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2016 IEEE International Conference on Semiconductor Electronics (ICSE)最新文献

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UTBB SOI MOSFETs with gate-source/drain underlap and ground plane (GP) structures for analog/RF applications UTBB SOI mosfet具有门源/漏极下接和地平面(GP)结构,用于模拟/RF应用
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573609
N. Othman, M. K. Md Arshad, S. Sabki, S. R. Kasjoo, U. Hashim
In this work, we report on the influence of underlap architecture (LUL) and ground plane (GP) on the analog/RF performance metrics of Ultra-Thin Body and Buried Oxide (UTBB) Fully-Depleted (FD) SOI MOSFETs with 25 nm gate length. Small-signal transconductance (gm), gate-to-gate capacitance (Cgg) and the cut-off frequency (ft) are the figures-of-merit (FoM) of interest. It is shown that longer underlap i.e. LUL = 10 nm showed lower gm. However, it is noted that Cgg also decreases as the underlap increases. Thus, the need for trade-off between gm and Cgg is needed to achieve optimum values of ft. From this work, it is found that the impact of gm on ft is more prominent than Cgg. From another point of view, the impact of different GP structures on gm and ft becomes more apparent at longer underlap.
在这项工作中,我们报告了覆盖结构(LUL)和地平面(GP)对具有25 nm栅极长度的超薄体和埋藏氧化物(UTBB)全耗尽(FD) SOI mosfet的模拟/RF性能指标的影响。小信号跨导(gm)、门对门电容(Cgg)和截止频率(ft)是我们感兴趣的优值(FoM)。结果表明,较长的覆盖(即LUL = 10 nm)显示较低的gm。然而,值得注意的是,Cgg也随着覆盖的增加而降低。因此,需要在gm和Cgg之间进行权衡,以达到ft的最优值。从这项工作中,我们发现gm对ft的影响比Cgg更突出。从另一个角度来看,不同GP结构对gm和ft的影响在较长的覆盖下变得更加明显。
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引用次数: 0
Interdigitated Electrodes integrated with zinc oxide nanoparticles for Cardiac Troponin I biomarker detection 结合氧化锌纳米颗粒的交叉指状电极用于心脏肌钙蛋白I生物标志物检测
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573631
C. M. Tan, M. K. Md Arshad, M. Fathil, R. Adzhri, M. Nuzaihan, A. R. Ruslinda, C. Ibau, U. Hashim
In this paper, an interdigitated electrodes (IDEs) biosensor integrated with zinc oxide (ZnO) nanoparticles thin film as transducer is presented, which is capable of converting the biological interaction into electrical signal of cardiac troponin I (cTnI), a gold standard biomarker for Acute Myocardial Infarction (AMI). Conventional photolithography methods are applied to fabricate the device on a silicon wafer. The surface ZnO nanoparticles thin film is functionalized with bi-linkers and cTnI monoclonal antibodies via covalent binding for capturing the cTnI target biomarkers. The fabricated biosensor is electrically characterized by using Keithley 6487 picoammeter. The changes in the current flow are compared between before and after cTnI biomarkers binding at different concentrations. The biosensor had successfully demonstrated detection of cTnI biomarker in the concentration range of 1 ng/ml to 10 μg/mL. The achieved sensitivity and detection limit of 15.806 nA*(g/mL)-1 and 2.191 ng/mL, respectively, show that biosensor has great properties for detection of cTnI.
本文提出了一种以氧化锌纳米颗粒薄膜为传感器的交叉指电极(IDEs)生物传感器,该传感器能够将生物相互作用转化为心肌肌钙蛋白I (cTnI)的电信号,这是急性心肌梗死(AMI)的金标准生物标志物。采用传统的光刻方法在硅片上制造该器件。表面ZnO纳米颗粒薄膜通过共价结合被双连接物和cTnI单克隆抗体功能化,以捕获cTnI靶生物标志物。所制备的生物传感器采用Keithley 6487皮安计进行电学表征。比较不同浓度cTnI生物标志物结合前后电流的变化。该生物传感器已成功检测到浓度范围为1 ng/ml ~ 10 μg/ ml的cTnI生物标志物。灵敏度和检出限分别为15.806 nA*(g/mL)-1和2.191 ng/mL,表明生物传感器检测cTnI具有良好的性能。
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引用次数: 8
Effect of gate length on Negative Bias Temperature Instability of 32nm advanced technology HKMG PMOSFET 栅极长度对32nm先进工艺HKMG PMOSFET负偏置温度不稳定性的影响
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573644
A. F. Muhammad Alimin, S. F. Wan Muhamad Hatta, N. Soin
Negative Bias Temperature Instability (NBTI) has become a key reliability concern in semiconductor industries as devices are scaled down. A simulation study had been done on 32 nm technology node PMOS using Synopsys TCAD Sentaurus simulator tool. This paper presents the effect of gate length on NBTI of 32 nm advanced technology high-k metal gate (HKMG) PMOSFET. The effect on the device parameters such as threshold voltage (Vth), drain current (Id) and the lifetime of the device had been studied and discussed in detail. It is found that NBTI is not highly dependent on gate length at low oxide field (Eox) while at higher Eox, longer gate length is shown to significantly affect the Vth degradation where Vth degradation in longer gate length is found to be lowered by 23.39% compared to the shorter.
