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2016 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)最新文献

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Improving optical and electrical properties of micropillar and black-Si solar cells by combining them into a superstructure 通过将微柱和黑硅太阳能电池组合成一个上层结构,提高了它们的光学和电学性能
J. Shieh, Chengyun You, Jian Ming Liu, C. Chiu
While nanostructured surface such as black silicon is an efficiency way to reduce the surface reflection, the high surface area impedes the application of photoelectronic conversion. On the other hand, micropillar is a promising alternative to efficiently collect carriers, but the pillar diameter is usually larger than the wavelength of light that makes surface reflection high. In this study we report an approach to reduce the surface reflection of micropillars by combining micropillar and nanostructure to create a superstructure that concurrently improves the electrical and optical properties. We found that the averaged reflection was reduced from 16.73% to 9.63%, and the efficiency was increased from 9.26% to 9.62% via only 2% modification in micropillar height.
虽然黑硅等纳米结构表面是减少表面反射的有效方法,但其高表面积阻碍了光电转换的应用。另一方面,微柱是有效收集载流子的一种很有前途的选择,但微柱的直径通常大于使表面反射率高的光的波长。在这项研究中,我们报告了一种通过结合微柱和纳米结构来创建同时改善电学和光学性能的上层结构来减少微柱表面反射的方法。结果表明,微柱高度仅改变2%,平均反射率从16.73%降低到9.63%,效率从9.26%提高到9.62%。
{"title":"Improving optical and electrical properties of micropillar and black-Si solar cells by combining them into a superstructure","authors":"J. Shieh, Chengyun You, Jian Ming Liu, C. Chiu","doi":"10.1109/AM-FPD.2016.7543673","DOIUrl":"https://doi.org/10.1109/AM-FPD.2016.7543673","url":null,"abstract":"While nanostructured surface such as black silicon is an efficiency way to reduce the surface reflection, the high surface area impedes the application of photoelectronic conversion. On the other hand, micropillar is a promising alternative to efficiently collect carriers, but the pillar diameter is usually larger than the wavelength of light that makes surface reflection high. In this study we report an approach to reduce the surface reflection of micropillars by combining micropillar and nanostructure to create a superstructure that concurrently improves the electrical and optical properties. We found that the averaged reflection was reduced from 16.73% to 9.63%, and the efficiency was increased from 9.26% to 9.62% via only 2% modification in micropillar height.","PeriodicalId":422453,"journal":{"name":"2016 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)","volume":"61 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115794450","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
High performance green exciplex OLED 高性能绿色复合OLED
W. Hung, Pin-Yi Chiang
Highly efficient exciplex systems incorporating a 1,3,5-triazine derivative (3N-T2T) as an electron acceptor and caibazole derivative (Tris-PCz) as an electron donor are developed. We employed a simple device structure composed of only Tris-PCz and 3N-T2T as charge-transporting and emitting materials. The combination of the hole and electron mobility of Tris-PCz and 3N-T2T, respectively, the barrier free hole injection from the ITO to the EML and high triplet energies renders the green exciplex device to realize an exceptionally low driving voltage of 3.4 V at 1000 cdm-2 and maximum EQE up to 10.8% (32.7 cdA-1, 38.4 lm W-1).
