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2008 IEEE International Conference on Semiconductor Electronics最新文献

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Microfluidic device for biocells manipulation and measurement 用于生物细胞操作和测量的微流控装置
Pub Date : 2008-12-09 DOI: 10.1109/SMICND.2008.4703356
M. Avram, C. Iliescu, M. Volmer, F. S. Iliescu, A. Avram
In this work we present a study of the interaction between the magnetic particles used in biological applications and the GMR sensor. The fractional change in resistance, and hence the sensitivity, will be maximized by matching, as far as possible, the size of the sensor to the size of the beads and by carefully positioning the beads over the sensor. We found, by micromagnetic simulations, that the amount of the surface coverage with magnetic particles may affect the magnetization curve of the sensor and will change the field dependence of his GMR response.
在这项工作中,我们提出了用于生物应用的磁性颗粒与GMR传感器之间相互作用的研究。通过尽可能地使传感器的尺寸与磁珠的尺寸相匹配,并小心地将磁珠放置在传感器上,电阻的微小变化,从而使灵敏度最大化。通过微磁模拟,我们发现磁性颗粒表面覆盖的大小可能会影响传感器的磁化曲线,并改变其GMR响应的场依赖性。
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引用次数: 0
Generalised DC characteristics of gate-controlled diodes in avalanche breakdown regime 雪崩击穿条件下门控二极管的广义直流特性
Pub Date : 2008-12-09 DOI: 10.1109/SMICND.2008.4703321
A. Rusu, M. Badila, C. Bulucea
This paper considers the gate-controlled diode as a device performing both analog and digital functions. This behavior is encountered in the breakdown regime of the device, where the transfer characteristic has slopes in a wide range, from a cvasilinear to a collapse region. The form of this characteristic depends on the electrode that is considered as reference. Theoretical models and experimental measurements demonstrate these assumptions.
本文认为门控二极管是一种兼具模拟和数字功能的器件。这种行为在器件的击穿状态中会遇到,其中传输特性在很大范围内具有斜率,从线性区域到崩溃区域。该特性的形式取决于作为参考的电极。理论模型和实验测量证明了这些假设。
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引用次数: 3
Electromagnetic response of a structured drude material; a numerical study 结构材料的电磁响应数值研究
Pub Date : 2008-12-09 DOI: 10.1109/SMICND.2008.4703349
C. Kusko
In this work we have numerically investigated the electromagnetic response of a 2-dimensional nanostructured material with a Drude dispersive dielectric constant. The system consists in a square lattice of rings with a small positive dielectric constant realized in a material with negative permittivity. For certain frequencies of the exciting electromagnetic field, the nanostructured system presents a resonance which leads to a Lorentz type response. By performing finite difference time domain (FDTD) simulations and S-parameter calculations we have calculated the effective permittivity and permeability for this system.
本文对具有德鲁德色散介电常数的二维纳米结构材料的电磁响应进行了数值研究。该系统由具有小正介电常数的方形环晶格组成,在具有负介电常数的材料中实现。在一定频率的激励电磁场下,纳米结构系统产生共振,导致洛伦兹型响应。通过时域有限差分(FDTD)模拟和s参数计算,计算了该系统的有效介电常数和磁导率。
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引用次数: 0
Biohybrid surface preparation for protein/DNA microarray applications 蛋白质/DNA微阵列应用的生物杂化表面制备
Pub Date : 2008-12-09 DOI: 10.1109/SMICND.2008.4703368
M. Simion, L. Ruta, I. Kleps, C. Mihailescu, A. Bragaru, M. Miu, T. Ignat
The chemistry of slide substrates used in microarray technology is important, since it determines the spot morphology, signal intensity, low carry over and low evaporation rate. In this paper the experiments developed one substrate type - porous silicon as base for micro arrays with a gold layer film deposit on top. It was study two gold texture in order to find the best report between signal intensity and spot morphology. The experiments reveal that: (i) porous silicon substrate for both functionalization methods assure spots uniformity and a good relationship between signal intensity and solution concentration; (ii) it was observed bonds saturation for high concentrations for both types of samples.
用于微阵列技术的载片衬底的化学性质很重要,因为它决定了光斑形态、信号强度、低携带和低蒸发速率。本实验开发了一种衬底类型——多孔硅作为微阵列的基底,在其上沉积一层金薄膜。为了找到信号强度与光斑形态之间的最佳吻合,对两种金的纹理进行了研究。实验表明:(1)两种功能化方法的多孔硅衬底均能保证光斑均匀性,且信号强度与溶液浓度之间具有良好的关系;(ii)观察到两种类型的样品在高浓度下键饱和。
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引用次数: 0
Design and optimization of an electrostatic actuated micromirror with isolated bottom electrode on silicon substrate 硅衬底隔离电极静电驱动微镜的设计与优化
Pub Date : 2008-12-09 DOI: 10.1109/SMICND.2008.4703348
C. Florin, C. Tibeica, M. Purica
In this paper one type of an electrostatic actuated micromirror structure was simulated using Coventorware software, taking into account the material properties and structure geometry in order to optimize the structure. A characteristic response (displacement versus voltage) for simulated structure is the hysteresis loop of displacement. By reducing the length off the bottom electrode and also the length of the upper isolating layer we can obtain larger displacement of 12 mum. The optimized mirror reflective surface has a size of 120 mum times 120 mum.
