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2018 IEEE 20th Electronics Packaging Technology Conference (EPTC)最新文献

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Extending the Cooling Limit of Remote Radio Head (RRH) Systems Based on Level 1 Thermal Management 基于一级热管理的远程无线电头(RRH)系统冷却极限扩展
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654306
G. Refai-Ahmed, Hoa Do, Brian Philofsky, Anthony Torza
The evolution of wireless networks from 3G/4G to 5G will significantly increase the bandwidth, capacity and capability of these systems. To address these growing requirements, chip manufacturers are using aggressive node scaling coupled with tighter SoC integration to deliver the promises of the next generation network without negatively impacting system power. The combination of these techniques contribute to the breakdown of Dennard Scaling and result in higher power and thermal densities per device as we integrate more circuitry into smaller areas demanding a greater challenge to existing thermal design techniques and driving changes to this development. This paper will explore one such change using a lidless package paired with an innovative surface and mounting method to address this growing power density paradigm.
无线网络从3G/4G向5G的演进将显著增加这些系统的带宽、容量和能力。为了满足这些不断增长的需求,芯片制造商正在使用积极的节点扩展和更紧密的SoC集成来提供下一代网络的承诺,而不会对系统功率产生负面影响。这些技术的结合有助于打破登纳德缩放,并导致每个器件更高的功率和热密度,因为我们将更多的电路集成到更小的区域中,这对现有的热设计技术提出了更大的挑战,并推动了这一发展的变化。本文将探讨一种这样的变化,使用无盖封装与创新的表面和安装方法相结合,以解决这种不断增长的功率密度范例。
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引用次数: 6
Thermomechanical and Viscoelastic Properties of Dielectric Materials Used in Fan-Out Wafer-Level Packaging 扇形圆片级封装中介质材料的热力学和粘弹性
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654361
Y. Andriani, Xiaobai Wang, Songlin Liu, Zhaohui Chen, Xiaowu Zhang
The fan-out wafer-level packaging (FOWLP) has gained significant interests owing to the cost effectiveness, high performance, high I/O density, high integration capability, small form factor and diverse range of applications. FOWLP is currently seen as the best fit for the highly demanding mobile and wireless market, and is attractive for other markets focusing on high performance and small size. However, up to date, wafer warpage is still one of the unresolved challenges in this field. As an integral component of the electronic packaging, dielectric materials could also contribute to the overall warpage. Nonetheless, this contribution is sometimes excluded from the theoretical warpage calculation. Even when the dielectric material was included in the finite element modeling, the simulation results have not been able to duplicate the actual experimental results yet. The difference between the modeling and the experimental results could be due to the only incorporation of elastic properties of the polymer dielectric materials in the simulation, instead of the viscoelastic behavior. Here, we reported the thermomechanical, and viscoelastic properties of three commercial dielectric materials that have been used in the FOWLP and construct master curves via the time-temperature superposition principle to study the relaxation behaviors of the dielectric materials. These results could support the ongoing development of an accurate modeling system for prediction and control of wafer warpage in the FOWLP.
扇出晶圆级封装(FOWLP)由于具有成本效益、高性能、高I/O密度、高集成能力、小尺寸和广泛的应用范围而获得了极大的兴趣。FOWLP目前被视为最适合高要求的移动和无线市场,并且对其他专注于高性能和小尺寸的市场具有吸引力。然而,到目前为止,晶圆翘曲仍然是该领域尚未解决的挑战之一。作为电子封装的一个组成部分,介电材料也可能导致整体翘曲。尽管如此,这种贡献有时被排除在理论翘曲计算之外。即使将介电材料纳入有限元模型中,模拟结果仍不能与实际实验结果相吻合。模拟结果与实验结果之间的差异可能是由于模拟中只考虑了聚合物介电材料的弹性特性,而没有考虑粘弹性特性。本文报道了三种用于FOWLP的商用介电材料的热力学和粘弹性性能,并利用时间-温度叠加原理构建了主曲线来研究介电材料的弛豫行为。这些结果可以支持正在进行的用于预测和控制FOWLP晶圆翘曲的精确建模系统的开发。
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引用次数: 5
In-situ Cure Shrinkage Characterization of Epoxy Molding Compounds for Fan-Out Wafer-Level Packaging 扇形圆片级封装环氧成型化合物的原位固化收缩特性
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654315
Xiaobai Wang, Y. Andriani, Songlin Liu, Zhaohui Chen, Xiaowu Zhang
Wafer warpage has remained as a big issue in the semiconductor industry due to the defects it may cause, such as delamination and cracks in the molded devices. In the FOWLP process, the wafer warpage becomes even more critical due to the stringent process requirements. Although quite a few models have been set up to predict the shrinkage and warpage, research on the correlation between the Epoxy Molding Compound (EMC) cure shrinkage and warpage is still very limited due to the lack of experimental data input on the chemical cure shrinkage. In this paper, the chemical cure shrinkage of five main stream EMCs used in FOWLP were investigated in-situ. Differential Scanning Calorimeter (DSC) was used to monitor the curing process, in order to find out a suitable heating profile for shrinkage test. Thermomechanical analyzer (TMA) equipped with a dilatometer accessory was used to investigate the real-time shrinkage of EMCs at an isothermal curing condition. The results show that the chemical cure shrinkage of the selected EMCs is between 0.4% and 4%.
