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2006 IEEE International Conference on Semiconductor Electronics最新文献

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Fabrication of Platinum Membrane on Silicon for MEMS Microphone MEMS传声器用硅基铂膜的制备
Pub Date : 2006-11-01 DOI: 10.1109/SMELEC.2006.381010
A. A. Hamzah, B. Y. Majlis, I. Ahmad
Platinum membrane with silicon nitride layer is fabricated and analyzed. The membrane, which is designed for MEMS microphone application, is fabricated using sputter platinum and CVD silicon nitride. Membranes with sandwich layer of platinum-nitride-platinum with thickness of 6.35 mum are successfully fabricated. Deflection of the fabricated membrane corresponding to given pressure is measured using Tencor surface profiler. It is observed that deflection at its center is proportional to applied pressure for pressure between 20 Pa to 200 Pa. Average center deflection for applied pressure of 200 Pa is measured to be 0.41 mum. The fabricated platinum membrane is deemed suitable for MEMS microphone application due to its linear deflection response in acoustic pressure range.
制备了具有氮化硅层的铂膜,并对其进行了分析。该薄膜由溅射铂和CVD氮化硅制成,专为MEMS麦克风应用而设计。成功制备了厚度为6.35 μ m的铂-氮化铂夹层膜。利用Tencor表面剖面仪测量所制膜在给定压力下的挠度。我们观察到,当压力在20 Pa到200 Pa之间时,其中心的挠度与施加的压力成正比。施加200帕压力时,平均中心挠度测量为0.41毫微米。所制备的铂膜在声压范围内具有良好的线性偏转响应,适合MEMS传声器的应用。
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引用次数: 2
Nanoporous InN Films Synthesized using Photoelectrochemical (PEC) Wet Etching 利用光电化学(PEC)湿法蚀刻合成纳米多孔InN薄膜
Pub Date : 2006-11-01 DOI: 10.1109/SMELEC.2006.380706
L. S. Chuah, Z. Hassan, F. Yam, H. Abu Hassan
In this study, we have investigated the structural characteristics of nanoporous InN prepared by photoelectrochemical (PEC) wet etching. The PEC process which uses various 0.2, 0.5 and 1.0 wt% aqueous potassium hydroxide (KOH) solution utilizes photogenerated electron-hole pairs to enhance oxidation and reduction reactions taking place in an electrochemical cell. For etching condition using 0.2 wt% KOH solution (sample B), surface became relatively rough, however no pore was found. SEM images show that average pore size for sample C (0.5 wt% KOH solution) and sample D (1.0 wt% KOH solution) was around 30 to 60 nm. However, from our analysis of porous InN prepared by varying the etching condition, the non uniform etch rate across the sample surface is limited by diffusion processes. From the X-ray diffraction scan, porous samples show a broadening of the full width at half maximum with respect to the as-grown InN epilayer. On the other hand, the peak shift for InN (0002) and GaN (0002) diffraction planes was inconsistent. This can be explained by the relatively smaller statistical size distribution of the pores.
在这项研究中,我们研究了光电化学(PEC)湿蚀刻法制备的纳米多孔InN的结构特性。PEC工艺使用各种0.2、0.5和1.0 wt%的氢氧化钾水溶液(KOH),利用光产生的电子空穴对来增强电化学电池中发生的氧化和还原反应。在0.2 wt% KOH溶液(样品B)的蚀刻条件下,表面变得相对粗糙,但没有发现孔隙。SEM图像显示,样品C (0.5 wt% KOH溶液)和样品D (1.0 wt% KOH溶液)的平均孔径约为30 ~ 60 nm。然而,从我们对不同蚀刻条件制备的多孔InN的分析来看,样品表面的非均匀蚀刻速率受到扩散过程的限制。从x射线衍射扫描中可以看出,多孔样品的全宽度比生长的InN涂层最大增宽了一半。另一方面,InN(0002)和GaN(0002)衍射面的峰移不一致。这可以用孔隙的统计尺寸分布相对较小来解释。
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引用次数: 3
Effect of Mesa Spacing on the Electrical Properties of Mesa Isolation in High Electron Mobility Transistor Structures 高电子迁移率晶体管结构中台地间距对台地隔离电性能的影响
Pub Date : 2006-11-01 DOI: 10.1109/SMELEC.2006.380682
H. Hashim, M. K. Othman, M. N. Osman, A. Dolah, M. Yahya
This paper report effects of variation spacing of mesa isolation on pHEMT substrate in order get an optimum isolated area. The multilayer pHEMT substrate was used as a substrate and wet etching techniques have been applied to form the islands. The citric mixture used is C2H8O7:H2O2:H2O with ratio of 4:1:1. The mesa spacing used in this study was varies at 570, 792 and 835 mum. The etch time for each spacing was fixed at 3 minutes. The electrical effect of mesa isolation spacing was characterized through current-voltage curve. It was found that the 570 mum mesa spacing shows optimum current value for mesa isolation. This indicated that 570 mum mesa spacing etch with citric acid mixture of 4:1:1 ratio for 3 minutes etch time can produce optimum current for application of pHEMT device.
