Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908865
Yu-Min Fu, Y. Liang, Y. T. Cheng, Pu-Wei Wu
Inkjet printing has been one of fascinating techniques for microfabrication owing to the characteristics of low manufacturing cost, low processing temperature, low material usage,...etc. [1, 2]. In this work, a Lift-off Printing (LoP) process combining conventional photolithography and inkjet printing processes is introduced to realize printed size-scalable silver microstructures with the line width of 5 up to 70 μm and the resistivity of ~5.7 μΩ · cm on a silicon substrate. In addition, an as-printed interdigitated capacitor with the electrode size and spacing of 10μm has been successfully demonstrated with a capacitance of 2.3 pF/mm2@10kHz.
{"title":"Size scaling of printed microstructures using a lift-off printing (LoP) process","authors":"Yu-Min Fu, Y. Liang, Y. T. Cheng, Pu-Wei Wu","doi":"10.1109/NEMS.2014.6908865","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908865","url":null,"abstract":"Inkjet printing has been one of fascinating techniques for microfabrication owing to the characteristics of low manufacturing cost, low processing temperature, low material usage,...etc. [1, 2]. In this work, a Lift-off Printing (LoP) process combining conventional photolithography and inkjet printing processes is introduced to realize printed size-scalable silver microstructures with the line width of 5 up to 70 μm and the resistivity of ~5.7 μΩ · cm on a silicon substrate. In addition, an as-printed interdigitated capacitor with the electrode size and spacing of 10μm has been successfully demonstrated with a capacitance of 2.3 pF/mm2@10kHz.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"89 1","pages":"530-531"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90608013","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908849
Wen Liu, Mengdi Han, Xuming Sun, Haixia Zhang
Polyvinylidene fluoride (PVDF) has a strong piezoelectricity. With the piezoelectric coefficient of poled thin films as large as 6-7 pC/N, PVDF is becoming a popular material for the sensors and energy harvesting. However, the fabrication process of PVDF is a big challenge due to the physical and chemical properties of PVDF. In this paper, a spiral-shaped PVDF cantilever is fabricated to harvest vibration energy in the environment. Copper mass and silicon mass are added to the PVDF cantilever to reduce the resonant frequency. Series of MEMS fabrication process are utilized to realize the PVDF piezoelectric energy harvester.
{"title":"Fabrication of spiral-shaped PVDF cantilever based vibration energy harvester","authors":"Wen Liu, Mengdi Han, Xuming Sun, Haixia Zhang","doi":"10.1109/NEMS.2014.6908849","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908849","url":null,"abstract":"Polyvinylidene fluoride (PVDF) has a strong piezoelectricity. With the piezoelectric coefficient of poled thin films as large as 6-7 pC/N, PVDF is becoming a popular material for the sensors and energy harvesting. However, the fabrication process of PVDF is a big challenge due to the physical and chemical properties of PVDF. In this paper, a spiral-shaped PVDF cantilever is fabricated to harvest vibration energy in the environment. Copper mass and silicon mass are added to the PVDF cantilever to reduce the resonant frequency. Series of MEMS fabrication process are utilized to realize the PVDF piezoelectric energy harvester.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"15 1","pages":"458-461"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89094525","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908886
Y. Lai, H. Wu, C. Pan, C. Yen, C. Tsao, Liwei Lin, S. Kuo, Y. S. Lu, S. Shen
In this study, a CNFES (cylindrical near-field electrospinning) process and a metallic coaxial needle injector were used to fabricate piezoelectric PVDF (polyvinylidene fluoride) hollow-walled fibers. Piezoelectric fibers devices with interdigitated electrode were fabricated to capture potential signal. First, the PVDF powder was mixed in the acetone solution and the fluorosurfactant was dissolved with the dimethyl sulfoxide to prepare PVDF macromolecular solution. Second, PVDF macromolecular solution was filled in the outer needle, air was filled in the syringe of inner needle and the metal needle coaxial injector contacted a high power supply. When the PVDF droplet in the coaxial needle was subjected to high electric field, the droplet overcame surface tension of the solution and became a Taylor cone, extremely fine hollow-walled PVDF fibers was spun out on collectors. The hollow-walled PVDF fibers were collected by a cylindrical device on the XY-axis digital platform. The diameter of hollow-walled PVDF fibers could be controlled by adjusting the electric field and the rotating speed of the cylindrical collector. The experimental images reveal structures of the hollow-walled PVDF fibers. In comparison of the solid PVDF and the hollow-walled PVDF fibers, the solid PVDF fibers with IDT (interdigitated electrode) could generate maximum peak voltage of 35.731-213.827 mV at frequencies of 2-9 Hz, whereas the hollow-walled PVDF fibers with IDT electrode could generate maximum peak voltage of 44.092-246.088 mV. The hollow-walled fibers with higher area/volume ratio and mechanical stiffness can produce more potential voltage.