开发了以1,3,5-三嗪衍生物(3N-T2T)为电子受体,以咔唑衍生物(Tris-PCz)为电子给体的高效外络合物体系。我们采用仅由Tris-PCz和3N-T2T组成的简单器件结构作为电荷传输和发射材料。Tris-PCz和3N-T2T的空穴迁移率和电子迁移率、ITO向EML的无势垒空穴注入和高三重态能量的结合,使得绿色杂化器件在1000 cdm-2下实现了3.4 V的极低驱动电压和高达10.8% (32.7 cda - 1,38.4 lm W-1)的最大EQE。
{"title":"High performance green exciplex OLED","authors":"W. Hung, Pin-Yi Chiang","doi":"10.1109/AM-FPD.2016.7543628","DOIUrl":"https://doi.org/10.1109/AM-FPD.2016.7543628","url":null,"abstract":"Highly efficient exciplex systems incorporating a 1,3,5-triazine derivative (3N-T2T) as an electron acceptor and caibazole derivative (Tris-PCz) as an electron donor are developed. We employed a simple device structure composed of only Tris-PCz and 3N-T2T as charge-transporting and emitting materials. The combination of the hole and electron mobility of Tris-PCz and 3N-T2T, respectively, the barrier free hole injection from the ITO to the EML and high triplet energies renders the green exciplex device to realize an exceptionally low driving voltage of 3.4 V at 1000 cdm-2 and maximum EQE up to 10.8% (32.7 cdA-1, 38.4 lm W-1).","PeriodicalId":422453,"journal":{"name":"2016 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)","volume":"61 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115016719","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fabrication of earth-abundant CZTS thin film solar cells 地球资源丰富的CZTS薄膜太阳能电池的制备
H. Katagiri, K. Jimbo
About 20 years ago, in 1995, we had started to develop the novel thin film solar cells using CZTS as an absorber to be able to use in the after next generation. The conversion efficiency of CZTS thin film solar cells reported for the first time in 1996 was only 0.66% and it had been improved to about 7% in our laboratory. Because the potential of CZTS-based thin film solar cells seems to be quite high, we will be able to overcome the resource problem of rare-metal in the near future. In this review manuscript we will survey our previous works and show the recent results concerning with this promising solar cells.
大约在20年前,也就是1995年,我们已经开始开发利用CZTS作为吸收剂的新型薄膜太阳能电池,以便能够在下一代中使用。1996年首次报道的CZTS薄膜太阳能电池的转换效率仅为0.66%,在我们的实验室已经提高到7%左右。由于基于czts的薄膜太阳能电池的潜力似乎相当高,我们将能够在不久的将来克服稀有金属的资源问题。在这篇综述中,我们将回顾我们以前的工作,并展示有关这种有前途的太阳能电池的最新结果。
{"title":"Fabrication of earth-abundant CZTS thin film solar cells","authors":"H. Katagiri, K. Jimbo","doi":"10.1109/AM-FPD.2016.7543617","DOIUrl":"https://doi.org/10.1109/AM-FPD.2016.7543617","url":null,"abstract":"About 20 years ago, in 1995, we had started to develop the novel thin film solar cells using CZTS as an absorber to be able to use in the after next generation. The conversion efficiency of CZTS thin film solar cells reported for the first time in 1996 was only 0.66% and it had been improved to about 7% in our laboratory. Because the potential of CZTS-based thin film solar cells seems to be quite high, we will be able to overcome the resource problem of rare-metal in the near future. In this review manuscript we will survey our previous works and show the recent results concerning with this promising solar cells.","PeriodicalId":422453,"journal":{"name":"2016 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)","volume":"238 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115108462","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
High photothermal properties in silicon nanostructures 硅纳米结构的高光热性能
Ting-Ting Ren, M. Wei, Chin-Chiang Hsiao, Bo-Yi Chen, Mei-Yi Li, Jui-Min Liou, F. Ko, Y. Lai
This research describes the p-type nanostalactites (p-type NS) with high photothermal conversion capability has been demonstrated by rapid INC process without extra heat treatment. In optical property, p-type NS has ultralow reflectance below 5 % and high light absorption due to rough structures in the broadband wavelength (350 nm-1100 nm). It looks like a black body. Silicon, an indirect band material, can release thermal energy during the recombination process of photo-generated electron-hole pairs. P-type NS converts photon energy into heat rapidly and then photothermal effect occurs. Then, the temperature change of p-type NS is faster in 10 second than bulk p-type silicon. These nanostructures can not only enhance thermal conversion efficiency but be regarded as a great heat absorber.
