganguly;Raj Rakshit;Chirabrata Bhaumik
Gas pipeline leaks in industrial environment can be hazardous, necessitating timely remediation. Owing to the shortcomings of contact-based sensing methods, noncontact localization and diagnostics is necessary. Leak severity, alongside leak localization, is a critical parameter requiring long-term monitoring due to its nonstationary nature. Existing algorithms become computationally expensive in such conditions. Thus, a lightweight data-driven approach is necessary. It has been experimentally found that during training phase, the leak severity gets coupled with leak position due to the directional nature of a leak with respect to the sensor. This work proposes a leak-position-informed neural network training method for leak severity classification. The proposed approach has been compared with various training and testing methods to evaluate their ability to predict leak severity. The proposed method yields accuracy of 93% and 83% in clean and noisy environment over a range of experimental conditions.
工业环境下的燃气管道泄漏具有危险性,需要及时修复。由于接触式传感方法的不足,非接触式定位和诊断是必要的。泄漏严重程度和泄漏定位是一个关键参数,由于其非平稳性,需要长期监测。在这种情况下,现有的算法在计算上变得非常昂贵。因此,需要一种轻量级的数据驱动方法。实验发现,在训练阶段,由于泄漏相对于传感器的方向性,泄漏严重程度与泄漏位置耦合。本文提出了一种基于泄漏位置的泄漏严重程度分类神经网络训练方法。该方法已与各种训练和测试方法进行了比较,以评估其预测泄漏严重程度的能力。在一系列实验条件下,该方法在清洁和噪声环境下的精度分别为93%和83%。
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引用次数: 0
GYTRIX Quartz MEMS Gyro: From Concept to Northfinding Measurements GYTRIX石英MEMS陀螺:从概念到寻北测量
IF 2.2 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-28 DOI: 10.1109/LSENS.2025.3638591
O. Le Traon;J. Bonhomme;L. Hudeley;M. Duquesnoy;C. Duclos;A. Andrieux-Ledier;P. Lavenus;J. Guerard;R. Levy
This letter presents the concept of a quartz crystal Coriolis vibrating gyroscope named GYTRIX (GYro for TRIgonal piezoelectric Xtal) able to operate in matched modes using force to rebalance or in the whole angle mode. The symmetry of the design that respects quartz crystal trigonal symmetry enables two degenerated modes with nominally identical thermomechanical behavior. This new gyro concept is presented, along with the first step in its development roadmap: the design of a separated-mode open-loop gyro transducer, in order to validate the concept with existing open-loop electronics. Prototype realization and experimental measurements made it possible to validate theoretical angular random walk of 0.017°/√h and to demonstrate gyrocompass operation.
这封信介绍了一个名为GYTRIX (GYro for TRIgonal压电Xtal)的石英晶体科里奥利振动陀螺仪的概念,该陀螺仪能够在匹配模式下使用力来重新平衡或在整个角度模式下运行。设计的对称性尊重石英晶体的三角对称,使两种简并模式具有名义上相同的热力学行为。提出了这种新的陀螺仪概念,以及其发展路线图的第一步:设计一种分离模式开环陀螺仪换能器,以便与现有的开环电子设备验证该概念。样机的实现和实验测量使得理论角度随机游走0.017°/√h和陀螺罗经操作的验证成为可能。
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引用次数: 0
Investigating the Impact of Noble Metal Nanoparticle Decorated Electrodes on Electrochemical Sensing of Hemoglobin 研究贵金属纳米粒子修饰电极对血红蛋白电化学传感的影响
IF 2.2 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-27 DOI: 10.1109/LSENS.2025.3638008
Aindrila Roy;Baishali Basak;Rajdeep Ganguly;Subhadip Chakraborty;Ananya Barui;Rajen Haldar;Sanatan Chattopadhyay
The work explores the interactions of hemoglobin (Hb) with noble metal nanoparticles (NPs) to probe its redox activity. Screen-printed electrodes (SPEs) modified with Au, Pt, and Pd NPs exhibit significant improvement in the electrochemical signals of Hb. Differential pulse voltammetry measurements show maximum Fe3+ reduction currents of Hb using AuNP/SPE. Such response is attributed to NP-induced conformational changes in Hb. Fourier transform infrared spectroscopy reveals that NPs promote protein unfolding, which leads to exposure of the iron-containing heme group from the hydrophobic pockets of Hb. Surface tension and contact angle analysis of Hb further support such observation. AuNPs induce maximum conformational alterations in Hb, consequently facilitating effective electron transport.
