Pub Date : 2026-06-01Epub Date: 2026-01-19DOI: 10.1016/j.optlaseng.2026.109626
Rifan Chen , Zongxuan Li , Shuping Tao , Qing Luo , Youhan Peng , Shuhui Ren , Zhiyuan Gu
To quantitatively evaluate the temporal variations of on-orbit imaging quality of space telescopes under dynamic disturbances, this study first establishes the structural dynamics state-space model of the telescope and validates its accuracy through comparative analysis with traditional finite element methods. The results demonstrate that the mean relative errors are 0.96 % for frequency response analysis and 1.22 % for transient response analysis. Subsequently, the instantaneous rigid-body displacements of the mirror surfaces are fitted based on the transient response results, with the mean relative error between the fitting results and those from the Sigfit being <2 %, thereby validating the accuracy of the dynamic response solving and rigid-body displacement fitting. Then, the offset of the image point is used to describe the dynamic LOS error of the optical system. Based on the opto-mechanical coupled ray-tracing theory, real-time reconstruction of the opto-mechanical system and ray-tracing analysis are performed, revealing that the maximum relative displacement of image points during imaging is 0.53 μm (<1/6 of the pixel). Quantitative assessment reveals that the mean relative errors for image point offsets in the X and Y directions compared with Zemax simulation are 2.53 % and 3.14 %, respectively. Furthermore, the edge method was used to calculate the MTF of the imaging system under the sole influence of micro-vibrations, which was 0.9833@143 lp/mm. This indicates that the actual impact of micro-vibrations on the overall imaging quality of the system is small. The developed framework enables accurate micro-vibration simulation and provides theoretical guidance for the optimization of vibration isolation of space telescopes.
{"title":"Dynamic opto-mechanical integrated modeling and simulation of high-resolution space telescopes","authors":"Rifan Chen , Zongxuan Li , Shuping Tao , Qing Luo , Youhan Peng , Shuhui Ren , Zhiyuan Gu","doi":"10.1016/j.optlaseng.2026.109626","DOIUrl":"10.1016/j.optlaseng.2026.109626","url":null,"abstract":"<div><div>To quantitatively evaluate the temporal variations of on-orbit imaging quality of space telescopes under dynamic disturbances, this study first establishes the structural dynamics state-space model of the telescope and validates its accuracy through comparative analysis with traditional finite element methods. The results demonstrate that the mean relative errors are 0.96 % for frequency response analysis and 1.22 % for transient response analysis. Subsequently, the instantaneous rigid-body displacements of the mirror surfaces are fitted based on the transient response results, with the mean relative error between the fitting results and those from the Sigfit being <2 %, thereby validating the accuracy of the dynamic response solving and rigid-body displacement fitting. Then, the offset of the image point is used to describe the dynamic LOS error of the optical system. Based on the opto-mechanical coupled ray-tracing theory, real-time reconstruction of the opto-mechanical system and ray-tracing analysis are performed, revealing that the maximum relative displacement of image points during imaging is 0.53 μm (<1/6 of the pixel). Quantitative assessment reveals that the mean relative errors for image point offsets in the X and Y directions compared with Zemax simulation are 2.53 % and 3.14 %, respectively. Furthermore, the edge method was used to calculate the MTF of the imaging system under the sole influence of micro-vibrations, which was 0.9833@143 lp/mm. This indicates that the actual impact of micro-vibrations on the overall imaging quality of the system is small. The developed framework enables accurate micro-vibration simulation and provides theoretical guidance for the optimization of vibration isolation of space telescopes.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"201 ","pages":"Article 109626"},"PeriodicalIF":3.7,"publicationDate":"2026-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146039561","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2026-05-01Epub Date: 2026-01-06DOI: 10.1016/j.optlaseng.2025.109582
E.Z. Omar
This work presents a novel and enhanced reconstruction method for three-dimensional phase computed tomography specifically designed to reconstruct complex volumetric phase distributions in specimens with severe geometric discontinuities, such as necked regions and surface crazing. Conventional filtered back projection (FBP) algorithms exhibit fundamental limitations, including severe streak artifacts, geometric distortions, and inadequate sampling, when applied to such non-ideal geometries. To overcome these challenges, the proposed methodology uses continuous wavelet transforms to extract phase data from polarizing microscopy. It then employs topology-aware sinogram construction with weighted multi-slice interpolation. Advanced reconstruction algorithms incorporate multi-dimensional regularization through inter-slice continuity constraints and three-dimensional morphological adaptation using geometry-specific Gaussian kernels. Artifacts are suppressed through automated boundary detection and craze identification algorithms. The methodology is experimentally validated using a Pluta polarizing interference microscope and a high-precision rotational stage to acquire interferometric data from isotactic polypropylene (iPP) and polypropylene (PP) fibers encompassing undrawn, necked, and crazed morphologies. Quantitative analysis demonstrates a significant performance improvement over traditional FBP, with error reductions of 20% for regular fibers, 49% for necked fibers, and 53% for crazed fibers, all measured relative to ground truth distributions. The reconstructed 3D phase maps are quantitatively converted to birefringence distributions, revealing distinct microstructural changes induced by drawing, necking, and crazing. This framework provides precise 3D analysis for better quality control of advanced materials.