本研究描述了p型纳米钟乳石(p-type NS)在没有额外热处理的情况下,通过快速INC法得到了具有高光热转换能力的纳米钟乳石。在光学性能上,p型NS具有5%以下的超低反射率,并且由于其在宽带波长(350 nm-1100 nm)内结构粗糙,具有较高的光吸收率。它看起来像一个黑体。硅是一种间接能带材料,在光生电子-空穴对复合过程中释放热能。p型NS将光子能量迅速转化为热能,产生光热效应。然后,p型NS在10秒内的温度变化比体型p型硅快。这些纳米结构不仅可以提高热转换效率,而且被认为是一种很好的吸热材料。
{"title":"High photothermal properties in silicon nanostructures","authors":"Ting-Ting Ren, M. Wei, Chin-Chiang Hsiao, Bo-Yi Chen, Mei-Yi Li, Jui-Min Liou, F. Ko, Y. Lai","doi":"10.1109/AM-FPD.2016.7543672","DOIUrl":"https://doi.org/10.1109/AM-FPD.2016.7543672","url":null,"abstract":"This research describes the p-type nanostalactites (p-type NS) with high photothermal conversion capability has been demonstrated by rapid INC process without extra heat treatment. In optical property, p-type NS has ultralow reflectance below 5 % and high light absorption due to rough structures in the broadband wavelength (350 nm-1100 nm). It looks like a black body. Silicon, an indirect band material, can release thermal energy during the recombination process of photo-generated electron-hole pairs. P-type NS converts photon energy into heat rapidly and then photothermal effect occurs. Then, the temperature change of p-type NS is faster in 10 second than bulk p-type silicon. These nanostructures can not only enhance thermal conversion efficiency but be regarded as a great heat absorber.","PeriodicalId":422453,"journal":{"name":"2016 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115401345","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Doping profile control of epitaxial-like Si emitting layer for the application of c-Si solar cells c-Si太阳能电池外延类硅发射层的掺杂轮廓控制
Chien-Chieh Lee, Y. Hsieh, Tomi T. T. Li, Jenq-Yang Chang
The formation of p-n junctions is a crucial step in the fabrication of photovoltaic devices. Standard processes such as high temperature (> 800 °C) diffusion cannot provide the shallow doped layers, with abrupt interfaces. In this study, the epitaxial-like boron-doped silicon (epi-Si) thin films as emitters of c-Si solar cells with structure of ITO/epi-Si(p+)/c-Si(n) are investigated under the modulation of deposited parameters, such as gas ratio, and working pressure. Applying the epi-Si:H (p+) shallow junction with abrupt interface leads to improve the short curent density (Jsc) of the planar c-Si solar cell is higher than 36 mA/cm2, and efficiency reaches above 15%.
p-n结的形成是光电器件制造的关键步骤。高温(> 800℃)扩散等标准工艺不能提供具有突变界面的浅掺杂层。本文研究了ITO/epi-Si(p+)/c-Si(n)结构的外延样掺硼硅(epi-Si)薄膜作为c-Si太阳能电池的发射体,研究了沉积参数(如气体比和工作压力)的调制。采用具有突变界面的epi-Si:H (p+)浅结可以提高平面c-Si太阳电池的短电流密度(Jsc),达到36 mA/cm2以上,效率达到15%以上。
{"title":"Doping profile control of epitaxial-like Si emitting layer for the application of c-Si solar cells","authors":"Chien-Chieh Lee, Y. Hsieh, Tomi T. T. Li, Jenq-Yang Chang","doi":"10.1109/AM-FPD.2016.7543674","DOIUrl":"https://doi.org/10.1109/AM-FPD.2016.7543674","url":null,"abstract":"The formation of p-n junctions is a crucial step in the fabrication of photovoltaic devices. Standard processes such as high temperature (> 800 °C) diffusion cannot provide the shallow doped layers, with abrupt interfaces. In this study, the epitaxial-like boron-doped silicon (epi-Si) thin films as emitters of c-Si solar cells with structure of ITO/epi-Si(p+)/c-Si(n) are investigated under the modulation of deposited parameters, such as gas ratio, and working pressure. Applying the epi-Si:H (p+) shallow junction with abrupt interface leads to improve the short curent density (Jsc) of the planar c-Si solar cell is higher than 36 mA/cm2, and efficiency reaches above 15%.","PeriodicalId":422453,"journal":{"name":"2016 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123310503","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Estimation of threshold voltage shift in a-IGZO TFTs under different bias temperature stress by improved stretched-exponential equation 用改进的拉伸指数方程估计不同偏置温度应力下a-IGZO TFTs的阈值电压位移
Xin Ju, Xiang Xiao, Yuxiang Xiao, Shengdong Zhang
In this work, we study threshold voltage (Vth) shift degradation in amorphous IGZO (a-IGZO) TFTs. The TFTs employ the bottom-gate staggered structure with an etch stopped layer. An improvement is presented to well known stretched-exponential equation for the Vth shift, and a systematic extraction method is provided. The Vth shift in a-IGZO TFTs is estimated quantitatively under different gate bias stress and temperature. Good agreements are obtained between calculated results and measured data.