这项工作探讨血红蛋白(Hb)与贵金属纳米颗粒(NPs)的相互作用,以探测其氧化还原活性。用Au、Pt和Pd纳米粒子修饰的丝网印刷电极(spe)对Hb的电化学信号有显著改善。差分脉冲伏安法测量显示,使用AuNP/SPE Hb的最大Fe3+还原电流。这种反应归因于np诱导的Hb构象变化。傅里叶变换红外光谱显示,NPs促进蛋白质展开,导致含铁血红素基团从Hb的疏水口袋中暴露出来。Hb的表面张力和接触角分析进一步支持了这一观察结果。aunp诱导Hb的最大构象改变,从而促进有效的电子传递。
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引用次数: 0
Through-Wall Human Pose Estimation With WiFi 通过墙壁的人体姿态估计与WiFi
IF 2.2 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-27 DOI: 10.1109/LSENS.2025.3637753
Xin-Min Pan;Siyuan Yang;Kah Chan Teh;Sirajudeen Gulam Razul;Alex Chichung Kot
The loss of information from occlusions increases the complexity of remote sensing, with vision-based methods failing in situations of full occlusion. Radio frequency (RF) methods in the WiFi spectrum rely on signals that can pass through some obstacles, such as walls, thereby overcoming known limitations of vision-based perception, such as poor lighting and obstruction of the subject. As such, this letter illustrates a proof-of-concept of through-wall human pose estimation (HPE) using WiFi-like signals, proposing a dual-channel transmitter–receiver setup behind two orthogonal walls. Using a matched filter, four sets of data are collected simultaneously, corresponding to two sets of monostatic and bistatic Doppler data. Leveraging the benefits of skip connections in convolutional neural networks, the experiments employ existing deep learning architectures, achieving an average error in the same order of magnitude as state-of-the-art RF HPE methods. The usage of all four sets of data yields a 62.01-mm average error across all joints and actions, and an average error of 73.13 mm for a single-channel setup with just a single set of monostatic Doppler data.
遮挡信息的丢失增加了遥感的复杂性,基于视觉的方法在完全遮挡的情况下失败。WiFi频谱中的射频(RF)方法依赖于可以穿过某些障碍物(如墙壁)的信号,从而克服了已知的基于视觉的感知限制,例如光线不足和主体的障碍物。因此,这封信说明了使用类似wifi信号的穿墙人体姿势估计(HPE)的概念验证,提出了在两个正交的墙后面设置双通道收发器。采用匹配滤波器,同时采集四组数据,分别对应两组单站和双站多普勒数据。利用卷积神经网络中跳过连接的优势,实验采用现有的深度学习架构,实现了与最先进的RF HPE方法相同数量级的平均误差。所有四组数据的使用在所有关节和动作中产生62.01 mm的平均误差,而单通道设置仅使用一组单稳态多普勒数据的平均误差为73.13 mm。
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引用次数: 0
Concurrent Battery-Free Wireless Strain Sensing Using Backscatter Communication 使用反向散射通信的并行无电池无线应变传感
IF 2.2 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-27 DOI: 10.1109/LSENS.2025.3637817
Jin Mitsugi;Osamu Tokumasu;Masashi Owaki
This letter presents a novel battery-free wireless strain sensing system consisting of an interrogator and single or multiple streaming sensors. A streaming sensor comprises a radio frequency integrated circuit (RFIC), a commercial off-the-shelf strain gauge, and an analog-to-digital converter (ADC). Backscatter communication in the 920 MHz band is employed to both power the sensor and to establish communication. The emerging ISO/IEC 18000-65 (FDIS), which supports concurrent backscatter streaming, is adopted as the communication protocol. The ADC sampling rate and the backscatter frequency channel are over-the-air configurable through a glue logic between the RFIC and the ADC. The proposed system was evaluated in an indoor propagation environment. It was experimentally demonstrated that the proposed system can achieve an error free concurrent strain measurement with a measurement resolution in the order of $10^{-5}$ and reading distance of 1.8 m using a 4-W effective isotropic radiation power software defined interrogator.
