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2018 IEEE 20th Electronics Packaging Technology Conference (EPTC)最新文献

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Evaluation of Piezoresistive Polymer-based Traces for Non-invasive Sensor Patch 非侵入式传感器贴片的压阻聚合物痕迹评价
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654338
Ramona B. Damalerio, Ruiqi Lim, Weiguo Chen, D. Choong, Ming-Yuan Cheng
In this paper, we shall discuss the suitable alternative material to gold for creating traces or electrodes of a noninvasive flexible sensor patch that is used for detecting early extravasation during intravenous cannulation. The samples were prepared by printing $5 mu mathrm{m} -$ to $10 mu mathrm{m} -$ thin piezoresistive polymer-based Carbon paste on a base polymer patch, also called the adhesive film. The first samples have the traces embedded in between two base adhesive films. The sensitivity of the samples was characterized by using a pressure chamber/jig with 4 cm hole to mimic an extravasation by bump formation when pumped with compressed dry air (CDA) that is connected to a 15 psi source. The sensitivity value obtained was 20% up to 23% at 0.16 psi. After optimization of the curing temperature of the adhesive film and piezoresistive polymer-based Carbon traces, ex-vivo test was conducted with the prototype sample placed on the cannulation site of a pork front hock. At 2 ml and 5 ml infused fluid, the sensitivity obtained is only 1.1% and 2.44%, respectively. The overall prototype dimension of all samples is 6 × 7 cm2. The second samples were prepared with narrower trace width and spacing than the first samples. Sensitivity obtained from the second sample at 0.16 psi increased to 50% up to 79%. The third samples were prepared with the same narrow trace with as the second sample, but this time the piezoresistive polymer-based traces were not embedded in two adhesive films, making the sample a single layer patch only. Sensitivity obtained at 0.16 psi increased further to 140% up to 200%. The 0.16 psi readout is based on previous data that at this pressure induced in the 4 mm hole where the adhesive film is placed over, it translates to 3mm bump height at 2ml infused volume on the skin. The results suggest a strong potential in the development of the piezoresistive polymer-based Carbon traces for flexible non-invasive sensor patch for early extravasation detection.
在本文中,我们将讨论合适的替代材料,以创造无创柔性传感器贴片的痕迹或电极,用于检测静脉插管期间的早期外渗。样品是通过在基聚合物贴片上印刷5 mu mathm {m} -$至10 mu mathm {m} -$薄的压阻性聚合物基碳糊来制备的,也称为粘接膜。第一个样品的痕迹嵌入在两个基材胶膜之间。样品的灵敏度是通过使用带有4厘米孔的压力室/夹具来模拟当与15 psi源连接的压缩干空气(CDA)泵送时由凸起形成的外溢来表征的。在0.16 psi下获得的灵敏度值为20%至23%。在优化了胶膜和压阻性聚合物碳迹固化温度后,将原型样品放置在猪前飞节穿刺部位进行离体试验。在输注2 ml和5 ml液体时,灵敏度分别仅为1.1%和2.44%。所有样品的整体原型尺寸为6 × 7 cm2。制备的第二种样品比第一种样品的迹线宽度和间距更窄。在0.16 psi下从第二个样品获得的灵敏度增加到50%到79%。第三个样品与第二个样品具有相同的窄迹,但这一次压阻性聚合物基迹没有嵌入两个胶膜中,使样品仅为单层贴片。在0.16 psi下获得的灵敏度进一步增加到140%至200%。0.16 psi的读数是基于之前的数据,在这个压力下,在4毫米的孔中产生粘胶膜,在2ml的注入量下,它在皮肤上转化为3毫米的凸起高度。研究结果表明,压阻性聚合物基碳迹在开发用于早期外渗检测的柔性无创传感器贴片方面具有很大的潜力。
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引用次数: 2
K-band SATCOM Receiver Modules: System Design, Analysis and Test using the M3-Approach k波段卫星通信接收模块:采用m3方法的系统设计、分析和测试
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654359
C. Tschoban, B. Curran, J. Reyes, I. Ndip, Marco Rossi, K. Lang
In this work, a holistic approach, the M3-appraoch (Methodologies, Models, Measures), is applied for the efficient and accurate design of K-band receiver front-end modules for satellite communication applications on earth stations on mobile platforms (ESOMPs). First, based on the targeted application and the international regulatory requirements we derive the system specifications and the system/receiver architecture. Based on this, we specify the system components,. In addition, we develop a concept for low-cost realization of the receiver front-end module, as well as a strategy to test it. Next, the proposed module is modeled and its performance investigated by means of 3D full-wave simulations, both at the component and at the packaging level. Then, test samples are fabricated and measured to verify the results of the full-wave simulations. Excellent correlation between measurements and simulations is achieved. Finally, he verified models are applied to optimize the RF performance of the K-band receiver components and front-end.
