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Body doping analysis of vertical strained-SiGe Impact Ionization MOSFET incorporating dielectric pocket (VESIMOS-DP) 含介电袋的垂直应变- sige冲击电离MOSFET (VESIMOS-DP)体掺杂分析
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706544
I. Saad, H. M. Zuhir, C. Bun Seng, D. Pogaku, A. R. A. Bakar, A. M. Khairul, B. Ghosh, N. Bolong, R. Ismail, U. Hashim
The Vertical Strained Silicon Germanium (SiGe) Impact Ionization MOSFET with Dielectric Pocket (VESIMOS-DP) has been successfully developed and analyzed in this paper. There are significant drop in subthreshold slope (S) while threshold voltage is increase as the body doping concentration increases. It is notable that for body doping concentration above 1020, the S values keep increasing which is not recommended as the switching speed getting higher distracting performance of the device. An improved stability of threshold voltage, VTH was found for VESIMOS-DP device of various DP size ranging from 20nm to 80nm. The stability is due to the reducing charge sharing effects between source and drain region. In addition, the output characteristic was also highlighted a very good drain current at different gate voltage with the increasing of drain voltage for VESIMOS-DP with high body doping concentration. VESIMOS-DP with low body doping concentration suffers PBT effect that prevents the device from being able to switch off. Hence, high body doping concentrations are imperative for obtaining better device characteristics and ensure the device works in II mode.
本文成功研制了具有介电袋的垂直应变硅锗冲击电离MOSFET (VESIMOS-DP)。随着体掺杂浓度的增加,阈下斜率S显著下降,阈值电压显著升高。值得注意的是,当体掺杂浓度大于1020时,S值持续增加,不建议切换速度越快,器件的分散性能越高。对于20nm ~ 80nm不同尺寸的VESIMOS-DP器件,其阈值电压VTH具有较好的稳定性。这种稳定性是由于源极和漏极之间电荷分担效应的减少。此外,高体掺杂浓度VESIMOS-DP的输出特性也突出,在不同栅压下,随着漏极电压的增大,输出电流都很好。低体掺杂浓度的VESIMOS-DP会受到PBT效应的影响,使器件无法关闭。因此,为了获得更好的器件特性并确保器件在II模式下工作,高体掺杂浓度是必不可少的。
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引用次数: 1
Fabrication of multi-walled carbon nanotubes hydrogen sensor on plastic 塑料上多壁碳纳米管氢传感器的制备
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706539
M. M. Ramli, S. S. Isa, S. Henley
Vacuum filtration method was applied to build optically homogeneous film of palladium (Pd) nanoparticles dispersed multi-walled carbon nanotubes (MWCNTs) networks on plastic substrate. Measurement of the sheet resistance as a function of MWCNTs concentration showed a transition from 2D percolation to 3D conduction behaviour when the concentration of MWCNTs exceeded 0.015 mg/ml. The electrical response to H2 gas exposure was investigated at room temperature.
采用真空过滤法在塑料衬底上构建了钯纳米粒子分散的多壁碳纳米管(MWCNTs)光学均匀膜。当MWCNTs浓度超过0.015 mg/ml时,薄片电阻随MWCNTs浓度的变化从二维渗透行为转变为三维传导行为。研究了室温下氢气暴露的电响应。
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引用次数: 3
Characterization direct bonding of SiC/SiN layer on Si wafer for MEMS capacitive pressure sensor MEMS电容式压力传感器硅片上SiC/SiN层直接键合的表征
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706470
Noraini Marsi, B. Majlis, A. A. Hamzah, Faisal Mohd Yasin
Two silicon wafer size of 2.5 mm × 2.5 mm with 1 μm LPCVD silicon carbide (SiC) and 200 nm LPCVD silicon nitride, respectively has been characterize direct bonding between silicon nitride and silicon carbide surfaces. Chemical-mechanical polishing (CMP) treatment processes were performed to reduce the surface roughness of both surfaces before the surface are bonded to each other. The surface roughness shows about 1 μm before CMP treatment, while the smoothness of the surface roughness values as low as 20 nm was obtained after CMP treatment as measured by infinite focus microscopy (IFM). The interface between SiC/SiN layers on Si wafer was inspected by scanning electron microscopy (SEM). Heat treatment with different annealing temperatures is indentified that an optimized annealing process was at 400 °C for 2 hours to allow the bond-forming interface between silicon nitride and silicon carbide surfaces being bonded at 8.3467 MPa.
