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2016 IEEE International Conference on Semiconductor Electronics (ICSE)最新文献

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The impact of the bilayer TaN/Ta barrier at the copper seed and copper electroplating process in semiconductor fabrication 半导体制造中双层TaN/Ta势垒对铜种及铜电镀工艺的影响
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573649
Z. S. Hashim, Md Nizam Abd Rahman, M. Muhamad, A. Ahmad
Copper metallization process, using electroplating, in Integrated Circuit interconnect, poses big challenge in semiconductor fabrication. Besides the stringent Dual Damascene requirement, the copper material itself is prone to rapid interface diffusion as well as surface oxidation. Thus the copper metallization process has to be performed within specific time after copper seed deposition process. This study investigated the impact of bilayer TaN/Ta barrier on copper sheet resistance changes at different time intervals. The study was based on 200mm wafer. In addition to that, correlation between sheet resistance to other copper film properties such as reflectance and stress was also investigated. Based on results of this study, bilayer TaN/Ta barrier inclusion in copper seed greatly improved film sheet resistance stability.
在集成电路互连中采用电镀的铜金属化工艺对半导体制造提出了很大的挑战。除了严格的双大马士革要求外,铜材料本身也容易发生界面快速扩散和表面氧化。因此,铜金属化工艺必须在铜种沉积工艺后的特定时间内进行。本文研究了不同时间间隔双层TaN/Ta势垒对铜片电阻变化的影响。本研究基于200mm晶圆。除此之外,还研究了薄片电阻与其他铜膜性能(如反射率和应力)之间的关系。基于本研究的结果,铜种子中的双层TaN/Ta势垒包合物大大提高了薄膜的电阻稳定性。
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引用次数: 0
Design and optimization of TiSix/HfO2 channel vertical double gate NMOS device TiSix/HfO2通道垂直双栅NMOS器件的设计与优化
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573593
K. Kaharudin, F. Salehuddin, A. Zain, M. Aziz, Z. Manap, Nurul Akmal Abd Salam, Wira Hidayat Bin Mohd Saad
This paper aims to propose a new structure of vertical double-gate NMOS device with titanium silicide (TiSix) and hafnium dioxide (HfO2) are utilized as gates and an insulator correspondingly. The simulation and characterization of the proposed device were carried out by using ATHENA and ATLAS modules of Silvaco TCAD tools. The threshold voltage (VTH) of the device was then optimized by tuning the correct level of halo implant dose, halo implant tilt, S/D implant energy and S/D implant tilt via the L9 orthogonal array (OA) of Taguchi method. The vertical TiSix/HfO2 channel vertical double-gate NMOS device has shown excellent device characteristics as the VTH, drive current (ION), leakage current (IOFF), ION/IOFF ratio and subthreshold swing (SS) were observed to be 0.2101 V, 2235.3 μA/μm, 1.363E-15 A/μm, 1.64E12 and 58.76 mV/dec respectively. These results are within the expected requirement of high performance (HP) multi gate (MG) technology as predicted by International Technology Roadmap Semiconductor (ITRS) 2013.