这封信提出了一种新型的无电池无线应变传感系统,由一个询问器和单个或多个流传感器组成。流传感器包括射频集成电路(RFIC)、商用应变计和模数转换器(ADC)。920mhz频段的反向散射通信用于为传感器供电和建立通信。采用新兴的支持并发后向散射流的ISO/IEC 18000-65 (FDIS)作为通信协议。通过RFIC和ADC之间的粘合逻辑,ADC的采样率和反向散射频率通道是空中可配置的。在室内传播环境中对该系统进行了评估。实验表明,该系统使用4 w有效各向同性辐射功率软件定义的询问器,可以实现无误差的并行应变测量,测量分辨率为10^{-5}$,读取距离为1.8 m。
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引用次数: 0
Design and Application of Passive Wireless Testing System 无源无线测试系统的设计与应用
IF 2.2 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-26 DOI: 10.1109/LSENS.2025.3637757
Junzhe Shen;Huiyang Yu;Junjie Zhang;Chentao Wang;Jianqiu Huang
This letter designs and implements a passive wireless resonant frequency testing system of sensors based on point frequency measurement technology, aiming to address the issues of high hardware costs and excessive power consumption in traditional sweep-frequency techniques for wireless sensor networks. The system achieved rapid resonance frequency calibration through fixed-frequency excitation, optimized impedance matching circuit design, and efficient coordination of RF transceiver modules. In order to estimate the performance of the passive wireless test system, it is used as an LC-resonant sensor for displacement and pressure detection. Displacement tests revealed a linear frequency tuning characteristic of −2.33 MHz/mm; pressure tests exhibited nonlinear sensitivity, showing a sensitivity of −1.25 MHz/N in the low-pressure region (0–20 N) and −0.04 MHz/N in the high-pressure region (20–100 N). Test results confirmed reduced power consumption, a significantly improved signal-to-noise ratio, a frequency measurement standard deviation of 1.47 MHz, and a maximum frequency offset of 3.36 MHz compared to traditional sweep-frequency approaches. This letter provides a feasible technical solution for low-cost, high-precision monitoring in wireless sensor networks.
本文设计并实现了一种基于点频测量技术的传感器无源无线谐振频率测试系统,旨在解决传统无线传感器网络扫频技术硬件成本高、功耗大的问题。该系统通过定频激励、优化阻抗匹配电路设计和射频收发模块的高效协调,实现了快速谐振频率校准。为了评估无源无线测试系统的性能,将其作为lc谐振传感器用于位移和压力检测。位移测试显示线性频率调谐特性为- 2.33 MHz/mm;压力测试表现出非线性灵敏度,在低压区(0-20 N)的灵敏度为- 1.25 MHz/N,在高压区(20-100 N)的灵敏度为- 0.04 MHz/N。测试结果证实,与传统扫频方法相比,该方法降低了功耗,显著提高了信噪比,频率测量标准差为1.47 MHz,最大频率偏移为3.36 MHz。本文为无线传感器网络中的低成本、高精度监测提供了一种可行的技术解决方案。
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引用次数: 0
An MoS$_{2}$/GO-Based Thin-Film Transistor for Region-Dependent Tunable Detection of NO$_{x}$ Gases 基于MoS$_{2}$/ go薄膜晶体管的NO$_{x}$气体区域可调检测
IF 2.2 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-25 DOI: 10.1109/LSENS.2025.3636894
Sukanya Mahalik;Bidesh Mahata;Sayan Dey
In this work, we demonstrated an MoS$_{2}$/Graphene oxide (GO) inverted back-gated thin-film transistor (TFT) for selective detection of NO$_{x}$ in dual-operational regimes. Few-layered MoS$_{2}$ was synthesized by liquid exfoliation technique while GO was synthesized by the modified Hummer’s method. The as-fabricated device was exposed to calculated concentrations of NO and NO$_{2}$ gases varying from 1 to 30 ppm, and its sensing performance was analyzed. The device demonstrated a distinct region-dependent selectivity under ambient conditions (300 K), detecting NO in the saturation region at V$_{GS}$ of −1 V and a V$_{DS}$ of −4.5 V, achieving a maximum response of 58% at 30 ppm of NO. In contrast, a highly selective response to NO$_{2}$ under similar gate bias conditions was observed in the linear region, with a V$_{DS}$ of −2 V, a response of 40% at 30 ppm of NO$_{2}$. The limit of detection for NO and NO$_{2}$ at the abovementioned optimized conditions was found to be 27.5 and 195 ppb, respectively. Hence, the proposed device, with its region-based sensing capabilities, offers a cost-effective and low-power alternative to traditional gas sensor arrays by reducing the effective device dimensions and associated design complexities.