用1 μm LPCVD碳化硅(SiC)和200 nm LPCVD氮化硅分别制备了两种尺寸为2.5 mm × 2.5 mm的硅片,表征了氮化硅与碳化硅表面的直接键合。采用化学机械抛光(CMP)处理工艺,在表面粘合之前降低两个表面的表面粗糙度。CMP处理前的表面粗糙度约为1 μm,而无限聚焦显微镜(IFM)测量CMP处理后的表面粗糙度值低至20 nm。用扫描电镜(SEM)观察了硅片上SiC/SiN层之间的界面。确定了不同退火温度下的热处理工艺,最优退火工艺为在8.3467 MPa的温度下,在400℃下,保温2小时,使氮化硅和碳化硅表面之间形成键合界面。
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引用次数: 1
High frequency small signal modeling of CNTFET CNTFET高频小信号建模
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706547
S. Farhana, A. Alam, Sheroz Khan
In this paper, we describe the development of small signal model of a CNTFET. The development consist of high frequency response of CNTFET. The CNTFET generates higher output rather than the conventional Si MOSFET. An SPICE model for enhancement mode Carbon nanotube transistor has been developed. The performance analysis of the CNTFET shows the desirable performance parameter in terms of 10 Thz frequency with 1.8 mS.
本文描述了CNTFET小信号模型的发展。CNTFET的发展包括高频响应。CNTFET产生比传统的Si MOSFET更高的输出。建立了一种用于增强模式碳纳米管晶体管的SPICE模型。通过对CNTFET的性能分析,得出了理想的10thz频率下1.8 mS的性能参数。
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引用次数: 6
Finite element modeling of SAW resonator in CMOS technology for single and double interdigitated electrode (IDT) structure 基于CMOS技术的单、双交叉电极(IDT)结构SAW谐振器有限元建模
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706458
Aliza Aini Md Ralib, A. Nordin, U. Hashim
The performance of surface acoustic wave resonator in CMOS technology for single and double electrode (IDT) structure is presented. Interdigitated electrodes (IDT) structure in surface acoustic wave (SAW) resonator is the most crucial component for excitation of SAW devices. Possible configurations for the IDT are single electrode and double electrode. The performance of the resonator for single and double electrode is compared at a frequency range of 0.5 GHz to 1 GHz. 2D Finite element modeling of the CMOS SAW resonator was simulated using COMSOL Multiphysics® for three step analysis eigen frequency, frequency domain and time domain analysis. The structure and dimension of the device is based on 0.18 μm RF CMOS process where the pattern of IDT is fabricated using standard CMOS fabrication process. The simulated results shows high quality factor in the order of thousands for double electrode CMOS SAW resonator compared to single electrode CMOS SAW resonator.
介绍了单电极和双电极(IDT)结构的CMOS表面声波谐振器的性能。表面声波谐振器中的交错电极结构是表面声波器件激发的关键部件。IDT的可能配置有单电极和双电极。在0.5 GHz ~ 1ghz频率范围内,比较了单电极谐振器和双电极谐振器的性能。利用COMSOL Multiphysics®对CMOS SAW谐振器的二维有限元建模进行了三步分析,包括本征频率、频域和时域分析。器件的结构和尺寸基于0.18 μm RF CMOS工艺,其中IDT图案采用标准CMOS工艺制作。仿真结果表明,双电极CMOS SAW谐振器的质量因数比单电极CMOS SAW谐振器高几千倍。
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引用次数: 6
Investigating the annealing effect on the conventional growth of ZnO nanorod through electrical characterization 通过电学表征研究了退火对ZnO纳米棒常规生长的影响
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706536
R. Prasad, U. Hashim, K. L. Foo, M. Shafiq
Zinc oxide nanorods was synthesized by using hydrothermal growth due to simplicity and involve low temperature processing that is 930C. Low temperature processing is very essential for ZnO nanorod synthesis because defect on developing nano-device can be avoided. Development of nano-device with minimal defect is essential to ensure that the performances of the nano device is optimum for sensing bio-molecular substances. Zinc oxide has become the most remarkable choice among other metal oxides semiconductor due to many criteria such as economical cost, unique physical and electrical properties and biocompatible. Initially, ZnO thin films was prepared by using sol gel method. The ZnO seed solution was prepared using conventional sol-gel route. Zinc oxide solution was prepared in two different solvents which are isopropanol (IPA) and methanol (MeOH) in order to investigate the influence of solvent to the quality of ZnO nanorods. MEA, the sol stabilizer was added to the solution for the following 2 hours. Aluminum IDE electrode was deposited on the silicon wafer sample <;100> using traditional wet etching method. Positive photoresist (PR) was coated on the silicon wafer and followed with soft back for 90 seconds. IDE pattern transfer was done by exposing UV light (365nm) onto the PR for 10 seconds. After that, developing and etching process occurred for pattern transfer the IDE electrode onto the silicon wafer. The prepared seed solution was coated on silicon wafer by using speed coating method. Some of the coated samples underwent annealing process at temperature 2000C for 2 hours. The annealed and non-annealed sample undergoes hydrothermal growth method to synthesize ZnO nanorods. The synthesized nanorods underwent I-V test and capacitances to investigate the electrical behavior of ZnO nanorods. The annealed ZnO nanorods provided higher current, which was 900μA, as compared the non-annealed ZnO nanorods which was only 55 μA.
