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Difficulties on the estimation of the thermal structure function from noisy thermal impedance transients 基于噪声热阻抗瞬态估计热结构函数的困难
Pub Date : 2006-04-24 DOI: 10.1109/ESIME.2006.1644029
M. Salleras, J. Palacín, G. Carles, S. Marco
The thermal structure function permits to have an insight in the thermal pathflow of electronic components. In this work the sensitivity to noise of this technique is analyzed. For this purpose, a homogeneous slab of material is considered, since for this case the exact time constant spectrum is known. Results show that the thermal structure function is very sensitive to noise in the thermal transient
热结构函数允许对电子元件的热路径流有一个深入的了解。本文分析了该技术对噪声的敏感性。为了这个目的,考虑一个均匀的材料板,因为在这种情况下确切的时间常数谱是已知的。结果表明,热瞬态过程中热结构函数对噪声非常敏感
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引用次数: 7
Exact Modelling of Stress Fields In Bimaterial Beams Using Readily Available Mathematical Software 精确模拟应力场在双材料梁使用现成的数学软件
Pub Date : 2006-04-24 DOI: 10.1109/ESIME.2006.1644036
C. Kinsella, T. Moore, J. Jarvis
A little-used first principles solution was proposed by Hess in 1969 for the stress fields in a bimaterial elastic beam under any arbitrary self equilibrating free end loading. In this paper Hess's solution is implemented using Matlab to calculate axial and normal stresses at any required horizontal or vertical cross-section of the beam. The approach uses numerical methods to develop an eigenvalue solution for any given set of layer thicknesses and material properties. A novel finite element mesh design, originally presented in 1989 by Schiermeier and Szabo, is used to validate the results from the above analysis. The mesh (of p-elements) is strongly graded around singularities, ensuring their effects are isolated. More remote areas of the model, where stresses and gradients are low, are sparsely populated by elements. The rapid changes in interfacial peeling stress and interfacial shear stress close to the free edge are coped with quite effectively by this mesh design. The two methods are used to examine the stress fields in the bimaterial beam. Although both methods can be used to calculate stresses at any required horizontal or vertical cross-section in the beam, the first principles method has the advantage of not requiring FEA software. Instead Excel or Matlab can readily display a plot of the stress distribution in the selected cross section. The method can be applied to axial, shear and peeling (normal) stresses in bimaterial beams. The solution has applications in many varied areas of engineering, from thermal stresses in IC packages to the behaviour of armour plating under mechanical loads
赫斯在1969年提出了一个很少使用的第一原理解,用于任意自平衡自由端载荷下双材料弹性梁的应力场。本文利用Matlab实现Hess解,计算梁在任意要求的水平或垂直截面处的轴向应力和法向应力。该方法使用数值方法对任意给定的层厚度和材料特性集开发特征值解。一种新的有限元网格设计,最初是由Schiermeier和Szabo于1989年提出的,用于验证上述分析的结果。(p元素的)网格围绕奇点进行强烈分级,确保它们的影响是隔离的。模型中较偏远的区域,应力和梯度较低,稀疏地分布着元素。这种网格设计有效地解决了自由边缘附近界面剥离应力和界面剪切应力的快速变化。用这两种方法对双材料梁的应力场进行了检测。虽然这两种方法都可以用于计算梁中任何所需水平或垂直截面的应力,但第一性原理法的优点是不需要有限元分析软件。相反,Excel或Matlab可以很容易地显示所选截面的应力分布图。该方法可应用于双材料梁的轴向、剪切和剥落(正)应力。该解决方案在许多不同的工程领域都有应用,从IC封装的热应力到机械负载下装甲镀的行为
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引用次数: 0
Numerical Identification of Geometric Parameters from Dynamic Measurement of Grinded Membranes on Wafer Level 圆片级磨膜动态测量几何参数的数值识别
Pub Date : 2006-04-24 DOI: 10.1109/ESIME.2006.1644016
M. Ebert, R. Gerbach, J. Bagdahn, S. Michael, S. Hering
In the paper a new nondestructive quality testing methods for MEMS were presented that can be applied on wafer level in early stage of the manufacturing process. The approach was applied to determine the thickness of KOH etched membranes from measured eigenfrequencies. The dynamic measurements of test specimen were performed by laser Doppler vibrometry. A finite element (FE) model was created to identify the membrane thickness from the measured eigenfrequency values. A good agreement between the measured thicknesses and the calculated thicknesses of membranes was found. Furthermore, a stochastic model was created to describe the influence of different parameters on the calculated thickness of membrane
