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Reducing equivalent magnetic noise by electrode design and magnetic annealing in Quartz/Metglas magnetoelectric sensors 通过电极设计和磁退火降低石英/金属玻璃磁电传感器的等效磁噪声
IF 4.1 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-13 DOI: 10.1016/j.sna.2024.115903
Xuan Sun, Jingen Wu, Yiwei Xu, Jieqiang Gao, Bomin Lin, Guannan Yang, Bingfeng Ge, Zhongqiang Hu, Ming Liu

Magnetoelectric (ME) composites are promising for the development of high-performance magnetometers due to their high sensitivity, low cost, low power consumption, and small size. Enhancing the ME coefficient while reducing the background noise is an effective method to improve the performance of ME sensors, which remains challenging. In this work, we propose a method to reduce the equivalent magnetic noise by optimizing the electrode design and the magnetic annealing process in magnetoelectric quartz/Metglas composites. Compared with the non-optimized ME composites, the ME coefficient increases by 1.38 times while the background noise decreases by about 0.78 times, resulting in a LoD of 10 fT at resonance. Due to the high ME coefficient and low background noise, the equivalent magnetic noise from 20 kHz to 50 kHz was less than 6.10 pT/Hz1/2. The results show that proper annealing treatment of Metglas is beneficial for improving the soft magnetic properties. Meanwhile, the hollow electrode of quartz can reduce the equivalent capacitance and enhance the quality factor of the piezoelectric layer. This work demonstrates a feasible way to enhance the performance of ME magnetic field sensors.

磁电(ME)复合材料具有灵敏度高、成本低、功耗低和体积小等优点,因此在开发高性能磁强计方面大有可为。在提高 ME 系数的同时降低背景噪声是提高 ME 传感器性能的有效方法,但这仍然具有挑战性。在这项工作中,我们提出了一种通过优化磁电石英/金属玻璃复合材料的电极设计和磁退火工艺来降低等效磁噪声的方法。与未优化的 ME 复合材料相比,ME 系数增加了 1.38 倍,而背景噪声降低了约 0.78 倍,从而使共振时的 LoD 达到 10 fT。由于 ME 系数高、本底噪声低,从 20 kHz 到 50 kHz 的等效磁噪声小于 6.10 pT/Hz1/2。结果表明,适当的退火处理有利于提高 Metglas 的软磁特性。同时,石英空心电极可以降低等效电容,提高压电层的品质因数。这项研究为提高 ME 磁场传感器的性能提供了一种可行的方法。
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引用次数: 0
Experimental and density functional theory study of the gas sensing property of Pt and Au doped WS2 to partial discharge gas CO in air switchgear 掺杂铂和金的 WS2 对空气开关柜中局部放电气体 CO 的气体传感特性的实验和密度泛函理论研究
IF 4.1 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-13 DOI: 10.1016/j.sna.2024.115905
Yu Zhang , Weiquan Feng , Wenjun Hou , Wen Zeng , Qu Zhou

This work aims to investigate the detection performance of WS2 and its doped gas sensitive materials for carbon monoxide (CO), one of the most important characteristic gases of partial discharge in air switchgear.Its accurate monitoring can be an effective evaluation of the operating condition of air switchgear. Three gas-sensitive materials were synthesized using the hydrothermal method: WS2, Pt-WS2, and Au-WS2. The materials were characterized through XRD, SEM, and XPS, followed by an evaluation of their sensing performance for CO gas. The findings revealed that the gas sensitivity of WS2 was significantly enhanced through doping with Pt and Au. At a CO concentration of 10 ppm, the response sensitivity of the Pt-WS2 sensor reached 4.03, while that of the Au-WS2 sensor was measured at 2.68—both representing an increase by a factor of 3.52 compared to intrinsic WS2 sensors. Moreover, the response recovery time for the Au-WS2 sensor was found to be 20–30 s faster than that observed in Pt-WS2 sensors. The mechanisms underlying the enhancement in CO adsorption on WS2 due to Pt and Au doping were investigated based on density functional theory calculations encompassing band structure analysis, density of states assessment, adsorption distance measurement, and adsorption energy evaluation. This study posits that both Pt-WS2 and Au-WS2 can be used for the detection of partial discharge gas CO in air switchgear.

