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2010 3rd International Nanoelectronics Conference (INEC)最新文献

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Solid-state microwave induced plasma synthesis of antimony telluride 固态微波诱导等离子体合成碲化锑
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5425067
T. Suriwong, T. Thongtem, S. Thongtem
The utility of microwave heating and microwave generating of plasma as a synthetic technique toward the synthesis of Sb2Te3 is reported. The solid-state microwave synthetic method was studied the effects of irradiation times and cycles, and molar ratio of Sb:Te at a 900 W irradiated microwave power in order to determine phase purity of the reaction products. X-ray powder diffraction, field-emission scanning and transmission electron microscopic, including Raman spectroscopic techniques were used to investigate their phase, structures, surface morphologies and vibration characteristics. Their optical properties were also investigated by UV-vis and luminescent spectrophotometries.
报道了微波加热和等离子体微波产生技术在合成Sb2Te3中的应用。采用固体微波合成方法,在900 W微波辐照功率下,研究了辐照次数、辐照周期、Sb:Te的摩尔比对反应产物相纯度的影响。利用x射线粉末衍射、场发射扫描和透射电镜技术,包括拉曼光谱技术,研究了它们的物相、结构、表面形貌和振动特性。用紫外-可见和发光分光光度法研究了它们的光学性质。
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引用次数: 0
Mass sensitive sensor, a comparative study between PVC and PEI coated on quartz crystal microbalance 质量敏感传感器,在石英晶体微天平上涂覆PVC和PEI的比较研究
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5424836
K. Wong-ek, N. Nuntawong, K. Jaruwongrungsee, A. Tuantranont
In this work, we report a comparative study of quartz crystal microbalance sensors for Cardiac marker detection. These sensors are deposited with two different polymers, polyvinylchroride (PVC) and polyethylenemine (PEI) using spray coating technique for preparation of adsorption surface. The AFM measurements show that the maximum RMS roughness of coated films occur at around 20 seconds of deposition time, under spraying pressure of 1 bar using precursors concentration of 1% w/v. The results indicate that PEI is far superior to PVC in term of surface roughness which is corresponding to the presence of micropores. The hydrophilic properties between these two materials confirm that PEI have a higher potentials of attracting bimolecular due to a lower contact angle to a droplet of DI water. The absorption of proteins A (103 molecules) suspension on PEI surface is verified by a SEM image.
在这项工作中,我们报告了用于心脏标志物检测的石英晶体微平衡传感器的比较研究。这些传感器用两种不同的聚合物,聚氯乙烯(PVC)和聚乙烯胺(PEI)沉积,采用喷涂技术制备吸附表面。AFM测量结果表明,在1 bar的喷涂压力下,前驱体浓度为1% w/v,涂层的RMS粗糙度最大值出现在沉积时间约20秒时。结果表明,PEI在表面粗糙度方面远远优于PVC,这与微孔的存在相对应。这两种材料之间的亲水性证实了PEI具有更高的吸引双分子的潜力,因为它与一滴DI水的接触角较小。通过扫描电镜图像验证了蛋白A(103分子)悬浮液在PEI表面的吸附。
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引用次数: 0
Fully integrated circuit design Aihara's chaotic neuron model 全集成电路设计Aihara的混沌神经元模型
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5424672
Jiman Kim, Jinwoo Jung, Bomin Kwon, Juhong Park, Nam-Tae Kim, Yongsu Park, Jewon Lee, Hanjung Song
This paper presents design of the integrated chaotic neuron using 0.8 µm single poly CMOS technology, its dynamical behavior analysis. Proposed chaotic neuron consists of several op-amps, sample and hold circuits, a nonlinear function block for chaotic signal generation, a two-phase clock circuits and sigmoid output function block. From HSPICE simulation results of the circuit, approximated empirical equations is induced. Then the dynamical responses of the chaotic neuron such as bifurcation diagram, time series, Lyapunov exponent, and average firing rate are calculated with numerical analysis.
本文采用0.8µm单聚CMOS技术设计了集成混沌神经元,并对其动态行为进行了分析。所提出的混沌神经元由若干运算放大器、采样和保持电路、用于混沌信号产生的非线性功能块、两相时钟电路和s型输出功能块组成。根据电路的HSPICE仿真结果,推导出近似的经验方程。然后通过数值分析计算了混沌神经元的分岔图、时间序列、李雅普诺夫指数和平均放电率等动态响应。
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引用次数: 1
Shaped nanomembranes: From fundamental perception to new concepts and applications 形纳米膜:从基本感知到新概念和应用
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5425203
Y. Mei, O. Schmidt
Ultra-thin membranes out of inorganic materials can be easily formed into various shapes and geometries on a single chip. Imagine the following experiment: A compressively strained layer is released from the substrate by e.g. selective underetching. If the layer is homogeneously strained, the film forms wrinkles, whereas it bends if there is a large enough strain gradient across the thickness of the film [1]. We exploit these two phenomena to create large periodic arrays of wrinkled nanochannel arrays and rolled-up micro-and nanotubes. The unique approach to transform a 2D layer system, defined by advanced deposition and lithography techniques, into a 3D object technology [2], opens entirely new perspectives towards reproducible, size scalable and multi-functional components for on-and off-chip applications [3]. We demonstrate ionic sensitive field-effect transistors [4], novel micro-and nanojet engines [5], optofluidic sensors [6], single microtube batteries [7], new concepts for lab-in-a-tube systems [8] and metamaterial fiber optics [9].