本文提出了一种新的MEMS无损质量检测方法,可应用于制造初期的晶圆级。该方法被应用于从测量的特征频率来确定KOH蚀刻膜的厚度。采用激光多普勒振动仪对试样进行了动态测量。建立了一个有限元模型,根据测量的特征频率值来确定膜的厚度。测定的膜厚度与计算的膜厚度吻合较好。此外,还建立了一个随机模型来描述不同参数对计算膜厚的影响
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引用次数: 5
MVT corrections for the evaluation of damping in MEMS MEMS中阻尼评估的MVT校正
Pub Date : 2006-04-24 DOI: 10.1109/ESIME.2006.1644006
C. Cercignani, A. Frangi, S. Lorenzani, B. Vigna
The analysis of fluid damping in micro-electro-mechanical-systems (MEMS) is addressed. A mixed fast multipole boundary element method based on both velocity and traction integral equations is employed and adapted in order to account for slip boundary conditions. The formulation presented is applied to the analysis of a biaxial accelerometer and validated with experimental results
对微机电系统(MEMS)中的流体阻尼进行了分析。为了考虑滑移边界条件,采用了基于速度和牵引积分方程的混合快速多极边界元方法。将所提出的公式应用于双轴加速度计的分析,并用实验结果进行了验证
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引用次数: 0
Multi-domain and mixed-signal simulation of System-on-Chip embedding MEMS 片上系统嵌入MEMS的多域和混合信号仿真
Pub Date : 2006-04-24 DOI: 10.1109/ESIME.2006.1643956
S. Basrour, K. Matou, Y. Ammar, M. Marzencki, A. Zenati
The aim of this paper is to deal with a new approach for the modelling and the simulation of mixed-signal multi-domain microsystems (MSMD) in the MATLABreg/Simulinkreg environment. MSMD are systems mixing different domains such as analog and digital electronics, radio-frequency modules, micro-electro-mechanical systems (MEMS), micro-optical-electro-mechanical systems (MOEMS) and others on the same chip (system-on-chip: SoC) or in the same package (system-on-package: SoP). The heterogeneity of such systems can be seen at different abstraction levels. In fact this heterogeneity is mainly due to the multiphysic domains and also to the nature of the signals available on the chip. The creation of a virtual prototype of such microsystems is very useful because it allows to significantly shorten the design cycle and to reduce the design cost. Due to different domains, the mixed signals, the several non-linearities of the electrical components or MEMS devices and the interdependences of their subsystems, it is very complex to make a global simulation and optimization with traditional approaches and with the same simulator. Several modelling languages can be used, for example SPICE and VHDL-AMS, but one of the major disadvantages of these languages concerns the convergence of the simulation. MATLABreg/Simulinkreg is a powerful environment where several subsystems can be modelled with analytical equations, electrical circuits, etc. In this paper, we apply our approach to model and to simulate a self powered micro systems (SPMS) in this simulation environment. Several simulation results, made with different abstraction levels, have been compared and are in very good agreement. Moreover, we report in this paper cosimulation results obtained with Simulinkreg/SMASHtrade software. These results will prove the efficiency of our approach for the design of microsystems
本文的目的是探讨在matlab /Simulinkreg环境下对混合信号多域微系统(MSMD)进行建模和仿真的新方法。MSMD是混合不同领域的系统,如模拟和数字电子学,射频模块,微机电系统(MEMS),微光机电系统(MOEMS)和其他在同一芯片(片上系统:SoC)或在同一封装(片上系统:SoP)。这种系统的异构性可以在不同的抽象层次上看到。事实上,这种异质性主要是由于多物理场域以及芯片上可用信号的性质。创建这种微系统的虚拟原型非常有用,因为它可以大大缩短设计周期并降低设计成本。由于电子元件或MEMS器件具有不同的域、混合的信号、多种非线性以及子系统之间的相互依赖性,用传统的方法和同一个模拟器进行全局仿真和优化是非常复杂的。可以使用几种建模语言,例如SPICE和VHDL-AMS,但这些语言的主要缺点之一涉及模拟的收敛性。MATLABreg/Simulinkreg是一个功能强大的环境,可以用分析方程,电路等对几个子系统进行建模。在本文中,我们应用我们的方法在这个仿真环境中对自供电微系统(SPMS)进行建模和仿真。对不同抽象层次的仿真结果进行了比较,结果吻合得很好。此外,本文还报道了使用Simulinkreg/SMASHtrade软件进行联合仿真的结果。这些结果将证明我们的方法在微系统设计中的有效性
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引用次数: 1
Assembly-Induced Stress and Its Effect on the Integrity of Assembly System in Drop Simulation 跌落仿真中装配诱导应力及其对装配系统完整性的影响
Pub Date : 2006-04-24 DOI: 10.1109/ESIME.2006.1643977
W. Ren, Jianjun Wang