在这项工作中,一个整体的方法,m3方法(方法,模型,措施),应用于有效和准确的设计k波段接收器前端模块的卫星通信应用在地球站的移动平台(esomp)。首先,基于目标应用和国际法规要求,我们推导出系统规范和系统/接收器架构。在此基础上,我们指定了系统组件,。此外,我们还提出了接收器前端模块的低成本实现概念,以及测试策略。接下来,提出的模块是建模和其性能研究的三维全波模拟的手段,在组件和封装级。然后,制作了测试样品并进行了测量,以验证全波模拟的结果。在测量和模拟之间实现了良好的相关性。最后,将验证的模型应用于k波段接收机组件和前端的射频性能优化。
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引用次数: 1
Evaluation of Materials for Fan-Out Panel Level Packaging (FOPLP) Applications 扇出面板级封装(FOPLP)应用的材料评估
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654427
V. N. Sekhar, V. S. Rao, Kazunori Yamamoto, Tetsushi Fujinaga, Koichi Jono, H. Matsui, Takaya Yoshiteru, Horiguchi Yukio
Present study focuses on lithography evaluation of dielectric and resist materials for panel level fan out fabrication. All experiments have been conducted on Gen 3 (550x650mm) size glass panels. Slit coating and Laser Direct Imaging (LDI) methods has been used for coating and exposure of dielectric and resist materials respectively. In this study, two positive tone photo definable polymer dielectric (PD) materials and one positive tone photo resist (PR) have been evaluated for process ability in terms of coating uniformity and pattern resolution capability. A special test structures lay out with different size vias and line traces of various Line Width/ Line Space (LW/LS) has been designed for these materials evaluation. Slit coating process was optimized and achieved target coating of $7 mu {mathrm{ m}}$ thick PR layer and $10 mu {mathrm{ m}}$ thick PD layer with TTV of 1% and 3% respectively. Extensive DOE has been carried out to optimize the LDI parameters like exposure dose, focus and laser power to identify optimum conditions for fine LW/LS patterns and smallest via openings on PR and PD layers respectively. Experiment results revealed that fine LW/LS of $2 mu {mathrm{ m}}/2 mu {mathrm{ m}}$ in $7 mu {mathrm{ m}}$ thick PR layer and smallest vias of $3 mu {mathrm{ m}}$ openings in $10 mu {mathrm{ m}}$ PD layers can be achieved using optimized LDI process. The detailed process parameters optimization and material evaluation results have been reported in the subsequent sessions of this paper.
