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2019 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)最新文献

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TCAD investigation of zero-cost high voltage transistor architectures for logic memory circuits 逻辑存储电路零成本高压晶体管结构的TCAD研究
J. Locati, C. Rivero, J. Delalleau, V. Della Marca, K. Coulié, J. Innocenti, O. Paulet, A. Régnier, S. Niel
In this paper, a new device architecture has been studied by TCAD process simulations in order to provide the improvements on the electrical characteristics. We focus mainly on the drain-bulk junction breakdown voltage, of a double 130 nm poly gate transistor for Non-Volatile Memory technology. It is used as a word line select transistor, handling the drain voltage up to 13 V. The proposed structure has been implemented on silicon and the electrical measurements demonstrate the good predictability given by simulations. Finally, a new zero-cost added process asymmetric architecture is also studied to propose further improvements in terms of footprint or electrical characteristics.
本文通过TCAD过程仿真研究了一种新的器件结构,以改善其电气特性。我们主要关注用于非易失性存储器技术的双130 nm多栅极晶体管的漏极-体结击穿电压。它被用作字选线晶体管,处理漏极电压高达13v。所提出的结构已在硅上实现,电学测量结果表明,仿真结果具有良好的可预测性。最后,还研究了一种新的零成本附加工艺不对称结构,以提出在占地面积或电气特性方面的进一步改进。
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引用次数: 1
ATOMOS: An ATomistic MOdelling Solver for dissipative DFT transport in ultra-scaled HfS2 and Black phosphorus MOSFETs 超尺度HfS2和黑磷mosfet中耗散DFT输运的原子建模求解器
A. Afzalian, G. Pourtois
A state-of-the-art DFT-NEGF based ATOmistic - MOdelling Solver (ATOMOS) was developed and used to assess the physics and fundamental-performance potential of various scaled mono-layer transition-metal-dichalcogenides and blackphosphorus (BP) MOSFETs down to a gate length of 5 nm, including the effect of electron-phonon scattering. Our study highlights the good scalability and drive-current potential of HfS2 and the impact of optical-phonon scattering for BP.
开发了一种基于DFT-NEGF的最先进的原子建模求解器(ATOMOS),并用于评估栅极长度为5 nm的各种单层过渡金属-二硫化物和黑磷(BP) mosfet的物理和基本性能潜力,包括电子-声子散射的影响。我们的研究强调了HfS2良好的可扩展性和驱动电流潜力,以及光声子散射对BP的影响。
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引用次数: 14
An Efficient Method for Modeling Parasitic Light Sensitivity in Global Shutter CMOS Image Sensors 一种有效的全局快门CMOS图像传感器寄生光灵敏度建模方法
F. Pace, O. Marcelot, P. Martin-Gonthier, O. Saint-Pé, M. Bréart de Boisanger, Rose-Marie Sauvage, P. Magnan
Parasitic Light Sensitivity (PLS) is a key performance parameter for Global Shutter CMOS Image Sensors (GSCIS), which quantifies the sensor sensitivity to light when the shutter is supposed closed. Its modeling and understanding would allow for an optimization in developing future sensors. This paper aims to present an efficient method for 2D modeling PLS in GSCIS through separation of the optical problem from the carriers motion one. The optical problem is solved thanks to Finite-Differences Time-Domain (FDTD) simulations, while solution to the carriers motion problem is given through the application of the Boltzmann Transport Equation (BTE). This method is presented as a faster alternative to the coupled use of FDTD and TCAD simulations: since it is supposed that the two problem solutions are independent, the two simulations can be performed in parallel. The results show good match between the developed method and the TCAD solutions, thus showing fair agreement with experimental data, probably due to a poor knowledge of the back-end process.
