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2012 24th International Symposium on Power Semiconductor Devices and ICs最新文献

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4.5-kV multi-chip level-shift circuit using dedicated discrete IGBTs for driving high-power IGBTs 采用专用分立igbt驱动大功率igbt的4.5 kv多芯片电平移位电路
Pub Date : 2012-06-03 DOI: 10.1109/ISPSD.2012.6229061
N. Sakurai, K. Takami, S. Yukutake, Y. Kouno, J. Sakano
A 4.5-kV voltage level-shift circuit with a multi-chip structure composed of upper and lower arm driver ICs and dedicated discrete IGBTs was developed. It was experimentally confirmed that this level-shift circuit could drive a 3.3-kV/1200-A IGBT module.
研制了一种由上下臂驱动ic和专用分立igbt组成的多芯片结构的4.5 kv电压电平移位电路。实验证实,该电平移位电路可以驱动3.3 kv /1200 a的IGBT模块。
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引用次数: 1
High-voltage thin layer SOI technology for negative power supply 高压薄层SOI负电源技术
Pub Date : 2012-06-03 DOI: 10.1109/ISPSD.2012.6229058
M. Qiao, Yitao He, Heng-juan Wen, Xin Zhou, Lingli Jiang, Huaping Jiang, X. Luo, Zhaoji Li, Bo Zhang, Zhengcai Chen, Yuxuan Su, Zhiqiang Xiao, Cheng Wang
A novel HV thin layer SOI technology based on 1.5-μm-thick silicon layer for negative HV power supply has been first proposed. HV field nLDMOS with thick gate oxide, HV pLDMOS with thin gate oxide and LV CMOS are compatible with shallow trench isolation. Gate and source field plates are adopted to improve the breakdown characteristics of HV field nLDMOS since it doesn't meet SOI RESURF criterion. N-field with shallow junction depth is introduced to eliminate channel discontinuity around the “beak” region at the source side of HV field nLDMOS and avoid punch-through breakdown induced by BG effect of HV field nLDMOS. The influences of key parameters on breakdown mechanism are discussed and optimal parameters are obtained to achieve well characteristics of HV field nLDMOS for negative HV power supply. A negative HV switching IC using the proposed thin layer SOI technology shows that both the rise and fall times of the output stages are less than 50 ns under the negative supply voltage of -100 V and the load capacitance of 5000 pF.
首次提出了一种基于1.5 μm厚硅层的高压薄层SOI技术。采用厚栅极氧化物的高压场nLDMOS、薄栅极氧化物的高压pLDMOS和低压CMOS兼容浅沟槽隔离。由于高压场nLDMOS不满足SOI RESURF标准,采用栅极和源场极板来改善其击穿特性。为了消除高压场nLDMOS源侧“喙”区周围的通道不连续,避免高压场nLDMOS的BG效应引起的穿通击穿,引入了结深较浅的n场。讨论了关键参数对击穿机理的影响,得到了用于负高压电源的高压场nLDMOS的最佳参数。采用薄层SOI技术的负高压开关IC在负电源电压为-100 V、负载电容为5000pf时,输出级的上升和下降时间均小于50ns。
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引用次数: 2
Bipolar transistor gain influence on the high temperature thermal stability of HV-BiGTs 双极晶体管增益对高压bigt高温热稳定性的影响
Pub Date : 2012-06-03 DOI: 10.1109/ISPSD.2012.6229047
L. Storasta, S. Matthias, A. Kopta, Munaf T. A. Rahimo
In this paper we present the detailed investigation of the influence of the internal bipolar PNP transistor gain on the thermal stability of high voltage IGBTs and BiGTs. The bipolar gain is controlled by means of anode and buffer design and by the introduction of anode shorts. The influence of the different buffer and anode doping profiles and the different layouts in the case of anode-shorted designs are analyzed. Temperature dependent leakage current measurements confirm that the lowering of the leakage current and its subsequent weak temperature dependency can be achieved by buffer and anode engineering albeit with certain design trade-off restrictions. Nevertheless, another effective approach for suppressing the leakage current and its dependency on temperature is achieved by the introduction of anode shorts as demonstrated in reverse conducting IGBT or BiGT structures. Such designs eliminate to a large extent the internal bipolar transistor action in the BiGT anode shorted designs while allowing different anode and buffer doping profiles for the design trade-offs. Despite the fact that the lifetime control in the BiGT drift region causes the leakage current to increase, the temperature coefficient remains unchanged, hence, making the hard switched BiGT suitable for high temperature operation.
