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2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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Universal concept for fabricating arbitrary shaped μIPMC transducers and its application on developing accurately controlled surgical devices 制备任意形状μIPMC换能器的通用概念及其在精确控制手术装置中的应用
Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433028
G. Feng, Ri-Hong Chen
This paper presents a novel micromachined method for fabricating micro-sized ion polymer metal composite (IPMC) devices with arbitrary shapes and demonstrates the technique to develop tiny accurately controlled surgical devices. This technology is beyond current state-of-the-art approaches in manufacturing large-scale IPMC devices, and provides a universal solution to construct micro-size- featured IPMC transducers with fine contours and no short-circuits. To demonstrate the usefulness of the method, hand-shaped grips for laparoscopic operation are designed, fabricated and tested. The fabricated device with the dimension of 6 mm times 6 mm times 80 mum shows that it could reach a displacement of 300 mum at the location 1 mm away from the anchor when a 0.5 Hz square wave of 12 Volts is applied, and a maximum instantaneous force of 5 mN output when it is driven with a 0.5 Hz square wave of 6 Volts.
本文提出了一种制造任意形状微尺寸离子聚合物金属复合材料(IPMC)器件的新型微机械加工方法,并演示了该技术可用于开发微型精确控制的手术器件。该技术超越了目前制造大规模IPMC设备的最先进方法,并提供了一种通用的解决方案来构建具有精细轮廓和无短路的微型IPMC传感器。为了证明该方法的有效性,设计、制作并测试了用于腹腔镜手术的手形握把。所制备的尺寸为6mm × 6mm × 80mm的器件表明,当施加0.5 Hz的12伏方波时,其在距锚点1mm处的位移可达300mm;当施加0.5 Hz的6伏方波时,其最大瞬时输出力为5mn。
{"title":"Universal concept for fabricating arbitrary shaped μIPMC transducers and its application on developing accurately controlled surgical devices","authors":"G. Feng, Ri-Hong Chen","doi":"10.1109/MEMSYS.2007.4433028","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433028","url":null,"abstract":"This paper presents a novel micromachined method for fabricating micro-sized ion polymer metal composite (IPMC) devices with arbitrary shapes and demonstrates the technique to develop tiny accurately controlled surgical devices. This technology is beyond current state-of-the-art approaches in manufacturing large-scale IPMC devices, and provides a universal solution to construct micro-size- featured IPMC transducers with fine contours and no short-circuits. To demonstrate the usefulness of the method, hand-shaped grips for laparoscopic operation are designed, fabricated and tested. The fabricated device with the dimension of 6 mm times 6 mm times 80 mum shows that it could reach a displacement of 300 mum at the location 1 mm away from the anchor when a 0.5 Hz square wave of 12 Volts is applied, and a maximum instantaneous force of 5 mN output when it is driven with a 0.5 Hz square wave of 6 Volts.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"25 1","pages":"7-10"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85141671","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Flexible micro thermoelectric generator 柔性微型热电发电机
Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433021
W. Glatz, C. Hierold
We demonstrate and discuss the performance of a flexible micro thermoelectric generator with Ni/Cu thermocouples in a SU-8 mold. The fabricated devices generate up to 20.68plusmn0.32 muWcm-2K-2 for the case of vanishing thermal interface resistance (K=0). The generator keeps functionality when bent to curvatures with radii down to 7.5 mm. This allows for enhanced thermal contact to non planar surfaces. A specific electrical contact resistance between thermoelectric material and interconnects of 2.11*10-11 Omega m2 have been achieved in average, which is crucial for low generator resistance and hence for improved performance. First model based design optimization predictions are experimentally verified.
