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2019 International Conference on Electronics Packaging (ICEP)最新文献

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Recent Progress of SiC-MOSFETs and Their Futures-Competion with state-of-the-art Si-IGBT- sic - mosfet的最新进展及其未来与最先进Si-IGBT的竞争
Pub Date : 2019-04-17 DOI: 10.23919/ICEP.2019.8733597
N. Iwamuro
SiC MOSFET device is a one of superior candidates as next power semiconductor device structure for many power transform systems. Owing to high requirement of stability for the whole application systems, it is essential to explore the optimized structures and operations for SiC MOSFETs with not only the extremely low on resistance but also much higher reliability. In this paper, an overview on recent device technologies of SiC MOSFETs is introduced.
SiC MOSFET器件是许多功率转换系统中下一代功率半导体器件结构的首选器件之一。由于整个应用系统对稳定性的要求很高,因此探索具有极低导通电阻和更高可靠性的SiC mosfet的优化结构和操作是非常必要的。本文综述了近年来碳化硅mosfet的器件技术。
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引用次数: 5
Design demonstration of band-pass-filter characteristics with integrated passive device on glass interposer 玻璃中间层上集成无源器件带通滤波器特性的设计演示
Pub Date : 2019-04-17 DOI: 10.23919/ICEP.2019.8733408
Masaya Tanaka, T. Takano, Yumi Okazaki
We studied the fundamental characteristics of two type passive elements of the integrated passive devices (IPDs) configuration with electromagnetic field analysis and measurement. One is 3D solenoid coil using through glass via (TGV), and another is metal insulator metal (MIM) structured capacitor with inorganic dielectric thin film. Our developed 3D TGV inductor achieved high Q factor by optimizing of solenoid coil design. And our developed MIM capacitor indicates high breakdown voltage by controlling surface roughness condition of metal pad. Furthermore, we demonstrated band pass filter design that passes 2.4GHz to 2.5GHz with the combination of these IPDs. From this evaluation, our developed glass interposer (GiP) with filter function with IPDs achieved very small size, low height and better electrical characteristics compared with conventional LTCC component.
对集成无源器件(ipd)结构中两类无源元件的基本特性进行了电磁场分析和测量。一种是采用玻璃通孔(TGV)的三维电磁线圈,另一种是采用无机介质薄膜的金属绝缘体金属(MIM)结构电容器。通过对电磁线圈的优化设计,实现了高Q因子的三维TGV电感。我们研制的MIM电容器通过控制金属衬垫的表面粗糙度来实现高击穿电压。此外,我们展示了通过这些ipd组合的2.4GHz至2.5GHz带通滤波器设计。从这个评估中,我们开发的具有ipd过滤功能的玻璃中间层(GiP)与传统的LTCC组件相比,实现了非常小的尺寸,低高度和更好的电气特性。
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引用次数: 1
GaAs Diode Rectifier Power Module in mixed Ag- and Large Area Cu-Sintering Technology for Ultra-Fast and Wireless Electric Vehicle Battery Charging 用于超快速无线充电的砷化镓二极管整流功率模块混合银和大面积铜烧结技术
Pub Date : 2019-04-17 DOI: 10.23919/ICEP.2019.8733484
T. Blank, V. Dudek, M. Luh, B. An, H. Wurst, B. Leyrer, D. Ishikawa, Marc Weber
This paper describes the properties of GaAs PIN power diodes and demonstrates their utilization in a 650V 10kW LLC converter for fast charging of electric vehicles. The module comprises two SiC MOSFET half-bridges equipped with Rohm S4101 MOSFETs and the GaAs rectifier module packaged in an EconoPACK2 housing. The SiC half-brides and the GaAs rectifier are assembled on 0.38 mm thick zirconia-toughened alumina (ZTA) substrate with a bending strength of 700 MPa and a thermal conductivity of 27 W/mK. The SiC and GaAs semiconductors are silver-sintered onto a 0.3 mm measuring copper thick film layer on the top and bottom side of the substrate. The substrate is pressure sintered by a novel low temperature copper paste to the three mm thick copper base plate. The bow of the base plate with copper sintered substrates measures 200 μm and is comparable to the bow of soldered substrates. The thermal resistance of the GaAs module is calculated to 0.73 K/W. First electrical measurement at an output power of 0.5 kW reveal the extremely fast switching characteristic of the diode, which were validated by double pulse measurements.