本文报道了不同隔震间距对pHEMT衬底的影响,以获得最佳隔震面积。采用多层pHEMT衬底作为衬底,采用湿法蚀刻技术形成岛状结构。使用的柠檬酸混合物为C2H8O7:H2O2:H2O,比例为4:1:1。在本研究中使用的台面间距在570、792和835之间变化。每个间距的蚀刻时间固定为3分钟。通过电流-电压曲线表征了台面隔离间距的电学效应。结果表明,570ma的台面间距是台面隔离的最佳电流值。结果表明,以4:1:1比例的柠檬酸溶液进行570ma台面间距蚀刻,蚀刻时间为3分钟,可以产生适合pHEMT器件应用的最佳电流。
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引用次数: 0
Design of Single-Stage Folded-Cascode Gain Boost Amplifier for 100mW 10-bit 50MS/s Pipelined Analog-to-Digital Converter 用于100mW 10位50MS/s流水线模数转换器的单级折叠级码增益放大器设计
Pub Date : 2006-11-01 DOI: 10.1109/SMELEC.2006.380747
R. Musa, Y. Yusoff, T. Yew, M. Ahmad
This paper presents the design and simulation of high speed, high gain and low power fully differential operational amplifier (op-amp) implemented in 0.35 um CMOS technology. The op-amp was designed for sample-and-hold stage of 100 mW 10-bit 50 MS/s pipelined analog-to-digital converter. A topology of single-stage folded-cascode with gain boosting technique is employed in this op-amp. The simulated op-amp achieves a DC gain of 95dB, unity gain bandwidth of 412 MHz and phase margin of 75 degrees. The settling time is 7.5 ns and the op-amp consumes power 12.8 mW with supply voltage of 3V.
介绍了一种基于0.35 um CMOS技术的高速、高增益、低功耗全差分运算放大器的设计与仿真。该运放设计用于100mw 10位50 MS/s流水线模数转换器的采样保持级。该运放采用了单级折叠级联码的拓扑结构和增益提升技术。仿真运算放大器的直流增益为95dB,单位增益带宽为412 MHz,相位裕度为75度。稳定时间为7.5 ns,输入电压为3V时,运算放大器功耗为12.8 mW。
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引用次数: 20
TCAD Simulation of STI Stress Effect on Active Length for 130nm Technology STI应力对130nm工艺有效长度影响的TCAD仿真
Pub Date : 2006-11-01 DOI: 10.1109/SMELEC.2006.380798
W.R.W. Ahmad, A. Kordesch, I. Ahmad, P. Yew
In this paper we investigated the compressive stress in the channel induced by shallow trench isolation (STI) for different active length (Sa). We simulate both PMOS and NMOS for 130 nm gate length with five active lengths (Sa=0.34, 0.5, 0.8,1.0, 5.0 um) by using TCAD simulation and compare to experimental data from wafers fabricated using Silterra's 130 nm Technology. When the Sa is decreasing, Sxx stress becomes more compressive for both P- and N- MOS while the Syy component becomes more tensile, causing hole mobility improvement in PMOS and electron mobility degradation in NMOS. When Sa decreases from 5 um to 0.34 um, the Idsat for NMOS is degraded 6.6% and Idsat for PMOS is increased 6%. This means narrower Sa will increases hole mobility performance in p-channel but degrade the electron mobility in n-channel. These results agree with the experimental data.