我们在SU-8模具上演示并讨论了Ni/Cu热电偶柔性微型热电发电机的性能。在热界面电阻(K=0)消失的情况下,制备的器件产生高达20.68plusmn0.32 muWcm-2K-2。发电机在弯曲到半径低至7.5毫米的曲率时保持功能。这可以增强与非平面表面的热接触。热电材料和互连之间的特定电接触电阻平均为2.11*10-11 ω m2,这对于降低发电机电阻和提高性能至关重要。首先对基于模型的设计优化预测进行了实验验证。
{"title":"Flexible micro thermoelectric generator","authors":"W. Glatz, C. Hierold","doi":"10.1109/MEMSYS.2007.4433021","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433021","url":null,"abstract":"We demonstrate and discuss the performance of a flexible micro thermoelectric generator with Ni/Cu thermocouples in a SU-8 mold. The fabricated devices generate up to 20.68plusmn0.32 muWcm-2K-2 for the case of vanishing thermal interface resistance (K=0). The generator keeps functionality when bent to curvatures with radii down to 7.5 mm. This allows for enhanced thermal contact to non planar surfaces. A specific electrical contact resistance between thermoelectric material and interconnects of 2.11*10-11 Omega m2 have been achieved in average, which is crucial for low generator resistance and hence for improved performance. First model based design optimization predictions are experimentally verified.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"39 1","pages":"89-92"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85266489","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 20
Photothermal transducer based on ultrathin bimetal Si resonator 基于超薄双金属硅谐振器的光热传感器
Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433165
T. Ono, S. Yoshida, Y. Kawai, M. Esashi
In this paper, we present a photothermal transducer consisted of an ultrathin Au/Si bimetal cantilever as a resonator with a total thickness of 45 nm and quality factor of -12000. Due to the high quality factor and small size, this transducer is sensitive to photothermal effect and its thermal response frequency can be up to 140 kHz. It is demonstrated that the irradiation of weak laser can enhance the response of the transducer due to the nonlinear photothermal effect. The mechanical FM detection of modulated light is demonstrated using this bimetal transducer.
本文提出了一种由超薄金/硅双金属悬臂梁作为谐振腔组成的光热换能器,其总厚度为45 nm,质量因子为-12000。该换能器质量因数高,体积小,对光热效应敏感,热响应频率可达140 kHz。结果表明,由于非线性光热效应,弱激光的照射可以提高换能器的响应。机械调频检测调制光演示使用这种双金属换能器。
{"title":"Photothermal transducer based on ultrathin bimetal Si resonator","authors":"T. Ono, S. Yoshida, Y. Kawai, M. Esashi","doi":"10.1109/MEMSYS.2007.4433165","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433165","url":null,"abstract":"In this paper, we present a photothermal transducer consisted of an ultrathin Au/Si bimetal cantilever as a resonator with a total thickness of 45 nm and quality factor of -12000. Due to the high quality factor and small size, this transducer is sensitive to photothermal effect and its thermal response frequency can be up to 140 kHz. It is demonstrated that the irradiation of weak laser can enhance the response of the transducer due to the nonlinear photothermal effect. The mechanical FM detection of modulated light is demonstrated using this bimetal transducer.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"47 1","pages":"639-642"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82660110","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Effect of nano stripe carbonized-polymer electrode on high S/N ratio in electrochemical detection 纳米条纹碳化聚合物电极对电化学检测中高信噪比的影响
Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433053
K. Naka, H. Hayashi, M. Senda, H. Shiraishi, S. Konishi
This paper presents a scaling effect of the nano stripe electrode made of carbonized-polymer on the S/N ratio in electrochemical detections. It is well known that microelectrodes show higher sensitivity and higher S/N ratio. Downsizing of electrode, however, causes a reduction in signal current. Co-author has proposed a novel theoretical concept of a stripe electrode to solve this trade-off. The S/N ratio increases with downsizing the width of the stripe electrode because the noise current exponentially decreases. The nano stripe electrode with 450 nm in width and 15 mum in the center-to-center separation of the electrode could achieve 17.15 times higher S/N ratio than that of a planar electrode having the same corresponding area size. Furthermore, comparisons of experimental and theoretical S/N ratios will be discussed.
