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2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD)最新文献

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Enhancement-mode AlN/GaN MOSHEMTs fabricated by selective area regrowth of AlGaN barrier layer AlGaN阻挡层选择性区域再生制备增强模式AlN/GaN MOSHEMTs
Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694480
Tongde Huang, X. Zhu, K. Lau
Enhancement-mode (E-mode) metal-oxide semiconductor high electron mobility transistors (MOSHEMTs) have been fabricated by selective area regrowth technique on AlN/GaN heterostructure. A selectively regrown AlGaN barrier layer could effectively increase the 2-dimensional electron gas (2DEG) density underneath. In comparison with the conventional methods of plasma etching/treatment in the gate region, the regrowth technique can effectively avoid damage caused by the plasma process. Atomic layer deposition of Al2O3 was employed as the gate dielectric. It was found that the Al2O3 on the AlN barrier layer also could induce a higher density of 2DEG. The fabricated E-mode MOSHEMTs with a 1.4-μm gate length exhibited excellent performance of maximum drain current of 530 mA/mm and peak transconductance of 310 mS/mm. The threshold voltage of MOSHEMTs was around +0.2 V. The reverse leakage current was also observed to be around 3.6 × 10-4 mA/mm at Vgs = -1 V and Vds = 6 V. The peak channel electron mobility was extracted to be 880 cm2/Vs using split-CV method. These results indicate that the regrowth technique is a promising method to realize E-mode transistors.
采用选择性面积再生技术在AlN/GaN异质结构上制备了增强模式(E-mode)金属氧化物半导体高电子迁移率晶体管(MOSHEMTs)。选择性再生的AlGaN势垒层可以有效地提高其下的二维电子气密度。与传统的栅极区等离子体刻蚀/处理方法相比,再生技术可以有效地避免等离子体过程造成的损伤。采用Al2O3原子层沉积作为栅介质。AlN阻挡层上的Al2O3也能诱导出较高的2DEG密度。所制备的栅极长度为1.4 μm的e模MOSHEMTs具有优异的性能,最大漏极电流为530 mA/mm,峰值跨导为310 mS/mm。moshemt的阈值电压约为+0.2 V。在Vgs = -1 V和Vds = 6 V时,反向泄漏电流约为3.6 × 10-4 mA/mm。利用分裂- cv法提取通道电子迁移率峰值为880 cm2/Vs。这些结果表明,再生技术是一种很有前途的实现e模晶体管的方法。
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引用次数: 6
Current balancing control for parallel connected IGBTs using programmable gate driver output resistance 采用可编程栅极驱动器输出电阻的并联igbt电流平衡控制
Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694398
M. Sasaki, H. Nishio, A. Shorten, W. Ng
A gate driver IC with programmable output resistance (Rout) capable of performing current balancing for parallel connected IGBTs is presented in this paper. This novel method is to dynamically adjust the gate driver Rout to minimize the difference in the turn-on/off delay times between parallel connected IGBTs. The programmable gate driver Rout is implemented using a segmented output stage technique. This gate driver IC is designed and fabricated using TSMC's 0.18μm BCD Gen-2 process. Experimental results are obtained by measuring the current distribution between two parallel connected IGBTs (600V, 90A). These results indicate an improvement in average current imbalance of 89% and 98% for the turn-on and off periods, respectively.
提出了一种具有可编程输出电阻的栅极驱动集成电路,能够对并联igbt进行电流平衡。这种新颖的方法是动态调整栅极驱动器路由,以最小化并联igbt之间的开/关延迟时间差异。可编程门驱动器路由采用分段输出级技术实现。该栅极驱动IC采用台积电0.18μm BCD Gen-2工艺设计和制造。通过测量两个并联igbt (600V, 90A)之间的电流分布,得到了实验结果。这些结果表明,在导通和关断期间,平均电流不平衡分别改善了89%和98%。
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引用次数: 12
Potential of diamond power devices 金刚石动力器件的潜力
Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694410
S. Yamasaki, T. Makino, D. Takeuchi, M. Ogura, H. Kato, T. Matsumoto, T. Iwasaki, M. Hatano, M. Suzuki, S. Koizumi, H. Ohashi, H. Okushi
For the next generation power devices, we have developed several types of unique diamond power devices. By these device performances, we conclude that by using the unique properties of diamond in addition to the superior structural FOM (figure of merit) the diamond power devices have high potential for the power devices. We discuss the potential of diamond power devices, specially, for ultra-high voltage application.