在这项工作中,我们展示了一种MoS$_{2}$/氧化石墨烯(GO)倒背门控薄膜晶体管(TFT),用于在双操作状态下选择性检测NO$_{x}$。采用液体剥离法合成了少层MoS$_{2}$,采用改进的Hummer法合成了氧化石墨烯。将制备好的器件暴露于计算浓度为1 ~ 30ppm的NO和no_bb_0 $气体中,分析其传感性能。该装置在环境条件下(300 K)表现出明显的区域依赖选择性,在V$ {GS}$为- 1 V和V$ {DS}$为- 4.5 V的饱和区域检测NO,在30 ppm的NO下达到58%的最大响应。相比之下,在相似的栅偏置条件下,在线性区域观察到对NO$_{2}$的高度选择性响应,V$_{DS}$为- 2 V,在30 ppm的NO$_{2}$下响应为40%。在上述优化条件下,NO和NO的检出限分别为27.5和195 ppb。因此,该装置具有基于区域的传感能力,通过减小有效器件尺寸和相关设计复杂性,为传统气体传感器阵列提供了一种经济高效、低功耗的替代方案。
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引用次数: 0
LiDAR Sensor-Based Dual-Scale Fusion Approach for Bird’s-Eye View Sensing in Autonomous Vehicles 基于LiDAR传感器的自动驾驶汽车鸟瞰图双尺度融合方法
IF 2.2 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-24 DOI: 10.1109/LSENS.2025.3636670
Thurimerla Prasanth;Ram Prasad Padhy;B Sivaselvan
Sensors play a fundamental role in sensing the environment for autonomous vehicle perception, providing accurate and reliable data essential for understanding and navigating the surroundings. LiDAR sensors are widely used for their ability to generate detailed 3-D point cloud data of the surroundings. Bird’s-Eye View (BEV) detection utilizes these point cloud data to identify objects, such as cars and cyclists, from a top–down perspective. This LiDAR sensor-based perception approach is essential for understanding complex environments and ensuring safe navigation in real-time driving scenarios. This letter presents DSFNet, a compact LiDAR-only network for BEV perception. The model integrates an efficient pillar-based encoder with a proposed dual-scale fusion (DSF) backbone, designed to mitigate performance and complexity issues associated with LiDAR sensors. The backbone reduces parameter count by approximately 50% compared to standard architectures while maintaining competitive detection accuracy. By capturing both local detail and global context, DSFNet enhances feature representation for sparse and irregular LiDAR data. Evaluations on the official KITTI BEV benchmark demonstrate strong performance in car and cyclist detection, highlighting suitability for real-time sensor-driven applications.
传感器在自动驾驶汽车感知环境中发挥着重要作用,为理解和导航周围环境提供准确可靠的数据。激光雷达传感器因其能够生成周围环境的详细三维点云数据而被广泛使用。鸟瞰(BEV)检测利用这些点云数据从自上而下的角度识别物体,如汽车和骑自行车的人。这种基于激光雷达传感器的感知方法对于理解复杂环境和确保实时驾驶场景中的安全导航至关重要。这封信介绍了DSFNet,一个紧凑的纯激光雷达网络,用于BEV感知。该模型集成了高效的柱式编码器和双尺度融合(DSF)主干网,旨在缓解激光雷达传感器的性能和复杂性问题。与标准体系结构相比,主干减少了大约50%的参数计数,同时保持了具有竞争力的检测精度。通过捕获局部细节和全局背景,DSFNet增强了稀疏和不规则激光雷达数据的特征表示。对官方KITTI BEV基准的评估显示,在汽车和自行车检测方面表现出色,突出了实时传感器驱动应用的适用性。
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引用次数: 0
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IEEE Sensors Letters
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