本文详细研究了内双极PNP晶体管增益对高压igbt和bigt热稳定性的影响。通过阳极和缓冲器的设计以及引入阳极短路来控制双极增益。分析了在阳极短路的情况下,不同的缓冲液和阳极掺杂分布以及不同的布局对阳极短路设计的影响。温度相关的泄漏电流测量证实,尽管存在一定的设计权衡限制,但缓冲和阳极工程可以实现泄漏电流的降低及其随后的弱温度依赖性。然而,另一种有效的方法是通过引入阳极短路来抑制泄漏电流及其对温度的依赖,如反向导电IGBT或BiGT结构所示。这样的设计在很大程度上消除了BiGT阳极短路设计中的内部双极晶体管作用,同时允许不同的阳极和缓冲掺杂配置文件进行设计权衡。尽管BiGT漂移区的寿命控制使漏电流增大,但温度系数保持不变,因此硬开关BiGT适合高温工作。
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引用次数: 13
Improving module performance and reliability in power electronic applications by monolithic integration of RC-snubbers 通过rc -缓冲器的单片集成提高电力电子应用中模块的性能和可靠性
Pub Date : 2012-06-03 DOI: 10.1109/ISPSD.2012.6229078
T. Erlbacher, H. Schwarzmann, A. Bauer, S. Berberich, J. vom Dorp, L. Frey
Monolithic integration of RC snubbers in power electronic applications offers great opportunities. The presented devices provide tight tolerances and enable high integration densities. Especially, the incorporation into power modules enables reduction of electromagnetic interferences in accordance with reliable lifetime predictions.
单片集成RC缓冲器在电力电子应用中提供了巨大的机会。所提出的器件提供严格的公差并实现高集成密度。特别是,集成到功率模块中可以根据可靠的寿命预测减少电磁干扰。
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引用次数: 6
Low loss IGBT with Partially Narrow Mesa Structure (PNM-IGBT) 部分窄面结构低损耗IGBT (PNM-IGBT)
Pub Date : 2012-06-03 DOI: 10.1109/ISPSD.2012.6229012
M. Sumitomo, J. Asai, H. Sakane, K. Arakawa, Y. Higuchi, M. Matsui
A PNM (Partially Narrow Mesa) -IGBT with a fundamentally new surface is proposed for the first time. The unique gate shape looks like a “vase” and generates an extreme injection enhancement. Its performance approaches the limits of Si-IGBT. Therefore, PNM-IGBT is able to contribute to the saturation voltage reduction and the improvement of Vce(sat)-Eoff trade off. Furthermore, it can be adapted to actual conditions because of its sufficiently rugged structure.