In this paper, a drop vehicle of LCD system was selected to address the assembly-induced stress and its effect on the integrity of assembly system in drop simulation. A finite element procedure was implemented to analyze a two-step loaded LCD system in terms of ABAQUS/Standard and ABAQUS/Explicit tools. Firstly, the LCD is statically loaded by the pretension of the screws and the pressure of the elastomer to determine the stress/strain equilibrium by using the ABAQUS/Standard tool. Secondly, the pre-stressed LCD system is loaded by dropping it from one and half meters high onto a hard floor to assess its reliability under impact loading by means of the ABAQUS/Explicit tool. From the finite element analysis, it is found that the maximum stress level obtained from a model without assembly-induced pre-stressing is generally smaller than that obtained from a model with assembly-induced pre-stressing. In addition, the effect of the ratio of the pressed thickness of the elastomer to the non-pressed thickness of the elastomer on the LCD reliability was investigated based on the proposed procedure. An optimized ratio was recommended
本文选取LCD系统的跌落车辆进行跌落仿真,以解决跌落仿真中装配诱导应力及其对装配系统完整性的影响。采用ABAQUS/Standard和ABAQUS/Explicit两种工具对两步加载LCD系统进行了有限元分析。首先,利用ABAQUS/Standard工具,通过螺杆预拉力和弹性体压力对LCD进行静态加载,确定其应力/应变平衡。其次,通过ABAQUS/Explicit工具,将预应力液晶显示系统从1.5米高的地方跌落到坚硬的地板上进行加载,以评估其在冲击载荷下的可靠性。从有限元分析中发现,无装配诱导预应力模型得到的最大应力水平一般小于有装配诱导预应力模型得到的最大应力水平。此外,还研究了弹性体受压厚度与非受压厚度之比对液晶显示可靠性的影响。提出了最佳配比
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引用次数: 1
Thermo-Mechanical Analysis of the Packaging Process for Micro-Electronic Displays 微电子显示器封装工艺的热-力学分析
Pub Date : 2006-04-24 DOI: 10.1109/ESIME.2006.1644051
Y. Lee, C. Bailey, Hua Lu, S. Riches, M. Bartholomew, N. Tebbit
Micro-electronic displays are sensitive devices and its performance is easily affected by external environmental factors. To enable the display to perform in extreme conditions, the device must be structurally strengthened, the effects of this packaging process was investigated. A thermo-mechanical finite element analysis was used to discover potential problems in the packaging process and to improve the overall design of the device. The main concern from the analysis predicted that displacement of the borosilicate glass and the Y stress of the adhesive are important. Using this information a design which reduced the variation of displacement and kept the stress to a minimum was suggested
微电子显示器是敏感器件,其性能容易受到外界环境因素的影响。为了使显示器能够在极端条件下工作,器件必须在结构上加强,研究了这种封装过程的影响。采用热-机械有限元分析方法,发现封装过程中存在的潜在问题,改进器件的整体设计。分析预测了硼硅酸盐玻璃的位移和胶粘剂的Y应力是重要的影响因素。利用这些信息,提出了一种减小位移变化并使应力最小的设计方案
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引用次数: 2
Steady state and transient thermal characterization for flip chip interconnection on flexible substrate 柔性衬底上倒装芯片互连的稳态和瞬态热特性
Pub Date : 2006-04-24 DOI: 10.1109/ESIME.2006.1644019
L. Chen, R. Lehtiniemi, B. Vandevelde, A. Arslan
As flexible electronic applications gain more and more research interests, the thermal management issues related to these become more critical. This paper quantifies the thermal resistance of flip chip interconnection on flexible substrate by both simulation and experimental measurements. For the simulation, both finite element method (FEM) and computational fluid dynamics (CFD) are used. Measurements are employed in both steady state and transient state conditions. Results reveal that thinner flex substrate is a poor thermal conductor and one of the key factors in improving thermal performance is the amount of copper in the substrate, as this acts as a heat spreader to remove heat over a larger area. The module without backside metallization has a significant amount of heat conduction through the copper tracks, while for the module having backside metallization, the main portion of heat is spread over the backside metallization. Thermal resistance is also boundary-dependent: it is smaller in cold-plate condition, while 5-15 times higher at natural convection condition. The backside copper metallization plays an important role under natural convection condition, while this influence is not pronounced under cold-plate conditions.