一氧化碳(CO)是空气开关设备中局部放电最重要的特征气体之一,准确监测一氧化碳可以有效评估空气开关设备的运行状况。采用水热法合成了三种气敏材料:水热法合成了三种气敏材料:WS2、Pt-WS2 和 Au-WS2。通过 XRD、SEM 和 XPS 对这些材料进行了表征,然后评估了它们对 CO 气体的传感性能。研究结果表明,通过掺杂铂和金,WS2 的气体灵敏度显著提高。在 CO 浓度为 10 ppm 时,铂-WS2 传感器的响应灵敏度达到 4.03,而金-WS2 传感器的响应灵敏度则为 2.68,两者都比固有的 WS2 传感器提高了 3.52 倍。此外,还发现 Au-WS2 传感器的响应恢复时间比 Pt-WS2 传感器快 20-30 秒。基于密度泛函理论计算,包括能带结构分析、状态密度评估、吸附距离测量和吸附能评估,研究了掺杂铂和金导致 WS2 对 CO 吸附增强的机制。本研究认为,Pt-WS2 和 Au-WS2 均可用于空气开关设备中局部放电气体 CO 的检测。
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引用次数: 0
Measuring internal temperature inside a sealed cell of an atomic magnetometer using steady-state linewidth analysis 利用稳态线宽分析测量原子磁力计密封单元的内部温度
IF 4.1 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-12 DOI: 10.1016/j.sna.2024.115900
Hong Zhang , Sheng Zou , Wei Quan , Xiyuan Chen

We report a non-destructive and in-situ measurement technique to infer the internal temperature inside a sealed cell of an atomic magnetometer, based on steady-state linewidth analysis. This approach exploits the relationship between the alkali vapor density and the steady-state linewidth of the magnetometer in the presence of an applied DC magnetic field, particularly when the spin polarization of the alkali metal is significantly low (P1). The atomic density inside the cell is a univariate nonlinear function of the cell temperature, enabling us to establish a model linking the magnetometer’s steady-state linewidth to the internal temperature of the cell. To validate the accuracy and feasibility of this method, we conducted a series of experiments over a wide temperature range, from 140 °C to 190 °C. Using the magnetometer’s steady-state linewidth as a key parameter, we successfully measured the actual temperature inside the cell. The test results were corrected to ensure precision and reliability, and comprehensive evaluations of measurement uncertainty were performed to quantify the confidence level in the temperature measurements. This novel determination method marks a significant advancement in atomic magnetometer temperature measurement, offering real-time and on-site monitoring capabilities within sealed cells.

我们报告了一种基于稳态线宽分析的非破坏性原位测量技术,用于推断原子磁强计密封单元的内部温度。这种方法利用了碱蒸气密度与外加直流磁场下磁力计稳态线宽之间的关系,尤其是当碱金属的自旋极化显著较低时(P≪1)。电池内部的原子密度是电池温度的单变量非线性函数,这使我们能够建立一个模型,将磁力计的稳态线宽与电池内部温度联系起来。为了验证这种方法的准确性和可行性,我们在 140 °C 至 190 °C 的宽温度范围内进行了一系列实验。利用磁强计的稳态线宽作为关键参数,我们成功测量了电池内部的实际温度。我们对测试结果进行了校正,以确保精度和可靠性,并对测量不确定性进行了全面评估,以量化温度测量的置信度。这种新颖的测定方法标志着原子磁强计温度测量的重大进步,为密封电池提供了实时和现场监测能力。
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引用次数: 0
Dome structure nonwoven-based dual-mode pressure-humidity sensor: Enhancing sensitivity and breathability for human health monitoring 基于穹顶结构无纺布的双模压力-湿度传感器:提高人体健康监测的灵敏度和透气性
IF 4.1 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-12 DOI: 10.1016/j.sna.2024.115887
Rui Zhang , Jian Wang , Jilong Wang , Chengjie Du , Zhuanyong Zou , Jianhan Hong

In the field of health monitoring and electronic skin, flexible wearable sensors have attracted considerable research interest. However, preparing a flexible multifunctional sensor that simultaneously possesses a rapid response time, stability, reliability, high breathability, as well as high sensitivity remains a significant challenge. Herein, a flexible pressure-humidity dual-mode sensor based on nonwoven fabrics is developed in this study, using hydroentangled nonwoven fabric with graphene oxide/carbon nanotube composite as the sensing layer and polyester plain nonwoven fabric with carbon nanotube printed interdigitated electrodes as the electrode layer. The sensor exhibits high permeability (649.2 mm/s), high sensitivity (2.72 kPa−1), wide sensing range (0–220 kPa), fast response/recovery time (24.4 /73.3 ms), and low detection limit (2.79 Pa). In addition, the sensor exhibits excellent cyclic stability (15,000 cycles) and can detect both weak body movements (pulses, swallowing) as well as large deformational movements (joint movements). Furthermore, the sensing layer of the sensor responds quickly to different humidity levels, which can be used to monitor humidity in real time, and human breathing and speech can be monitored by placing it inside a mask. This high-performance flexible pressure-humidity dual-mode sensor shows promising potential for applications in health monitoring and respiratory monitoring.