目前研究的重点是电介质和抗蚀剂材料的光刻评价。所有实验均在三代(550x650mm)尺寸的玻璃板上进行。狭缝镀膜和激光直接成像(LDI)分别用于介质和抗蚀剂材料的镀膜和曝光。本研究从涂层均匀性和图案分辨能力两方面对两种正色调光可定义聚合物介电材料(PD)和一种正色调光抗蚀剂(PR)的工艺性能进行了评价。设计了具有不同尺寸通孔和不同线宽/线距(LW/LS)线迹的特殊测试结构,对这些材料进行了评估。对狭缝涂层工艺进行了优化,实现了7 mu {mathrm{m}}$厚PR层和10 mu {mathrm{m}}$厚PD层的目标涂层,TTV分别为1%和3%。为了优化LDI参数,如曝光剂量、聚焦和激光功率,我们进行了大量的DOE试验,以确定在PR层和PD层上获得精细LW/LS图案和最小通孔的最佳条件。实验结果表明,优化后的LDI工艺可以在$7 mathrm{m}}$厚的PR层中获得$2 mathrm{m}}}/2 mathrm{m}}$厚的LW/LS,在$10 mathrm{m}}$ PD层中获得$3 mathrm{m}}$开孔。详细的工艺参数优化和材料评价结果已在本文的后续章节中报道。
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引用次数: 2
Package Integrity and Reliability Effects of Mold Compound Chemistry for Power Device Application 动力器件用模具复合化学对封装完整性和可靠性的影响
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654298
April Joy H. Garete, Matthew M. Fernandez, Reinald John S. Roscain
Mold compound material plays an important role in the quality improvement and reliability performance of Power SO-8 packages. Different chemistries of epoxy-based mold compounds were successfully evaluated through material analysis, assembly performance, package delamination performance, and reliability performance. Material analysis through material characterizations, stress index calculation, and die stress simulation suggested that EMC-B has the lowest risk of package delamination and solder joint degradation due to its low stress properties. Package delamination and solder joint degradation performance proved that low stress mold compounds resulted to better mold adhesion and solder joint integrity than high stress mold compounds. EMC-B having the lowest stress induced on the die resulted to no delamination after assembly, minor delamination after thermal stress cycle and lowest solder joint degradation after thermal stress cycle. Rdson and dVsd performance after thermal stress cycle verified that solder joint degradation affects the thermal and electrical performance of the package. Overall, Power SO-8 package built using EMC-B resulted to good mold-to-die and mold-toclip adhesion, high solder joint integrity and stable thermal and electrical performance after thermal stress cycle.
模具复合材料对Power SO-8封装的质量提高和可靠性性能起着重要作用。通过材料分析、装配性能、封装分层性能和可靠性性能,成功地评估了环氧基模具化合物的不同化学性质。通过材料表征、应力指数计算和模具应力模拟的材料分析表明,由于EMC-B具有低应力特性,因此其封装分层和焊点退化的风险最低。封装分层和焊点退化性能证明,低应力模具化合物比高应力模具化合物具有更好的模具附着力和焊点完整性。mc - b在模具上的应力最小,组装后没有分层,热应力循环后分层程度很小,热应力循环后焊点退化最低。热应力循环后的Rdson和dVsd性能验证了焊点退化会影响封装的热学和电学性能。总体而言,采用EMC-B构建的Power SO-8封装具有良好的模具到模具和模具到夹的附着力,高焊点完整性以及热应力循环后稳定的热电性能。
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引用次数: 2
Surface Planarization of Polymeric Interlayer Dielectrics for FOWLP Applications 用于FOWLP应用的聚合物层间介电体表面平面化
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654287
Soo-Geon Kang, Yejin Kim, Ayoung Moon, Sangwon Lee, S. Kim, Sungdong Kim
The surface planarity of polymeric interlayer dielectrics becomes a key factor for the multi-level interconnection for fan-out wafer level package. The surface topography of polymeric interlayer dielectrics depends on the underlying metal patterns, and the higher degree of planarization was observed with narrower line and larger space. The pressing method is proposed to flatten the surface undulations. The surface of PBO was pressed with a pressing plate during the soft-bake process, and the surface planarity was observed to be improved effectively.