采用水热法合成氧化锌纳米棒,工艺简单,低温处理温度为930℃。低温工艺对于ZnO纳米棒的合成是至关重要的,因为低温工艺可以避免在制备纳米器件时出现缺陷。开发缺陷最小的纳米器件是保证纳米器件在传感生物分子物质时具有最佳性能的关键。氧化锌因其经济的成本、独特的物理和电学性能以及生物相容性等诸多标准而成为半导体金属氧化物中最引人注目的选择。首先,采用溶胶-凝胶法制备ZnO薄膜。采用常规溶胶-凝胶法制备ZnO种子溶液。在异丙醇(IPA)和甲醇(MeOH)两种不同溶剂中制备氧化锌溶液,考察溶剂对氧化锌纳米棒质量的影响。MEA,在溶液中加入溶胶稳定剂2小时。采用传统的湿法刻蚀法在硅片样品上沉积铝IDE电极。将正性光刻胶(PR)涂在硅片上,然后用软背涂敷90秒。将紫外光(365nm)照射在PR上10秒,完成IDE图案转移。然后,将IDE电极的图案转移到硅片上,进行显影和蚀刻过程。将制备好的种子溶液用快速镀膜法涂覆在硅片上。部分包覆样品在2000℃下退火2小时。对退火和未退火样品进行水热生长法制备ZnO纳米棒。对合成的纳米棒进行了I-V测试和电容测试,研究了ZnO纳米棒的电学行为。与未退火ZnO纳米棒相比,退火ZnO纳米棒提供了更高的电流,为900μA,而未退火ZnO纳米棒只有55 μA。
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引用次数: 1
Numerical study of side gate junction-less transistor in on state 边栅无结晶体管导通状态的数值研究
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706575
A. Dehzangi, F. Larki, B. Majlis, M. Hamidon, M. Navasery, E. Gharibshahi, N. Khalilzadeh, M. Vakilian, E. Saion
Side gate p-type Junctionless Silicon transistor is fabricated by AFM nanolithography on low-doped (105 cm-3) SOI wafer. In this work, the simulation characteristic of the device using TCAD Sentaurus in on state will be studied. The results show that the device is the pinch off transistor, works in on state for zero gate voltage in depletion mode. Negative gate voltage drives the device into on state, but unable to make significant effect on drain current as accmulation mode. Simulation results for valence band energy, electric field and hole density are investigated along the active regions. The influence of the electric field due to the applied voltages of VDS and VG on charge distribution is much more when the device operates at the saturation region. The hole quasi-Fermi level has a positive slope showing the current flows from source to drain.
采用AFM纳米光刻技术,在低掺杂(105 cm-3) SOI晶圆上制备了侧栅p型无结硅晶体管。在本工作中,将研究使用TCAD Sentaurus在开启状态下对器件的仿真特性。结果表明,该器件为掐断型晶体管,在耗尽模式下工作在零栅极电压导通状态。负栅极电压驱动器件进入导通状态,但作为累加方式对漏极电流不能产生显著影响。研究了活性区的价带能、电场和空穴密度的模拟结果。当器件工作在饱和区时,由VDS和VG外加电压引起的电场对电荷分布的影响更大。孔准费米能级具有正斜率,表明电流从源极流向漏极。
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引用次数: 0
Characterization of unipolar nanorectifiers coupled with an RF antenna 与射频天线耦合的单极纳米整流器的特性
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706461
S. R. Kasjoo, Arun K. Singh, U. Hashim, A. Song
A novel type of unipolar nanodiode, the self-switching diode (SSD), has recently shown promising properties as an ultra-high-speed detector at room temperature by the utilization of its nonlinear diode-like behavior and intrinsically low parasitic capacitance. In this report, a large SSD array with approximately 2,000 SSDs connected in parallel within the fingers of an interdigital structure was coupled with a printed-circuit-board- (PCB-) based wideband patch antenna, operating in the radio-frequency (RF) region. Such a large array was realized in a single lithography step without the need for interconnection layers. This allows for a simple, low-cost and reproducible fabrication process. Despite of the large impedance mismatch between the SSD array and the PCB-based antenna, the device was able to detect RF signals transmitted using a network analyzer via another patch antenna at distance of approximately 70 cm from it, at 2.45 GHz. The estimated room-temperature extrinsic voltage responsivity of the device and its noise-equivalent power, measured at 5 cm away from the transmitted RF signals and at zero bias, were 10 mV/mW and 1.2 nW/Hz1/2, respectively. The results have shown that the SSDs can be utilized in many RF applications at low cost.