介绍了GaAs PIN功率二极管的特性,并演示了其在电动汽车快速充电用650V 10kW LLC变换器中的应用。该模块包括两个SiC MOSFET半桥,配备Rohm S4101 MOSFET和封装在EconoPACK2外壳中的GaAs整流模块。SiC半新娘和GaAs整流器组装在0.38 mm厚的氧化锆增韧氧化铝(ZTA)衬底上,其抗弯强度为700 MPa,导热系数为27 W/mK。SiC和GaAs半导体在衬底的上下两侧的0.3 mm测量铜厚薄膜层上进行银烧结。该基板是由一种新型低温铜膏压烧结到3毫米厚的铜基板上。铜烧结基板的弯曲尺寸为200 μm,与焊接基板的弯曲相当。计算出GaAs模块的热阻为0.73 K/W。首先在0.5 kW的输出功率下进行电测量,揭示了二极管极快的开关特性,并通过双脉冲测量验证了这一点。
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引用次数: 1
Selective removal by laser processing for the sensor mold 传感器模具的激光加工选择性去除
Pub Date : 2019-04-17 DOI: 10.23919/ICEP.2019.8733450
Ryuta Ikoma, K. Mawatari, Koji Hashimoto, J. Sato, Nobuyoshi Wakasugi
In order to achieve the stress free structure of the sensor chip, it is necessary to remove the epoxy molding compound (EMC) around the sensor chip. However, removing the EMC close to the sensor chip may damage the sensor chip, and it adversely affects the sensor characteristics. Therefore, it is necessary to develop the processing method that can remove only EMC without damaging the sensor chip. As the processing method, Er:YAG laser is adopted by focusing on the difference of energy absorption rate vs. wavelength between the sensor chip and the EMC. In order to measure the difference of energy absorption rate vs. the laser wavelength, FT-IR was selected Moreover, a laser energy distribution was visualized by a laser beam analysis of a spherical aberration characteristic, and the damaged zone of the sensor chip and the removed zone of the EMC within the laser spot diameter were clarified. With 2940nm wavelength Er:YAG, energy absorption rate of the sensor chip is 12.7% and that of the EMC is 95.5%. From this result, it is estimated that the resin close to the sensor chip can be removed due to high energy absorption rate and the sensor chip is not damaged due to low energy absorption rate. In addition, by visualizing the energy distribution of the laser, the focus position is considered to achieve both the selective removal and a processing time. As a result, selective removal can be achieved by setting the focus position to 0.4 mm out of focus side.
为了实现传感器芯片的无应力结构,需要去除传感器芯片周围的环氧成型化合物(EMC)。但是,移除靠近传感器芯片的EMC可能会损坏传感器芯片,对传感器特性产生不利影响。因此,有必要开发一种既能去除EMC又不损坏传感器芯片的处理方法。加工方法采用Er:YAG激光,重点关注传感器芯片与EMC之间的能量吸收率与波长的差异。为了测量能量吸收率随激光波长的变化,选择了傅里叶变换红外光谱(FT-IR),并通过对激光束球差特性的分析可视化了激光能量分布,明确了传感器芯片在激光光斑直径范围内的损伤区和电磁干扰去除区。在2940nm波长Er:YAG下,传感器芯片的能量吸收率为12.7%,电磁兼容的能量吸收率为95.5%。从这个结果可以估计,由于能量吸收率高,靠近传感器芯片的树脂可以被移除,并且由于能量吸收率低,传感器芯片不会被损坏。此外,通过可视化激光的能量分布,焦点位置被认为是实现选择性去除和加工时间。因此,可以通过将焦点位置设置为距焦点侧0.4 mm来实现选择性去除。
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引用次数: 1
Wafer-scale Au-Au surface activated bonding using atmospheric-pressure plasma 使用常压等离子体的晶圆级Au-Au表面活化键合
Pub Date : 2019-04-17 DOI: 10.23919/ICEP.2019.8733602
Michitaka Yamamoto, T. Matsumae, Y. Kurashima, H. Takagi, T. Miyake, T. Suga, T. Itoh, E. Higurashi
Wafer-scale surface activated bonding (SAB) using intermediate layers of ultra-thin Au films was performed by using glow-discharge-type atmospheric-pressure (AP) plasma with a direct plasma system. The entire process, from surface activation to bonding, was performed in ambient air using AP plasma. While partial wafer bonding was obtained with 2.5 s plasma treatment, strong bonding was obtained with both 10 s and 30 s plasma treatment, and the Si substrates were sometimes broken in a razor blade test.