聚合物层间介电体的表面平面度是影响扇出式晶圆级封装多级互连的关键因素。聚合物层间介质的表面形貌与下伏金属图案有关,平面化程度越高,线越窄,空间越大。提出了压平表面波动的方法。在软焙过程中,采用压板对PBO表面进行压制,表面平整度得到了有效提高。
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引用次数: 3
Dynamic Bending Reliability Analysis of Flexible Hybrid Integrated Chip-Foil Packages 柔性混合集成芯片箔封装的动态弯曲可靠性分析
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654334
N. Palavesam, E. Yacoub-George, W. Hell, C. Landesberger, C. Kutter, K. Bock
With the emergence of the Internet-of-Things (IoT) and wearable devices in the recent years, Flexible Hybrid Electronics (FHEs) has attracted significant attention. Chip-foil packages (also known as flexible interposers) fabricated by integrating ultra-thin silicon ICs onto or embedded into polymer foils comprising of metal interconnects (wiring lines, through hole via interconnects etc.) for powering up the system and transmission of data signals / IO commands are ideal candidates for FHE integration. The principal advantages of chip-foil packages over standard Surface Mount Device (SMD) components are their bend ability and conformability. However, the behavior of chip-foil packages under repeated bending must be analyzed in detail through extensive investigations to enable the transfer of the technology from research labs to industrial manufacturing platforms. Hence, we conducted two different types of bending tests to examine the repeated or dynamic bending reliability of the wiring lines and the via interconnects of the chip-foil packages. The experimental results highlight the need for design optimized dimensioning of the wiring lines and the via interconnects for manufacturing FHEs with high performance and good dynamic bending reliability. Such results complement the state-of-the-art information available regarding the electrical as well as mechanical reliability of chip-foil packages and are required as essential information for establishing guidelines for handling chip-foil packages during integration as well as for producing FHEs that are more reliable.
近年来,随着物联网(IoT)和可穿戴设备的出现,柔性混合电子(FHEs)引起了人们的广泛关注。芯片箔封装(也称为柔性中间体)通过将超薄硅集成电路集成到或嵌入到由金属互连(布线线,通孔通过互连等)组成的聚合物箔上制造,用于为系统供电和数据信号/ IO命令传输,是FHE集成的理想候选者。与标准表面贴装器件(SMD)组件相比,芯片箔封装的主要优点是其弯曲能力和一致性。然而,芯片箔封装在反复弯曲下的行为必须通过广泛的调查来详细分析,以使技术从研究实验室转移到工业制造平台。因此,我们进行了两种不同类型的弯曲测试,以检查布线线和芯片箔封装的过孔互连的重复或动态弯曲可靠性。实验结果表明,为了制造具有高性能和良好动态弯曲可靠性的FHEs,需要优化布线和通孔互连的尺寸。这些结果补充了关于芯片箔封装的电气和机械可靠性的最新信息,并且是在集成过程中建立处理芯片箔封装指南以及生产更可靠的fhe所需的基本信息。
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引用次数: 5
Electronic Packaging Solution for 300°C Ambience 300°C环境下的电子封装解决方案
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654295
V. Chidambaram, W. L. Ching
Niche applications in automobile and aerospace industries such as the management of integrity and operation based on the inputs from the network of sensors (e.g. pressure, accelerometer, vibration etc.) that are strategically located close to the high temperature area of the engine, requires reliable packaging solution for higher temperature regime around $300^{circ}mathrm{C}$. A unique test vehicle involving different packaging scenarios including multi-layered ceramic capacitor (MLCC), sensor device, passive component and a voltage regulator was designed and fabricated. Different types of wire bond materials, wire bond pad metallization, substrate metallization, die attach materials both conductive and non-conductive types, lid attach materials were investigated and the prospective candidates are recommended for $300^{circ}mathrm{C}$ ambience Key finding of this work are NiAuAg substrate metallization could cater for both Au and Al wire bonds. Ag sintering material is the best suited candidate for conductive die attach application, since it does not induce any thermal stresses to the components, unlike the hard solders counterpart like Au-Sn eutectic or Au-Ge eutectic. Hermeticity of the rugged package involving ceramic substrate is guaranteed by seam welding approach. Functionality of the ruggedized packages is confirmed by pre and post reliability electrical measurements. Reliability tests were carried out to confirm the selected bill of materials (BOM), function reliably at $300^{circ}mathrm{C}$ ambience.