{"title":"Co-axially electrospun PVDF fibers with hollow wall to enhance potential output","authors":"Y. Lai, H. Wu, C. Pan, C. Yen, C. Tsao, Liwei Lin, S. Kuo, Y. S. Lu, S. Shen","doi":"10.1109/NEMS.2014.6908886","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908886","url":null,"abstract":"In this study, a CNFES (cylindrical near-field electrospinning) process and a metallic coaxial needle injector were used to fabricate piezoelectric PVDF (polyvinylidene fluoride) hollow-walled fibers. Piezoelectric fibers devices with interdigitated electrode were fabricated to capture potential signal. First, the PVDF powder was mixed in the acetone solution and the fluorosurfactant was dissolved with the dimethyl sulfoxide to prepare PVDF macromolecular solution. Second, PVDF macromolecular solution was filled in the outer needle, air was filled in the syringe of inner needle and the metal needle coaxial injector contacted a high power supply. When the PVDF droplet in the coaxial needle was subjected to high electric field, the droplet overcame surface tension of the solution and became a Taylor cone, extremely fine hollow-walled PVDF fibers was spun out on collectors. The hollow-walled PVDF fibers were collected by a cylindrical device on the XY-axis digital platform. The diameter of hollow-walled PVDF fibers could be controlled by adjusting the electric field and the rotating speed of the cylindrical collector. The experimental images reveal structures of the hollow-walled PVDF fibers. In comparison of the solid PVDF and the hollow-walled PVDF fibers, the solid PVDF fibers with IDT (interdigitated electrode) could generate maximum peak voltage of 35.731-213.827 mV at frequencies of 2-9 Hz, whereas the hollow-walled PVDF fibers with IDT electrode could generate maximum peak voltage of 44.092-246.088 mV. The hollow-walled fibers with higher area/volume ratio and mechanical stiffness can produce more potential voltage.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"10 1","pages":"614-617"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89139030","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908806
A. Narimannezhad, J. Jennings, M. Weber, K. Lynn
Fabrication of a portable high-density charged particle trap with an array of micro-Penning-Malmberg traps (microtraps) with substantially lower end barrier potentials than conventional Penning-Malmberg traps is presented [1]. The microtraps are designed for antimatter storage such as positrons. The fabrication of large length to radius aspect ratio (1000:1) microtrap arrays involved advanced techniques including photolithography, deep reactive ion etching (DRIE) of silicon wafers to achieve through-vias, gold sputtering of the wafers surfaces and inside the vias, and thermal compression bonding. The bonded stacks were gold electroplated to achieve a uniform gold surface to minimize the patch effects. Positron losses occur in experimentation by trap imperfections such as misalignment of microtraps, asymmetries, and physical imperfections on the surfaces. This paper describes the fabrication issues encountered and addresses geometry errors and asymmetries.