在这项工作中,我们研究了非晶IGZO (a-IGZO) tft的阈值电压(Vth)移位退化。tft采用底栅交错结构,并具有腐蚀停止层。对已知的第v次位移拉伸指数方程进行了改进,并给出了一种系统的提取方法。在不同的栅极偏置应力和温度下,定量地估计了a-IGZO TFTs的Vth位移。计算结果与实测数据吻合较好。
{"title":"Estimation of threshold voltage shift in a-IGZO TFTs under different bias temperature stress by improved stretched-exponential equation","authors":"Xin Ju, Xiang Xiao, Yuxiang Xiao, Shengdong Zhang","doi":"10.1109/AM-FPD.2016.7543647","DOIUrl":"https://doi.org/10.1109/AM-FPD.2016.7543647","url":null,"abstract":"In this work, we study threshold voltage (Vth) shift degradation in amorphous IGZO (a-IGZO) TFTs. The TFTs employ the bottom-gate staggered structure with an etch stopped layer. An improvement is presented to well known stretched-exponential equation for the Vth shift, and a systematic extraction method is provided. The Vth shift in a-IGZO TFTs is estimated quantitatively under different gate bias stress and temperature. Good agreements are obtained between calculated results and measured data.","PeriodicalId":422453,"journal":{"name":"2016 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130061031","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Blue-phase pixel circuit design to enlarge operation voltage and combine polarity inversion with a-IGZO thin-film-transistors 蓝相像素电路设计,放大工作电压,结合极性反转与a-IGZO薄膜晶体管
Chia-En Wu, Chih-Lung Lin, Ming-Xun Wang
This work develops a pixel circuit for in-plane switching blue-phase liquid crystal displays (IPS BPLCDs) integrated with amorphous indium-gallium-zinc-oxide thin-film-transistors (a-IGZO TFTs). The proposed circuit enlarges the range of operation voltage of BPLC by selecting different bias voltage signals to achieve maximum transmittance of BPLCs. Polarity inversion is also combined with the source follower structure. Simulation results show that the proposed circuit increases the operation voltage to -50 V to 50 V and the error voltages over the entire range of operation voltage are all below 1.2 V demonstrating the feasibility and the reliability of the proposed circuit for practical BPLCD applications.
本研究开发了一种集成非晶铟镓锌氧化物薄膜晶体管(a- igzo TFTs)的平面内开关蓝相液晶显示器(IPS bplcd)像素电路。该电路通过选择不同的偏置电压信号,扩大了BPLC的工作电压范围,使BPLC的透光率达到最大。极性反转还与源从动件结构相结合。仿真结果表明,该电路将工作电压从-50 V提高到50 V,整个工作电压范围内的误差电压均在1.2 V以下,证明了该电路在实际BPLCD应用中的可行性和可靠性。
{"title":"Blue-phase pixel circuit design to enlarge operation voltage and combine polarity inversion with a-IGZO thin-film-transistors","authors":"Chia-En Wu, Chih-Lung Lin, Ming-Xun Wang","doi":"10.1109/AM-FPD.2016.7543687","DOIUrl":"https://doi.org/10.1109/AM-FPD.2016.7543687","url":null,"abstract":"This work develops a pixel circuit for in-plane switching blue-phase liquid crystal displays (IPS BPLCDs) integrated with amorphous indium-gallium-zinc-oxide thin-film-transistors (a-IGZO TFTs). The proposed circuit enlarges the range of operation voltage of BPLC by selecting different bias voltage signals to achieve maximum transmittance of BPLCs. Polarity inversion is also combined with the source follower structure. Simulation results show that the proposed circuit increases the operation voltage to -50 V to 50 V and the error voltages over the entire range of operation voltage are all below 1.2 V demonstrating the feasibility and the reliability of the proposed circuit for practical BPLCD applications.","PeriodicalId":422453,"journal":{"name":"2016 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)","volume":"100 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127571083","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Local photovoltaic characterization of Si thin film solar cells 硅薄膜太阳能电池的局部光伏特性
T. Itoh
New technique to measure local photovoltaic properties of Si based thin film solar cells has been developed using scanning probe microscopy technique. Local photovoltaic properties of hydrogenated amorphous silicon (a-Si:H) thin film solar cell was demonstrated using this technique. Short-circuit current obtained from local current-voltage (I-V) characteristics with light irradiation increased with increasing the irradiation light power. The value of the open-circuit voltage obtained from local I-V characteristics with light irradiation was almost the same as that obtained from macroscopic one. In the a-Si:H thin film solar cell used in this work, the local photovoltaic properties was not uniform in the scanning area.