汽车和航空航天工业中的小众应用,例如基于传感器网络(例如压力、加速度计、振动等)输入的完整性和操作管理,这些传感器网络战略上靠近发动机的高温区域,需要可靠的包装解决方案,用于约300^{circ} maththrm {C}$的更高温度范围。设计并制造了包含多层陶瓷电容器(MLCC)、传感器器件、无源元件和稳压器等不同封装场景的独特测试车。研究了不同类型的导线键合材料,导线键合焊盘金属化,衬底金属化,导电和非导电的模具连接材料,盖连接材料,并推荐了潜在的候选材料,该工作的关键发现是NiAuAg衬底金属化可以同时满足Au和Al的导线键合。Ag烧结材料是最适合导电模具连接应用的候选材料,因为它不会对组件产生任何热应力,不像硬焊料对应的Au-Sn共晶或Au-Ge共晶。采用缝焊的方法,保证了陶瓷基板坚固封装的密封性。加固包的功能是通过前后可靠性电气测量来确认的。进行了可靠性试验,以确认所选物料清单(BOM)在$300^{circ} mathm {C}$环境下的可靠性。
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引用次数: 0
Effect of Electric Current on Constitutive Behaviour and Microstructure of SAC305 Solder Joint 电流对SAC305焊点本构性能及组织的影响
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654268
Wenbin Tang, X. Long, Yongchao Liu, C. Du, Yao Yao, Cheng Zhou, Yan-pei Wu, Fengrui Jia
As the traditional lead-containing solders were banned for consumer electronics by RoHS laws, lead-free solders are widely adopted in the electronics packaging industry. The Sn3.0Ag-0.5Cu (wt%, SAC305) solder material is one of the most commonly used die-attach solders. But the reliability of SAC305 solder joints under complex working conditions still requires to be carefully investigated. In this paper, the uniaxial tensile behavior of solder joint specimens with a diameter of 1.0 mm was investigated subjected to the strain rate of $10^{-4} mathrm{s}^{-1}$ under electric current density ranging from 1000 A/cm2 to 4000 A/cm2. In order to reveal the current stress effect under the mechanical-electrical coupled loadings, the uniaxial tensile properties of SAC305 solder joint specimens were measured by a multi-field loading system. In addition, the microstructure of the tensile specimens is observed by a scanning electron microscope. It was found that fracture mode changed from ductile fracture to the combination of brittle and ductile fracture when the current density raised from 1000A/cm2 to 2000A/cm2. And the fracture was more likely to happen near the interface when the current density is higher.
随着传统的含铅焊料被RoHS法规禁止用于消费电子产品,无铅焊料在电子封装行业被广泛采用。Sn3.0Ag-0.5Cu (wt%, SAC305)焊料是最常用的模附焊料之一。但是SAC305焊点在复杂工作条件下的可靠性仍然需要仔细研究。本文研究了直径为1.0 mm的焊点试样在应变率为$10^{-4} mathm {s}^{-1}$的条件下,在电流密度为1000 ~ 4000 a /cm2范围内的单轴拉伸行为。为了揭示机电耦合加载下的电流应力效应,采用多场加载系统对SAC305焊点试件的单轴拉伸性能进行了测试。此外,用扫描电镜观察了拉伸试样的显微组织。当电流密度从1000A/cm2提高到2000A/cm2时,断裂模式由韧性断裂转变为脆性与韧性结合断裂。当电流密度较大时,在界面附近更容易发生断裂。
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引用次数: 2
Highly Stretchable, Durable, and Printable Textile Conductor 高度可拉伸,耐用,可印刷的纺织导体
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654296
W. Lee, J. Y. Park, H. Nam, Sung‐Hoon Choa
This paper describes the development of a highly stretchable and durable textile electrode fabricated by simple stencil and screen printing methods. It specifically investigated the effects of an interface layer as a planarization layer between the conductive electrode and the textile on the durability of the textile electrode. A stretchable conductive paste was synthesized by mixing Ag flake powder in a polyester. The conductive electrode was encapsulated with Ecoflex material. The stretchability and durability of the textile electrodes were evaluated via stretching, MIT folding, and dynamic endurance tests. The stretching and MIT folding tests indicated that the interface layer significantly enhanced the durability of the textile electrode. A highly stretchable and flexible textile electrode exhibited a low sheet resistance of $0.05 Omega /$square, excellent stretchability of 70%. The textile electrodes also withstood stretching endurance tests of 10,000 cycles. The illumination of an LED with the conductive electrode was also stable under 70% tensile strain and in water.