晶圆翘曲一直是半导体行业的一个大问题,因为它可能导致缺陷,如模制器件的分层和裂纹。在FOWLP工艺中,由于严格的工艺要求,晶圆翘曲变得更加关键。虽然已经建立了相当多的模型来预测收缩和翘曲,但由于缺乏化学固化收缩的实验数据输入,对环氧成型化合物(EMC)固化收缩与翘曲之间的相关性研究仍然非常有限。本文对FOWLP中使用的5种主流EMCs的化学固化收缩率进行了现场研究。采用差示扫描量热仪(DSC)对固化过程进行监测,以确定合适的加热曲线进行收缩试验。采用热力学分析仪(TMA)和膨胀仪附件,研究了EMCs在等温固化条件下的实时收缩率。结果表明,所选EMCs的化学固化收缩率在0.4% ~ 4%之间。
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引用次数: 2
Spray cooling enhancement studies using dielectric liquid 电介质液体喷雾冷却强化研究
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654446
R. Kandasamy, Pengfei Liu, H. Feng, T. Wong, K. Toh
An experimental investigation on closed-loop single nozzle spray cooling with and without the presence of non-condensable gas in the system was carried out. A circular bare copper heated surface of area 3.14 cm2 was spray cooled with dielectric liquid PF-5060 and FC-3284 in this study. Results showed that spray cooling without non-condensable gas showed a lower surface temperature for the same heat flux compared to that with non-condensable gas.
对系统中存在不凝性气体和不存在不凝性气体时的闭环单喷嘴喷雾冷却进行了实验研究。本研究采用介电液PF-5060和FC-3284喷雾冷却面积为3.14 cm2的圆形裸铜受热面。结果表明,在相同热流密度下,不含不凝性气体的喷雾冷却比不含不凝性气体的喷雾冷却表面温度低。
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引用次数: 0
3D Measurement Workflow for Packaging Development and Production Control Using High-Resolution 3D X-ray Microscope 使用高分辨率3D x射线显微镜进行包装开发和生产控制的3D测量工作流程
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654390
A. Gu, John Auyoong
Existing technologies have become less effective for structural inspection and metrology for highly complex 3D semiconductor packages. It is virtually impossible to measure embedded structures of a semiconductor package without physically opening it. In this paper, we propose a new workflow to enable 3D structural measurements without physically altering or destroying a sample. Based on a high-resolution 3D X-ray tomography technique, we have developed a semi-automated metrology workflow to extract critical geometric information from intact packages. In the first case study, the test sample was a commercial DRAM package with a 4-die stack. We utilized the measurement workflow to have successfully extracted bond line thickness, solder volume and solder shape information. In the second case study, several smartphone camera modules were used to further validate this metrology workflow. The measurement was focused on two major components of the camera module: CMOS imaging sensor (CIS) package and lens optics assembly. After the samples were imaged with XRM at high resolution, a measurement workflow followed to measure Au bump height, volume, surface area, and other critical dimensions in the CIS package. In the case of lens optics measurement, lens gap, lens thickness, lens tilt and decentricity were measured from 3D tomographic images using the similar workflow. The workflow was scripted to test multiple repetitive parts for high repeatability and reproducibility.