一种新型的单极纳米二极管——自开关二极管(SSD),由于其非线性类二极管特性和固有的低寄生电容,近年来在室温下表现出了作为超高速探测器的良好性能。在本报告中,一个大型的SSD阵列,大约有2000个SSD在一个数字间结构的手指内并联,与一个基于印刷电路板(PCB)的宽带贴片天线相结合,工作在射频(RF)区域。这样大的阵列在一个光刻步骤中实现,而不需要互连层。这允许一个简单,低成本和可重复的制造过程。尽管SSD阵列和基于pcb的天线之间存在较大的阻抗不匹配,但该设备能够检测到使用网络分析仪通过距离其约70厘米的另一个贴片天线传输的射频信号,频率为2.45 GHz。在距离发射射频信号5 cm处和零偏置下,该器件的估计室温外部电压响应度和噪声等效功率分别为10 mV/mW和1.2 nW/Hz1/2。结果表明,该固态硬盘可以低成本地用于许多射频应用。
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引用次数: 0
Four wave mixing and cross gain modulation wavelength converters in semiconductor optical amplifier 半导体光放大器中的四波混频和交叉增益调制波长转换器
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706521
Intan Zubaidah Mazlan, M. Wahid, Ahmad Fariz Hassan, Mohd Azarulsani Md Azidin, Noor Aqsa Nadeea Mat Isa
Wavelength converter is simply a device for converting the injected signal light from one wavelength to another. A simulation wavelength converter made out of a semiconductor optical amplifier and an optical bandpass filter is presented in this paper. The wavelength converter has a simple configuration and allows future photonic integration.
波长转换器就是将注入的信号光从一种波长转换为另一种波长的装置。本文介绍了一种由半导体光放大器和光带通滤波器组成的模拟波长变换器。波长转换器具有简单的配置,并允许未来的光子集成。
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引用次数: 0
Memristor based delay element using current starved inverter 基于忆阻器的电流饥渴型逆变器延时元件
Pub Date : 2013-09-01 DOI: 10.1109/RSM.2013.6706478
Siti Musliha Ajmal Binti Mokhtar, W. Abdullah
This paper will first review on some applications of newly found passive element, the memristor. Utilizing the beneficial characteristic of memristor where it can remember its last state, more and more improvements on today electronic designs has been proposed. However, it is crucial to observe the behavior of memristor model before applying into circuits, especially when the memristor is coupled with other devices. In this paper, LTspice memristor model is used to simulate memristor behavior and applied to the basic delay element circuit. The circuit used a tristate inverter as the delay element. It controls the current flowing to the parasitic capacitor, thus controlling the delay. The compatibility of memristor with the delay element is also in consideration to ensure the functionality of the circuits. At the end, a basic delay element using inverter and memristor is presented. This paper is divided into 4 sections, including the introduction where few examples of memristor applications are explained. It follows by next section where the inverter delay characteristic is narrated. Section 3 is about a mathematical model of memristor that been used to provide a specific memristor resistance in order to get certain delay value during simulation. Using LT spice, a memristor based delay circuit design is then proposed and the delay is observed by circuit simulation. In conclusion, the calculated R and delay value is then compared to the simulation result in order to verify circuit functionality.
本文首先综述了新发现的无源元件忆阻器的一些应用。利用忆阻器能记住其最后状态的有利特性,对当今的电子设计提出了越来越多的改进。然而,在应用到电路中,特别是当忆阻器与其他器件耦合时,观察忆阻器模型的行为是至关重要的。本文采用LTspice忆阻器模型来模拟忆阻器的行为,并将其应用于基本延迟元件电路。该电路采用三态逆变器作为延时元件。它控制流向寄生电容的电流,从而控制延迟。为了保证电路的功能,还考虑了忆阻器与延迟元件的兼容性。最后,提出了一种基于逆变器和忆阻器的基本延迟元件。本文分为4个部分,包括引言部分,其中解释了几个忆阻器应用的例子。接下来是下一节,其中逆变器的延迟特性是叙述。第3节是关于忆阻器的数学模型,在仿真过程中提供特定的忆阻电阻以获得一定的延迟值。在此基础上,提出了一种基于忆阻器的延迟电路设计,并通过电路仿真观察了延迟。最后,将计算的R值和延迟值与仿真结果进行比较,以验证电路的功能。
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引用次数: 5
期刊
RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics
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