随着器件的小型化,负偏置温度不稳定性(NBTI)已成为半导体工业中一个关键的可靠性问题。利用Synopsys TCAD Sentaurus仿真工具对32nm工艺节点PMOS进行了仿真研究。本文研究了栅极长度对32 nm先进工艺高k金属栅极PMOSFET NBTI的影响。对阈值电压(Vth)、漏极电流(Id)和器件寿命等器件参数的影响进行了详细的研究和讨论。在低氧化场(Eox)下,NBTI对栅极长度的依赖程度不高,而在高氧化场(Eox)下,较长的栅极长度显著影响Vth的降解,较长的栅极长度比较短的栅极长度降低了23.39%的Vth降解。
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引用次数: 0
Enhancing equivalent circuit model of Dual Channel Vertical Strained Impact Ionization MOSFET (DC-VESIMOS) for biosensor applications 增强双通道垂直应变冲击电离MOSFET (DC-VESIMOS)等效电路模型,用于生物传感器
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573599
I. Saad, Hazwani Syazana B. Andee, Seng C. Bun, Zuhir H. Mohd, N. Bolong
Dual Channel Vertical Strained Impact Ionization MOSFET (DC-VESIMOS) device shows superb performance with lower subthreshold slope (S) value of 11.48mV/dec and high range of ON and OFF current of 1013 obtained which indicates fast switching behavior and low leakage current respectively by using Silvaco's TCAD. Besides that, high breakdown voltage, VB of 2.45V is obtained which results in high reliability where the device become a promising candidates as a biosensor applications device. DC-VESIMOS demonstrated S value of 10.53mV/dec with supply voltage of VDS=1.75V in circuitry level. A considerable high breakdown voltage (VB=2.6V) and high ratio of ION/IOFF indicates low leakage currents and good reliability. The input of K parameter determines device behavior and the best value selected is when K=5 when compared with the published experimental works. Increase in body doping concentration will decrease the ON voltage of the device. In many aspects, DC-VESIMOS performance revealed that it was a best candidate to become one of the low power and high performance based biosensor applications device in the future.
双通道垂直应变冲击电离MOSFET (DC-VESIMOS)器件表现出优异的性能,其亚阈值斜率(S)值低至11.48mV/dec,通断电流范围高至1013,分别表明了快速的开关性能和低泄漏电流。此外,该器件具有较高的击穿电压,VB为2.45V,具有较高的可靠性,是生物传感器应用器件的理想选择。DC-VESIMOS的S值为10.53mV/dec,电源电压VDS=1.75V。较高的击穿电压(VB=2.6V)和较高的ION/IOFF比表明泄漏电流小,可靠性好。K参数的输入决定了器件的行为,通过对比已发表的实验作品,选择K=5时为最佳值。体掺杂浓度的增加会降低器件的ON电压。在许多方面,DC-VESIMOS的性能表明它是未来低功耗、高性能的生物传感器应用器件之一。
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引用次数: 0
Design segmented slot waveguide for integrated waveguide modulator 集成波导调制器的分段缝隙波导设计
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573586
Musab A. M. Al-Tarawni, A. Bakar, A. M. Md Zain
In this article, segmented slot waveguide structures are designed and analysed numerically. We present a theoretical investigation of overlap factors and low half voltage for different segmented slot waveguide structures to determine optimised geometrical dimensions based on slot widths. Results shows that high overlap factor, and low half voltage, occurs for 200 and 300 nm periodicities at a 100 nm slot width, while for a 400 nm periodicity this width is 125 nm. Thus, achieving a very low Vπ compared to conventional slot waveguides demonstrates a high sensitivity of segmented slot waveguide and unprecedented sensing in a sensor application.