用无机材料制成的超薄薄膜可以很容易地在一个芯片上形成各种形状和几何形状。想象一下下面的实验:通过选择性底蚀刻,从衬底上释放出压缩应变层。如果薄膜层受到均匀的拉伸,薄膜就会形成褶皱,而如果薄膜厚度上有足够大的应变梯度,薄膜就会弯曲。我们利用这两种现象来制造褶皱纳米通道阵列和卷起的微纳米管和纳米管的大型周期性阵列。将先进的沉积和光刻技术定义的2D层系统转换为3D对象技术的独特方法,为片上和片外应用的可复制,尺寸可扩展和多功能组件开辟了全新的视角。我们展示了离子敏感场效应晶体管[4]、新型微纳米喷气发动机[5]、光流体传感器[6]、单微管电池[7]、管中实验室系统[8]和超材料光纤[9]。
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引用次数: 0
Complete formation sequence of InAs quantum dots on lattice-mismatched InGaAs/GaAs substrates 晶格不匹配InGaAs/GaAs衬底上InAs量子点的完整形成序列
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5424719
S. Kanjanachuchai, T. Limwongse
The complete formation sequence of InAs quantum dots (QDs) on lattice-mismatched InGaAs cross-hatch substrate has been identified. The InAs QDs sequentially form at the following locations: the dislocation free end, the dislocation T-section, the dislocation intersection, the [1–10] dislocation line, the [110] dislocation line and the flat area. Different surface energies at these locations give rise to QD formation at different effective thicknesses and times.
在晶格不匹配的InGaAs交叉舱口衬底上,确定了InAs量子点的完整形成序列。InAs量子点依次在以下位置形成:位错自由端、位错t截面、位错交点、位错[1-10]线、位错[110]线、位错平坦区。这些位置的不同表面能导致不同有效厚度和时间的量子点形成。
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引用次数: 0
Molecular dynamics simulation of polylactic acid/ organoclay nanocomposites: Effects of different organic modifiers 聚乳酸/有机粘土纳米复合材料的分子动力学模拟:不同有机改性剂的影响
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5424589
Meitang Liu, M. Pu, Hongwen Ma
A molecular dynamics study was performed to analyze the effects of different organic modifiers (OMs) on the atomic scale structure, binding energies and basal spacing of polylactic acid/organoclay nanocomposites. Each supercell comprising one molecule of polylactic acid (PLA), montmorillonite (MMT) with a cation exchange capacity (CEC) of 102mmol/100g organomodified with several quaternary alkylammonium ions (Quats) and two positively charged amino acids(arginine and lysine) was constructed during simulation tasks. According to the results, amino acids exhibit strong affinity to MMT surface and create considerable spacing room which is very important to intercalation procedure. In contrasting, ordinary Quats demonstrate weaker interaction with MMT unless they are carboxylic modified. This work gave an instructive suggestion for PLA nanocomposites preparation.
通过分子动力学研究,分析了不同有机改性剂对聚乳酸/有机粘土纳米复合材料原子尺度结构、结合能和基间距的影响。每个超级单体由1个聚乳酸(PLA)分子、阳离子交换容量(CEC)为102mmol/100g的蒙脱土(MMT)组成,并由几个季烷基铵离子(Quats)和两个带正电的氨基酸(精氨酸和赖氨酸)进行有机修饰。结果表明,氨基酸对MMT表面具有较强的亲和性,并产生相当大的间距空间,这对插层过程非常重要。相比之下,普通Quats与MMT的相互作用较弱,除非它们被羧基修饰。本工作对PLA纳米复合材料的制备具有指导意义。
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引用次数: 2
Cell-based biosensor system using micropatterned polymer nanofiber 基于微图案聚合物纳米纤维的细胞生物传感器系统
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5424508
Hyun Jong Lee, Eunji Jang, Saemi Park, P. Murthy, W. Koh
In this study, to improve efficiency and functionality of cell-based biosensor microarrays, we introduced nano-topographical features on cell adhesive region. Micropatterned surface was created by poly (ethylene glycol) (PEG) hydrogel microstructures via photolithography. Nano-topographical features were introduced using polymeric nanofibers which were produced by electrospinning technique. Combining PEG hydrogel microstructure and polymeric nanofibers created a clear contrast between adhesion resist hydrogel walls and adhesion promoting nanofiber surfaces. When mammalian cells were seeded onto micropatterned nanostructure, cells only selectively adhered to nanofiber maintaining their viability, while adherent cells were not present on the hydrogel wall.
