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1980 International Electron Devices Meeting最新文献

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Thermal diffusion current mechanisms in n+-p-p+Hg1-xCdxTe photodiodes n+-p-p+Hg1-xCdxTe光电二极管的热扩散电流机制
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1980.189878
J. Shanley, C. T. Flanagan, M. Reine, T. Casselman
The thermal diffusion current mechanisms present in an 8-14 micrometer n+-p-p+(Hg,Cd)Te photodiode are analyzed. The n+region diffusion current is determined by first calculating the Auger 1 lifetime in degenerate n-type (Hg,Cd)Te. The Auger 1 lifetime is found to vary as 1/nαo, where 0.7 ≤ α ≤ 1.0 and no is the equilibrium carrier density, for degenerate n-type (Hg,Cd)Te. The p-side diffusion current is calculated by considering the radiative and Auger 7 recombination mechanisms. A comparison of the n+- and p- side thermal diffusion current components reveals that the p-side contribution is dominant.
分析了8 ~ 14微米n+-p-p+(Hg,Cd)Te光电二极管的热扩散电流机制。n+区扩散电流首先通过计算简并n型(Hg,Cd)Te中的俄歇1寿命来确定。简并n型(Hg,Cd)Te的俄歇1寿命为1/nα 0,其中0.7≤α≤1.0,no为平衡载流子密度。考虑辐射和俄歇7复合机制,计算了p侧扩散电流。对n+侧和p侧热扩散电流分量的比较表明,p侧的贡献占主导地位。
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引用次数: 0
InP/InGaAs heterojunction bipolar phototransistors with improved sensitivity 灵敏度提高的InP/InGaAs异质结双极光电晶体管
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1980.189884
J. Campbell, A. Dentai, C. Burrus, J. F. Ferguson
The fabrication and device characteristics of back-illuminated InP/InGaAs n-p-n heterojunction phototransistors will be described. These devices consist of a "wide-bandgap" InP emitter with smaller bandgap InGaAs base and collector layers. Uniform spectral response is observed in the wavelength range from 0.95 µm to 1.6 µm. The DC optical gain increases from approximately 40 at an input power of 1 nW to over 1000 for an input power level of 5 µW. The small-signal gain is characteristically 2 to 3 times higher than the EC gain. The cut-off frequency fTis an increasing function of the incident light level; for 1 µW of incident power fT≃ 300 MHz. The possible applications of these phototransistors in fiber optic systems will be discussed.
介绍了背光InP/InGaAs n-p-n异质结光电晶体管的制作方法和器件特性。这些器件由“宽带隙”的InP发射极和较小带隙的InGaAs基极和集电极层组成。在0.95µm ~ 1.6µm波长范围内光谱响应均匀。直流光增益从输入功率为1nw时的约40增加到输入功率为5 μ W时的1000以上。小信号增益通常比EC增益高2到3倍。截止频率是入射光强度的递增函数;当入射功率为1 μ W时,fT≃300 MHz。讨论了这些光电晶体管在光纤系统中的可能应用。
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引用次数: 0
LWIR HgCdTe photovoltaic detectors for hybrid focal plane arrays 用于混合焦平面阵列的LWIR HgCdTe光伏探测器
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1980.189875
K. Riley
High performance second generation infrared imaging systems require high density focal plane arrays which utilize intrinsic HgCdTe photodiodes for photon detection and Si CCD signal processors in a hybrid configuration. Limitations on system performance are established by both input circuit as well as detector requirements. In the paper performance of LWIR photodiodes in the 8-12 µm spectral region will be discussed. LWIR HgCdTe photodiodes have been fabricated by two basic techniques: ion implantation and liquid phase epitaxial heterojunctions. In the 8-12 µm region dark current components include diffusion, generation-recombination, tunneling and surface leakage currents. Each of these components may be minimized and therefore performance maximized by proper choice of material parameters and device design. In this paper a tradeoff analysis including thin base lateral diffusion (TBLD) as well as heterojunction (HJ) design concepts utilized to minimize dark current sources will be presented. A review of recent and current work on HgCdTe ion implantation and heterojunction technology including material growth, surface passivation and device fabrication will be presented and experimental results compared with predicted device performance.