采用直接等离子体系统,采用辉光放电型常压等离子体进行超薄金薄膜中间层表面活化键合(SAB)。整个过程,从表面活化到键合,都是在环境空气中使用AP等离子体进行的。2.5 s等离子体处理可获得部分晶圆键合,10 s和30 s等离子体处理可获得强键合,并且在刀片测试中有时会出现Si衬底断裂。
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引用次数: 1
Optimization of Wafer Thinning Process by Reducing Thickness Variation of Temporary Adhesive Layer for Medical Device 减少医疗器械临时粘接层厚度变化优化晶圆减薄工艺
Pub Date : 2019-04-17 DOI: 10.23919/ICEP.2019.8733598
Ken Yamamoto, Takuro Suyama, Noriyuki Fujimori
This study focuses on optimization of wafer thinning process by reducing the thickness variation of the temporary adhesive layer. To optimize edge trimming parameters, we evaluated the edge bead height and the width of the adhesive layer coated on the device wafer. After optimizing edge trimming parameters, the thickness distribution of the device wafer and the adhesive layer after thinning was evaluated. There was no difference in the thickness distribution of the device wafer and the adhesive layer after thinning regardless of whatever the edge trimming was applied or not. In contrast, peeling occurred at the edge of the bonded wafer only in the wafer without edge trimming. By measuring the surface shape of the glass wafer at the edge part, it was found that the wafer without edge trimming had a larger deflection than the wafer with edge trimming. Edge trimming is conventionally performed to prevent an edge chipping. Moreover, it has been confirmed that it is also effective to prevent a peeling of a wafer from a supporting substrate.
本研究的重点是优化晶圆减薄工艺,减少临时粘接层的厚度变化。为了优化边缘修整参数,我们评估了涂覆在器件晶圆上的胶粘剂层的边缘珠高度和宽度。优化边缘修整参数后,对减薄后的器件晶片和粘接层厚度分布进行了评价。无论是否进行边缘修整,减薄后的器件晶片和粘附层厚度分布没有差异。相比之下,仅在未进行边缘修剪的晶圆中,粘合晶圆的边缘发生剥落。通过对边缘部分玻璃晶圆表面形状的测量,发现没有边缘修整的晶圆比有边缘修整的晶圆有更大的挠度。通常进行边缘修剪以防止边缘切屑。此外,已证实它也有效地防止晶圆片从支撑基板上剥落。
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引用次数: 0
A Hollow Nanostructure of Silicon-Based can be produced by Using Electrospinning process 采用静电纺丝法可制备硅基中空纳米结构
Pub Date : 2019-04-17 DOI: 10.23919/ICEP.2019.8733522
Chun-Yi Chen, Junrong Zheng, Kai-Po Hsu, C. Chung
In this study, the silicon-base net-like hollow nano-structure were prepared using single-nozzle electrospinning and heat treatment process. Firstly, a precursor solution is prepared by dissolving an appropriate amount of Polyvinylpyrrolidone (PVP) and Tetraethyl orthosilicate (TEOS) in ethanol and spinning the nanofibers using a single -nozzle electrospinning. Secondly, the morphology of electrospinning nanofibers was controlled, the temperature profile was designed to prepare hollow nanofibers, and the morphology and properties of nanofibers were explored. Molding with traditional methods, such as rapid freezing, 3D printing, and sintering. It is almost impossible to prepare fibers with diameters less than 1 μm. The electrospinning technology is simple in its production process and cab increase the hollow, high length, uniform diameter, and diverse components of the nano-fiber.Finally, the characteristic of nanofibers, following instruments were used: Atomic force microscopy (AFM), Field Emission Scanning Electron Microscope (FE-SEM), Transmission electron microscopy (TEM), X-ray Diffract-ion(XRD). The AFM was used to scan the nanofibers, and 3D Graphics was used to explore the surface morphology of fibers. Using FE-SEM and TEM system is to explore the morphology, diameter of nanofibers, and hollow nanofiber . The electrospinning technique followed by subsequent heat treatment is well developed so that we can successfully prepare silicon-based oxide nanofibers with the hollow structure. Thus, the microstructure and morphology of electrostatic spinning silicon-base oxide hollow nanofibers were explored, and also their crystalline properties and crystal structure were identified.