在本研究中,为了提高基于细胞的生物传感器微阵列的效率和功能,我们在细胞粘附区域引入了纳米形貌特征。利用聚乙二醇(PEG)水凝胶微结构光刻技术制备了微图案化表面。介绍了静电纺丝法制备的高分子纳米纤维的纳米形貌特征。将聚乙二醇水凝胶微观结构与高分子纳米纤维相结合,形成了抗粘附水凝胶壁和促粘附纳米纤维表面的清晰对比。当哺乳动物细胞被植入微图案纳米结构中时,细胞仅选择性地粘附在纳米纤维上,而水凝胶壁上不存在粘附细胞。
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引用次数: 3
Conformal photoresist coating for critical dimension improvement 用于关键尺寸改进的保形光刻胶涂层
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5424787
L. Supadee, W. Titiroongruang
3D surface topography of read / write head fabrication is difficult for lithography process. Photoresist deposition by using the conventional spin coating method is troubled. Spray coating is a replacement technique that eliminates the problem by producing micro-resist droplets that adhere firmly to the deposition location; thus, spray coating with optimal parameters from designed experiment is a suitable method for photoresist deposition on structures with high aspect ratio. By using proper nitrogen flow rate to spread out AZ4999 resist to be micro-droplet in the same time with proper traveling nozzle speed, the photoresist turbulence will perform good resist coverage over all surfaces. From design of experiment show the optimum condition for conformal deposition is 0.8 Bar at 117mm/s for nitrogen pressure and nozzle speed, respectively. Photoresist thickness was dropped at 30um far away from groove or edge of the head.
读写头的三维表面形貌是光刻工艺的难点。采用传统的旋涂法沉积光刻胶存在一定的问题。喷涂是一种替代技术,通过产生牢固粘附在沉积位置的微抗蚀剂液滴来消除问题;因此,采用实验设计的最优参数进行喷涂是在高纵横比结构上制备光刻胶的合适方法。通过适当的氮气流量,在适当的喷嘴速度下,将AZ4999抗蚀剂同时扩散成微液滴,光刻胶湍流可以在所有表面上实现良好的抗蚀剂覆盖。实验设计表明,在氮气压力和喷嘴速度下,适形沉积的最佳条件为0.8 Bar,速率为117mm/s。光刻胶厚度在远离凹槽或头部边缘30um处下降。
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引用次数: 2
Growth and characterization of Er doped ZnO prepared by reactive ion beam sputtering 反应离子束溅射制备Er掺杂ZnO的生长与表征
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5425089
Chung-Chi Liau, L. Chao
Er doped ZnO (EZO) has been deposited on Si substrate at 500°C by reactive ion beam sputtering utilizing a capillaritron ion source at various oxygen partial flow rates. All the EZO films exhibit a preferred (002) growth direction. Maximum Er emission at 984 nm (4I11/2 to 4I15/2) was achieved from EZO deposited with 12.5% oxygen partial flow rate. XPS analysis of the O 1s core level shows an additional peak centered at 532.5 eV, indicating the presence of erbium oxide.
利用毛细管离子源,在不同的氧分流速率下,在500℃的温度下,通过反应离子束溅射在Si衬底上沉积了Er掺杂ZnO (EZO)。所有的EZO薄膜都表现出优先的(002)生长方向。当氧偏流量为12.5%时,沉积的EZO在984 nm (4I11/2 ~ 4I15/2)处的Er发射量最大。XPS分析表明,o1s核心能级在532.5 eV处有一个额外的峰,表明氧化铒的存在。
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引用次数: 2
Nanoplate structure for photocurrent enhancement in thin film solar cell 薄膜太阳能电池中光电流增强的纳米板结构
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5424679
M. Tang, Shu-Tong Chang, Z. Pei, B. Hsieh
We investigated the novel thin film solar cell with nanoplate structure that can solve the conflict between the light absorption and the carrier transport in amorphous silicon thin film solar cell. This structure has n-type amorphous silicon nanoplate array on the substrate, and the p-layer and i-layer are sequentially grown along the surface of each n-type amorphous silicon nanoplate. Under sunlight illumination, the light is absorbed along the vertical direction of nanoplate. However, the carrier transport is along the horizontal direction. Therefore, nanoplate with the larger height can absorb most of the sunlight. In the meantime, the thickness of the solar cell is still thin enough for effective transport of photo-generated carriers.
为了解决非晶硅薄膜太阳能电池中载流子输运与光吸收之间的矛盾,研究了纳米板结构的新型薄膜太阳能电池。该结构将n型非晶硅纳米板阵列在衬底上,沿每个n型非晶硅纳米板表面依次生长p层和i层。在阳光照射下,光沿纳米板垂直方向被吸收。然而,载体的输运是沿水平方向的。因此,高度较大的纳米板可以吸收大部分的阳光。同时,太阳能电池的厚度仍然足够薄,可以有效地传输光生成的载流子。
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引用次数: 0
期刊
2010 3rd International Nanoelectronics Conference (INEC)
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