首次提出了一种具有全新表面的PNM (partial Narrow Mesa) -IGBT。独特的闸门形状看起来像一个“花瓶”,并产生一个极端的注射增强。其性能接近Si-IGBT的极限。因此,PNM-IGBT能够有助于降低饱和电压和改善Vce(sat)-Eoff权衡。此外,由于其结构足够坚固,可以适应实际情况。
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引用次数: 90
Power devices for grid connections 电网连接用动力装置
Pub Date : 2012-06-03 DOI: 10.1109/ISPSD.2012.6229009
L. Casey, L. Zubieta, J. Mossoba, B. Borowy, B. Semenov
Power electronic interfaces are vital to advanced, smarter, distributed grids and micro-grids and the capabilities and limitations of power devices are integral to this. This paper discusses existing and emerging applications of grid connected electronic interfaces that are enabled by Power Semiconductor Devices. The application focus will be on: (1) inverters, which are a key element of modern distributed and renewable energy systems; (2) solid-state transformers which hold great promise to reduce size and weight, while enhancing performance, compared to existing Grid transformers; (3) MV static transfer switches, which facilitate redundant power at the medium voltage level. Capabilities and tradeoffs between Power circuit topologies, available devices, and circuit techniques are presented. Existing and projected market opportunities are also presented, and motivation for future device development is outlined. Emerging transformative research using wide band gap devices in silicon-dominated power device applications, along with hybrid power switch configurations, will also be highlighted. The compelling requirement of advanced grids for both fast fault current limiting, fast voltage control, and possibly increased overload capability to enable the much heralded advances, are also shown to be completely dependent on devices, along with their cost effective application.
电力电子接口对于先进、智能、分布式电网和微电网至关重要,电力设备的能力和限制是不可或缺的。本文讨论了由功率半导体器件实现的电网连接电子接口的现有和新兴应用。应用重点将集中在:(1)逆变器,这是现代分布式和可再生能源系统的关键要素;(2)固态变压器,与现有的电网变压器相比,它在减小尺寸和重量的同时提高了性能;(3) MV静态转换开关,便于中压级冗余供电。介绍了功率电路拓扑、可用器件和电路技术之间的能力和权衡。现有的和预计的市场机会也提出,并为未来的设备发展动机概述。在硅主导的功率器件应用中使用宽带隙器件的新兴变革性研究,以及混合功率开关配置,也将得到强调。先进电网对快速故障限流、快速电压控制和可能增加的过载能力的迫切需求,也被证明完全依赖于设备,以及它们的成本效益应用。
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引用次数: 4
A simple method to design the single-mask multi-zone junction termination extension for high-voltage IGBT 高压IGBT单掩模多区结端扩展的一种简单设计方法
Pub Date : 2012-06-03 DOI: 10.1109/ISPSD.2012.6229051
Huaping Jiang, Bo Zhang, Wanjun Chen, Zhaoji Li, Congzhi Zheng, Chuang Liu, Z. Rao, B. Dong
A simple method to design the single-mask multi-zone junction termination extension (MZJTE) (SM-MZJTE) for high-voltage insulated-gate bipolar transistor (IGBT) is presented and experimentally demonstrated. By assuming that the p-type SM-MZJTE region is completely depleted and the equipotential lines are circular arcs for simplicity, an analytical model of the selective function is derived from the charge balance and the geometrical relations. As the blocking capability is sensitive to the implantation dose, the Boron segregation at Si-SiO2 interface has also been taken into consideration in this model. According to the analytical model, high-voltage IGBTs and test devices with edge termination of SM-MZJTE are fabricated. IGBTs with edge termination implantation dose of 3×1012 cm-2 show highest average breakdown voltage of 3.79 kV (about 92% of the parallel plane breakdown voltage).