在健康监测和电子皮肤领域,柔性可穿戴传感器引起了相当大的研究兴趣。然而,制备一种同时具有快速响应时间、稳定性、可靠性、高透气性和高灵敏度的柔性多功能传感器仍然是一项重大挑战。本研究以氧化石墨烯/碳纳米管复合材料的水刺无纺布为传感层,以碳纳米管印刷交错电极的聚酯平纹无纺布为电极层,开发了一种基于无纺布的柔性压力-湿度双模传感器。该传感器具有高渗透性(649.2 mm/s)、高灵敏度(2.72 kPa-1)、宽传感范围(0-220 kPa)、快速响应/恢复时间(24.4 /73.3 ms)和低检测限(2.79 Pa)。此外,该传感器还具有出色的周期稳定性(15,000 个周期),既能检测到微弱的身体运动(脉冲、吞咽),也能检测到较大的变形运动(关节运动)。此外,传感器的传感层能对不同的湿度水平做出快速反应,可用于实时监测湿度,将其置于面罩内还能监测人的呼吸和语言。这种高性能柔性压力-湿度双模传感器在健康监测和呼吸监测领域的应用前景十分广阔。
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引用次数: 0
Real-time SERS sensing of highly toxic seawater contaminants using plasmonic silver assembled pyramidal/nanowire heterostructures 利用等离子体银组装金字塔/纳米线异质结构对剧毒海水污染物进行实时 SERS 检测
IF 4.1 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-12 DOI: 10.1016/j.sna.2024.115894
Abdel Rahman Allan , Soumya Columbus , Roqiya Belmerabet , Muhammed Irshad , Krithikadevi Ramachandran , Kais Daoudi , Mounir Gaidi

Hierarchically oriented plasmonic nanostructures have attracted an advanced molecular sensing platform for multifaceted applications. In the present work, we have attempted to fabricate ultrasensitive and cost-effective pyramidal/nanowire hetero arrays, hosted with silver nanoparticles for the effective surface-enhanced Raman spectroscopy (SERS) assisted detection of toxic water contaminants. Three-dimensionally oriented pyramidal/nanowire hetero arrays with enhanced surface area were fabricated by combining wet etching and metal-assisted chemical etching techniques. The regulation of structural features was achieved by controlling the process parameters during fabrication. Particularly, the evolution of morphological properties of the hybrid sensor was investigated in terms of nanowire aspect ratio and further analyzed in terms of SERS properties. The hetero arrays exhibited significant enhancement in Raman signal for sensing organic pollutants. Moreover, these hetero arrays with a nanowire length of ∼1 µm exhibited the highest signal enhancement. Further, the excellent reproducibility and reusability characteristics were also demonstrated for the fabricated sensors. Different cationic and anionic organic pollutants were employed for efficacy studies which showed detection limits ranging from femtomolar to picomolar levels. Finally, the real-time sensing of organic contaminants such as aniline was also investigated from seawater with an estimated enhancement factor of 8 × 108, indicating that as-fabricated hetero arrays can perform as outstanding SERS sensors for environmental remediation applications.