{"title":"Enhanced three-dimensional phase computed tomography with morphological adaptation for complex polymer fiber characterization","authors":"E.Z. Omar","doi":"10.1016/j.optlaseng.2025.109582","DOIUrl":"10.1016/j.optlaseng.2025.109582","url":null,"abstract":"<div><div>This work presents a novel and enhanced reconstruction method for three-dimensional phase computed tomography specifically designed to reconstruct complex volumetric phase distributions in specimens with severe geometric discontinuities, such as necked regions and surface crazing. Conventional filtered back projection (FBP) algorithms exhibit fundamental limitations, including severe streak artifacts, geometric distortions, and inadequate sampling, when applied to such non-ideal geometries. To overcome these challenges, the proposed methodology uses continuous wavelet transforms to extract phase data from polarizing microscopy. It then employs topology-aware sinogram construction with weighted multi-slice interpolation. Advanced reconstruction algorithms incorporate multi-dimensional regularization through inter-slice continuity constraints and three-dimensional morphological adaptation using geometry-specific Gaussian kernels. Artifacts are suppressed through automated boundary detection and craze identification algorithms. The methodology is experimentally validated using a Pluta polarizing interference microscope and a high-precision rotational stage to acquire interferometric data from isotactic polypropylene (iPP) and polypropylene (PP) fibers encompassing undrawn, necked, and crazed morphologies. Quantitative analysis demonstrates a significant performance improvement over traditional FBP, with error reductions of 20% for regular fibers, 49% for necked fibers, and 53% for crazed fibers, all measured relative to ground truth distributions. The reconstructed 3D phase maps are quantitatively converted to birefringence distributions, revealing distinct microstructural changes induced by drawing, necking, and crazing. This framework provides precise 3D analysis for better quality control of advanced materials.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"200 ","pages":"Article 109582"},"PeriodicalIF":3.7,"publicationDate":"2026-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145928028","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2026-05-01Epub Date: 2026-01-10DOI: 10.1016/j.optlaseng.2025.109590
Pengxiang Ji, Tian He, Haihang Zhao, Jing Zou
X-ray computed laminography (CL) has emerged as a highly effective technique for non-destructive testing of plate-like samples. However, it is challenging to strike an optimal balance between image quality and computation speed due to the intractable superimposed artifacts. In this paper, a novel strategy based on Fourier information completeness is developed for high-speed de-artifacting reconstruction of CL. We first demonstrate that the Fourier defective volume of CL is delineated by multiple ellipses that share a common focus. Guided by this geometric insight, a resampling algorithm is designed to maximally restore the Fourier information of cone-beam CL projections. The restored data is then incorporated into an efficient dual-domain framework, and complemented by L0 norm regularization in image domain. Numerical experiments demonstrate that the proposed method has achieved not only comparable image quality to that of conventional SART-based algorithm, but also an efficiency level approximately 32 times higher. The proposed elliptical model and resampling algorithm provide a new interpretation of cone-beam CL data, and hold great promise for real-time reconstruction in industrial applications.