提出了一种用于高压绝缘栅双极晶体管(IGBT)的单掩模多区结端延伸(MZJTE) (SM-MZJTE)的简单设计方法,并进行了实验验证。假设p型SM-MZJTE区完全耗尽,为简便起见,等势线为圆弧,从电荷平衡和几何关系出发,导出了选择函数的解析模型。由于阻滞能力对注入剂量敏感,该模型还考虑了Si-SiO2界面处的硼偏析。根据分析模型,制作了SM-MZJTE的高压igbt和边缘端接测试装置。当边缘终止注入剂量为3×1012 cm-2时,igbt的平均击穿电压最高,为3.79 kV,约为平行平面击穿电压的92%。
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引用次数: 0
3.2 kV AlGaN/GaN MIS-HEMTs employing RF sputtered Ga2O3 films 采用射频溅射Ga2O3薄膜的3.2 kV AlGaN/GaN miss - hemts
Pub Date : 2012-06-03 DOI: 10.1109/ISPSD.2012.6229075
O. Seok, W. Ahn, Young-shil Kim, M. Han, M. Ha
AlGaN/GaN metal insulator semiconductor high electron mobility transistors (MIS-HEMTs) employing rf sputtered Ga2O3 have been proposed and fabricated. A very high breakdown voltage exceeding 3200 V and a low drain leakage current of 230 nA/mm at gate-drain distance (LGD) of 40 μm was achieved without any sacrificing DC output characteristics while those of the unpassivated HEMT were 350 V and 134 μA/mm. The breakdown voltage of the Ga2O3 passivated HEMT was increased with increase of LGD because the injected electrons into the deep traps in Ga2O3 effectively extended the depletion region between the gate and the drain. And the injected electrons into deep traps have high activation energy for de-trapping so that the reverse blocking characteristics of the Ga2O3 passivated HEMT were considerable improved.
采用射频溅射Ga2O3制备了AlGaN/GaN金属绝缘体半导体高电子迁移率晶体管(MIS-HEMTs)。在栅极-漏极距离(LGD)为40 μm的情况下,HEMT具有超过3200 V的击穿电压和230 nA/mm的漏极漏电流,而未钝化HEMT的直流输出特性为350 V和134 μA/mm。Ga2O3钝化HEMT的击穿电压随着LGD的增加而增加,这是因为注入到Ga2O3深阱中的电子有效地扩展了栅极和漏极之间的耗尽区。注入到深阱中的电子具有较高的脱陷活化能,从而大大提高了Ga2O3钝化HEMT的反向阻滞特性。
{"title":"3.2 kV AlGaN/GaN MIS-HEMTs employing RF sputtered Ga2O3 films","authors":"O. Seok, W. Ahn, Young-shil Kim, M. Han, M. Ha","doi":"10.1109/ISPSD.2012.6229075","DOIUrl":"https://doi.org/10.1109/ISPSD.2012.6229075","url":null,"abstract":"AlGaN/GaN metal insulator semiconductor high electron mobility transistors (MIS-HEMTs) employing rf sputtered Ga<sub>2</sub>O<sub>3</sub> have been proposed and fabricated. A very high breakdown voltage exceeding 3200 V and a low drain leakage current of 230 nA/mm at gate-drain distance (L<sub>GD</sub>) of 40 μm was achieved without any sacrificing DC output characteristics while those of the unpassivated HEMT were 350 V and 134 μA/mm. The breakdown voltage of the Ga<sub>2</sub>O<sub>3</sub> passivated HEMT was increased with increase of L<sub>GD</sub> because the injected electrons into the deep traps in Ga<sub>2</sub>O<sub>3</sub> effectively extended the depletion region between the gate and the drain. And the injected electrons into deep traps have high activation energy for de-trapping so that the reverse blocking characteristics of the Ga<sub>2</sub>O<sub>3</sub> passivated HEMT were considerable improved.","PeriodicalId":371298,"journal":{"name":"2012 24th International Symposium on Power Semiconductor Devices and ICs","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-06-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117162551","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
700V PIC technology based on 0.35µm design for AC-DC power units 基于0.35µm的700V PIC技术设计的交直流电源单元
Pub Date : 2012-06-03 DOI: 10.1109/ISPSD.2012.6229060
T. Karino, O. Sasaki, M. Yamaji, H. Sumida
We have established the 700V-class PIC technology based on 0.35μm design to provide power management ICs with higher performances and lower chip cost for the first time. And a 700V PWM-IC based on 0.35μm design, whose chip size can be reduced to 50% that of the IC based on 1.0μm design, is realized. This paper will report our developed 700V PIC technology with a PWM-IC product designed by this technology.