层次定向的质子纳米结构已成为一种先进的分子传感平台,可用于多方面的应用。在本研究中,我们尝试制作超灵敏、低成本的金字塔/纳米线异质阵列,并以银纳米粒子为载体,用于有效的表面增强拉曼光谱(SERS)辅助检测有毒水污染物。通过结合湿法蚀刻和金属辅助化学蚀刻技术,制备了具有增强表面积的三维定向金字塔/纳米线异质阵列。通过控制制造过程中的工艺参数,实现了对结构特征的调节。特别是从纳米线长宽比的角度研究了混合传感器形态特性的演变,并进一步从 SERS 特性的角度进行了分析。异质阵列在感测有机污染物方面表现出明显的拉曼信号增强。此外,纳米线长度为 1 µm 的异质阵列的信号增强效果最好。此外,所制造的传感器还具有出色的可重现性和可重复使用性。对不同的阳离子和阴离子有机污染物进行了功效研究,结果表明其检测限从飞摩尔级到皮摩尔级不等。最后,还对海水中苯胺等有机污染物的实时传感进行了研究,估计增强因子为 8 × 108。
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引用次数: 0
Determination of acoustic properties of paraffin oil mixed with activated coal nanoparticles or SPAN80 using only BAW time delay measurement 仅使用声表面波时延测量法确定石蜡油与活性炭纳米颗粒或 SPAN80 混合后的声学特性
IF 4.1 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-12 DOI: 10.1016/j.sna.2024.115893
Vladimir Anisimkin , Natalia Voronova , Elizaveta Shamsutdinova , Andrey Smirnov , Elizaveta Datsuk , Vadim Kashin , Vladimir Kolesov , Nina Filippova , Oleg Kotsyurbenko , Iren Kuznetsova

An important aspect of controlling the properties of liquids relates to their use in modern engines powered by composite materials. In this context, controlling the properties of industrial fluids containing micro- and nanoscale particles is essential. Understanding the temperature-dependent behavior of fluid density and elasticity is crucial for proper engine operation. Seven physical parameters of pure paraffin oil, paraffin oil with varying concentrations of activated coal nanoparticles or sorbitane monooleate (SPAN 80) were simultaneously determined using only BAW time delay measurement in the single experimental run. This technique relies on propagating LBAW through the test fluid and measuring the time delay and amplitude of these waves at different temperatures. By calculating temperature coefficients for velocity, density, time delay, and expansion using well-established formulas the physical properties of fluids under study were determined. The frequency of the LBAW used in the experiment was 13 MHz. The length of the liquid sample in the propagation direction of LBAW was ∼ 5 mm. The experiments were carried out within a temperature range of −20 °C to +90 °C. The volume of the test sample was around 1 milliliter. The comparison of the physical properties of different suspensions under these conditions allows us to demonstrate the dependence of the measured properties on the type and composition of the medium tested.

控制液体特性的一个重要方面与它们在由复合材料驱动的现代发动机中的应用有关。在这种情况下,控制含有微米级和纳米级颗粒的工业液体的特性至关重要。了解液体密度和弹性随温度变化的行为对发动机的正常运行至关重要。在一次实验中,仅使用 BAW 时延测量法同时测定了纯石蜡油、含有不同浓度活性煤纳米颗粒或单油酸山梨糖醇酐(SPAN 80)的石蜡油的七个物理参数。该技术依赖于在测试流体中传播低压声波,并测量这些波在不同温度下的时间延迟和振幅。通过使用成熟的公式计算速度、密度、时延和膨胀的温度系数,可以确定所研究流体的物理性质。实验中使用的 LBAW 频率为 13 MHz。液体样品在 LBAW 传播方向上的长度为 5 毫米。实验在 -20 °C 至 +90 °C 的温度范围内进行。测试样品的体积约为 1 毫升。通过比较这些条件下不同悬浮液的物理性质,我们可以证明所测得的物理性质与被测介质的类型和成分有关。
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引用次数: 0
Two-dimensional graphyne monolayers as substrate discs of piezoelectric nanogenerators: A hybrid atomistic-continuum model study 作为压电纳米发电机衬底圆盘的二维石墨烯单层:原子-真空混合模型研究
IF 4.1 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-12 DOI: 10.1016/j.sna.2024.115889
Masoumeh Shavikloo, Asghar Esmaeili

The different phases of α-, β-, and γ-graphyne, which are new types of two-dimensional carbon allotropes, hold promise as potential candidates for designing substrate discs in piezoelectric nanogenerators. Accurate modeling of the bending rigidity and stretching properties as well as resonance frequencies of these materials is crucial for engineering applications like nano-resonator and nanogenerator systems. This step is imperative in designing and advancing future applications involving these structures. This study aims to create a hybrid atomistic-continuum model for modeling graphyne monolayers used as substrate discs in nanogenerators. The model integrates the benefits of both atomistic and continuum approaches. Based on the results, α-graphyne is the least mechanically stable, while γ-graphyne is the most stable. However, in terms of vibration frequency, α-graphyne has the highest frequency while γ-graphyne has the lowest. Therefore, β-graphyne, with moderate stability and resonance frequency, is recommended as the ideal choice for the substrate disc in piezoelectric nanogenerators. It can function within the Q-F frequency range (30–140 GHz) and induce deformation in the piezoelectric shim as well as generation voltage.