本文旨在提出一种以硅化钛(TiSix)和二氧化铪(HfO2)分别作为栅极和绝缘体的新型垂直双栅NMOS器件结构。利用Silvaco TCAD工具中的ATHENA和ATLAS模块对所提出的器件进行了仿真和表征。通过田口法的L9正交阵列(OA)调整晕形种植体剂量、晕形种植体倾斜、S/D种植体能量和S/D种植体倾斜的正确水平,优化装置的阈值电压(VTH)。垂直TiSix/HfO2通道垂直双栅NMOS器件的VTH、驱动电流(ION)、泄漏电流(IOFF)、离子/IOFF比和亚阈值摆幅(SS)分别为0.2101 V、2235.3 μA/μm、1.363E-15 A/μm、1.64E12和58.76 mV/dec,具有良好的器件特性。这些结果符合国际技术路线图半导体(ITRS) 2013预测的高性能(HP)多门(MG)技术的预期要求。
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引用次数: 2
Investigation on electrical conductivity of strontium (Sr2+) influenced CaTi0.8Fe0.2O3 polycrystalline perovskite 锶(Sr2+)对CaTi0.8Fe0.2O3多晶钙钛矿电导率影响的研究
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573624
M. Panday, M. Vinoth, S. Surendhiran, V. Rajendran, P. Menon
The electrical conductivity of the bulk and grain boundary of oxygen deficient (CaxSr1-x)(Ti0.8Fe0.2)O3-δ (x = 0.14, 0.16, 0.18, and 2.0) polycrystalline specimens were estimated by complex impedance spectroscopy analysis in the domestic frequency ranges from 0.01 Hz to 1 MHz at room temperature. The powder ceramic was synthesized using the sonochemical route. Powder X-ray diffraction of all the samples at 1000 °C shows cubic phase in symmetry. The impedance plots are composed of semicircles followed by warburg impedance for all the compounds. The shrinkage of grains and grain boundaries contribution are increased when Sr2+ ion concentration is increased. This is evident from the observed SEM image of grain morphology of the prepared powders. Frequency dependence of all the electrical parameters are carried out using complex impedance spectroscopy (CIS) analysis. The large dielectric constant is found in CSTFO14 sample in the magnitude order of ~×10^5. So, this kind of materials used for the applications of microwave and radio wave communications.
在国内0.01 Hz ~ 1 MHz的频率范围内,用复阻抗谱法测定了缺氧(CaxSr1-x)(Ti0.8Fe0.2)O3-δ (x = 0.14、0.16、0.18和2.0)多晶试样的体电导率和晶界电导率。采用声化学方法合成了粉末陶瓷。所有样品在1000℃时的粉末x射线衍射均显示为对称的立方相。所有化合物的阻抗图均由半圆和warburg阻抗组成。随着Sr2+离子浓度的增加,晶粒收缩率和晶界贡献增大。从观察到的制备粉末的颗粒形貌的SEM图像可以看出这一点。利用复阻抗谱(CIS)分析了各电参数的频率依赖性。CSTFO14样品的介电常数较大,约为×10^5数量级。所以,这类材料用于微波和无线电波通信的应用。
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引用次数: 5
Dielectrophoretic force response for Lactobacillus Casei 干酪乳杆菌介电泳力响应
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573585
M. R. Buyong, F. Larki, Norazreen Abd Aziz, J. Yunas, A. A. Hamzah, B. Majlis
In this research, we discussed laboratory analysis of the dielectrophoretic force response (DFR) using Lactobacillus Casei. Platinum microelectrode array with ~ 80 μm spacing on glass substrate (PMA) are used to study dielectrophoretic behaviour for rod shaped Lactobacillus Casei with size of width 0.7 to 1.1 μm and length of 2 to 4 μm. An experiment was conducted under positive dielectrophoresis (PDEP), negative dielectrophoresis (NDEP) and crossover frequency (fxo) of Lactobacillus Casei over a wide range frequency from 0 Hz to 1 MHz. Implementation DFR proved the capability to streamed the lactobacillus from right to left side and from left to right side based input frequency tuned at fxo ~ 3550 Hz with 10% to 15% input frequency tolerance.
在本研究中,我们讨论了使用干酪乳杆菌的介电泳力响应(DFR)的实验室分析。采用间距约80 μm的铂微电极阵列(PMA)研究了宽0.7 ~ 1.1 μm、长2 ~ 4 μm的棒状干酪乳杆菌的介电泳行为。以干酪乳杆菌(Lactobacillus Casei)为研究对象,在0 Hz ~ 1 MHz的宽频率范围内,采用正、负介质电泳(PDEP)和交叉频率(fxo)进行了实验。实施DFR证明了从右到左和从左到右流式乳酸菌的能力,输入频率调整为fxo ~ 3550 Hz,输入频率公差为10%至15%。
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引用次数: 4
Wafer edge Shallow Trench Isolation side wall defect reduction on advanced CMOS 0.13µm technology at 0.18µm equipment platform 在0.18µm设备平台上采用先进的CMOS 0.13µm技术降低晶圆边缘浅沟隔离侧壁缺陷
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573646
Thung Beng Joo, K. Ibrahim, Nurulfajar Abd Manap, S. Fauziyah
Nowadays sustaining semiconductor business needs competitiveness improvement which includes scaling down the technology node from CMOS 0.18μm to 0.13μm using similar equipment platforms. In this paper, the enabling new advances technology is through process improvement. The method is complicated and easily caused systematics wafer edge yield loss during initial technology development due to process margin and equipment capability. This paper presents an integrated engineering approach to improve sort yield especially at the wafer edge region. Shallow Trench Isolation (STI) deposition void that causes poly stringer defect is one of the major contributors of yield loss. The process improvement includes understanding caused of defect, process optimization approach that lead to re-design of the STI layout with Optical Proximity Correction (OPC) tagging. The improvement has successfully enable CMOS 0.13μm technology to process at CMOS 0.18μm equipment platform and implemented in production.