本文介绍了用简单的模板和丝网印刷方法制备高拉伸和耐用的纺织电极的发展。具体研究了导电电极与纺织品之间作为平面化层的界面层对纺织品电极耐久性的影响。将银片粉掺入聚酯中,合成了一种可拉伸导电浆料。导电电极采用Ecoflex材料封装。通过拉伸、MIT折叠和动态耐久测试来评估织物电极的拉伸性和耐久性。拉伸和MIT折叠试验表明,界面层显著提高了织物电极的耐久性。一种具有高拉伸性和柔性的纺织电极具有低的片电阻,为0.05 Omega /$square,优异的拉伸率为70%。纺织品电极还经受了10,000次循环的拉伸耐久性测试。在70%的拉伸应变和水中,导电电极的LED照明也很稳定。
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引用次数: 2
Low Stress Solution of Anodic Bonding Technology with SW-YY® Glass for Sensitive MEMS SW-YY®玻璃用于敏感MEMS的阳极键合技术的低应力解决方案
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654362
Xiaodong Hu, P. Mackowiak, Manuel Baeuscher, Yucheng Zhang, Bei Wang, U. Hansen, S. Maus, O. Gyenge, O. Ehrmann, K. Lang, H. Ngo
Anodic bonding technology is a well-established industrial technique, which is reported to be the most widely used MEMS packaging method. This Paper studies residual stress issue caused by different coefficients of thermal expansion (CTE) between silicon and glass during the anodic bonding process and its influence on MEMS-based sensors. For this purpose, SW-YY® Glass from ASAHI is selected. Firstly, the SW-YY® glass material is characterized in the bonding temperature range from 250°C to 500°C and voltage range from 400V-800V. Secondly, a MEMS based pressure sensor and two type glass substrates (SW-YY®, Pyrex®7740) were fabricated and bonded to evaluate the stress issue. Results show that the offset of the pressure sensor introduced by mismatched CTE was reduced significantly with SW-YY® glass than standard Pyrex® ®7740 glass. The proposed method can be used to reduce the influence of the internal stress caused with bonding temperature and the mismatched CTEs for stress sensitive MEMS.
阳极键合技术是一种成熟的工业技术,是目前应用最广泛的MEMS封装方法。本文研究了硅与玻璃在阳极键合过程中由于热膨胀系数(CTE)不同而产生的残余应力问题及其对mems传感器的影响。为此,我们选择了旭硝子的SW-YY®玻璃。首先,SW-YY®玻璃材料的特点是键合温度范围为250°C至500°C,电压范围为400V-800V。其次,制造基于MEMS的压力传感器和两种类型的玻璃基板(SW-YY®,Pyrex®7740)并粘合以评估应力问题。结果表明,与标准Pyrex®®7740玻璃相比,SW-YY®玻璃显著降低了由不匹配CTE引入的压力传感器的偏移量。对于应力敏感型MEMS,该方法可以有效地降低由键合温度和cte不匹配引起的内应力的影响。
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引用次数: 1
期刊
2018 IEEE 20th Electronics Packaging Technology Conference (EPTC)
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