寄生光灵敏度(PLS)是全局快门CMOS图像传感器(GSCIS)的一个关键性能参数,它量化了当快门关闭时传感器对光的灵敏度。它的建模和理解将允许在开发未来传感器的优化。本文旨在通过将光学问题与载波运动问题分离,提出一种有效的GSCIS中PLS二维建模方法。利用时域有限差分(FDTD)模拟解决了光学问题,利用玻尔兹曼输运方程(BTE)解决了载流子运动问题。这种方法被认为是FDTD和TCAD模拟耦合使用的一种更快的替代方法:因为假设两个问题的解决方案是独立的,所以两个模拟可以并行执行。结果表明,所开发的方法与TCAD解决方案匹配良好,与实验数据吻合较好,这可能是由于对后端过程的了解较差。
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引用次数: 1
Device and Circuit Level Gate Configuration Optimization for 2D Material Field-Effect Transistors 二维材料场效应晶体管的器件和电路级栅极结构优化
D. Verreck, G. Arutchelvan, M. Heyns, I. Radu
A tied double gate structure has been shown to deliver optimal device-level performance in few-layer MoS2 field-effect transistors. However, the enlarged gate capacitance from the added gate increases circuit-level power consumption and negatively affects minimum obtainable delay. Here, we therefore use a calibrated design-technology co-optimization approach that includes the interconnect load to evaluate back gate size reduction strategies in terms of power and delay. We consider the impact of a spacer region and varying interconnect length. We find that power consumption can be decreased by almost 20% by reducing the back gate overlap with the source-drain contacts without negatively affecting delay, as the carrier injection is occurring dominantly at the contact edges. We also show that opening the back gate underneath the channel provides additional benefit for locally interconnected devices.
捆绑双栅极结构已被证明可以在少层MoS2场效应晶体管中提供最佳的器件级性能。然而,增加的栅极增大的栅极电容增加了电路级功耗,并对最小可获得延迟产生负面影响。因此,在这里,我们使用一种校准的设计技术协同优化方法,其中包括互连负载,以评估功耗和延迟方面的后门尺寸减小策略。我们考虑间隔区域和不同的互连长度的影响。我们发现,由于载流子注入主要发生在接触边缘,通过减少与源漏触点的后门重叠,功耗可以降低近20%,而不会对延迟产生负面影响。我们还表明,打开通道下面的后门为本地互联设备提供了额外的好处。
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引用次数: 2
Variability of Threshold Voltage Induced by Work-Function Fluctuation and Random Dopant Fluctuation on Gate-All-Around Nanowire nMOSFETs 栅极全能纳米线nmosfet的功函数波动和随机掺杂波动诱导阈值电压的变化
W. Sung, Min-Hui Chuang, Yiming Li
We advance the localized work-function fluctuation (LWKF) method to examine the variability of threshold voltage $(mathrm{V}_{mathrm{t}mathrm{h}})$ induced by titanium nitride (TiN) metal-gate work-function fluctuation (WKF) and combined the WKF with the random dopant fluctuation (RDF) for various grain sizes on Si gate-all-around (GAA) nanowire (NW) MOSFETs. Our results show that the WKF-induced variability of $mathrm{V}_{mathrm{t}mathrm{h}}$ will be dominated by bamboo-type TiN grains and its impact is larger than that induced by the RDF with doped channel (RDF (doped)). Additionally, the variability of $mathrm{V}_{mathrm{t}mathrm{h}}$ induced by the WKF and the RDF (doped) could be treated as independent fluctuation sources because the channel dopants are away from the metal-gate/high-$kappa$ interface. Consequently, statistical models are further proposed for the $sigmamathrm{V}_{mathrm{t}mathrm{h}}$ induced by the WKF and the combined WKF with RDF (doped) by considering position effect of nanosized TiN grains.