如今,要想维持半导体业务,需要提高竞争力,包括使用类似的设备平台,将CMOS技术节点从0.18μm缩小到0.13μm。在本文中,使新的进步技术是通过过程改进。由于工艺裕度和设备能力的限制,该方法较为复杂,在技术开发初期容易造成系统性晶圆边缘良率损失。本文提出了一种综合工程方法来提高分选良率,特别是在晶圆边缘区域。浅沟隔离(STI)沉积空洞引起的多弦缺陷是造成成品率损失的主要原因之一。工艺改进包括了解缺陷的原因,采用光学接近校正(OPC)标签重新设计STI布局的工艺优化方法。该改进已成功地使CMOS 0.13μm技术在CMOS 0.18μm设备平台上加工并实现量产。
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引用次数: 0
Copper-graphene SPR-based biosensor for urea detection 基于铜-石墨烯sprr的尿素检测生物传感器
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573642
F. A. Said, P. Menon, Mohd Nuriman Nawi, A. M. Md Zain, A. Jalar, B. Majlis
This paper is intended to investigate the copper-graphene surface plasmon resonance (SPR)-based biosensor by considering the high adsorption efficiency of graphene. Copper (Cu) is used as a plasmonic material whereas graphene is used to prevent Cu from oxidation and enhance the reflectance intensity. Numerical investigation is performed using finite-difference-time-domain (FDTD) method by comparing the sensing performance such as reflectance intensity that explains the sensor sensitivity and the full-width-at-half-maximum (FWHM) of the spectrum for detection accuracy. The measurements were observed with various Cu thin film thicknesses ranging from 20nm to 80nm with 785nm operating wavelength. The proposed sensor shows that the 40nm-thick Cu-graphene (1 layer) SPR-based sensor gave better performance with narrower plasmonic spectrum line width (reflectance intensity of 91.2%) and better FWHM of 3.08°. The measured results also indicate that the Cu-graphene SPR-based sensor is suitable for detecting urea with refractive index of 1.49 in dielectric medium.
考虑到石墨烯的高吸附效率,本文拟研究基于铜-石墨烯表面等离子体共振(SPR)的生物传感器。铜(Cu)用作等离子体材料,而石墨烯用于防止铜氧化并增强反射强度。数值研究采用时域有限差分(FDTD)方法,通过比较传感性能,如解释传感器灵敏度的反射强度和检测精度的光谱半最大全宽度(FWHM)。在工作波长为785nm的不同Cu薄膜厚度(20nm ~ 80nm)下进行测量。结果表明,40nm厚的cu -石墨烯(1层)spr传感器具有较好的等离子体谱线宽度(反射强度为91.2%)和较好的FWHM(3.08°)。测量结果还表明,基于cu -石墨烯spr的传感器适用于检测介电介质中折射率为1.49的尿素。
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引用次数: 22
Modeling and simulation of tunable band-pass filter based on metal-mumps 基于金属腮腺炎的可调谐带通滤波器的建模与仿真
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573576
Ladon Ahmed Bade, J. Dennis, M. Khir, W. P. Wen
This paper presents a tunable Radio Frequency Micro Electromechanical Systems (RF-MEMS) coupled band-pass filter (BPF) with wide tuning range based on the Chebyshev fourth degree equivalent circuit using inter-digitized tunable capacitors, and fixed inductors. A new tunable BPF with a 100% tuning range from 3.1 to 4.9 GHz has been designed and simulated to verify the proposed method. The band-pass filter was fabricated using Metal Multi-User MEMS Process (MUMPs) process. The objective is to understand reconfigurable frequencies and attain high RF performance for Ultra Wide Band (UWB) application such as in wireless sensor network. The filter displayed good RF performance because of its simple fabrication, less insertion loss around 4 dB and high return loss of around 20 dB.