{"title":"Microfabrication of high aspect ratio microtube arrays to store high density charged particles","authors":"A. Narimannezhad, J. Jennings, M. Weber, K. Lynn","doi":"10.1109/NEMS.2014.6908806","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908806","url":null,"abstract":"Fabrication of a portable high-density charged particle trap with an array of micro-Penning-Malmberg traps (microtraps) with substantially lower end barrier potentials than conventional Penning-Malmberg traps is presented [1]. The microtraps are designed for antimatter storage such as positrons. The fabrication of large length to radius aspect ratio (1000:1) microtrap arrays involved advanced techniques including photolithography, deep reactive ion etching (DRIE) of silicon wafers to achieve through-vias, gold sputtering of the wafers surfaces and inside the vias, and thermal compression bonding. The bonded stacks were gold electroplated to achieve a uniform gold surface to minimize the patch effects. Positron losses occur in experimentation by trap imperfections such as misalignment of microtraps, asymmetries, and physical imperfections on the surfaces. This paper describes the fabrication issues encountered and addresses geometry errors and asymmetries.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"5 1","pages":"269-274"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90398030","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908868
M. Jung, Chulki Kim, Taikjin Lee, J. H. Kim, Seok Lee, Deok-Ha Woo
Metal nanodot arrays with the uniform diameter were fabricated utilizing nanoporous alumina mask with through-holes as an evaporation mask. Ag, Cu, and Au nanodot arrays were fabricated on indium tin oxide coated glass as a replica of the nanoporous alumina mask. The localized surface plasmon resonance (LSPR) properties of metal nanodot arrays were experimentally measured by the ultraviolet-visible spectroscopy. The dependency of LSPR wavelength on nanodot composition was examined.
{"title":"Plasmonic properties of metal nanodot arrays with same diameter utilizing nanoporous alumina mask","authors":"M. Jung, Chulki Kim, Taikjin Lee, J. H. Kim, Seok Lee, Deok-Ha Woo","doi":"10.1109/NEMS.2014.6908868","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908868","url":null,"abstract":"Metal nanodot arrays with the uniform diameter were fabricated utilizing nanoporous alumina mask with through-holes as an evaporation mask. Ag, Cu, and Au nanodot arrays were fabricated on indium tin oxide coated glass as a replica of the nanoporous alumina mask. The localized surface plasmon resonance (LSPR) properties of metal nanodot arrays were experimentally measured by the ultraviolet-visible spectroscopy. The dependency of LSPR wavelength on nanodot composition was examined.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"103 1","pages":"682-683"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78449397","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908758
Taylor Busch, Bo Ma, S. Tung
A Pyrex nanochannel system with embedded transverse nanoelectrodes was designed and fabricated by MEMS based microfabrication and focused ion beam (FIB) nanolithography. The microchannels and microelectrodes in the system were patterned on a Cr/Au coated Pyrex wafer using conventional photolithography while the nanoelectrodes (100 nm wide and 50 nm thick) and the nanochannels (500 nm to 1 μm wide and 100 nm deep) were fabricated by FIB nanolithography. A Pyrex chip coated with amorphous silicon was used as the capping piece to seal off the nanochannels and nanoelectrodes through anodic bonding. Fluorescein isothiocyanate (FITC) solution was pumped through the completed nanochannel system after wetting steps to verify flow patency. The electrical conductivity of four different liquids solutions were measured in the nanochannel system and compared to their bulk values. Translocation of negatively charged nanobeads with an average diameter of 20 nm was successfully carried out and the instantaneous transverse electrical conductivity of the translocating nanobeads was measured by the embedded nanoelectrodes.
{"title":"Focus ion beam based nanofluidic system for biomolecule characterization","authors":"Taylor Busch, Bo Ma, S. Tung","doi":"10.1109/NEMS.2014.6908758","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908758","url":null,"abstract":"A Pyrex nanochannel system with embedded transverse nanoelectrodes was designed and fabricated by MEMS based microfabrication and focused ion beam (FIB) nanolithography. The microchannels and microelectrodes in the system were patterned on a Cr/Au coated Pyrex wafer using conventional photolithography while the nanoelectrodes (100 nm wide and 50 nm thick) and the nanochannels (500 nm to 1 μm wide and 100 nm deep) were fabricated by FIB nanolithography. A Pyrex chip coated with amorphous silicon was used as the capping piece to seal off the nanochannels and nanoelectrodes through anodic bonding. Fluorescein isothiocyanate (FITC) solution was pumped through the completed nanochannel system after wetting steps to verify flow patency. The electrical conductivity of four different liquids solutions were measured in the nanochannel system and compared to their bulk values. Translocation of negatively charged nanobeads with an average diameter of 20 nm was successfully carried out and the instantaneous transverse electrical conductivity of the translocating nanobeads was measured by the embedded nanoelectrodes.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"18 1","pages":"55-59"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83347904","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908763
F. Buja, J. Kokorian, A. Sumant, W. V. Spengen
We present the first measuremenst of adhesion between two micro-electromechanical systems (MEMS) surfaces, fully fabricated with boron doped ultrananocrystalline diamond (B-UNCD). This research allows us to explore the potential of conductive UNCD MEMS for the solution of issues like adhesion and friction in micro-devices and describe with accuracy the effects involved. By means of standard lithographic techniques, we have fabricated a diamond micro thermal actuator (chevron type), which is used as a platform for tribological testing. A peculiar effect has been observed in the adhesion phenomenon of UNCD. It involves with high probability, an interaction between hydrocarbon/amorphous carbon layers (a-C) that cover the two diamond contacting surfaces. The as-etched device shows a `chewing-gum' effect in the adhesion curve, probably due to the formation of hydrocarbon/a-C chains after the interaction of the surfaces. This effect disappears when the device is treated in oxygen plasma and the hydrocarbon/a-C is removed. The study of this phenomenon will be followed by more accurate analysis and atomistic simulation and the results will be compared with nitrogen-incorporated UNCD (N-UNCD) fabricated devices.