高性能第二代红外成像系统需要高密度焦平面阵列,该阵列采用混合配置的HgCdTe光电二极管进行光子检测和Si CCD信号处理器。系统性能的限制是由输入电路和检测器的要求建立的。本文将讨论LWIR光电二极管在8-12µm光谱范围内的性能。采用离子注入和液相外延异质结两种基本技术制备了低波长红外高碲化镉光电二极管。在8-12µm区域,暗电流组分包括扩散电流、产生复合电流、隧道电流和表面漏电流。通过适当选择材料参数和器件设计,这些组件中的每一个都可以最小化,从而使性能最大化。在本文中,权衡分析,包括薄基横向扩散(tld)以及异质结(HJ)设计概念,用于最小化暗电流源将被提出。综述了近年来在HgCdTe离子注入和异质结技术方面的研究进展,包括材料生长、表面钝化和器件制造,并将实验结果与预测器件性能进行了比较。
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引用次数: 0
A new silicon micro-transducer for the measurement of the magnitude and direction of a magnetic-field vector 一种用于测量磁场矢量大小和方向的新型硅微传感器
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1980.189924
V. Zieren
This paper describes a new Silicon Micro-Transducer (SMT) which is capable of measuring the magnitude and direction of a magnetic-field vector. This vector sensor --made by standard bipolar technology-is a four-collector npn-transistor giving output signals which are a linear function of the two components of an in-plane magnetic field. A centrally injected current is divided into four equal parts. The current differences of the two pairs of opposite collectors, affected by the two in-plane field components, are the output signals. Consequently, the amplitude and direction of the applied field can be derived from these independent signals. The vector sensor was developed from a one-dimensional sensor having two collectors only. As the basic operating principles are the same, most of the one-dimensional characteristics also apply to the vector sensor. Non-linearity: ≤ 0.3% for |B| ≤ 1 T. Typical sensitivity per collector pair: δIc/(Ic.B) = 3 × 10-2T-1at Ucb= 5 V.
本文介绍了一种能够测量磁场矢量大小和方向的新型硅微换能器。这种矢量传感器采用标准双极技术制造,是一种四集电极npn晶体管,输出信号是平面内磁场两个分量的线性函数。集中注入的电流被分成四等份。两对相对集电极的电流差,受两个面内场分量的影响,即为输出信号。因此,可以从这些独立的信号推导出外加场的振幅和方向。矢量传感器是由只有两个收集器的一维传感器发展而来的。由于基本工作原理相同,矢量传感器的大部分一维特性也适用于矢量传感器。每集电极对的典型灵敏度:δIc/(Ic.B) = 3 × 10-2T-1at Ucb= 5 V。
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引用次数: 11
Weakly inverted MOSFETs and their applications 弱反转mosfet及其应用
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1980.189959
S.T. Liu, O. Tufte, J.S.T. Huang, A. van der Ziel
The relevant properties of the weakly inverted MOSFETS are examined for high impedance sensor applications. The characteristics of these devices are exponential and their transconductance approaches that of bipolar transistors through a factor n which is a useful characteristic of these devices. The high frequency noise spectrum in these devices is found to be white and inversely proportional to the drain current. The high frequency noise spectrum is related to n and is identified to be thermal noise. The 1/f noise corner frequencies in these devices are found to be lower than in the strongly inverted region. These properties make the weakly inverted MOSFETS useful as amplifiers in low power, low frequency and high impedance sensor applications.
研究了用于高阻抗传感器的弱倒置mosfet的相关特性。这些器件的特性是指数的,它们的跨导通过一个因数n接近双极晶体管,这是这些器件的一个有用的特性。这些器件中的高频噪声频谱呈白色,且与漏极电流成反比。高频噪声谱与n相关,确定为热噪声。发现这些器件中的1/f噪声角频率低于强反转区域。这些特性使得弱反向mosfet在低功率、低频率和高阻抗传感器应用中用作放大器。
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引用次数: 0
Experimental and theoretical characterization of submicron MOSFETs 亚微米mosfet的实验与理论表征
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1980.189743
W. Fichtner, E. Fuls, R. L. Johnston, T. Sheng, R. Watts
We report on measurements and computer simulations for enhancement and depletion MOSFETs with submicron channel lengths as small as 0.2 µm. The behavior of the devices is analyzed using both advanced techniques such as transmission electron microscopy for profile measurements and numerical models to simulate processing conditions and device behavior in two dimensions.