{"title":"Efficient dual-domain iterative algorithm for computed laminography","authors":"Pengxiang Ji, Tian He, Haihang Zhao, Jing Zou","doi":"10.1016/j.optlaseng.2025.109590","DOIUrl":"10.1016/j.optlaseng.2025.109590","url":null,"abstract":"<div><div>X-ray computed laminography (CL) has emerged as a highly effective technique for non-destructive testing of plate-like samples. However, it is challenging to strike an optimal balance between image quality and computation speed due to the intractable superimposed artifacts. In this paper, a novel strategy based on Fourier information completeness is developed for high-speed de-artifacting reconstruction of CL. We first demonstrate that the Fourier defective volume of CL is delineated by multiple ellipses that share a common focus. Guided by this geometric insight, a resampling algorithm is designed to maximally restore the Fourier information of cone-beam CL projections. The restored data is then incorporated into an efficient dual-domain framework, and complemented by L<sub>0</sub> norm regularization in image domain. Numerical experiments demonstrate that the proposed method has achieved not only comparable image quality to that of conventional SART-based algorithm, but also an efficiency level approximately 32 times higher. The proposed elliptical model and resampling algorithm provide a new interpretation of cone-beam CL data, and hold great promise for real-time reconstruction in industrial applications.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"200 ","pages":"Article 109590"},"PeriodicalIF":3.7,"publicationDate":"2026-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145928042","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2026-05-01Epub Date: 2026-01-08DOI: 10.1016/j.optlaseng.2026.109603
Junyu Chai , Siye Zhao , Kun Zhang , Ang Li , Chengzhi Wu
With the rapid advancement of fiber laser technology, challenges including modal competition, intermodal coupling, and differential mode group delay (DMGD) in multimode and few-mode fibers (FMFs) have become prominent, especially under high-power operation and in mode-division multiplexing systems. Additionally, generating higher-order modes (HOMs) for specialized applications (e.g., structured light fields) poses technical obstacles. To address these issues, mode analysis methodologies have been developed to characterize fiber lasers and guide system improvements. This work presents a comprehensive review of mode decomposition (MD) for fiber laser systems, encompassing relevant investigations conducted globally over the past decade. It includes an elaboration of the theoretical foundations of MD, an overview of various MD techniques, and a discussion of their key applications and future developments.
{"title":"Spatial mode decomposition for fiber lasers","authors":"Junyu Chai , Siye Zhao , Kun Zhang , Ang Li , Chengzhi Wu","doi":"10.1016/j.optlaseng.2026.109603","DOIUrl":"10.1016/j.optlaseng.2026.109603","url":null,"abstract":"<div><div>With the rapid advancement of fiber laser technology, challenges including modal competition, intermodal coupling, and differential mode group delay (DMGD) in multimode and few-mode fibers (FMFs) have become prominent, especially under high-power operation and in mode-division multiplexing systems. Additionally, generating higher-order modes (HOMs) for specialized applications (e.g., structured light fields) poses technical obstacles. To address these issues, mode analysis methodologies have been developed to characterize fiber lasers and guide system improvements. This work presents a comprehensive review of mode decomposition (MD) for fiber laser systems, encompassing relevant investigations conducted globally over the past decade. It includes an elaboration of the theoretical foundations of MD, an overview of various MD techniques, and a discussion of their key applications and future developments.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"200 ","pages":"Article 109603"},"PeriodicalIF":3.7,"publicationDate":"2026-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145928043","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2026-05-01Epub Date: 2026-01-02DOI: 10.1016/j.optlaseng.2025.109600
Xinyu Liu, Liangcai Cao
The coded aperture snapshot spectral imager (CASSI) acquires compressive measurements of spectral images in a single exposure, which are then reconstructed into full data cubes using compressive sensing algorithms. However, the reconstruction quality is limited by the severely underdetermined mechanism in the compressive measurements. In this work, a dual-camera CASSI configuration using a reflective mask is proposed, enabling simultaneous capture of a grayscale image alongside the encoded spectral measurement. Unlike available dual-camera CASSI, our arrangement ensures pixel-level alignment and effective data fusion between the two arms. A multi-scale fusion network (MSF-Net) is developed to integrate the high-spectral-resolution CASSI measurement and the high-spatial-resolution grayscale image. The proposed reflective dual-camera CASSI (RDC-CASSI) with the MSF-Net offers efficient acquisition and reconstruction of spectral image cubes with high-spatial and high-spectral resolution. The peak signal-to-noise ratio and structural similarity index measure of the RDC-CASSI are 6.96% and 1.16% higher than those of the dual-disperser CASSI, respectively. The reconstructed spectrum of the standard color chart closely matches the ground truth from a commercial spectroradiometer, with an average mean squared error of 0.007. The improvements demonstrate a practical and scalable solution for real-time, high-quality spectral imaging.