随着柔性电子应用越来越受到人们的关注,与之相关的热管理问题变得越来越重要。本文采用仿真和实验两种方法对柔性衬底上倒装芯片互连的热阻进行了量化。模拟采用了有限元法和计算流体力学方法。在稳态和瞬态条件下均采用测量。结果表明,较薄的柔性衬底是一个较差的热导体,而提高热性能的关键因素之一是衬底中的铜含量,因为铜的作用是在更大的区域内散热。没有背面金属化的模块有大量的热传导通过铜轨道,而背面金属化的模块,热量的主要部分分布在背面金属化。热阻也与边界有关:在冷板条件下热阻较小,而在自然对流条件下热阻高5-15倍。在自然对流条件下,背面铜金属化起重要作用,而在冷板条件下,这种影响不明显。
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引用次数: 3
Molecular Modeling of Analyte Adsorption on MEMS GC Stationary Phases 分析物在MEMS GC固定相上吸附的分子模拟
Pub Date : 2006-04-24 DOI: 10.1109/ESIME.2006.1644059
N. Iwamoto, U. Bonne
Future microelectromechanical systems (MEMS), nanoelectromechanical (NEMS), and micro-optical electromechanical systems (MOEMS) require distinct understanding of interfacial effects in order to predict their performance and to reliably manufacture these devices. We show here that molecular modeling offers a unique tool for simulating and understanding critical working interfaces by specifically modeling the atomic mechanics during performance. This paper offers examples of how molecular modeling may be used for improving materials used in MEMS devices using as example the comparative performance of materials for stationary phases in gas chromatographs. This comparison was based on derived interaction enthalpies between analytes and stationary phases and using simulations of surface separation by employing molecular dynamics. The separation performance was compared to experimental GC data., showing that qualitative comparison of separation was present from the molecular scale and confirming that molecular modeling may be a useful tool to pre-select stationary phases for specific activity
未来的微机电系统(MEMS)、纳米机电系统(NEMS)和微光机电系统(MOEMS)需要对界面效应有不同的理解,以便预测其性能并可靠地制造这些设备。我们在这里展示了分子建模为模拟和理解关键工作界面提供了一个独特的工具,通过在性能过程中专门建模原子力学。本文提供了分子建模如何用于改进MEMS器件中使用的材料的示例,例如气相色谱仪中固定相材料的比较性能。这种比较是基于分析物和固定相之间的相互作用焓,并利用分子动力学模拟表面分离。并与实验GC数据进行了比较。,表明从分子尺度上存在分离的定性比较,并确认分子建模可能是预先选择特定活性的固定相的有用工具
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引用次数: 3
Compact Modeling of Diode with VHDL-AMS Including Reverse Recovery 二极管的VHDL-AMS紧凑建模包括反向恢复
Pub Date : 2006-04-24 DOI: 10.1109/ESIME.2006.1643952
L. Coyitangiye, R. Grisel
A diode VHDL-AMS model is presented which can simulate the diode reverse recovery behavior. For VHDL-AMS to be useful to the analog design community, efficient semiconductor device model must be available. The model is based on the charge transport equations and they are simplified using the lumped-charge modeling technique. The model is demonstrated on the Advance-MS simulator and compared to measurements
提出了一个模拟二极管反向恢复行为的VHDL-AMS模型。为了使VHDL-AMS对模拟设计界有用,必须提供高效的半导体器件模型。该模型基于电荷输运方程,并采用集总电荷建模技术对其进行了简化。该模型在advanced - ms模拟器上进行了验证,并与测量结果进行了比较
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引用次数: 2
期刊
微纳电子与智能制造
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