提出了一种局域功函数波动(LWKF)方法来检测氮化钛(TiN)金属栅功函数波动(WKF)对阈值电压$(mathrm{V}_{mathrm{t}mathrm{h}})$的影响,并将WKF与不同晶粒尺寸的Si栅极全能级(GAA)纳米线mosfet的随机掺杂波动(RDF)相结合。我们的研究结果表明,wkf诱导的$mathrm{V}_{mathrm{t}mathrm{h}}$变率将以竹型TiN晶粒为主,其影响大于带掺杂通道的RDF (RDF(掺杂))。此外,由于通道掺杂剂远离金属栅/高$kappa$界面,WKF和RDF(掺杂)引起的$mathrm{V}_{mathrm{t}mathrm{h}}$的可变性可以视为独立的波动源。因此,考虑到纳米TiN颗粒的位置效应,进一步提出了WKF和WKF与RDF(掺杂)联合诱导$sigmamathrm{V}_{mathrm{t}mathrm{h}}$的统计模型。
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引用次数: 0
Trigonal Tellurium Nanostructure Formation Energy and Band gap 三角碲纳米结构的形成、能量和带隙
Aaron Kramer, M. L. Van de Put, C. Hinkle, W. Vandenberghe
Trigonal-Tellurium (t-Te), a van der Waals material, recently garnered interest to the nanoelectronics community because a high hole mobility, a high bandgap, and low temperature growth have all been observed in nanostructures. We analyze various t-Te nanostructures (nanowires and layers) using first principles simulations. We compare bandgap variation and relative stability among different shapes and sizes of Te nanostructures. We determine that nanowires host higher bandgaps and are preferentially grown, rather than layers of t-Te. We also propose a simplified model using the number of van der Waals interactions in explaining relative stability among t-Te nanostructures. Finally, we study uniquely shaped (auxiliary) t-Te nanostructures and verify that their stability obeys the same simplified model.
三角碲(t-Te)是一种范德华材料,最近引起了纳米电子学界的兴趣,因为在纳米结构中已经观察到高空穴迁移率、高带隙和低温生长。我们使用第一性原理模拟分析了各种t-Te纳米结构(纳米线和纳米层)。我们比较了不同形状和尺寸的碲纳米结构的带隙变化和相对稳定性。我们确定纳米线具有更高的带隙,并且优先生长,而不是t-Te层。我们还提出了一个简化模型,使用范德华相互作用的数量来解释t-Te纳米结构之间的相对稳定性。最后,我们研究了独特形状的(辅助)t-Te纳米结构,并验证了它们的稳定性遵循相同的简化模型。
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引用次数: 0
Surface Roughness Scattering in NEGF using self-energy formulation 基于自能公式的NEGF表面粗糙度散射
O. Badami, S. Berrada, H. Carrillo-Nuñez, C. Medina-Bailón, V. Georgiev, A. Asenov
The microelectronic industry has moved from matured bulk planar transistor to three-dimensional (3D) architectures with small non-trivial cross-sections and short channel lengths requiring quantum simulation techniques. In addition, novel materials, which enhance the transistor performance, are considered as silicon channel replacement. This necessitates the efficient inclusion of surface roughness scattering in quantum transport simulations. In this work, we report an approximate methodology to include surface roughness scattering in 3D Non-Equilibrium Green’s Function (NEGF) simulations using self-energy formulation within the self-consistent Born approximation (SCBA). The method is validated with the well established methodology of treating surface roughness as a variability source. We also extract the mobility from our simulations and then compare with to those reported in the literature.
微电子工业已经从成熟的块状平面晶体管过渡到三维(3D)架构,具有较小的非平凡横截面和需要量子模拟技术的短通道长度。此外,可以提高晶体管性能的新材料被认为是硅沟道的替代品。这就需要在量子输运模拟中有效地包含表面粗糙度散射。在这项工作中,我们报告了一种近似方法,该方法使用自洽Born近似(SCBA)中的自能公式将表面粗糙度散射包括在3D非平衡格林函数(NEGF)模拟中。该方法通过将表面粗糙度作为变异性源的成熟方法进行了验证。我们还从模拟中提取流动性,然后与文献中报道的流动性进行比较。
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引用次数: 5
Physical Insights into the Transport Properties of RRAMs Based on Transition Metal Oxides 基于过渡金属氧化物的rram输运性质的物理见解
T. Sadi, O. Badami, V. Georgiev, J. Ding, A. Asenov
Nowadays, resistive random-access memories (RRAMs) are widely considered as the next generation of non-volatile memory devices. Here, we employ a physics-based multi-scale kinetic Monte Carlo simulator to study the microscopic transport properties and characteristics of promising RRAM devices based on transition metal oxides, specifically hafnium oxide (HfOx) based structures. The simulator handles self-consistently electronic charge and thermal transport in the three-dimensional (3D) space, allowing the realistic study of the dynamics of conductive filaments responsible for switching. By presenting insightful results, we argue that using a simulator of a 3D nature, accounting for self-consistent fields and self-heating, is necessary for understanding switching in RRAMs. As an example, we look into the unipolar operation mode, by showing how only the correct inclusion of self-heating allows the proper reconstruction of the switching behaviour. The simulation framework is well-suited for exploring the operation and reliability of RRAMs, providing a reliable computational tool for the optimization of existing device technologies and the path finding and development of new RRAM options.