研究了碳化聚合物纳米条纹电极在电化学检测中对信噪比的影响。众所周知,微电极具有较高的灵敏度和信噪比。然而,电极的缩小会导致信号电流的减小。作者提出了一种新的理论概念,即条纹电极来解决这种权衡。随着条纹电极宽度的减小,噪声电流呈指数级减小,信噪比增大。宽度为450 nm、中心间距为15 μ m的纳米条纹电极的信噪比是同等面积大小的平面电极的17.15倍。此外,还将讨论实验和理论信噪比的比较。
{"title":"Effect of nano stripe carbonized-polymer electrode on high S/N ratio in electrochemical detection","authors":"K. Naka, H. Hayashi, M. Senda, H. Shiraishi, S. Konishi","doi":"10.1109/MEMSYS.2007.4433053","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433053","url":null,"abstract":"This paper presents a scaling effect of the nano stripe electrode made of carbonized-polymer on the S/N ratio in electrochemical detections. It is well known that microelectrodes show higher sensitivity and higher S/N ratio. Downsizing of electrode, however, causes a reduction in signal current. Co-author has proposed a novel theoretical concept of a stripe electrode to solve this trade-off. The S/N ratio increases with downsizing the width of the stripe electrode because the noise current exponentially decreases. The nano stripe electrode with 450 nm in width and 15 mum in the center-to-center separation of the electrode could achieve 17.15 times higher S/N ratio than that of a planar electrode having the same corresponding area size. Furthermore, comparisons of experimental and theoretical S/N ratios will be discussed.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"7 1","pages":"195-198"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82059518","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Fabrication and characteristics of MEMS vertical type probe tip for micro sized pads measurement 用于微尺寸焊盘测量的MEMS垂直型探针头的制造与特性
Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4432969
Jin Hyuk Kim, S. Chu, H. Seo, J. Ryu, Gye Tae Kim, S. Moon
In this research we proposed, designed, fabricated, and measured a novel micro electro mechanical system (MEMS) based vertical probe tips which differs from conventional cantilever probe tips. The main idea of the vertical probe design was how to distribute the total forces vertically concentrated on the probe tip in measuring semiconductor devices. To solve the problem, we designed the vertical probe tip with meander structure which could provide enough displacements so that the vertical probe tips could distribute the forces acting on the tips. The structural analyses of the probe tip were accomplished using finite element method (FEM) and compared with actual measurement values. The primary fabrication processes were surface micromachining, wafer bonding technology, and electroplating. The material of the electro-plated probe tip was an Ni-Co alloy. In this study, we demonstrated the potential of the vertical probe tip that could apply to a small area with the over drive (O.D.) of 10~40 mum and the contact force of 1~8 gf. The measured contact resistance was less than 2 Omega and little noise was observed.
在这项研究中,我们提出,设计,制造和测量了一种新型的基于垂直探头的微机电系统(MEMS),它不同于传统的悬臂探头。垂直探头设计的主要思想是在测量半导体器件时,如何分配垂直集中在探头尖端的总力。为了解决这一问题,我们设计了具有弯曲结构的垂直探针尖端,该结构可以提供足够的位移,使垂直探针尖端能够分配作用在尖端上的力。采用有限元法对探针尖端进行了结构分析,并与实际测量值进行了比较。主要的制造工艺是表面微加工、晶圆键合技术和电镀。电镀探针尖端的材料为镍钴合金。在这项研究中,我们展示了垂直探针尖端的潜力,可以应用于小区域,过度驱动(od)为10~40 μ m,接触力为1~ 8gf。测量到的接触电阻小于2 ω,噪声很小。
{"title":"Fabrication and characteristics of MEMS vertical type probe tip for micro sized pads measurement","authors":"Jin Hyuk Kim, S. Chu, H. Seo, J. Ryu, Gye Tae Kim, S. Moon","doi":"10.1109/MEMSYS.2007.4432969","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4432969","url":null,"abstract":"In this research we proposed, designed, fabricated, and measured a novel micro electro mechanical system (MEMS) based vertical probe tips which differs from conventional cantilever probe tips. The main idea of the vertical probe design was how to distribute the total forces vertically concentrated on the probe tip in measuring semiconductor devices. To solve the problem, we designed the vertical probe tip with meander