利用扫描探针显微技术研究了硅基薄膜太阳能电池的局部光伏特性。利用该技术证明了氢化非晶硅(a-Si:H)薄膜太阳能电池的局部光伏特性。随着辐照光功率的增大,局部电流-电压(I-V)特性得到的短路电流增大。由光照射下的局部I-V特性得到的开路电压值与由宏观特性得到的开路电压值几乎相同。在本研究使用的a-Si:H薄膜太阳能电池中,局部光伏性质在扫描区域内并不均匀。
{"title":"Local photovoltaic characterization of Si thin film solar cells","authors":"T. Itoh","doi":"10.1109/AM-FPD.2016.7543605","DOIUrl":"https://doi.org/10.1109/AM-FPD.2016.7543605","url":null,"abstract":"New technique to measure local photovoltaic properties of Si based thin film solar cells has been developed using scanning probe microscopy technique. Local photovoltaic properties of hydrogenated amorphous silicon (a-Si:H) thin film solar cell was demonstrated using this technique. Short-circuit current obtained from local current-voltage (I-V) characteristics with light irradiation increased with increasing the irradiation light power. The value of the open-circuit voltage obtained from local I-V characteristics with light irradiation was almost the same as that obtained from macroscopic one. In the a-Si:H thin film solar cell used in this work, the local photovoltaic properties was not uniform in the scanning area.","PeriodicalId":422453,"journal":{"name":"2016 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130249697","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Comparison of N2 and ar plasma treatment for source/drain formation in self-aligned top-gate amorphous InGaZnO thin film transistor 自对准顶栅非晶InGaZnO薄膜晶体管源极/漏极形成过程中N2和ar等离子体处理的比较
Hongjuan Lu, Chongyang Ren, Xiang Xiao, Yuxiang Xiao, Cuicui Wang, Shengdong Zhang
We propose a self-aligned top-gate amorphous InGaZnO thin film transistor (a-IGZO TFT) with source/drain treated by N2 plasma. By comparing the performances of the self-aligned top-gate a-IGZO TFTs with N2 and Ar plasma treatment, it is found that N2 plasma treatment can effectively decrease the resistivity of the a-IGZO. The TFTs with N2 plasma treated source/drain have the comparable electrical performance and superior stress stability compared to the Ar plasma treated one. The fabricated self-aligned top-gate a-IGZO TFT with N2 plasma treatment exhibits field-effect mobility of 5.1cm2/V·s, threshold voltage of -0.33 V, a subthreshold swing of 0.26V/dec, and a shift of Vth of -0.65 V and 0.52 V under PBS and NBS with gate-bias stress voltage of+30V respectively.