α-、β-和γ-石墨烯是新型二维碳同素异形体,它们的不同物相有望成为设计压电纳米发电机基盘的潜在候选材料。这些材料的弯曲刚度和拉伸特性以及共振频率的精确建模对于纳米谐振器和纳米发电机系统等工程应用至关重要。这一步骤对于设计和推进涉及这些结构的未来应用至关重要。本研究旨在创建一个原子-真空混合模型,用于模拟纳米发电机中用作基底圆盘的石墨烯单层。该模型综合了原子方法和连续方法的优点。根据研究结果,α-石墨烯的机械稳定性最低,而γ-石墨烯的稳定性最高。然而,就振动频率而言,α-石墨烯的频率最高,而γ-石墨烯的频率最低。因此,β-石墨烯具有适中的稳定性和共振频率,建议作为压电纳米发电机中基片圆盘的理想选择。它能在 Q-F 频率范围(30-140 GHz)内发挥作用,并能引起压电垫片变形和产生电压。
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引用次数: 0
CMOS-based micro-fluxgate with racetrack core and solenoid coils 基于 CMOS 的微型磁通门,带赛道磁芯和电磁线圈
IF 4.1 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-12 DOI: 10.1016/j.sna.2024.115886
Jiří Maier , Pavel Ripka , Poki Chen

This work introduces an integrated fluxgate sensor fabricated using CMOS chip technology. The sensor uses a “racetrack” shape of the core. The material used for the core is VITROVAC 6025F, and the shape was laser-cut from 25 μm thick foil. The coils are solenoids fabricated using metal layers of the chip and bonding wires. Sensing and excitation coils have 60 and 40 turns respectively. TSMC D35 technology was used for fabrication. The size of the core is 8 mm × 1.75 mm. Dimensions of the chip are 8 mm × 2.7 mm (21.6 mm2).

The sensor was tested in open-loop operation using a sinewave excitation. Sensitivity increases with frequency up to 1.5 MHz, reaching 5000 V/T. This is a significantly higher value than what can be achieved using a flat pick-up coil (around 10 V/T). Fully saturating the core requires a 110 mA excitation current, leading to 300 mW power dissipation in the coil. The Core loss is 100 mW at 1 MHz excitation. The Noise at 1 Hz may be as low as 2nT/Hz depending on excitation signal parameters. The typical offset is below 1 μT.

这项工作介绍了一种利用 CMOS 芯片技术制造的集成磁通门传感器。该传感器采用 "赛道 "形状的磁芯。磁芯使用的材料是 VITROVAC 6025F,形状由 25 μm 厚的金属箔激光切割而成。线圈是利用芯片的金属层和键合导线制作的螺线管。感应线圈和激励线圈的匝数分别为 60 和 40。采用台积电 D35 技术制造。磁芯尺寸为 8 毫米 × 1.75 毫米。使用正弦波激励对传感器进行了开环运行测试。灵敏度随着频率的增加而增加,最高可达 1.5 MHz,达到 5000 V/T。这一数值明显高于使用扁平拾波线圈所能达到的数值(约 10 V/T)。使磁芯完全饱和需要 110 mA 的激励电流,这导致线圈中的功率损耗达到 300 mW。在 1 MHz 的激励下,磁芯损耗为 100 mW。根据激励信号参数的不同,1 Hz 时的噪声可能低至 2nT/Hz。典型偏移低于 1 μT。
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引用次数: 0
AlScN-based quasi-static multi-degree-of-freedom piezoelectric MEMS micromirror with large mirror plate and high fill factor 基于 AlScN 的准静态多自由度压电 MEMS 微镜,具有大镜面板和高填充因子
IF 4.1 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-11 DOI: 10.1016/j.sna.2024.115868
Junning Zhang , Yan Wang , Peng Chen , Tunan Lv , Hongbin Yu