structure which could provide enough displacements so that the vertical probe tips could distribute the forces acting on the tips. The structural analyses of the probe tip were accomplished using finite element method (FEM) and compared with actual measurement values. The primary fabrication processes were surface micromachining, wafer bonding technology, and electroplating. The material of the electro-plated probe tip was an Ni-Co alloy. In this study, we demonstrated the potential of the vertical probe tip that could apply to a small area with the over drive (O.D.) of 10~40 mum and the contact force of 1~8 gf. The measured contact resistance was less than 2 Omega and little noise was observed.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"75 1","pages":"283-286"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81432547","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Sequential parylene lift-off process for selective patterning of biological materials 生物材料选择性图像化的序贯聚对二甲苯分离工艺
Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433114
K. Kuribayashi, Yuichi Hiratsuka, T. Yamamura, Shoji Takeuchi
This paper describes a method of selective patterning of various types of biological materials with parylene lift-off process. Multiple parylene thin sheets with a microhole array were formed on a glass substrate, and were then sequentially peeled off during the pattering process. Using this method we have achieved high density patterning of different kinds of beads, lipids and proteins on the same substrate, respectively. We have also patterned proteins on a parylene sheet, and rolled up the sheet to a cylindrical structure as a demonstration of 3D protein chips.
本文介绍了一种利用聚对二甲苯脱模工艺对各类生物材料进行选择性图案化的方法。在玻璃基板上形成具有微孔阵列的多个聚对二甲苯薄片,然后在图案化过程中依次剥离。利用这种方法,我们分别在相同的底物上实现了不同种类的珠子、脂质和蛋白质的高密度图案。我们还在聚对二甲苯薄片上绘制了蛋白质的图案,并将薄片卷成圆柱形结构,作为3D蛋白质芯片的演示。
{"title":"Sequential parylene lift-off process for selective patterning of biological materials","authors":"K. Kuribayashi, Yuichi Hiratsuka, T. Yamamura, Shoji Takeuchi","doi":"10.1109/MEMSYS.2007.4433114","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433114","url":null,"abstract":"This paper describes a method of selective patterning of various types of biological materials with parylene lift-off process. Multiple parylene thin sheets with a microhole array were formed on a glass substrate, and were then sequentially peeled off during the pattering process. Using this method we have achieved high density patterning of different kinds of beads, lipids and proteins on the same substrate, respectively. We have also patterned proteins on a parylene sheet, and rolled up the sheet to a cylindrical structure as a demonstration of 3D protein chips.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"4 1","pages":"501-504"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85472544","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Alginate micro-bead fabrication on a centrifugal microfluidics platform 离心微流控平台上海藻酸盐微球的制备
Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433113
S. Haeberle, L. Naegele, R. Burger, R. Zengerle, J. Ducrée
We present a novel method for the direct, centrifugally induced fabrication of small alginate beads displaying adjustable diameters between 180 mum and 800 mum by polymer-tube micronozzles. The size distribution features a CV of 7 - 16 % for the main peak. Up to 600 beads per second and channel are issued from the micronozzle through an air gap towards a standard lab tube ("Eppi") attached to the rotor spinning and containing a curing agent. At spinning frequencies between 5 Hz and 28 Hz, the tubes align horizontally under rotation and return to a vertical position as soon as the rotor is at rest. The hardened beads are collected within the tube for further processing or characterization. This method is considered as a low cost technology for micro encapsulation technologies.