{"title":"A dual-camera coded aperture snapshot spectral imager using a reflective mask","authors":"Xinyu Liu, Liangcai Cao","doi":"10.1016/j.optlaseng.2025.109600","DOIUrl":"10.1016/j.optlaseng.2025.109600","url":null,"abstract":"<div><div>The coded aperture snapshot spectral imager (CASSI) acquires compressive measurements of spectral images in a single exposure, which are then reconstructed into full data cubes using compressive sensing algorithms. However, the reconstruction quality is limited by the severely underdetermined mechanism in the compressive measurements. In this work, a dual-camera CASSI configuration using a reflective mask is proposed, enabling simultaneous capture of a grayscale image alongside the encoded spectral measurement. Unlike available dual-camera CASSI, our arrangement ensures pixel-level alignment and effective data fusion between the two arms. A multi-scale fusion network (MSF-Net) is developed to integrate the high-spectral-resolution CASSI measurement and the high-spatial-resolution grayscale image. The proposed reflective dual-camera CASSI (RDC-CASSI) with the MSF-Net offers efficient acquisition and reconstruction of spectral image cubes with high-spatial and high-spectral resolution. The peak signal-to-noise ratio and structural similarity index measure of the RDC-CASSI are 6.96% and 1.16% higher than those of the dual-disperser CASSI, respectively. The reconstructed spectrum of the standard color chart closely matches the ground truth from a commercial spectroradiometer, with an average mean squared error of 0.007. The improvements demonstrate a practical and scalable solution for real-time, high-quality spectral imaging.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"200 ","pages":"Article 109600"},"PeriodicalIF":3.7,"publicationDate":"2026-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145886039","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2026-05-01Epub Date: 2026-01-06DOI: 10.1016/j.optlaseng.2025.109587
Badrinath Balasubramaniam , Vignesh Suresh , Yang Cheng , Jiaqiong Li , Beiwen Li
Fringe projection profilometry (FPP), while capable of sub-millimeter accuracy at kilohertz speeds, produces sparse and incomplete depth maps when scanning objects with complex, heterogeneous material properties including specular metallic surfaces, mirror-like reflective regions, and absorptive materials. This is due to measurement failures predominantly in mirror-like reflective regions and underexposed areas where fringe patterns are unreliable or absent. Hard disk drives represent a particularly challenging test case for these limitations, exhibiting all of these problematic surface characteristics within a single assembly. Accurate 3D sensing of such components is critical for automated robotic disassembly in e-waste recycling, where valuable materials such as palladium, aluminum, and the rare earth metal neodymium remain largely unrecovered due to lack of recycling infrastructure. Recent zero-shot depth estimation models, while inaccurate for fine-scale, millimeter-level depth prediction, capture useful geometric priors. In this research, we present a multi-modal fusion approach that combines three data sources: sparse depth map computed from FPP, projector-illuminated grayscale image, and the relative depth map from the Depth Anything v2 Foundation Model. Our lightweight fusion network exploits the lower domain gap in geometric features compared to appearance features, enabling effective learning and sim-to-real transfer with limited synthetic and real-world training data. The network learns to predict dense depth in regions where FPP fails, which is then fused with the original sparse measurements to produce complete depth maps. We demonstrate that this approach achieves a mean absolute error and root mean square error of less than 2 mm on both synthetic and real-world test cases, and critically, achieves good reconstruction fidelity in the sparse regions, paving the way for fine-scale robotic disassembly while avoiding the need for extensive surface treatment or large-scale real-world data collection. Furthermore, our approach addresses the primary limitations of FPP on mirror-like reflective surfaces and underexposed regions within a single scan, and demonstrates a potential roadmap for industrial metrology of parts with similarly challenging optical properties.