本文提出了一种基于切比雪夫四度等效电路的宽调谐范围射频微机电系统(RF-MEMS)耦合带通滤波器(BPF),该滤波器采用内部数字化可调谐电容和固定电感。设计并仿真了一种100%调谐范围为3.1 ~ 4.9 GHz的新型可调谐BPF,验证了所提出的方法。采用金属多用户MEMS工艺(MUMPs)制作带通滤波器。目标是了解可重构频率,并为超宽带(UWB)应用(如无线传感器网络)获得高射频性能。该滤波器制作简单,插入损耗在4 dB左右,回波损耗在20 dB左右,具有良好的射频性能。
{"title":"Modeling and simulation of tunable band-pass filter based on metal-mumps","authors":"Ladon Ahmed Bade, J. Dennis, M. Khir, W. P. Wen","doi":"10.1109/SMELEC.2016.7573576","DOIUrl":"https://doi.org/10.1109/SMELEC.2016.7573576","url":null,"abstract":"This paper presents a tunable Radio Frequency Micro Electromechanical Systems (RF-MEMS) coupled band-pass filter (BPF) with wide tuning range based on the Chebyshev fourth degree equivalent circuit using inter-digitized tunable capacitors, and fixed inductors. A new tunable BPF with a 100% tuning range from 3.1 to 4.9 GHz has been designed and simulated to verify the proposed method. The band-pass filter was fabricated using Metal Multi-User MEMS Process (MUMPs) process. The objective is to understand reconfigurable frequencies and attain high RF performance for Ultra Wide Band (UWB) application such as in wireless sensor network. The filter displayed good RF performance because of its simple fabrication, less insertion loss around 4 dB and high return loss of around 20 dB.","PeriodicalId":169983,"journal":{"name":"2016 IEEE International Conference on Semiconductor Electronics (ICSE)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128836970","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Effect of geometrical shapes on 3D hydrodynamic focusing of a microfluidic flow cytometer 几何形状对微流控流式细胞仪三维流体动力聚焦的影响
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573604
Muhammad Syafiq Rahim, N. Selamat, J. Yunas, A. Ehsan
This paper focuses on the effect of geometrical cross section between rectangular and circular shapes on the hydrodynamic focusing of a micro flow cytometer device. The effect of fluid flow ratio between the main and sheath channels on the focusing width is studied. This study has been performed using a COMSOL Multiphysics simulation tool. The results showed that focusing width decreases as the ratio between main channel and sheath channels are increased. The concentration at long-range is studied and indicated that circular shape can sustain a higher concentration at the centre along the channel compared with rectangular shape. The velocity at the cross-section of the channel-junction shows that circular shape produces higher velocity at the centre of the channel compare to that of the rectangular shape. The effect of flow ratio and geometrical shape are significantly vital for microfluidic system which utilizes hydrodynamic focusing for biological and chemical analysis. From the result, micro flow cytometer studied able to use for human body cells such as glucose, virus, red blood cells and white blood cells which have a range size of 2-120 microns.