针对下一代动力器件,我们开发了几种独特的金刚石动力器件。通过这些器件的性能,我们得出结论,利用金刚石的独特性能以及优越的结构FOM (merit figure),金刚石功率器件在功率器件中具有很高的潜力。我们讨论了金刚石功率器件的潜力,特别是在超高压应用方面。
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引用次数: 7
New source-side breakdown mechanism in AlGaN/GaN insulated-gate HEMTs AlGaN/GaN绝缘栅极hemt中新的源侧击穿机制
Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694434
S. Bahl, M. Van Hove, X. Kang, D. Marcon, M. Zahid, S. Decoutere
We find that off-state breakdown in AlGaN/GaN insulated-gate HEMTs can occur at the source-side of the gate with increase in the drain voltage. This new finding is borne out by extensive electrical measurements and confirmed with the OBIRCH (Optical Beam Induced Resistance CHange) technique. It is explained by a hypothesis whereby holes generated at high Vds flow to the source-side of the gate, and due to the low valence band offset, enter the gate insulator and damage it. Holes also cause threshold voltage shifts that turn the device on. The damage occurs in discrete spots, as would be expected by defects. Finally, we show improved breakdown voltage with a better gate-dielectric interface.
我们发现,随着漏极电压的增加,AlGaN/GaN绝缘栅极hemt在栅极源侧会发生脱态击穿。这一新发现被广泛的电测量证实,并被OBIRCH(光束感应电阻变化)技术证实。这可以通过一个假设来解释,即在高Vds下产生的空穴流向栅极的源侧,并且由于低价带偏移,进入栅极绝缘体并损坏它。空穴还会引起阈值电压的变化,从而开启器件。损坏发生在离散的点上,正如缺陷所预料的那样。最后,我们展示了一个更好的栅极-介电界面改善击穿电压。
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引用次数: 23
Silicon carbide pinched barrier rectifier (PBR) 碳化硅箝位势垒整流器
Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694472
Chaofeng Cai, Li Zhang, Na Ren, Kuang Sheng
In this paper, a new rectifier structure in silicon carbide (SiC) is presented for the first time. The proposed structure involves neither Schottky contact nor minor carrier injection via P-N junction. With adjacent P+ areas placed sufficiently close, pinched barrier is formed for rectifier purpose. Numerical simulations are carried out to verify its function, and optimize its performance. Based on the simulation results, a good trade-off can be achieved between forward drop and reverse leakage, provided that this new structure offers flexibility of controlling onset voltage by adjusting channel parameters continuously.
本文首次提出了一种新型碳化硅整流器结构。所提出的结构既不涉及肖特基接触,也不涉及通过P-N结的少量载流子注入。相邻的P+区域放置得足够近,形成了整流用的夹紧屏障。通过数值仿真验证了其功能,并对其性能进行了优化。仿真结果表明,如果该结构能够通过连续调节通道参数来灵活控制起始电压,则可以在正向降和反向漏之间实现良好的权衡。
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引用次数: 4
Injection control technique for high speed switching with a double gate PNM-IGBT 双栅PNM-IGBT高速开关的注入控制技术
Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694392
M. Sumitomo, H. Sakane, K. Arakawa, Y. Higuchi, M. Matsui
We proposed a PNM-IGBT [1] that can realize performance close to the theoretical limit shown by Nakagawa, et, al [2, 3]. In that work, we confirmed PNM-IGBT can achieve a very low saturation voltage due to its great injection enhancement effect. However, it is accompanied by a slight increase in turn-off-loss. We believe that we can diminish this increase by our unique control technique. Therefore, in this paper, we propose a fundamentally new IGBT control technique. By combining this control technique and PNM-IGBT, it becomes possible to achieve both a low saturation voltage and fast switching speed. To demonstrate the above hypothesis, we have developed a double gate PNM-IGBT, and confirmed a decrease in turn-off-loss of 30% using this technique.
我们提出了一种PNM-IGBT[1],可以实现接近Nakagawa等人[2,3]的理论极限的性能。在这项工作中,我们证实了PNM-IGBT由于其强大的注入增强效果可以实现非常低的饱和电压。然而,它伴随着关闭损失的轻微增加。我们相信我们可以通过我们独特的控制技术来减少这种增长。因此,本文提出了一种全新的IGBT控制技术。通过将该控制技术与PNM-IGBT相结合,可以实现低饱和电压和快速开关速度。为了证明上述假设,我们开发了一种双栅极PNM-IGBT,并证实使用这种技术可以减少30%的关断损耗。
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引用次数: 42
Low gate capacitance IEGT with Trench Shield Emitter (IEGT-TSE) realizing high frequency operation 低栅极电容IEGT与沟槽屏蔽发射极(IEGT- tse)实现高频工作
Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694438
K. Matsushita, H. Ninomiya, T. Naijo, M. Izumi, S. Umekawa
A novel IEGT (Injection Enhanced Gate Transistor) design for drastically reducing of gate capacitance has been proposed in this work. The device structure named IEGT-TSE (IEGT with Trench Shield Emitter) has a dummy trench electrode connected to an emitter electrode. It shields gate electrode from floating p-well during switching. To demonstrate this effect, we exhibit switching waveforms by a numerical simulation and a fabricated device at 1200 blocking voltage class.