The code for our multi-modal depth completion network, MMDC-Net, will be publicly available at https://github.com/badri999/MMDC-Net
{"title":"Application-driven multi-modal depth completion in fringe projection profilometry","authors":"Badrinath Balasubramaniam , Vignesh Suresh , Yang Cheng , Jiaqiong Li , Beiwen Li","doi":"10.1016/j.optlaseng.2025.109587","DOIUrl":"10.1016/j.optlaseng.2025.109587","url":null,"abstract":"<div><div>Fringe projection profilometry (FPP), while capable of sub-millimeter accuracy at kilohertz speeds, produces sparse and incomplete depth maps when scanning objects with complex, heterogeneous material properties including specular metallic surfaces, mirror-like reflective regions, and absorptive materials. This is due to measurement failures predominantly in mirror-like reflective regions and underexposed areas where fringe patterns are unreliable or absent. Hard disk drives represent a particularly challenging test case for these limitations, exhibiting all of these problematic surface characteristics within a single assembly. Accurate 3D sensing of such components is critical for automated robotic disassembly in e-waste recycling, where valuable materials such as palladium, aluminum, and the rare earth metal neodymium remain largely unrecovered due to lack of recycling infrastructure. Recent zero-shot depth estimation models, while inaccurate for fine-scale, millimeter-level depth prediction, capture useful geometric priors. In this research, we present a multi-modal fusion approach that combines three data sources: sparse depth map computed from FPP, projector-illuminated grayscale image, and the relative depth map from the Depth Anything v2 Foundation Model. Our lightweight fusion network exploits the lower domain gap in geometric features compared to appearance features, enabling effective learning and sim-to-real transfer with limited synthetic and real-world training data. The network learns to predict dense depth in regions where FPP fails, which is then fused with the original sparse measurements to produce complete depth maps. We demonstrate that this approach achieves a mean absolute error and root mean square error of less than 2 mm on both synthetic and real-world test cases, and critically, achieves good reconstruction fidelity in the sparse regions, paving the way for fine-scale robotic disassembly while avoiding the need for extensive surface treatment or large-scale real-world data collection. Furthermore, our approach addresses the primary limitations of FPP on mirror-like reflective surfaces and underexposed regions within a single scan, and demonstrates a potential roadmap for industrial metrology of parts with similarly challenging optical properties.</div><div>The code for our multi-modal depth completion network, MMDC-Net, will be publicly available at <span><span>https://github.com/badri999/MMDC-Net</span><svg><path></path></svg></span></div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"200 ","pages":"Article 109587"},"PeriodicalIF":3.7,"publicationDate":"2026-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145927888","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2026-05-01Epub Date: 2026-01-07DOI: 10.1016/j.optlaseng.2025.109599
Xiaohang Duan , Junyi Chen , Nan Wang , Yong Yang
Optical sectioning structured illumination microscopy (OS-SIM) faces limitations in background suppression under low signal-to-noise ratio (SNR) conditions, where out-of-focus noises and scattered light degrade sectioning abilities. To address this limitation, we introduce confocal-inspired optical sectioning structured illumination microscopy (COS-SIM), which integrates confocal-like spatial filtering into the OS-SIM framework to simultaneously process information in both spatial and frequency domains. It replaces conventional sinusoidal illumination with dynamically programmable digital masks generated by a spatial light modulator (SLM) and incorporates conjugate virtual digital masks at the detection plane. By controlling the duty cycle, COS-SIM enables parallelized virtual pinhole array detection for enhanced background rejection, while frequency-domain demodulation yields enhanced optical sectioning performance.This approach retains the high-speed, widefield detection advantage inherent to OS-SIM. Theoretically, COS-SIM maintains axial resolution equivalent to that of OS-SIM, but significantly improves optical sectioning quality through optimized duty-cycle control of the mask patterns, which reduces residual background noise. Experimentally, COS-SIM achieves a depth of field consistent with OS-SIM while yielding superior signal-to-background ratio (SBR) and signal-to-noise ratio (SNR). These results confirm that COS-SIM offers enhanced sectioning fidelity in the presence of strong background signals, extending the applicability of structured illumination microscopy to challenging scenarios such as integrated circuit inspection and metallographic sample detection.