A quasi-static multi-degree-of-freedom piezoelectric MEMS micromirror with large mirror plate and high fill factor based on AlScN is presented. It consists of two individual components, namely the mirror plate and the actuator. They are fabricated separately and vertically assembled together to form the final combination. In current case, a square mirror plate with side length of 5 mm is used. The actuator is designed into a gimbal-less structure, which involves a central connection platform with a mounting hole and four groups of piezoelectric actuators that are connected to the platform's corners via serpentine springs. This configuration provides multi-degree-of-freedom driving capabilities, allowing tip-tilt-piston mirror movement. The piezoelectric actuator is composed of three-stage cantilever-type actuation units that are connected in series, and they are intentionally arranged into S-shape so as to be completely hidden beneath the mirror plate. Moreover, the driving performance is further improved by optimizing the electrode coverage region on each actuation unit. As a result, not only large displacement but also nearly 100 % fill factor as well as high optical utilization efficiency can be achieved. From experimental results, the as-fabricated MEMS micromirror demonstrates static mechanical tilt angles of approximately ±2.2° about two orthogonal axes and piston vertical movement of ±54.9 μm within ±50 VDC driving voltage range with excellent linearity. Given the large mirror size, high fill factor and multi-degree-of-freedom motion advantages, the proposed micromirror could be found application perspective in light field shaping, free space optical communication and projection lithography areas.

本文介绍了一种基于 AlScN 的准静态多自由度压电 MEMS 微镜,它具有大镜板和高填充因子。它由两个独立的部件组成,即镜板和致动器。它们分别制造并垂直组装在一起,形成最终组合。本例中使用的是边长为 5 毫米的方形镜板。致动器设计为无万向节结构,包括一个带安装孔的中央连接平台和四组压电致动器,这些致动器通过蛇形弹簧连接到平台的四角。这种配置具有多自由度驱动能力,可实现尖端倾斜-活塞镜运动。压电致动器由串联的三级悬臂式致动单元组成,它们被有意布置成 S 形,以便完全隐藏在镜板下面。此外,通过优化每个执行单元上的电极覆盖区域,进一步提高了驱动性能。因此,不仅可以实现大位移,还可以实现近 100% 的填充因子和高光学利用效率。实验结果表明,制作完成的 MEMS 微镜在 ±50 VDC 驱动电压范围内,对两个正交轴的静态机械倾斜角约为±2.2°,活塞垂直移动量为±54.9 μm,线性度极佳。鉴于微镜具有大尺寸、高填充系数和多自由度运动等优点,该微镜可在光场整形、自由空间光通信和投影光刻等领域找到应用前景。
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引用次数: 0
Sensitive determination of mechanical and thermal properties of MoS2 multilayers using microcantilevers 利用微悬臂灵敏测定 MoS2 多层膜的机械和热性能
IF 4.1 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-11 DOI: 10.1016/j.sna.2024.115902
M. Raghu Ramaiah, R.G. Athira, Kishore K. Madapu, K. Prabakar, S. Tripurasundari, Sandip K. Dhara

Understanding the mechanical and thermal properties of MoS2 multilayers is of importance for applications ranging from nano-mechanical structures to high-performance flexible electronics. The conventional methods such as micro-Raman spectroscopy, are often constrained by factors like probing laser beam induced heating and substrate interactions. In the present work, we demonstrate a novel method to estimate the Young’s modulus, strain and thermal expansion co-efficient of MoS2 multilayers using a bimaterial like micro-mechanical device made of MoS2 and SiO2. SiO2 microcantilevers (MC) were fabricated using bulk micromachining technique and MoS2 layers were grown on one side of the device by chemical vapor deposition method. Shift in resonance frequency due to the added MOS2 layers on MCs was used to estimate the Young’s modulus of layered MoS2. Similarly, growth induced curvature change of the bimaterial MCs was measured to estimate the interfacial stress between the MoS2 multilayers and the substrate. From the measured temperature induced curvature changes, thermal expansion co-efficient of layered MoS2 was estimated.

了解 MoS2 多层膜的机械和热特性对于从纳米机械结构到高性能柔性电子器件等各种应用都非常重要。微拉曼光谱法等传统方法往往受到探测激光束诱导加热和基底相互作用等因素的限制。在本研究中,我们展示了一种新方法,利用由 MoS2 和 SiO2 制成的双材料微型机械装置来估算 MoS2 多层膜的杨氏模量、应变和热膨胀系数。SiO2 微悬臂 (MC) 采用体微加工技术制造,MoS2 层则通过化学气相沉积法生长在装置的一侧。利用 MC 上添加的 MOS2 层引起的共振频率偏移来估算层状 MoS2 的杨氏模量。同样,通过测量双材料 MC 的生长诱导曲率变化来估算 MoS2 多层与基底之间的界面应力。通过测量温度引起的曲率变化,可以估算出层状 MoS2 的热膨胀系数。
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引用次数: 0
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Sensors and Actuators A-physical
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