本文利用Coventorware软件对一种静电驱动微镜结构进行了仿真,考虑了材料特性和结构几何,对结构进行了优化。模拟结构的一个特征响应(位移对电压)是位移的迟滞回线。通过减少底部电极的长度和上部隔离层的长度,我们可以获得更大的12 μ m的位移。优化后的镜面反射面尺寸为120 μ m × 120 μ m。
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引用次数: 1
Surface plasmon resonance in Ag nanoparticles deposited inside porous GaP templates 在多孔GaP模板内沉积银纳米粒子的表面等离子体共振
Pub Date : 2008-12-09 DOI: 10.1109/SMICND.2008.4703343
L. Sirbu, V. Sergentu, V. Ursaki, I. Tiginyanu, G. Piredda, R. Boyd
Surface plasmon resonance is studied for Ag nanoparticles electrochemically deposited on bulk GaP substrates and inside porous GaP templates. The size and density of Ag nanoparticles are controlled by the conditions of electrochemical deposition and thermal processing. The experimental data are analyzed in the frame of the Drude theory taking into account the parameters of the metallic nanoparticles and the morphology of the porous template. It is shown that porous templates provide wide possibilities for the control of the surface plasmon resonance frequency.
研究了电化学沉积在大块GaP衬底和多孔GaP模板内的银纳米粒子的表面等离子体共振。银纳米颗粒的大小和密度受电化学沉积和热处理条件的控制。考虑了金属纳米颗粒的参数和多孔模板的形貌,在Drude理论框架下对实验数据进行了分析。结果表明,多孔模板为表面等离子体共振频率的控制提供了广泛的可能性。
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引用次数: 2
Grazing incidence mirrors for EUV lithography EUV光刻用掠入射镜
Pub Date : 2008-12-09 DOI: 10.1109/SMICND.2008.4703399
V. Braic, M. Balaceanu, M. Braic
Extreme UV lithography is one of the most favoured options for the next generation of lithography systems, being considered as one of the keys of the 50 nm technology node. ZrN/TiN, multi-layered coatings for mirrors with high reflectivity at grazing incidence for EUV radiation (13.5) are proposed as coatings for the collection mirror in an EUVL system. These films were deposited on different substrates (Si, glass, and different metals) by d.c. magnetron sputtering and characterized by XRD, AES, EDX, AFM and EUV reflectivity using synchrotron radiation.
极紫外光刻技术是下一代光刻系统中最受欢迎的选择之一,被认为是50纳米技术节点的关键之一。提出了用于EUVL系统收集镜的ZrN/TiN多层涂层,该涂层具有较高的掠射反射率(13.5)。这些薄膜采用直流磁控溅射沉积在不同的衬底(Si、玻璃和不同的金属)上,并用XRD、AES、EDX、AFM和同步辐射EUV反射率对其进行了表征。
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引用次数: 2
Design and fabrication of Fresnel lenses 菲涅耳透镜的设计与制造
Pub Date : 2008-12-09 DOI: 10.1109/SMICND.2008.4703451
M. Kusko, A. Avram, D. Apostol
In this paper are presented the results on design, simulation and fabrication of Fresnel lenses. In the theoretical section the design concepts and BPM simulations results are presented, and in the experimental section details about controlled RIE etching process of various materials are provided. Much attention is dedicated to find the etching rate corresponding to etching process parameters and substrate type.
本文介绍了菲涅耳透镜的设计、仿真和制作的研究成果。在理论部分给出了设计概念和BPM仿真结果,在实验部分详细介绍了各种材料的受控RIE蚀刻过程。研究了与蚀刻工艺参数和衬底类型相对应的蚀刻速率。
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引用次数: 7
The laboratory technology of crystalline silicon solar cells 晶体硅太阳能电池的实验室技术
Pub Date : 2008-12-09 DOI: 10.1109/SMICND.2008.4703450
S. Burtescu, C. Parvulescu, F. Babarada, E. Manea
This paper presents the solar cells fabrication on multicrystalline silicon substrate with maximum efficiency of 13% by laboratory technology and main equipments used to characterization of such devices. The main objective was the minimizing the production cost maintaining the device performances. For these reasons the general concept of the technology consists of maximum seven steps, was used multicrystalline silicon substrate, the front surface solar cell was texturized in order to reduce the light reflectivity and the wafer back side was p+ diffused in order to have low series resistance.
本文介绍了利用实验室技术在多晶硅衬底上制备效率最高可达13%的太阳能电池,并介绍了用于该器件表征的主要设备。主要目标是最大限度地降低生产成本,保持设备的性能。由于这些原因,该技术的一般概念最多由七个步骤组成,采用多晶硅衬底,太阳能电池的前表面进行纹理化以降低光反射率,晶片背面进行p+扩散以具有低串联电阻。
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引用次数: 0
The carbon nanotube radio 碳纳米管收音机
Pub Date : 2008-12-09 DOI: 10.1109/SMICND.2008.4703331
M. Dragoman, D. Dragoman
The characteristics of the nanotube radio are improved considering new configurations based on quantum tunneling. In this way, the new invented nanotube radio could be tuned electrically in the entire FM or AM bands and biased with miniaturized batteries.
考虑基于量子隧道效应的新结构,纳米管无线电的特性得到了改善。通过这种方式,新发明的纳米管收音机可以在整个调频或调幅波段上进行电调谐,并使用小型化电池进行偏置。
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引用次数: 1
期刊
2008 IEEE International Conference on Semiconductor Electronics
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