{"title":"High-fidelity optical section with digital mask filter: a structured illumination microscopy enhanced by confocal strategy","authors":"Xiaohang Duan , Junyi Chen , Nan Wang , Yong Yang","doi":"10.1016/j.optlaseng.2025.109599","DOIUrl":"10.1016/j.optlaseng.2025.109599","url":null,"abstract":"<div><div>Optical sectioning structured illumination microscopy (OS-SIM) faces limitations in background suppression under low signal-to-noise ratio (SNR) conditions, where out-of-focus noises and scattered light degrade sectioning abilities. To address this limitation, we introduce confocal-inspired optical sectioning structured illumination microscopy (COS-SIM), which integrates confocal-like spatial filtering into the OS-SIM framework to simultaneously process information in both spatial and frequency domains. It replaces conventional sinusoidal illumination with dynamically programmable digital masks generated by a spatial light modulator (SLM) and incorporates conjugate virtual digital masks at the detection plane. By controlling the duty cycle, COS-SIM enables parallelized virtual pinhole array detection for enhanced background rejection, while frequency-domain demodulation yields enhanced optical sectioning performance.This approach retains the high-speed, widefield detection advantage inherent to OS-SIM. Theoretically, COS-SIM maintains axial resolution equivalent to that of OS-SIM, but significantly improves optical sectioning quality through optimized duty-cycle control of the mask patterns, which reduces residual background noise. Experimentally, COS-SIM achieves a depth of field consistent with OS-SIM while yielding superior signal-to-background ratio (SBR) and signal-to-noise ratio (SNR). These results confirm that COS-SIM offers enhanced sectioning fidelity in the presence of strong background signals, extending the applicability of structured illumination microscopy to challenging scenarios such as integrated circuit inspection and metallographic sample detection.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"200 ","pages":"Article 109599"},"PeriodicalIF":3.7,"publicationDate":"2026-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145928046","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2026-05-01Epub Date: 2026-01-13DOI: 10.1016/j.optlaseng.2026.109621
Hui Xu , Tao Wang , Ziqiang Zhao , Ruijun Ma , Xiaoqing Wen , Huaguo Liang
Optical Proximity Correction (OPC) is a core technology for compensating lithographic diffraction effects in advanced manufacturing processes. Although Inverse Lithography Technology (ILT) enables high-precision mask optimization, it faces challenges in balancing mask printability and optimization efficiency due to three key problems: (1) low-quality initial solutions, (2) high computational overhead, and (3) the inability of pure data-driven methods to accurately model Sub-Resolution Assist Features (SRAF). To address these problems, this paper proposes Hi-ILT, an end-to-end OPC framework that integrates lightweight deep learning and physical ILT correction. A lightweight Convolutional Neural Network (CNN) first generates a high-precision initial mask at low resolution, with a Binary-Straight-Through Estimator (BSTE) resolving binarization gradient vanishing to stabilize training and achieve fast convergence. Subsequently, a gradient descent based ILT correction layer performs fine-grained optimization of mask details (especially SRAF) at high resolution and models process variations. Experiments on 32 nm node M1 layouts (ICCAD 2013 benchmark) and 10 large-scale datasets demonstrate that Hi-ILT outperforms state-of-the-art methods. Compared to deep learning-based ILT methods, it reduces L2 error by up to 30.1%, Process Variation Band (PVB) by up to 19.8%, and Edge Placement Error (EPE) violations by up to 73.4%; compared to gradient descent-based ILT methods, it shortens end-to-end Turn Around Time (TAT) by up to 69.4% while maintaining higher precision. Hi-ILT effectively achieves a balance between high printability and efficient optimization, making it suitable for advanced lithography requirements.