我们建立了基于0.35μm设计的700v级PIC技术,首次提供更高性能和更低芯片成本的电源管理ic。实现了基于0.35μm设计的700V pwm集成电路,其芯片尺寸比基于1.0μm设计的集成电路减小了50%。本文将介绍我们开发的700V PIC技术以及采用该技术设计的pwm集成电路产品。
{"title":"700V PIC technology based on 0.35µm design for AC-DC power units","authors":"T. Karino, O. Sasaki, M. Yamaji, H. Sumida","doi":"10.1109/ISPSD.2012.6229060","DOIUrl":"https://doi.org/10.1109/ISPSD.2012.6229060","url":null,"abstract":"We have established the 700V-class PIC technology based on 0.35μm design to provide power management ICs with higher performances and lower chip cost for the first time. And a 700V PWM-IC based on 0.35μm design, whose chip size can be reduced to 50% that of the IC based on 1.0μm design, is realized. This paper will report our developed 700V PIC technology with a PWM-IC product designed by this technology.","PeriodicalId":371298,"journal":{"name":"2012 24th International Symposium on Power Semiconductor Devices and ICs","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-06-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125649342","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Investigation of voltage-dependent thermal property in high-voltage drain-extended MOSFETs 高压漏极扩展mosfet的电压相关热特性研究
Pub Date : 2012-06-03 DOI: 10.1109/ISPSD.2012.6229037
Chen-Liang Chu, C. M. Hu, C. F. Huang, Y. Chen, F. Y. Chen, K. Thei, C. Hsu, C. Yao, R. Liou, H. Tuan
In this study, a reduction in the saturation current caused by self-heating effect at high VGS is observed in a 35-V rated asymmetric DEMOSFET. The high VGS -induced the large current and raises up the device surface temperature. The Kirk-effect takes places at sufficiently high current levels (high VGS values) leading to the movement of the maximum temperature point from the gate-overlapped DE (drain-extended) region to the drain-side contact region. The drift-region resistance strongly correlates to the self-heating effect and the VK voltage is proportional to the doping concentration in the drift region. As a result, the reduced surface heating (RESURH) can be realized by the optimization of doping concentration in the drift region.
在本研究中,在35 v额定的非对称demofet中观察到高VGS下由自热效应引起的饱和电流的降低。高VGS诱发大电流,使器件表面温度升高。柯克效应发生在足够高的电流水平(高VGS值),导致最高温度点从栅极重叠DE(漏极扩展)区域移动到漏极侧接触区域。漂移区电阻与自热效应密切相关,VK电压与漂移区掺杂浓度成正比。因此,可以通过优化漂移区掺杂浓度来实现表面减热(RESURH)。
{"title":"Investigation of voltage-dependent thermal property in high-voltage drain-extended MOSFETs","authors":"Chen-Liang Chu, C. M. Hu, C. F. Huang, Y. Chen, F. Y. Chen, K. Thei, C. Hsu, C. Yao, R. Liou, H. Tuan","doi":"10.1109/ISPSD.2012.6229037","DOIUrl":"https://doi.org/10.1109/ISPSD.2012.6229037","url":null,"abstract":"In this study, a reduction in the saturation current caused by self-heating effect at high VGS is observed in a 35-V rated asymmetric DEMOSFET. The high VGS -induced the large current and raises up the device surface temperature. The Kirk-effect takes places at sufficiently high current levels (high VGS values) leading to the movement of the maximum temperature point from the gate-overlapped DE (drain-extended) region to the drain-side contact region. The drift-region resistance strongly correlates to the self-heating effect and the VK voltage is proportional to the doping concentration in the drift region. As a result, the reduced surface heating (RESURH) can be realized by the optimization of doping concentration in the drift region.","PeriodicalId":371298,"journal":{"name":"2012 24th International Symposium on Power Semiconductor Devices and ICs","volume":"111 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-06-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131275115","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
2012 24th International Symposium on Power Semiconductor Devices and ICs
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