我们提出了一种利用聚合物管微喷嘴直接、离心诱导制备海藻酸盐小珠的新方法,这些小珠的直径在180 - 800微米之间可调节。主峰的大小分布CV值为7 - 16%。每秒多达600颗珠子和通道从微喷嘴通过气隙向标准实验室管(“epi”)发出,该管连接在旋转的转子上,并含有固化剂。在5赫兹和28赫兹之间的旋转频率,管对齐水平下旋转,并返回到垂直位置,只要转子是在休息。硬化的珠子被收集在管内,以便进一步处理或表征。该方法被认为是一种低成本的微封装技术。
{"title":"Alginate micro-bead fabrication on a centrifugal microfluidics platform","authors":"S. Haeberle, L. Naegele, R. Burger, R. Zengerle, J. Ducrée","doi":"10.1109/MEMSYS.2007.4433113","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433113","url":null,"abstract":"We present a novel method for the direct, centrifugally induced fabrication of small alginate beads displaying adjustable diameters between 180 mum and 800 mum by polymer-tube micronozzles. The size distribution features a CV of 7 - 16 % for the main peak. Up to 600 beads per second and channel are issued from the micronozzle through an air gap towards a standard lab tube (\"Eppi\") attached to the rotor spinning and containing a curing agent. At spinning frequencies between 5 Hz and 28 Hz, the tubes align horizontally under rotation and return to a vertical position as soon as the rotor is at rest. The hardened beads are collected within the tube for further processing or characterization. This method is considered as a low cost technology for micro encapsulation technologies.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"497-500"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89986002","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Acoustic polarization for optimized implantable power transimittion 优化植入式电力传输的声极化
Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433136
P. Shih, W. Weng, W. Shih, P. Chang
We present a fully-packaged acoustic power receiver which is implantable in the subcutaneous tissue to receive the acoustic energy generated from a compressive wave emitter on the skin. The implanted receiver is a piezoelectric acoustic transducer and is packaged by biocompatible cohesive gels. This specific package is soft enough to absorb the incident wave from the subcutaneous tissue. The receiver employs direct charging to convert the acoustic energy into the extractable electrical energy through piezoelectricity when exposed to the acoustic field. The effects of the scattering package shape and the stiffness ratio between the package and subcutaneous tissue are considered to design the receivers. The energy efficiency of the fabricated receiver is measured inside real streaky pork, which is used to simulate human subcutaneous tissue. The result indicates that the spherical package is more suitable than the cubic one when they are buried in the fatty layer. The maximum efficiency of the power transmission is found to be -40dB.
我们提出了一种完全封装的声能量接收器,它可植入皮下组织,以接收皮肤上压缩波发射器产生的声波能量。植入的接收器是一个压电声换能器,由生物相容性内聚凝胶包装。这种特殊的包装足够柔软,可以吸收来自皮下组织的入射波。接收器采用直接充电的方式,在声场中通过压电将声能转换为可提取的电能。在设计接收器时考虑了散射、封装形状和封装与皮下组织刚度比的影响。在模拟人体皮下组织的真实五花肉中测量了该接收器的能量效率。结果表明,在脂肪层中埋设球形包体比立方包体更合适。功率传输的最大效率为-40dB。
{"title":"Acoustic polarization for optimized implantable power transimittion","authors":"P. Shih, W. Weng, W. Shih, P. Chang","doi":"10.1109/MEMSYS.2007.4433136","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433136","url":null,"abstract":"We present a fully-packaged acoustic power receiver which is implantable in the subcutaneous tissue to receive the acoustic energy generated from a compressive wave emitter on the skin. The implanted receiver is a piezoelectric acoustic transducer and is packaged by biocompatible cohesive gels. This specific package is soft enough to absorb the incident wave from the subcutaneous tissue. The receiver employs direct charging to convert the acoustic energy into the extractable electrical energy through piezoelectricity when exposed to the acoustic field. The effects of the scattering package shape and the stiffness ratio between the package and subcutaneous tissue are considered to design the receivers. The energy efficiency of the fabricated receiver is measured inside real streaky pork, which is used to simulate human subcutaneous tissue. The result indicates that the spherical package is more suitable than the cubic one when they are buried in the fatty layer. The maximum efficiency of the power transmission is found to be -40dB.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"25 1","pages":"879-882"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73225881","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
A miniaturised integrated QCM-based electronic nose microsystem 基于qcm的微型化集成电子鼻微系统
Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4432979
T. Frisk, L. Eng, Shaohua Guo, Wouter van der Wijngaart, G. Stemme
We designed, fabricated and successfully tested an integrated miniaturised quartz crystal microbalance (QCM) based electronic nose microsystem. The microsystem is an assembly of four parts: 1. a micromachined gas-liquid interface with integrated fluid channels and electrical conductors, 2. an anisotropically conductive double-sided adhesive film, 3. a QCM crystal and 4. a polymer cap with fluid and electrical ports. The choice of the multifunctional materials and the geometric features of the four-component microsystem allow a functional integration of a QCM crystal, electrical contacts, fluidic contacts and a sample interface in a single system with minimal assembly effort, a potential for low-cost manufacturing, and a few orders of magnitude reduction in system size (12* 12*4 mm3) and weight compared to commercially available instruments. The system detected ecstasy in the 100 ng range within 30 seconds.