{"title":"Hi-ILT: A hybrid End-to-End framework of lightweight hierarchical VAE and physics-Guided ILT for inverse lithography technology","authors":"Hui Xu , Tao Wang , Ziqiang Zhao , Ruijun Ma , Xiaoqing Wen , Huaguo Liang","doi":"10.1016/j.optlaseng.2026.109621","DOIUrl":"10.1016/j.optlaseng.2026.109621","url":null,"abstract":"<div><div>Optical Proximity Correction (OPC) is a core technology for compensating lithographic diffraction effects in advanced manufacturing processes. Although Inverse Lithography Technology (ILT) enables high-precision mask optimization, it faces challenges in balancing mask printability and optimization efficiency due to three key problems: (1) low-quality initial solutions, (2) high computational overhead, and (3) the inability of pure data-driven methods to accurately model Sub-Resolution Assist Features (SRAF). To address these problems, this paper proposes Hi-ILT, an end-to-end OPC framework that integrates lightweight deep learning and physical ILT correction. A lightweight Convolutional Neural Network (CNN) first generates a high-precision initial mask at low resolution, with a Binary-Straight-Through Estimator (BSTE) resolving binarization gradient vanishing to stabilize training and achieve fast convergence. Subsequently, a gradient descent based ILT correction layer performs fine-grained optimization of mask details (especially SRAF) at high resolution and models process variations. Experiments on 32 nm node M1 layouts (ICCAD 2013 benchmark) and 10 large-scale datasets demonstrate that Hi-ILT outperforms state-of-the-art methods. Compared to deep learning-based ILT methods, it reduces <em>L</em><sub>2</sub> error by up to 30.1%, Process Variation Band (PVB) by up to 19.8%, and Edge Placement Error (EPE) violations by up to 73.4%; compared to gradient descent-based ILT methods, it shortens end-to-end Turn Around Time (TAT) by up to 69.4% while maintaining higher precision. Hi-ILT effectively achieves a balance between high printability and efficient optimization, making it suitable for advanced lithography requirements.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"200 ","pages":"Article 109621"},"PeriodicalIF":3.7,"publicationDate":"2026-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145979643","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2026-05-01Epub Date: 2026-01-15DOI: 10.1016/j.optlaseng.2026.109601
Jinghao Xu , Yizheng Liao , Tianci Feng , Siyuan Wang , Duan Luo , An Pan
This paper proposes a novel Digital Incoherent Fourier Ptychography (DI-FP) technique that effectively addresses the speckle noise challenge in long-range Fourier ptychographic imaging through an innovative batch gradient summation mechanism. Compared with conventional methods, this study makes several key contributions: First, we develop a feature-domain batch gradient summation algorithm that exploits the randomness of multi-angle speckles to achieve automatic noise cancellation without requiring additional preprocessing. Second, we construct a new reconstruction framework integrating incoherent imaging with feature extraction, which significantly enhances image contrast while maintaining resolution. Experimental results demonstrate that for imaging at distances of 12.8m and 65m, our method improves reconstruction quality (PSNR) from 5.42dB (conventional method) to 13.98dB, substantially reduces speckle contrast, and decreases single reconstruction time from 150s to 44s. This work provides a new solution for long-range high-resolution optical imaging that combines excellent anti-noise performance with computational efficiency, showing significant application potential in remote sensing monitoring and target recognition fields.