本研究采用单喷嘴静电纺丝和热处理工艺制备了硅基网状中空纳米结构。首先,将适量的聚乙烯吡罗烷酮(PVP)和正硅酸四乙酯(TEOS)溶解在乙醇中制备前驱体溶液,并采用单喷嘴静电纺丝制备纳米纤维。其次,对静电纺丝纳米纤维的形貌进行了控制,设计了制备中空纳米纤维的温度分布,并对纳米纤维的形貌和性能进行了探讨。采用快速冷冻、3D打印、烧结等传统方法进行成型。制备直径小于1 μm的光纤几乎是不可能的。静电纺丝技术生产工艺简单,可提高纳米纤维的中空性、高长度、直径均匀性和成分多样性。最后,利用原子力显微镜(AFM)、场发射扫描电镜(FE-SEM)、透射电镜(TEM)、x射线衍射仪(XRD)对纳米纤维进行表征。利用原子力显微镜对纳米纤维进行扫描,利用三维图形技术对纤维表面形貌进行研究。利用FE-SEM和TEM系统对纳米纤维的形貌、直径和中空纳米纤维进行了研究。通过静电纺丝工艺和后续热处理工艺的发展,成功制备了具有中空结构的氧化硅纳米纤维。为此,对静电纺丝制备的硅基氧化物中空纳米纤维的微观结构和形貌进行了研究,并对其结晶性能和晶体结构进行了鉴定。
{"title":"A Hollow Nanostructure of Silicon-Based can be produced by Using Electrospinning process","authors":"Chun-Yi Chen, Junrong Zheng, Kai-Po Hsu, C. Chung","doi":"10.23919/ICEP.2019.8733522","DOIUrl":"https://doi.org/10.23919/ICEP.2019.8733522","url":null,"abstract":"In this study, the silicon-base net-like hollow nano-structure were prepared using single-nozzle electrospinning and heat treatment process. Firstly, a precursor solution is prepared by dissolving an appropriate amount of Polyvinylpyrrolidone (PVP) and Tetraethyl orthosilicate (TEOS) in ethanol and spinning the nanofibers using a single -nozzle electrospinning. Secondly, the morphology of electrospinning nanofibers was controlled, the temperature profile was designed to prepare hollow nanofibers, and the morphology and properties of nanofibers were explored. Molding with traditional methods, such as rapid freezing, 3D printing, and sintering. It is almost impossible to prepare fibers with diameters less than 1 μm. The electrospinning technology is simple in its production process and cab increase the hollow, high length, uniform diameter, and diverse components of the nano-fiber.Finally, the characteristic of nanofibers, following instruments were used: Atomic force microscopy (AFM), Field Emission Scanning Electron Microscope (FE-SEM), Transmission electron microscopy (TEM), X-ray Diffract-ion(XRD). The AFM was used to scan the nanofibers, and 3D Graphics was used to explore the surface morphology of fibers. Using FE-SEM and TEM system is to explore the morphology, diameter of nanofibers, and hollow nanofiber . The electrospinning technique followed by subsequent heat treatment is well developed so that we can successfully prepare silicon-based oxide nanofibers with the hollow structure. Thus, the microstructure and morphology of electrostatic spinning silicon-base oxide hollow nanofibers were explored, and also their crystalline properties and crystal structure were identified.","PeriodicalId":213025,"journal":{"name":"2019 International Conference on Electronics Packaging (ICEP)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2019-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127965992","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
High-toughness (111) nano-twinned copper lines for fan-out wafer-level packaging 用于扇形圆片级封装的高韧性(111)纳米孪晶铜线
Pub Date : 2019-04-17 DOI: 10.23919/ICEP.2019.8733599
Yu-Jin Li, W. Hsu, B. Lin, Chia-Cheng Chang, Chih Chen