{"title":"First adhesion measurements of conductive ultrananocrystalline diamond MEMS sidewalls","authors":"F. Buja, J. Kokorian, A. Sumant, W. V. Spengen","doi":"10.1109/NEMS.2014.6908763","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908763","url":null,"abstract":"We present the first measuremenst of adhesion between two micro-electromechanical systems (MEMS) surfaces, fully fabricated with boron doped ultrananocrystalline diamond (B-UNCD). This research allows us to explore the potential of conductive UNCD MEMS for the solution of issues like adhesion and friction in micro-devices and describe with accuracy the effects involved. By means of standard lithographic techniques, we have fabricated a diamond micro thermal actuator (chevron type), which is used as a platform for tribological testing. A peculiar effect has been observed in the adhesion phenomenon of UNCD. It involves with high probability, an interaction between hydrocarbon/amorphous carbon layers (a-C) that cover the two diamond contacting surfaces. The as-etched device shows a `chewing-gum' effect in the adhesion curve, probably due to the formation of hydrocarbon/a-C chains after the interaction of the surfaces. This effect disappears when the device is treated in oxygen plasma and the hydrocarbon/a-C is removed. The study of this phenomenon will be followed by more accurate analysis and atomistic simulation and the results will be compared with nitrogen-incorporated UNCD (N-UNCD) fabricated devices.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"24 1","pages":"77-80"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82436911","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908831
Shao-Yu Wang, K. Hung, Y. C. Chen, C. Pan, C. Yen, W. C. Wang, Zong-Hsin Liu
This study mainly used Electrospraying and Taguchi method to investigate the optimum process of piezoelectric Zinc oxide (ZnO) nanorods parameters. Zinc oxide seed layer was electrosprayed on Au/Chromium/Silicon substrates. The electric field is around 660 V/mm. In this study, ZnO was made in an array to characterize. We used X-ray diffraction (XRD), photoluminescence (PL) and field emission scanning electron microscopy (FE-SEM) to characterize the morphology and luminescence of ZnO nanorods. The result showed that with higher and longer of annealing temperature and time. Furthermore, this study was obtained optimum height at 3~5 um of piezoelectric Zinc Oxide nanorods by adopting the process of hydrothermal for 14 hours and with 90 degrees Celsius.