我们设计、制造并成功测试了基于集成的小型化石英晶体微天平(QCM)的电子鼻微系统。微系统由四个部分组成:具有集成流体通道和电导体的微机械气液界面;一种各向异性导电双面胶膜;1 . QCM晶体;一种带有流体和电气端口的聚合物帽。多功能材料的选择和四组分微系统的几何特征允许QCM晶体、电触点、流体触点和样品接口在单个系统中的功能集成,组装工作量最小,具有低成本制造的潜力,并且与商用仪器相比,系统尺寸(12* 12*4 mm3)和重量减少了几个数量级。该系统在30秒内检测到100ng范围内的摇头丸。
{"title":"A miniaturised integrated QCM-based electronic nose microsystem","authors":"T. Frisk, L. Eng, Shaohua Guo, Wouter van der Wijngaart, G. Stemme","doi":"10.1109/MEMSYS.2007.4432979","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4432979","url":null,"abstract":"We designed, fabricated and successfully tested an integrated miniaturised quartz crystal microbalance (QCM) based electronic nose microsystem. The microsystem is an assembly of four parts: 1. a micromachined gas-liquid interface with integrated fluid channels and electrical conductors, 2. an anisotropically conductive double-sided adhesive film, 3. a QCM crystal and 4. a polymer cap with fluid and electrical ports. The choice of the multifunctional materials and the geometric features of the four-component microsystem allow a functional integration of a QCM crystal, electrical contacts, fluidic contacts and a sample interface in a single system with minimal assembly effort, a potential for low-cost manufacturing, and a few orders of magnitude reduction in system size (12* 12*4 mm3) and weight compared to commercially available instruments. The system detected ecstasy in the 100 ng range within 30 seconds.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"98 1","pages":"417-420"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75047760","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Topological layer switch technique for monolithically integrated electrostatic XYZ-stage 单片集成静电xyz级的拓扑层开关技术
Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4432992
Kazuhiro Takahashi, M. Mita, Hiroyuki Fujita, H. Toshiyoshi
We report a monolithic XYZ-stage with electrostatic comb-mechanisms integrated in only two silicon layers and by three photolithography steps that topologically switches the allocation of layer for electrical and elastic components. The XY-stage moved in the X- and the Y-direction by 19 mum independently, and also in the diagonal direction. We have successfully demonstrated maximum 2.12 mum in the Z-direction with applied voltage of 200 V.
我们报告了一个单片xyz级静电梳机制集成在只有两个硅层和三个光刻步骤,拓扑上切换层的分配为电气和弹性组件。X-阶段分别在X和y方向上移动了19 μ m,也在对角线方向上移动。我们已经成功地演示了在施加200 V电压的情况下,z方向上的最大2.12 mum。
{"title":"Topological layer switch technique for monolithically integrated electrostatic XYZ-stage","authors":"Kazuhiro Takahashi, M. Mita, Hiroyuki Fujita, H. Toshiyoshi","doi":"10.1109/MEMSYS.2007.4432992","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4432992","url":null,"abstract":"We report a monolithic XYZ-stage with electrostatic comb-mechanisms integrated in only two silicon layers and by three photolithography steps that topologically switches the allocation of layer for electrical and elastic components. The XY-stage moved in the X- and the Y-direction by 19 mum independently, and also in the diagonal direction. We have successfully demonstrated maximum 2.12 mum in the Z-direction with applied voltage of 200 V.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"381 1","pages":"651-654"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80220731","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
期刊
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)
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