本文提出了一种新型的注入增强型栅极晶体管(IEGT)设计,可大幅降低栅极电容。该器件结构名为IEGT- tse (IEGT with Trench Shield Emitter),其假沟槽电极与发射极连接。它在开关过程中屏蔽栅电极的p阱浮动。为了证明这种效应,我们通过数值模拟和制造器件展示了1200级阻断电压下的开关波形。
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引用次数: 7
Trench shielded planar gate IGBT (TSPG-IGBT) for low loss and robust short-circuit capalibity 沟槽屏蔽平面栅极IGBT (TSPG-IGBT)具有低损耗和强大的短路能力
Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694390
Jun Hu, M. Bobde, H. Yilmaz, A. Bhalla
A trench shielded planar gate IGBT is proposed in this paper. The unique 3D top cell structure, combining high density trench and low channel density, offers an excellent conduction vs. switching loss trade-off and a significantly better Short-circuit SOA compared to trench IEGTs. Measurements on fabricated devices show a 0.1V lower VCESAT for the same Eoff, and a 2x improvement in short circuit SOA.
本文提出了一种沟槽屏蔽平面栅极IGBT。独特的3D顶层电池结构,结合了高密度沟槽和低沟道密度,提供了出色的传导与开关损耗权衡,以及与沟槽iegt相比更好的短路SOA。对制造器件的测量表明,相同Eoff的VCESAT降低了0.1V,短路SOA提高了2倍。
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引用次数: 19
A 0.35 μm 700 V BCD technology with self-isolated and non-isolated ultra-low specific on-resistance DB-nLDMOS 一种0.35 μm 700 V BCD技术,具有自隔离和非隔离超低比导通电阻DB-nLDMOS
Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694429
Kun Mao, M. Qiao, Lingli Jiang, Huaping Jiang, Zehong Li, Weizhong Chen, Zhaoji Li, Bo Zhang
Integrated in a 0.35 μm 700 V BCD process platform, ultra-low Ron, sp 700 V self-ISO (isolated) and NISO (non-isolated) DB-nLDMOS (dual P-buried-layer nLDMOS) are proposed in this paper. 800 V and 780 V are achieved for NISO and ISO DB-nLDMOS, of which Ron, sp are 11.5 Ω·mm2 and 11.2 Ω·mm2, respectively. Utra-low Ron, sp benefits from optimized device size and strict limitations for annealing temperature and time after P-bury-layer implantation. For ISO DB-nLDMOS, by separately implanting NWELLs, NWELL drift region of low doping concentration under gate poly is achieved and then premature avalanche breakdown around bird's beak is avoided. Moreover, a 600 V DB-nJFET (dual P-buried-layer nJFET) with innovative 3D pinch-off structure is also presented.
在0.35 μm 700 V BCD工艺平台上集成了超低Ron、sp 700 V自iso(隔离)和NISO(非隔离)DB-nLDMOS(双p埋层nLDMOS)。NISO和ISO DB-nLDMOS的电压分别为800 V和780 V,其中Ron, sp分别为11.5 Ω·mm2和11.2 Ω·mm2。超低Ron, sp得益于优化的器件尺寸和p -埋层植入后对退火温度和时间的严格限制。对于ISO DB-nLDMOS,通过单独植入NWELL,实现栅聚下低掺杂浓度的NWELL漂移区,避免了鸟喙周围过早的雪崩击穿。此外,还提出了一种新颖的具有三维掐断结构的600 V DB-nJFET(双p埋层nJFET)。
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引用次数: 30
High speed turn-on gate driving for 4.5kV IEGT without increase in PiN diode recovery current 在不增加引脚二极管恢复电流的情况下,实现4.5kV IEGT高速导通栅极驱动
Pub Date : 2013-05-26 DOI: 10.1109/ISPSD.2013.6694419
Yamato Miki, M. Mukunoki, Takashi Matsuyoshi, M. Tsukuda, I. Omura
4.5 kV IEGT turn-on loss reduction is experimentally and numerically achieved by employing the proposed simple two step gate drive method without affecting PiN diode reverse recovery performance. It was found that 14% of turn-on loss is reduced only by the simple method. This study determines, for the first time, the optimum gate driving in the two step gate drive which can reduce IEGT turn-on loss maximally without affecting PiN diode reverse recovery performance by TCAD simulation. The method is simple yet effective for reducing switching loss of high voltage IEGT.
在不影响PiN二极管反向恢复性能的情况下,采用简单的两阶栅极驱动方法,实验和数值上实现了4.5 kV IEGT导通损耗降低。结果发现,仅采用简单的方法即可减少14%的导通损失。本研究首次通过TCAD仿真确定了在不影响PiN二极管反向恢复性能的前提下,最大限度降低IEGT导通损耗的两阶栅极驱动中的最佳栅极驱动。该方法简单有效地降低了高压IEGT的开关损耗。
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引用次数: 4
期刊
2013 25th International Symposium on Power Semiconductor Devices & IC's (ISPSD)
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