本文研究了不同有效长度(Sa)下浅沟隔离(STI)引起的通道内压应力。我们利用TCAD模拟了PMOS和NMOS在130 nm栅极长度下的五种有效长度(Sa=0.34, 0.5, 0.8,1.0, 5.0 um),并与使用Silterra的130 nm技术制造的晶圆的实验数据进行了比较。当Sa减小时,P-和N- MOS的Sxx应力变得更压缩,Syy组分变得更拉伸,导致PMOS的空穴迁移率提高,NMOS的电子迁移率下降。当Sa从5 um降低到0.34 um时,NMOS的Idsat降低了6.6%,PMOS的Idsat增加了6%。这意味着更窄的Sa会提高p通道中的空穴迁移率,但会降低n通道中的电子迁移率。这些结果与实验数据相吻合。
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引用次数: 3
Analysis of a Bilaminar Circular Piezoelectric Actuator for Micropumps 微泵用双层圆形压电驱动器的分析
Pub Date : 2006-11-01 DOI: 10.1109/SMELEC.2006.381029
J. Johari, B. Majlis
This paper presents a general approach to the problem of modeling diaphragm micropumps. This study utilized the finite element method to optimize the deflection of a bilaminar circular plate which consist of a single piezoelectric disc as an actuator and bonded to an elastic diaphragm of certain dimensions. Optimum actuator dimensions were fixed for a determined diaphragm dimensions.
本文提出了一种解决膜片微泵建模问题的一般方法。本文利用有限元方法对以单压电盘为作动器,与一定尺寸的弹性膜片结合的双层圆板的挠度进行了优化。对于确定的膜片尺寸,确定了最佳执行机构尺寸。
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引用次数: 2
Reduction of Turn-On Voltage in a Single Layer Structured Organic Light-Emitting Diode using Nanocomposites SiO2:PHF 利用纳米复合材料SiO2:PHF降低单层结构有机发光二极管的导通电压
Pub Date : 2006-11-01 DOI: 10.1109/SMELEC.2006.381025
T. Aziz, M. Salleh, M. Umar, M. Yahaya
Polymer light-emitting diode with ITO/PHF/Al structure has been fabricated, where PHF is poly (4,4'-diphenylene diphenylvinylene). The original device has turn-on voltage at 18.0 V. A reduction of turn-on voltage of this device is achieved by using the nanocomposites layer consisting of PHF and SiO2 nanoparticles as an emitting layer in a single structured ITO/nanocomposite/Al polymer light emitting diode. The SiO2: PHF was prepared by mixing 1.0 ml of PHF with 0.05 ml of SiO2 colloidal solution. It was found that the spin-coated nanocomposites has reduced the OLED turn-on voltage to 9.0 V.
制备了ITO/PHF/Al结构的聚合物发光二极管,其中PHF为聚(4,4′-二苯基乙烯)。原始设备的导通电压为18.0 V。在单结构ITO/纳米复合材料/Al聚合物发光二极管中,采用由PHF和SiO2纳米颗粒组成的纳米复合材料层作为发射层,实现了器件导通电压的降低。将1.0 ml PHF与0.05 ml SiO2胶体溶液混合制备SiO2: PHF。结果表明,自旋涂层纳米复合材料使OLED的导通电压降至9.0 V。
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引用次数: 0
Organic Light Emitting Diode (OLED) Using Different Hole Transport and Injecting Layers 采用不同空穴传输和注入层的有机发光二极管(OLED
Pub Date : 2006-11-01 DOI: 10.1109/SMELEC.2006.381034
M. K. Othman, M. M. Salleh, A. Mat
This paper reports the various structures and performances improvements using different hole transporting layer in OLED based on DPVBi as emitter. Here the indium tin oxide (ITO) used as an anode, copper pthalocyanine (CuPc) as the hole injecting layer, PEDOT:PSS and poly-9- vinylcarbozole (PVK) as hole transporting layer, 4,4'-bis(2,2'diphenilvinyl)-1,1' -biphenyl (DPVBi) as the blue emitting layer and aluminum (Al) as the cathode. The CuPc and DPVBi were prepared by thermal evaporation while the PEDOT:PSS and PVK films were prepared using spin coating technique. The effect of inserting additional layer of CuPc, PVK and PEDOT:PSS between anode and the emitting layers was analyzed through the current-voltage (IV) curves and the electroluminescence spectra. The additional layer structure was found to increase the maximum luminance compared to that one of single layer device. The used of PVK as hole transporting layer has improved the diode properties of the device and able to prevent the device from short circuits. The optimized DPVBi layer thickness was observed at 56 nm and the insertion of 10 nm CuPc hole injecting layer show the device reduce it turn on voltage from 7.0 V to 6.5 V.