{"title":"DI-FP: Digital incoherent Fourier ptychography for far-field imaging","authors":"Jinghao Xu , Yizheng Liao , Tianci Feng , Siyuan Wang , Duan Luo , An Pan","doi":"10.1016/j.optlaseng.2026.109601","DOIUrl":"10.1016/j.optlaseng.2026.109601","url":null,"abstract":"<div><div>This paper proposes a novel Digital Incoherent Fourier Ptychography (DI-FP) technique that effectively addresses the speckle noise challenge in long-range Fourier ptychographic imaging through an innovative batch gradient summation mechanism. Compared with conventional methods, this study makes several key contributions: First, we develop a feature-domain batch gradient summation algorithm that exploits the randomness of multi-angle speckles to achieve automatic noise cancellation without requiring additional preprocessing. Second, we construct a new reconstruction framework integrating incoherent imaging with feature extraction, which significantly enhances image contrast while maintaining resolution. Experimental results demonstrate that for imaging at distances of 12.8m and 65m, our method improves reconstruction quality (PSNR) from 5.42dB (conventional method) to 13.98dB, substantially reduces speckle contrast, and decreases single reconstruction time from 150s to 44s. This work provides a new solution for long-range high-resolution optical imaging that combines excellent anti-noise performance with computational efficiency, showing significant application potential in remote sensing monitoring and target recognition fields.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"200 ","pages":"Article 109601"},"PeriodicalIF":3.7,"publicationDate":"2026-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145979641","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2026-05-01Epub Date: 2026-01-10DOI: 10.1016/j.optlaseng.2026.109615
Feiyang Zhang , Guoxia Han , Yihan Tian , Yanbin Ma , Xianghua Yu , Xiaolong Liu
Metalens, as the most promising and applicable emerging optical device, has long been constrained by the limited field-of-view (FOV). Recent studies based on phase engineering or multi-layer strategies have made some progress indeed, but they all rely on upright meta-atoms. So, we can’t help considering, if tilted meta-atoms could represent a promising yet underexplored approach for enhancing the FOV? In this work, an interesting concept of gradient-tilted meta-atoms is provided and two wide field-of-view (WFOV) metalenses with different tilt configurations for different requirements of efficiency and precision are designed based on this approach, respectively. The results demonstrate that a 120° FOV and diffraction-limited focusing can be achieved with these two configurations—PDTM can attain relative high energy throughput via the optimization of the position-dependent tilted-meta-atoms while ADTM enhances the imaging precision with aperture-dependent tilted-meta-atoms. Exhilaratingly, the FOV of the proposed metalens can be further expanded by tuning the tilt angle configurations of meta-atoms and the metalens diameter. This work not only presents a new design framework for high-performance meta-optics but also opens avenues for compact imaging systems in VR, surveillance, and biomedical devices.
{"title":"Monolithic expandable-FOV metalens enabled by radially gradient-tilted meta-atoms","authors":"Feiyang Zhang , Guoxia Han , Yihan Tian , Yanbin Ma , Xianghua Yu , Xiaolong Liu","doi":"10.1016/j.optlaseng.2026.109615","DOIUrl":"10.1016/j.optlaseng.2026.109615","url":null,"abstract":"<div><div>Metalens, as the most promising and applicable emerging optical device, has long been constrained by the limited field-of-view (FOV). Recent studies based on phase engineering or multi-layer strategies have made some progress indeed, but they all rely on upright meta-atoms. So, we can’t help considering, if tilted meta-atoms could represent a promising yet underexplored approach for enhancing the FOV? In this work, an interesting concept of gradient-tilted meta-atoms is provided and two wide field-of-view (WFOV) metalenses with different tilt configurations for different requirements of efficiency and precision are designed based on this approach, respectively. The results demonstrate that a 120° FOV and diffraction-limited focusing can be achieved with these two configurations—PDTM can attain relative high energy throughput via the optimization of the position-dependent tilted-meta-atoms while ADTM enhances the imaging precision with aperture-dependent tilted-meta-atoms. Exhilaratingly, the FOV of the proposed metalens can be further expanded by tuning the tilt angle configurations of meta-atoms and the metalens diameter. This work not only presents a new design framework for high-performance meta-optics but also opens avenues for compact imaging systems in VR, surveillance, and biomedical devices.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"200 ","pages":"Article 109615"},"PeriodicalIF":3.7,"publicationDate":"2026-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145928039","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}