In the present paper, the nt-Cu were electroplated on the InFO test vehicles with 5 μm line width to compare the reliability with the normal electroplated copper. The temperature of the TCT ranges from -55 to 125°C. The microstructure of the copper traces after 200 cycles and 1000 cycles was shown in the results. The nt-Cu RDL is much stronger than the normal Cu in the thermal cycling test. In order to understand the mechanical property of the nt-Cu and the normal Cu, tensile tests of electroplated copper foils was employed. After annealing at 250°C for 3 hours, the toughness of nt-Cu (about 60MJ/m3) is much higher than normal copper (about 30MJ/m3). In addition, the simulation results shows that the maximum stress on the copper trace during the TCT is about 200MPa which is much lower than the yield point of nt-Cu. In other word, the nt-Cu would return to original size when the stress removed without strain accumulation. In summary, we observed that the nt-Cu performs much better than normal copper in TCT. From the tensile test and simulation, we can understand the mechanical behavior and the typical reason for the high reliability of nt-Cu.
本文在5 μm线宽的InFO试验车上电镀了nt-Cu,并与普通电镀铜进行了可靠性比较。TCT的工作温度范围为-55℃~ 125℃。结果显示了200次循环和1000次循环后铜迹的显微组织。在热循环试验中,nt-Cu的RDL比普通Cu强得多。为了了解nt-Cu和普通Cu的力学性能,采用了电镀铜箔的拉伸试验。在250℃退火3小时后,nt-Cu的韧性(约60MJ/m3)远高于普通铜(约30MJ/m3)。此外,模拟结果表明,在TCT过程中,铜迹的最大应力约为200MPa,远低于nt-Cu的屈服点。换句话说,在没有应变积累的情况下,当应力消除时,nt-Cu将恢复到原始尺寸。总之,我们观察到nt-Cu在TCT中的性能比普通铜要好得多。通过拉伸试验和模拟,我们可以了解到nt-Cu合金的力学行为和高可靠性的典型原因。
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引用次数: 1
Electrodeposition of Cu doped ZnS and evaluation of its photocatalytic property 铜掺杂ZnS的电沉积及其光催化性能评价
Pub Date : 2019-04-17 DOI: 10.23919/ICEP.2019.8733595
Naohiro Matsuda, N. Okamoto, Takeyasu Saito
These days, development of new photocatalyst materials have been interested, which can absorb visible light and have photocatalytic activities towards various reaction. In this study, we focused on ZnS as a new photocatalyst material. We prepared ZnS by electrodeposition. At first, we tried to synthesis ZnS with different electrolytic bathes in terms of additive composition and pH. Comparing the properties of samples, the best bath condition was containing EDTA and adjusting pH to 2.00. Secondly, we tried to make the band gap energy of ZnS small by Cu doping. We prepared 3 different bathes in terms of the concentration of Cu; the ratio of Cu to Zn was 1 mol%, 5 mol% and 10 mol% (Cu1, Cu5 and Cu10). The band gap energy of the samples were 2.6 eV, 2.8 eV and 2.4 eV, respectively. The bandgap energy of ZnS without Cu was 3.6 eV, so we assumed that Cu played the role of making band gap energy narrow. According to the XPS analysis, the chemical state of Cu was Cu(metal), CuO, CuS, Cu2O and Cu2S. The chemical state of Zn was Zn(metal), ZnO, ZnS, and Cu10 contains larger amount of ZnS than Cu1 and Cu5. The results of cyclic voltammetory implied that formation of ZnS was suppressed in Cu1 and Cu5. Band gap energy of Cu doped ZnS was 2.8 eV for Cu1, 2.4 eV for Cu5 and 2.6 eV for Cu10, and all of them can absorb visible light(λ < 500 nm). The conduction band potential of Cu1, Cu5 and Cu10 was more highly negative than TiO2 one. It implies that Cu doped ZnS would have stronger phothocatalytic activity for reduction than TiO2 one.