现有技术对于高度复杂的3D半导体封装的结构检测和计量已经变得不那么有效。如果不物理打开半导体封装,几乎不可能测量其嵌入结构。在本文中,我们提出了一种新的工作流程,可以在不物理改变或破坏样品的情况下实现3D结构测量。基于高分辨率3D x射线断层扫描技术,我们开发了一种半自动计量工作流程,从完整的包装中提取关键的几何信息。在第一个案例研究中,测试样本是一个带有4芯片堆栈的商用DRAM封装。我们利用测量工作流程成功地提取了键合线厚度、焊料体积和焊料形状信息。在第二个案例研究中,使用了几个智能手机相机模块来进一步验证该计量工作流程。测量的重点是相机模块的两个主要组成部分:CMOS成像传感器(CIS)封装和镜头光学组件。在用XRM对样品进行高分辨率成像后,按照测量工作流程测量CIS封装中的Au凸起高度、体积、表面积和其他关键尺寸。在透镜光学测量的情况下,使用类似的工作流程从3D层析图像中测量透镜间隙、透镜厚度、透镜倾斜和离心。该工作流脚本用于测试多个重复部分,以获得高可重复性和再现性。
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引用次数: 1
SIPI Co-Sim: Signal Performance of Super Speed Differential I/O with Power Referencing Design SIPI Co-Sim:基于功率参考设计的高速差分I/O信号性能
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654326
Li Wern Chew, Paik Wen Ong
Printed circuit board (PCB) design with full ground referencing for high speed signaling is generally preferred for better or cleaner signal return path. However, this has become very challenging when platform design is trending toward a smaller and thinner form factor where having full ground layers in between PCB stack-up is no longer feasible for practical hardware implementation. With the increase in popularity to have signal-to-power referencing in PCB design, signal-integrity (SI) and power-integrity (PI) co-simulation is however not that straight forward and often comes with sophisticated co-sim’s assumptions. This is because signaling quality is impacted by noise coupling suffered by the signal which has high dependency on the power plane sizes and shapes, area of power referenced, as well as how well the power delivery network (PDN) design is. In this paper, we evaluate the SI performance of a super speed input/output (I/O) buffer with full ground plane or partial power plane as its return path. Three controlled electrical parameters - voltage threshold, peak-to-peak noise and frequency are varied in our studies to investigate the impact of power referencing to signal eye margin. From the study, it is shown that power referencing is doable for high-speed I/O on the conditions that the power referenced voltage rail is a low frequency rails that has dominant frequency contents in the range of less than 5% of the targeted signal operating frequency and the total peak-to-peak noise is below 330mVpp. With these findings, platform routing guidelines for I/O design could be more relaxed and flexible, by allowing partial power referencing to the high speed signal traces.
印刷电路板(PCB)设计具有全接地参考的高速信号通常是更好或更干净的信号返回路径首选。然而,当平台设计趋向于更小更薄的外形因素时,这就变得非常具有挑战性,在PCB堆叠之间有完整的接地层对于实际的硬件实现不再可行。随着PCB设计中信号功率参考的普及,信号完整性(SI)和功率完整性(PI)联合仿真并不是那么直接,通常伴随着复杂的co-sim假设。这是因为信号受到噪声耦合的影响,而噪声耦合与功率平面的尺寸和形状、参考功率的面积以及电力输送网络(PDN)设计的好坏有很大的关系。在本文中,我们评估了以全地平面或部分功率平面作为其返回路径的超高速输入/输出(I/O)缓冲器的SI性能。在我们的研究中,三个受控的电气参数-电压阈值,峰对峰噪声和频率变化,以研究功率参考对信号眼边界的影响。研究表明,在功率参考电压轨为主导频率含量小于目标信号工作频率5%的低频轨,且总峰间噪声低于330mVpp的条件下,高速I/O的功率参考是可行的。有了这些发现,通过允许部分功率参考高速信号走线,I/O设计的平台路由指南可以更加宽松和灵活。
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引用次数: 0
Wideband slot array antenna for 1 THz band imaging device 用于1thz波段成像装置的宽带缝隙阵列天线
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654353
Kota Tsugami, T. Asano, H. Kanaya
This paper presents the design of wideband 1 x 2 one-sided directional slot array antenna for 1 THz band imaging device. The antenna element is composed of top metal, dielectric substrate, and bottom floating metal layer. This antenna array has 2 antenna elements to achieve a high gain and wideband. The THz signal is injected by CPW transmission line. The simulation result of return loss, antenna gain is presented in this paper. The bandwidth of proposed antenna is 210 GHz (0.88 THz – 1.09 THz), the relative bandwidth is 21.3 % and the peak gain is 5.87 dBi at 1.04 THz.