本文研究了矩形和圆形几何截面对微流式细胞仪流体动力聚焦的影响。研究了主通道与护套通道间流体流量比对聚焦宽度的影响。这项研究是使用COMSOL多物理场模拟工具进行的。结果表明:随着主通道与鞘通道比值的增大,聚焦宽度减小;对长程浓度进行了研究,结果表明,与矩形形状相比,圆形形状可以在通道中心维持更高的浓度。在通道交界处横截面处的速度表明,圆形通道比矩形通道在通道中心产生更高的速度。对于利用流体动力聚焦进行生物化学分析的微流控系统来说,流量比和几何形状的影响至关重要。结果表明,微流式细胞仪能够用于检测人体细胞,如葡萄糖、病毒、红细胞和白细胞,其大小范围为2-120微米。
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引用次数: 2
Multimode multiband power amplifier with tapped transformer for efficiency enhancement in low power mode 带抽头变压器的多模多频带功率放大器,用于在低功率模式下提高效率
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573643
Veeraiyah Thangasamy, V. Thiruchelvam, M. Hamidon, S. Hashim, M. Bukhori, Z. Yusoff, N. Kamsani
Multimode multiband connectivity has become a defacto requirement for smartphones with 3G WCDMA/4G LTE applications. In this research, a two-stage multimode multiband (MMMB) power amplifier (PA) with multiple gated transistor (MGTR) and configurable tapped transformer is designed and analysed in view of enhancing the efficiency in low power mode. The designed MMMB PA offers a 900MHz of operating bandwidth starting from the frequency of 1400MHz up to 2300MHz, covering 16 LTE FDD bands with peak output power of 27.8dBm and peak PAE of 31% in the high power mode. In low power mode, the PA offers the same bandwidth with peak output power of 25.5dBm and PAE of 30%. Use of the multiple gated transistor with tapped transformer for matching has increased the PAE in low power mode by 19% compared with that PAE in the high power mode.
多模多频段连接已成为具有3G WCDMA/4G LTE应用的智能手机的实际需求。从提高低功耗工作效率的角度出发,设计并分析了一种采用多门控晶体管(MGTR)和可配置抽头变压器的两级多模多带功率放大器(MMMB)。设计的MMMB PA提供从1400MHz到2300MHz的900MHz工作带宽,覆盖16个LTE FDD频段,峰值输出功率为27.8dBm,峰值PAE为31%。在低功耗模式下,PA提供相同的带宽,峰值输出功率为25.5dBm, PAE为30%。使用带抽头变压器的多门控晶体管进行匹配,与高功率模式下的PAE相比,低功率模式下的PAE增加了19%。
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引用次数: 1
A ZnO-rGO composite thin film discrete memristor ZnO-rGO复合薄膜分立记忆电阻器
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573608
G. M. Khanal, G. Cardarilli, A. Chakraborty, Simone Acciarito, M. Y. Mulla, L. Di Nunzio, R. Fazzolari, M. Re
Ultrathin 2D materials such as TiO2, WOx, NiO, ZnO, VO2 and graphene, offer scope for low power, highly dense and ultra-fast electronic devices. Due to their extraordinary physical and electrical/electronic property. In this work, a novel forming free memristor has been realized based on hybrid film of ZnO-rGO. The structure of the device is Metal-Insulator-Metal structure, where the Zinc Oxide- Reduced Graphene Oxide (ZnO-rGO) thin film is sandwiched between Silver (Ag) and Fluorine-doped tin oxide (FTO) coated glass. Free oxygen vacancies were created within the composite film by using high temperature annealing at 500 degrees Celsius. We demonstrate bipolar resistive switching behavior of the new device. Also we show that the variation of the conductance of the device is related to delay time of the applied input voltage sweep.
超薄2D材料,如TiO2、WOx、NiO、ZnO、VO2和石墨烯,为低功耗、高密度和超快的电子设备提供了空间。由于它们非凡的物理和电气/电子特性。本文提出了一种基于ZnO-rGO杂化膜的可成形自由忆阻器。该器件的结构为金属-绝缘体-金属结构,其中氧化锌-还原氧化石墨烯(ZnO-rGO)薄膜夹在银(Ag)和氟掺杂氧化锡(FTO)涂层玻璃之间。在500℃的高温退火条件下,在复合膜内形成了自由氧空位。我们演示了新器件的双极电阻开关行为。我们还表明,器件电导的变化与施加的输入电压扫描的延迟时间有关。
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引用次数: 15
期刊
2016 IEEE International Conference on Semiconductor Electronics (ICSE)
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