我们报告了亚微米通道长度小至0.2 μ m的增强和耗尽mosfet的测量和计算机模拟。设备的行为分析使用先进的技术,如透射电子显微镜的轮廓测量和数值模型,以模拟加工条件和设备的行为在两个维度。
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引用次数: 15
GaAs IGFET: A new device for high speed digital ICs GaAs IGFET:一种高速数字集成电路的新器件
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1980.189861
F. Schuermeyer, H.P. Singh, R. Scherer, D. Mays
GaAs IGFETs contain large interface state densities at midgap which, in the past have hindered the application of these devices in digital ICs. We have developed circuit techniques to charge these interface states such that the device operates in enhancement mode. These interface charges appear frozen at high frequencies. Ring oscillators and divide by two circuits were successfully fabricated and encouraging performance characteristics were observed. This presents the first reported demonstration of divide by two circuits using GaAs IGFET technology.
GaAs igfet在中隙处含有较大的界面态密度,这在过去阻碍了这些器件在数字集成电路中的应用。我们已经开发了电路技术来充电这些接口状态,使设备在增强模式下工作。这些界面电荷在高频时似乎是冻结的。成功地制作了环形振荡器和分频电路,并观察到令人鼓舞的性能特点。本文首次报道了采用GaAs IGFET技术的分二电路的演示。
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引用次数: 3
High frequency bipolar - JFET - I2L process 高频双极- JFET - I2L工艺
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1980.189844
S. Lui, R. Meyer
A new monolithic process is described which allows simultaneous fabrication of high-speed (fT=400 MHz) JFETs, high-frequency (fT=4 GHz) bi-polar transistors plus I2L logic (td=14 ns). The process incorporates an ion-implanted JFET structure with independently contacted gates and a bi-polar transistor with implanted base and emitter.
描述了一种新的单片工艺,可以同时制造高速(fT=400 MHz) jfet,高频(fT=4 GHz)双极晶体管和I2L逻辑(td=14 ns)。该工艺包含具有独立接触栅极的离子注入JFET结构和具有注入基极和发射极的双极晶体管。
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引用次数: 0
Propagation delay time dependence on gate geometry for the self-aligned I2L 自对准I2L传输延迟时间与栅极几何的关系
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1980.189846
S. Kameyama, K. Kanzaki, M. Taguchi, Y. Sasaki, G. Sasaki
The gate geometry dependence of the minimum pro.- pagation delay time (tpdm) was investigated for the self-aligned I2L. Switching characteristics were measured by using I2L test patterns with different base contact geometries and collector widths (Wc); tpdm=0.9 nS for a double base contact and Wc= 4µm I2L gate and ftoggle-max= 150 MHz for a divide-by two circuit with Wc= 7 µm I2L gates. Experimental results suggest that the resistance of the intrinsic base area for the n-p-n transistor has strong influence on tpdm. An analysis based on a charge control model which includes this base resistance effect was carried out and the experimental results were explained very well.
栅极几何关系的最小亲。研究了自对准I2L的分页延迟时间(tpdm)。采用不同基极接触几何形状和集电极宽度(Wc)的I2L测试模式测量开关特性;对于双基极触点和Wc= 4µm I2L栅极,tpdm=0.9 nS;对于Wc= 7µm I2L栅极的二分电路,ftoggle-max= 150 MHz。实验结果表明,n-p-n晶体管的本征基极电阻对tpdm有很大的影响。基于电荷控制模型分析了这种基极电阻效应,并对实验结果进行了很好的解释。
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引用次数: 4
Electrically alterable programmable logic array (EAPLA) 电可变可编程逻辑阵列
Pub Date : 1900-01-01 DOI: 10.1109/IEDM.1980.189904
Y. Hsieh, R. Wood, P.P. Wang
A functional Electrically Alterable Programmable Logic Array (EAPLA) has been developed to serve as fast turn-around-time engineering hardware for custom structured macro design in VLSI. A novel electrically alterable, floating gate memory device has been developed with double polysilicon technology. It was used in the PLA array such that the personalization patterns of the PLA can be electrically altered in the users' laboratory after packaging. The non-volatile memory device employs channel hot electron injection to write and junction avalanche breakdown hot hole injection or Fowler-Nordheim electron tunneling across the oxides to erase. Unique features of the cell structures and implementation to the EAPLA will be discussed.
开发了一种功能可变可编程逻辑阵列(EAPLA),可作为VLSI中定制结构宏设计的快速工程硬件。采用双多晶硅技术研制了一种新型的可电变浮栅存储器件。它被用于PLA阵列,使得PLA的个性化图案可以在包装后在用户的实验室中被电改变。该非易失性存储器件采用通道热电子注入进行写入和结雪崩击穿热孔注入或Fowler-Nordheim电子隧道穿过氧化物进行擦除。将讨论细胞结构的独特特征和EAPLA的实现。
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引用次数: 2
期刊
1980 International Electron Devices Meeting
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