本文介绍了用于1thz波段成像器件的宽带1 × 2单面定向槽阵天线的设计。天线元件由顶部金属、介电基板和底部浮动金属层组成。该天线阵列具有2个天线单元,以实现高增益和宽带。太赫兹信号通过CPW传输线注入。给出了回波损耗、天线增益的仿真结果。该天线带宽为210 GHz (0.88 THz ~ 1.09 THz),相对带宽为21.3%,在1.04 THz时峰值增益为5.87 dBi。
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引用次数: 0
“3rd Level” Solder Joint Reliability Investigations for Transfer of Consumer Electronics in Automotive Use “第三级”汽车用消费电子转移焊点可靠性研究
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654406
R. Dudek, M. Hildebrandt, K. Kreyssig, S. Rzepka, R. Döring, B. Seiler, T. Fries, M. Zhang, R. Ortmann
Developments directed towards autonomous driving require complex smart functionalities at reasonable cost, e.g., combined sensing and high volume data processing. Reliability remains a key issue in that process. However, in various cases dedicated automotive grade components are lacking. Therefore, thermo-mechanical reliability issues are one focus of the European project TRACE, which studies the issues for transfer of consumer electronics (CE) into automotive electronics (AE). Gaps between these use scenarios are figured out and measures to be taken are searched [1].Besides the well-known harsh environmental AE requirements, mounting induced effects on components loadings need to be considered. These mounting conditions superimpose stresses driven by the component-board induced CTE mismatch and are in particular critical for leadless components like QFNs, LGAs; WLPs, characteristic of CE use. For evaluation of this loading scenario, a combined measuring-simulation technique has been developed. It uses an optical multi-sensor metrology system for the thermo-mechanical deformation measurement of electronic components and systems for different size and resolution ranges. An application to critical components in an electronic control unit (ECU) is depicted.The combined experimental-numerical method is applied to test-setups, to figure out effects from board mounting on component reliability and characteristic limits due to mounting. Test-boards with systems in QFNs are analyzed. It is shown, that system effects can have major impact on components stress and solder fatigue life.
自动驾驶的发展需要以合理的成本实现复杂的智能功能,例如,结合传感和大容量数据处理。在这个过程中,可靠性仍然是一个关键问题。然而,在各种情况下,缺乏专用的汽车级组件。因此,热机械可靠性问题是欧洲项目TRACE的重点之一,该项目研究消费电子产品(CE)向汽车电子产品(AE)转移的问题。找出这些使用场景之间的差距,寻找应采取的措施[1]。除了众所周知的恶劣环境声发射要求外,还需要考虑安装对组件负载的影响。这些安装条件叠加了由组件板诱导的CTE不匹配驱动的应力,对于QFNs、lga等无引线元件尤其重要;wlp, CE使用的特征。为了评估这种加载情景,开发了一种测量与模拟相结合的技术。它采用光学多传感器测量系统对不同尺寸和分辨率范围的电子元件和系统进行热机械变形测量。描述了在电子控制单元(ECU)中的关键部件的应用。采用实验与数值相结合的方法对试验装置进行了研究,以确定电路板安装对元件可靠性的影响以及安装所引起的特性极限。分析了QFNs系统的测试板。结果表明,系统效应对元件应力和焊料疲劳寿命有重要影响。
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引用次数: 3
Demonstration of Ni-free Surface Finishing with IGEPIG for Solid-State Diffusion Bonding on Ultra-fine Pitch Chip-on-Film (COF) 超细间距片上膜(COF)固态扩散键合中IGEPIG无ni表面处理的演示
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654313
K. Pun, Jason Rotanson, Navdeep S. Dhaka, Chee-wah Cheung, A. Chan
This paper demonstrates the latest ultra-fine pitch scalability of off-chip IC assembly on an 18 $mu {mathrm{ m}}$ pitch chip-on-film (COF) package fabricated by novel fully additive process (FAP) with Ni-free surface finish plating, immersion Au/electroless Pd/immersion Au (IGEPIG). The COF assembled with Au-Au diffusion bonding method is evaluated in terms of electrical and mechanical performance. Comparison is made with various finishes including Electrolytic Ni/Au and electroless Ni/electroless Pd/immersion Au (ENEPIG). Excellent alignment with sufficient contact area is achieved even on such narrow traces. The substrate fabricated by FAP possess desirable trace profile suitable for fine pitch bonding. With different finishing, it is seen that surface roughness is the main contributing factor that interrupt diffusion and creep process in forming void on the joint interface while the elastic plastic properties of the material construction and tri-layer thickness affect the deformation of the interconnect structure. Correlations between the surface finish and the Au-Au solid state diffusion bonding on the COF is established. In terms of long term reliability, all finishes show stable contact resistance below 30 $text{m}omega $ with no open joint on the daisy chain connectivity after high temperature humidity storage at $85^{circ }text{C}$/85% RH (1000 hours) and air-to-air thermal shock test at $125^{circ }text{C}$/-$55^{circ }text{C}$ (1000 cycles).