本文对分段缝隙波导结构进行了设计和数值分析。我们对不同分段槽波导结构的重叠因子和低半电压进行了理论研究,以确定基于槽宽度的优化几何尺寸。结果表明,在200和300 nm的周期中,在100 nm的槽宽处出现了高重叠因子和低半电压,而在400 nm的周期中,该宽度为125 nm。因此,与传统槽波导相比,实现非常低的Vπ证明了分段槽波导的高灵敏度和传感器应用中前所未有的传感。
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引用次数: 4
Hydrophilic property of glass treated by needle plasma jet for surface modification 针状等离子体射流表面改性玻璃的亲水性
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573629
R. R. Elfa, M. K. Ahmad, N. Nafarizal, M. Z. Sahdan, C. Soon
The application of needle plasma jet using argon gas for surface modification is presented in this paper. The main objective is to modify the surface property of microscope slide glass from hydrophilic surface approximately to superhydrophilic surface. The power supply to the needle plasma jet was set to 400 kV and 1 kHz frequency with highly purity argon (Ar) gas as working gas to generate plasma condition. A copper wire was used as a powered electrode and needle. Water contact angle measurement was used to investigate the surface properties under the different period of treatment and storage time. As a result, we found that the sample of exposure for 300 seconds shows a great result in superhydrophilic surface until 6 hours of storage. This understanding is important in device fabrication application using the glass substrate.
本文介绍了氩气针状等离子体射流在表面改性中的应用。主要目的是将载玻片的表面性质从近似亲水表面改变为超亲水表面。将针状等离子体射流电源设置为400 kV,频率为1 kHz,工作气体为高纯氩(Ar)气,产生等离子体条件。一根铜线被用作通电的电极和针。采用水接触角测定法考察了不同处理时间和不同贮存时间下的表面性能。结果发现,曝光300秒的样品,直到储存6小时,表面的超亲水性都有很大的效果。这种理解在使用玻璃基板的器件制造应用中是重要的。
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引用次数: 1
Micro and nano-phononics 微观和纳米声学
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573573
A. Khelif
Phononic crystals (PnC) are periodic structures that have an ability to forbid the propagation of elastic waves in certain frequency. This region is known as Phononic Band Gap (PnBg) and can be used as guiding or filtering for elastic or acoustic wave. This ability has attracted many researchers around the world and many applications can be found from it such as in sensor, multiplexer, acoustic lens and acoustic cloaking. Furthermore, defects in the periodicity can be used to confine acoustic waves to follow complicated routes on a wavelength scale. In this presentation, we will show that mechanical micro- or nano resonators can made their way towards phononics where they lie at the heart of acoustic or elastic metamaterials. Particularly, phononic crystals based on resonant inclusions, could be used to strongly confine elastic waves and more specifically elastic waves propagating at the surface of a semi-infinite substrate exploiting the rich physics offered by the different coupling mechanisms in view of designing resonator systems capable to confine, control and transport the elastic energy at the micro and nano scale.
声子晶体是一种周期性结构,具有抑制弹性波在一定频率上传播的能力。这个区域被称为声子带隙(PnBg),可以用来引导或过滤弹性或声波。这种能力吸引了世界各地的众多研究人员,并在传感器、多路复用器、声透镜和声隐身等方面得到了广泛的应用。此外,周期性的缺陷可以用来限制声波在波长尺度上遵循复杂的路线。在这次演讲中,我们将展示机械微谐振器或纳米谐振器可以在声学或弹性超材料的核心位置向声子方向发展。特别是,基于共振内含体的声子晶体,可以利用不同耦合机制提供的丰富物理特性,在微纳米尺度上设计能够限制、控制和传输弹性能量的谐振器系统,从而对弹性波,特别是在半无限基片表面传播的弹性波进行强约束。
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引用次数: 0
Numerical simulation of underlap FET device architecture for biosensor applications 生物传感器中覆盖场效应晶体管结构的数值模拟
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573602
C. Ibau, M. K. Md Arshad, M. N. Md Nor, R. M. Ayub, R. A. Rahim, U. Hashim
The paper reports on numerical simulation of underlap field effect transistor (FET) device architecture on silicon-on-insulator (SOI) for a robustness used in biosensors application. By using the Silvaco ATLAS device simulator, the simulation is aimed at elucidating the effect of length of underlap, location of underlap, device etching profiles, and effect of back-gate biasing on the magnitude of drain current (ID). It is shown that the longer underlap and an etched silicon profile introduced higher parasitic resistance, thus decreasing the ID response. The ID response is higher for device with underlap between the gate-drain terminals as compared to gate-source terminals. Positive back-gate bias increases and shifts the current, and reduced the threshold voltage required to turn on the device.