本文报道了基于DPVBi作为发射极的OLED中不同空穴传输层的各种结构和性能改进。本文以氧化铟锡(ITO)为阳极,酞菁铜(CuPc)为空穴注入层,PEDOT:PSS和聚9-乙烯基carbozole (PVK)为空穴传输层,4,4'-双(2,2'二苯基乙烯基)-1,1' -联苯(DPVBi)为蓝色发射层,铝(Al)为阴极。采用热蒸发法制备CuPc和DPVBi薄膜,采用自旋镀膜法制备PEDOT:PSS和PVK薄膜。通过电流-电压曲线和电致发光光谱分析了在阳极和发射层之间插入CuPc、PVK和PEDOT:PSS的效果。与单层器件相比,附加层结构可以提高器件的最大亮度。采用PVK作为空穴传输层,提高了器件的二极管性能,并能防止器件发生短路。在56 nm处观察到优化后的DPVBi层厚度,在10 nm处插入CuPc孔注入层,器件的导通电压从7.0 V降低到6.5 V。
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引用次数: 4
A Highly Compatible Architecture Design for Optimum FPGA to Structured-ASIC Migration FPGA向结构化asic迁移的高兼容架构设计
Pub Date : 2006-11-01 DOI: 10.1109/SMELEC.2006.381114
Hee Kong Phoon, M. Yap, Chuan Khye Chai
Structured-ASIC design provides a mid-way point between FPGA and cell-based ASIC design for performance, area and power, but suffers from the same increasing verification burden associated with cell-based design. In this paper we address a structured ASIC architecture fabric directly tie to FPGA prototype and functional in-system verification with a clean migration path to structured ASIC. Our goal is to leverage the power/delay/area benefits of structured ASIC technology vs. FPGA with a simple flow which maintains the benefits of FPGAs for ease of test, prototyping, characterization and pre-verification. We will go over the introduction of FPGA to structured-ASIC migration, the architecture of the logic fabric follow by the Lcell to Hcell mapping methodology which can eliminate the need of complicated verification effort and overview of the CAD flow.
结构化ASIC设计在性能、面积和功耗方面介于FPGA和基于单元的ASIC设计之间,但也面临着与基于单元的设计相关的不断增加的验证负担。在本文中,我们解决了一个结构化ASIC架构结构,直接与FPGA原型和功能系统内验证相关联,并提供了一个清晰的迁移路径到结构化ASIC。我们的目标是利用结构化ASIC技术与FPGA相比的功耗/延迟/面积优势,通过简单的流程保持FPGA的优势,便于测试,原型设计,表征和预验证。我们将介绍FPGA到结构化asic迁移的介绍,逻辑结构的体系结构,然后是Lcell到Hcell映射方法,可以消除复杂的验证工作和CAD流程概述的需要。
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引用次数: 11
VLSI Implementation of 1/2 Viterbi Decoder for IEEE P802.15-3a UWB Communication IEEE P802.15-3a超宽带通信1/2 Viterbi解码器的VLSI实现
Pub Date : 2006-11-01 DOI: 10.1109/SMELEC.2006.380717
M. Siswanto, M. Othman, E. Zahedi
This paper presents the design of 1/2 Viterbi decoder for UWB applications following the standard requirements of IEEE P802.15-3a. The main design issues of Viterbi decoder were add-compare-select unit (ACSU), memory management and trace- back methods. In order to meet the requirements of IEEE P802.15-3a UWB, the transition metric unit (TMU) is designed using a finite state machine (FSM) and a parallel carry look-ahead adder (CLA) used to design the addition part of the ACSU. After synthesis using Xilinx synthesis technology (XST), the synthesis report shows that the design has a minimum period of 1.888 ns, equivalent to a data rate of 529.661 Mbps fulfilling more than the standard requirements of IEEE P802.15-3a for UWB, which has a data rate range from 55 to 480 Mbps.
本文根据IEEE P802.15-3a标准要求,设计了一种用于超宽带应用的1/2维特比解码器。维特比解码器的主要设计问题是添加比较选择单元(ACSU)、内存管理和回溯方法。为了满足IEEE P802.15-3a超宽带的要求,采用有限状态机(FSM)和并行进位前置加法器(CLA)设计了过渡度量单元(TMU)。采用Xilinx综合技术(XST)综合后,综合报告显示,该设计的最小周期为1.888 ns,相当于529.661 Mbps的数据速率,满足IEEE P802.15-3a对UWB的标准要求,其数据速率范围为55 ~ 480 Mbps。
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引用次数: 7
期刊
2006 IEEE International Conference on Semiconductor Electronics
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