{"title":"Fabrication of piezoelectric zinc oxide nanorods by Electrospraying method","authors":"Shao-Yu Wang, K. Hung, Y. C. Chen, C. Pan, C. Yen, W. C. Wang, Zong-Hsin Liu","doi":"10.1109/NEMS.2014.6908831","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908831","url":null,"abstract":"This study mainly used Electrospraying and Taguchi method to investigate the optimum process of piezoelectric Zinc oxide (ZnO) nanorods parameters. Zinc oxide seed layer was electrosprayed on Au/Chromium/Silicon substrates. The electric field is around 660 V/mm. In this study, ZnO was made in an array to characterize. We used X-ray diffraction (XRD), photoluminescence (PL) and field emission scanning electron microscopy (FE-SEM) to characterize the morphology and luminescence of ZnO nanorods. The result showed that with higher and longer of annealing temperature and time. Furthermore, this study was obtained optimum height at 3~5 um of piezoelectric Zinc Oxide nanorods by adopting the process of hydrothermal for 14 hours and with 90 degrees Celsius.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"35 1","pages":"378-381"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81686523","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908823
Cun Li, Yulong Zhao, Rongjun Cheng
We present a micro resonant acceleration sensor based on the frequency shift of quartz double ended tuning fork (DETF). The two stiff ends of DETF are mounted on proof mass and temperature isolator structure of silicon support, respectively. Electrodes are coated on the four surfaces of the resonant beam to excite anti-phase vibration model to balance inner stress and torque. Stress in DETF beam shifts when the proof mass is applied to acceleration, which changes resonance frequency of DETF. The temperature isolator structure is designed to reduce the impact of thermal stress due to the difference of thermal expansion coefficient between quartz and silicon. The silicon support and DETF are fabricated based on the bulk micromachining technology. Self-excited circuit is also designed to excite DETF. The proposed sensor is simply packaged for measurement. The sensor takes advantages of both quartz and silicon materials to achieve a micro resonant sensor with simple processing for digital acceleration measurements.
{"title":"A micro resonant acceleration sensor comprising silicon support with temperature isolator and quartz doubled ended tuning fork","authors":"Cun Li, Yulong Zhao, Rongjun Cheng","doi":"10.1109/NEMS.2014.6908823","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908823","url":null,"abstract":"We present a micro resonant acceleration sensor based on the frequency shift of quartz double ended tuning fork (DETF). The two stiff ends of DETF are mounted on proof mass and temperature isolator structure of silicon support, respectively. Electrodes are coated on the four surfaces of the resonant beam to excite anti-phase vibration model to balance inner stress and torque. Stress in DETF beam shifts when the proof mass is applied to acceleration, which changes resonance frequency of DETF. The temperature isolator structure is designed to reduce the impact of thermal stress due to the difference of thermal expansion coefficient between quartz and silicon. The silicon support and DETF are fabricated based on the bulk micromachining technology. Self-excited circuit is also designed to excite DETF. The proposed sensor is simply packaged for measurement. The sensor takes advantages of both quartz and silicon materials to achieve a micro resonant sensor with simple processing for digital acceleration measurements.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"1 1","pages":"346-349"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72678965","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908883
Zhikang Li, Libo Zhao, Zhuangde Jiang, Zhiying Ye, Yulong Zhao
This paper presents a novel approach for ultra-low pressure detection using a capacitive micromachined ultrasonic transducer (CMUT) as the sensing element. The working principle depends on the resonant frequency shift of the CMUT under the measured pressure. The finite element method (FEM) simulations were employed to study the sensing performance of the CMUT. The results demonstrated the feasibility and superiority of the CMUT for ultra-low pressure measurement. The resonant frequency varies linearly with the measured pressure. The pressure sensitivity can be improved by increasing the bias DC voltage for a certain CMUT. Additionally, the effects of structure parameters such as electrode dimension, electrode separation distance, membrane radius and thickness on the pressure sensitivity were also studied, which will contribute to the design and operation of the CMUT-based ultra-low pressure sensor.
{"title":"Capacitive micromachined ultrasonic transducer for ultra-low pressure detection","authors":"Zhikang Li, Libo Zhao, Zhuangde Jiang, Zhiying Ye, Yulong Zhao","doi":"10.1109/NEMS.2014.6908883","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908883","url":null,"abstract":"This paper presents a novel approach for ultra-low pressure detection using a capacitive micromachined ultrasonic transducer (CMUT) as the sensing element. The working principle depends on the resonant frequency shift of the CMUT under the measured pressure. The finite element method (FEM) simulations were employed to study the sensing performance of the CMUT. The results demonstrated the feasibility and superiority of the CMUT for ultra-low pressure measurement. The resonant frequency varies linearly with the measured pressure. The pressure sensitivity can be improved by increasing the bias DC voltage for a certain CMUT. Additionally, the effects of structure parameters such as electrode dimension, electrode separation distance, membrane radius and thickness on the pressure sensitivity were also studied, which will contribute to the design and operation of the CMUT-based ultra-low pressure sensor.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"11 1","pages":"600-603"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75186598","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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