本文报道了基于绝缘体上硅(SOI)的下迭场效应晶体管(FET)器件结构的数值模拟,用于生物传感器的鲁棒性研究。利用Silvaco ATLAS器件模拟器进行仿真,旨在阐明欠接长度、欠接位置、器件刻蚀轮廓和后门偏置对漏极电流(ID)大小的影响。结果表明,较长的下搭和蚀刻的硅轮廓引入了较高的寄生电阻,从而降低了内径响应。与栅极-源端相比,栅极-漏极端之间有搭接的器件的ID响应更高。正的反向偏置增加和移动电流,并降低开启器件所需的阈值电压。
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引用次数: 0
Vibration based T-shaped piezoelectric cantilever beam design using finite element method for energy harvesting devices 基于振动的t型压电悬臂梁的能量收集装置设计采用有限元法
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573610
Md. Naim Uddin, M. Islam, J. Sampe, Shafii A. Wahab, S. M. Md Ali
Ambient mechanical vibration energy can be converted into electrical energy using one of the most promising mechanism known as piezoelectric mechanism. In the mechanism, mechanical stress and strain generation in the piezoelectric materials can be converted into electrical energy which can be used for low power electronic devices. In this work, a T-shaped piezoelectric cantilever beam was analysed. The geometry of the cantilever beam was designed using SolidWorks. After that, the cantilever beam was simulated using Finite Element Method (FEM) in COMSOL Multiphysics. In the FEM simulation, the beam was kept under a vibration sources of 1g acceleration. As a result, maximum displacement at free end of the beam was found 2.47mm at resonant frequency of 238.75Hz. As piezoelectric energy harvesting from vibration depends on stress generation in piezoelectric materials, stress was analysed for the beam. The maximum amount of stress near the clamped end of the beam was found 2.39×108 N/m2 at resonance. The investigation showed that the designed and analysed T-shaped beam can be operated in low-frequency ambient vibration sources.
利用一种最有前途的机制——压电机制,可以将环境机械振动能转化为电能。在该机构中,压电材料中产生的机械应力和应变可以转化为电能,用于低功率电子器件。本文对t型压电悬臂梁进行了分析。利用SolidWorks设计悬臂梁的几何形状。在此基础上,利用COMSOL Multiphysics软件对悬臂梁进行有限元模拟。在有限元模拟中,梁保持在1g加速度的振动源下。结果表明,在谐振频率为238.75Hz时,梁自由端最大位移为2.47mm。由于压电从振动中获取能量取决于压电材料中产生的应力,因此对梁进行了应力分析。梁夹紧端附近的最大应力值为2.39×108 N/m2。研究表明,所设计和分析的t型梁可以在低频环境振动源下工作。
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引用次数: 4
Optimization of beam length and air gap of suspended graphene NEMS switch for low pull-in voltage application 用于低拉入电压应用的悬浮石墨烯NEMS开关的光束长度和气隙优化
Pub Date : 2016-08-01 DOI: 10.1109/SMELEC.2016.7573583
M. A. Zulkefli, M. A. Mohamed, K. Siow, B. Majlis
The trend of miniaturization has led to the development of graphene nanoelectromechanical system (NEMS) switch due to high demand for low power consumption device applications. One of the important step before start the fabrication process is to model and simulate the graphene NEMS switch in order to get the optimum device dimension with low pull-in voltage applications. The present work represents simulations of suspended graphene length and air beam effects on the pull-in voltage for NEMS switch application. The analysis is done by 3D simulation using COMSOL Multiphysics software under electromechanics interface based on Finite Element Method (FEM). Comparable values with the conventional semiconductor switch of the pull-in voltage can be achieved at ratio below 10 to 0.5 value of the graphene beam length and air gap, respectively. This article is expected to estimate the operational parameter and dimension that can produce low pull-in voltage for a graphene NEMS switch operations.
由于对低功耗器件应用的高需求,小型化趋势推动了石墨烯纳米机电系统(NEMS)开关的发展。在开始制造过程之前的一个重要步骤是对石墨烯NEMS开关进行建模和仿真,以获得低拉入电压应用的最佳器件尺寸。本工作模拟了悬浮石墨烯长度和空气束对NEMS开关应用的拉入电压的影响。利用COMSOL Multiphysics软件在机电界面下基于有限元法进行三维仿真分析。与传统半导体开关的拉入电压相比,石墨烯束长和气隙的比值分别低于10比0.5。这篇文章预计将估计可以产生低拉入电压的石墨烯NEMS开关操作的操作参数和尺寸。
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引用次数: 2
期刊
2016 IEEE International Conference on Semiconductor Electronics (ICSE)
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