本文展示了在18 $mu {mathrm{ m}}$螺距片上芯片(COF)封装上最新的超细间距可扩展性,该封装采用新颖的全增材工艺(FAP),无镍表面电镀,浸入式Au/化学镀Pd/浸入式Au (IGEPIG)。对用Au-Au扩散键合法组装的COF进行了电学性能和力学性能评价。比较了电解Ni/Au和化学Ni/化学Pd/浸金(ENEPIG)等各种表面处理方法。即使在如此狭窄的迹线上,也可以实现具有足够接触面积的出色对准。采用FAP工艺制备的基板具有良好的迹线轮廓,适合于细间距键合。在不同的整理工艺条件下,表面粗糙度是影响接头界面孔洞形成过程中扩散和蠕变过程中断的主要因素,而材料结构的弹塑性性能和三层厚度影响连接结构的变形。建立了COF表面光洁度与Au-Au固体扩散键合之间的关系。就长期可靠性而言,在$85^{circ }text{C}$ /85高温湿度储存后,所有饰面都显示出稳定的接触电阻低于30 $text{m}omega $,雏菊链连通性上没有开放接头% RH (1000 hours) and air-to-air thermal shock test at $125^{circ }text{C}$/-$55^{circ }text{C}$ (1000 cycles).
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引用次数: 0
Phthalonitrile-Based Electronic Packages for High Temperature Applications 用于高温应用的邻苯二腈基电子封装
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654340
Eric Jian Rong Phua, Ming Liu, J. Lim, Bokun Cho, C. Gan
Epoxy is ubiquitous in the electronics industry for its application as a package resin. However, harsher environments and more stringent conditions arising from emerging applications have driven epoxy to its servicing limit [1] –[5]. These applications have to rely heavily on fillers to push the performance limit further. Alternative high performance electronic packaging materials, including bismaleimide (BMI) [6, 7] and cyanate esters (CE) [8] –[10], have also been investigated. In this paper, we will discuss a variant of phthalonitrile (PN) [11] –[14], which as a resin itself is able to withstand a temperature of $300^{circ}mathrm{C}$ in normal atmosphere. Besides comparable properties especially in terms of mechanical strength, PN also exhibits strong thermal stability. High quality adherence of filler-matrix is not just observed in scanning electron microscopy (SEM) images but also reflected in the bond shear strength. The underlying mechanism of the performance of PN as an alternative packaging material was studied using Gaussian09™. It is shown that the interaction of triazine and phthalocyanine with silicon and aluminum atoms on silica and alumina respectively, is the factor behind the bond shear behavior observed.
环氧树脂作为封装树脂在电子工业中无处不在。然而,由于新兴应用的出现,越来越恶劣的环境和更严格的条件已经使环氧树脂达到了其使用极限[1]-[5]。这些应用程序必须严重依赖填料来进一步推动性能极限。替代高性能电子封装材料,包括双马来酰亚胺(BMI)[6,7]和氰酸酯(CE)[8] -[10],也进行了研究。在本文中,我们将讨论邻苯二腈(PN)[11] -[14]的一种变体,它作为树脂本身在正常气氛中能够承受300^{circ} mathm {C}$的温度。除了具有类似的性能,特别是在机械强度方面,PN还表现出很强的热稳定性。填料基质的高质量粘附性不仅体现在扫描电镜(SEM)图像上,还体现在粘结的抗剪强度上。使用Gaussian09™研究了PN作为替代包装材料性能的潜在机制。结果表明,三嗪和酞菁分别与硅原子和铝原子在二氧化硅和氧化铝上的相互作用是观察到键剪行为的原因。
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引用次数: 1
期刊
2018 IEEE 20th Electronics Packaging Technology Conference (EPTC)
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