近年来,人们对能够吸收可见光并对各种反应具有光催化活性的新型光催化剂材料的开发非常感兴趣。在这项研究中,我们重点研究了ZnS作为一种新的光催化剂材料。采用电沉积法制备ZnS。首先,我们尝试用不同的电解浴在添加剂组成和pH下合成ZnS。通过对样品性能的比较,最佳的电解浴条件是添加EDTA并将pH调至2.00。其次,我们试图通过Cu掺杂使ZnS的带隙能变小。我们根据Cu的浓度准备了3种不同的溶液;Cu与Zn的比例分别为1 mol%、5 mol%和10 mol% (Cu1、Cu5和Cu10)。样品的带隙能分别为2.6 eV、2.8 eV和2.4 eV。不含Cu的ZnS带隙能为3.6 eV,因此我们假设Cu起到了缩窄带隙能的作用。根据XPS分析,Cu的化学态为Cu(metal)、CuO、Cu、Cu2O和Cu2S。Zn的化学状态为Zn(金属),ZnO、ZnS, Cu10中ZnS的含量高于Cu1和Cu5。循环伏安结果表明,Cu1和Cu5抑制了ZnS的形成。Cu掺杂ZnS的能带能分别为Cu1的2.8 eV、Cu5的2.4 eV和Cu10的2.6 eV,均能吸收可见光(λ < 500 nm)。Cu1、Cu5和Cu10的传导带电位比TiO2的传导带电位负得更高。这说明Cu掺杂ZnS具有比TiO2掺杂ZnS更强的光催化还原活性。
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引用次数: 0
A Low-Cost Antenna-in-Package Solution for 77GHz Automotive Radar Applications 用于77GHz汽车雷达应用的低成本天线封装解决方案
Pub Date : 2019-04-17 DOI: 10.23919/ICEP.2019.8733518
Cheng-Yu Ho, Sheng-Chi Hsieh, Ming-Fong Jhong, H. Kuo, Chun-Yen Ting, Chen-Chao Wang
This work proposes a low-cost Antenna in package (AiP) solution implemented on Advanced single sided substrates (aS3 package) for 77-GHz automotive radar applications. The impact of fabrication tolerances is also studied in this work. This work demonstrates firstly the 77-GHz losses of the transition from chip to package among flip-chip ball grid array (FCBGA) package, flip chip chip scale (FCCSP) package, Fan out wafer level chip scale package (Fan-out WLP), and aS3 package. Although Fan-out WLP can minimizes 77-GHz losses of transition from chip to package plus package to PCB, low-cost AiP solutions are very important for 77-GHz automotive radar applications. The proposed AiP solution on aS3 package has low losses of transition from chip to package, and the performance of designed antenna on aS3 package meets the requirements of 77-GHz automotive radar systems. Finally, this work also demonstrates the impact of fabrication inaccuracies on the bandwidth and radiation pattern of AiP on aS3 package. This work provides a cost-effective AiP approach for 77-GHz automotive radar systems.
本研究提出了一种低成本的封装天线(AiP)解决方案,该方案在先进单面基板(aS3封装)上实现,适用于77 ghz汽车雷达应用。本文还研究了加工公差的影响。这项工作首先展示了倒装球栅阵列(FCBGA)封装、倒装芯片规模(FCCSP)封装、扇出晶圆级芯片规模封装(Fan-out WLP)和aS3封装之间从芯片到封装转换的77 ghz损耗。尽管扇出式WLP可以最大限度地减少从芯片到封装再到PCB的77 ghz损耗,但低成本AiP解决方案对于77 ghz汽车雷达应用非常重要。提出的基于aS3封装的AiP方案具有从芯片到封装的低损耗,设计的天线在aS3封装上的性能满足77 ghz汽车雷达系统的要求。最后,本工作还证明了制造精度对aS3封装上AiP的带宽和辐射方向图的影响。这项工作为77 ghz汽车雷达系统提供了一种经济有效的AiP方法。
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引用次数: 10
期刊
2019 International Conference on Electronics Packaging (ICEP)
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