我们提出了一种自对准顶栅非晶InGaZnO薄膜晶体管(a- igzo TFT),其源极/漏极经N2等离子体处理。通过对比自对准顶栅a-IGZO TFTs与N2和Ar等离子体处理的性能,发现N2等离子体处理能有效降低a-IGZO的电阻率。与Ar等离子体处理的tft相比,N2等离子体处理的tft具有相当的电学性能和优越的应力稳定性。经N2等离子体处理制备的自校准顶栅a- igzo TFT在PBS和NBS(栅偏置应力电压为+30V)作用下的场效应迁移率为5.1cm2/V·s,阈值电压为-0.33 V,亚阈值摆幅为0.26V/dec, Vth位移为-0.65 V和0.52 V。
{"title":"Comparison of N2 and ar plasma treatment for source/drain formation in self-aligned top-gate amorphous InGaZnO thin film transistor","authors":"Hongjuan Lu, Chongyang Ren, Xiang Xiao, Yuxiang Xiao, Cuicui Wang, Shengdong Zhang","doi":"10.1109/AM-FPD.2016.7543642","DOIUrl":"https://doi.org/10.1109/AM-FPD.2016.7543642","url":null,"abstract":"We propose a self-aligned top-gate amorphous InGaZnO thin film transistor (a-IGZO TFT) with source/drain treated by N2 plasma. By comparing the performances of the self-aligned top-gate a-IGZO TFTs with N2 and Ar plasma treatment, it is found that N2 plasma treatment can effectively decrease the resistivity of the a-IGZO. The TFTs with N2 plasma treated source/drain have the comparable electrical performance and superior stress stability compared to the Ar plasma treated one. The fabricated self-aligned top-gate a-IGZO TFT with N2 plasma treatment exhibits field-effect mobility of 5.1cm2/V·s, threshold voltage of -0.33 V, a subthreshold swing of 0.26V/dec, and a shift of Vth of -0.65 V and 0.52 V under PBS and NBS with gate-bias stress voltage of+30V respectively.","PeriodicalId":422453,"journal":{"name":"2016 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)","volume":"95 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124563585","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
All-solid-state electrochromic device integrated with near-IR blocking layer for image sensor and energy-saving glass application 集成近红外阻挡层的全固态电致变色器件,用于图像传感器和节能玻璃
Min-Chuan Wang, Y. Chen, Ming-Hao Hsieh, W. Tsai, D. Jan
The all-solid-state electrochromic device (ECD) integrated with near-IR (NIR) blocking layer has been developed for image sensor and energy-saving glass application. The all-solid-state ECD integrated with NIR blocking layer could potentially control the transmittance from 70.5% to 17.5% at 550nm in the visible region and from 39% to 9% at the NIR wavelength larger than 1100nm. The NIR blocking all-solid-state ECD with the one substrate structure of NiO/Ta2O5/WO3/ ITO on NIR blocking transparent conductive oxide (TCO) coated glass was prepared at room temperature by reactive DC magnetron sputtering technique. With the application of ECDs, it is possible to directly apply the device onto an image sensor and energy-saving glass with the NIR rejection function even in the bleached state. Furthermore, the low resistance NIR blocking TCO also provided the lower power consumption in the switching cycle at voltages as low as 5 V, make ECDs the ideal components for battery powered applications.
开发了一种集成近红外阻挡层的全固态电致变色器件(ECD),用于图像传感器和节能玻璃。集成近红外阻挡层的全固态ECD有可能将可见光区的透射率从550nm控制在70.5%到17.5%之间,将近红外波长大于1100nm的透射率控制在39%到9%之间。采用反应直流磁控溅射技术,在室温下制备了具有NiO/Ta2O5/WO3/ ITO单一衬底结构的近红外屏蔽透明导电氧化物(TCO)镀膜玻璃上的全固态ECD。通过ECDs的应用,即使在漂白状态下,也可以将该器件直接应用于具有近红外抑制功能的图像传感器和节能玻璃上。此外,低电阻近红外阻断TCO还在低至5 V的电压下提供了更低的开关周期功耗,使ECDs成为电池供电应用的理想组件。
{"title":"All-solid-state electrochromic device integrated with near-IR blocking layer for image sensor and energy-saving glass application","authors":"Min-Chuan Wang, Y. Chen, Ming-Hao Hsieh, W. Tsai, D. Jan","doi":"10.1063/1.4962842","DOIUrl":"https://doi.org/10.1063/1.4962842","url":null,"abstract":"The all-solid-state electrochromic device (ECD) integrated with near-IR (NIR) blocking layer has been developed for image sensor and energy-saving glass application. The all-solid-state ECD integrated with NIR blocking layer could potentially control the transmittance from 70.5% to 17.5% at 550nm in the visible region and from 39% to 9% at the NIR wavelength larger than 1100nm. The NIR blocking all-solid-state ECD with the one substrate structure of NiO/Ta2O5/WO3/ ITO on NIR blocking transparent conductive oxide (TCO) coated glass was prepared at room temperature by reactive DC magnetron sputtering technique. With the application of ECDs, it is possible to directly apply the device onto an image sensor and energy-saving glass with the NIR rejection function even in the bleached state. Furthermore, the low resistance NIR blocking TCO also provided the lower power consumption in the switching cycle at voltages as low as 5 V, make ECDs the ideal components for battery powered applications.","PeriodicalId":422453,"journal":{"name":"2016 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)","volume":"12 42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-07-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131383240","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 15
期刊
2016 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)
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