目前,电阻式随机存取存储器(rram)被广泛认为是下一代非易失性存储器件。在这里,我们采用基于物理的多尺度动力学蒙特卡罗模拟器来研究基于过渡金属氧化物,特别是基于氧化铪(HfOx)结构的有前途的RRAM器件的微观输运性质和特性。模拟器处理三维(3D)空间中自一致的电子电荷和热输运,允许对负责开关的导电细丝的动力学进行现实研究。通过提出富有洞察力的结果,我们认为使用3D性质的模拟器,考虑自一致场和自加热,对于理解rram中的开关是必要的。作为一个例子,我们通过展示如何只有正确地包含自加热才能正确地重建开关行为来研究单极操作模式。该仿真框架非常适合探索RRAM的运行和可靠性,为现有器件技术的优化以及新RRAM选项的寻路和开发提供可靠的计算工具。
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引用次数: 1
Progress in dislocation stress field model and its appications 位错应力场模型及其应用研究进展
U. Kwon, Jeong-Guk Min, Seon-Young Lee, Alexander Schmidt, D. Kim, Yasuyuki Kayama, Yutaka Nishizawa, Kiyoshi Ishikawa
TCAD prediction of the stress field generated by dislocation is crucial for the optimization of stressors for next generation logic devices. In this paper, we present a new hybrid approach for dislocation stress field calculation and its application to strained Si devices. New methodology combines an analytic stress field model for dislocation cores and consecutive FEM stress solving to get mechanical equilibrium. It was applied to the design optimization of dislocation stress memorization technique (D-SMT), its local layout effect (LLE) modeling, and the relaxation of lattice mismatch strain at Si/SiGe interface which degrades eSiGe stress. All the simulation results were verified with experimental results.
位错产生的应力场的TCAD预测对下一代逻辑器件的应力源优化至关重要。本文提出了一种新的位错应力场计算方法及其在应变硅器件中的应用。该方法将位错岩心的解析应力场模型与连续有限元应力求解相结合,得到力学平衡。将其应用于位错应力记忆技术(D-SMT)的设计优化、其局部布局效应(LLE)建模以及Si/SiGe界面点阵失配应变的松弛,从而降低eSiGe应力。仿真结果与实验结果进行了验证。
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引用次数: 1
Comprehensive Comparison of Switching Models for Perpendicular Spin-Transfer Torque MRAM Cells 垂直自旋传递转矩MRAM单元开关模型的综合比较
S. Fiorentini, R. Orio, W. Goes, J. Ender, V. Sverdlov
Simulations of free-layer switching in spin - transfer torque MRAM are usually performed with the torque computed approximately by assuming a position-independent electric current density through the structure. For high values of the tunneling magnetoresistance, this description is not accurate anymore, and one needs to solve the spin and charge drift-diffusion equations in the whole structure self-consistently. We compute the switching time distribution obtained by the self-consistent model and compare it to the switching times from the fixed current density approach. We show that, provided the current is appropriately adjusted, the simplified model can mimic the correct switching time distribution even in the case of high TMR.
自旋传递转矩MRAM中自由层开关的仿真通常是通过假设一个与位置无关的电流密度来近似计算转矩。当隧穿磁电阻较高时,这种描述不再准确,需要自洽地求解整个结构的自旋和电荷漂移-扩散方程。我们计算了自洽模型得到的开关时间分布,并将其与固定电流密度方法得到的开关时间进行了比较。我们证明,只要适当调整电流,简化模型即使在高TMR情况下也能模拟正确的开关时间分布。
{"title":"Comprehensive Comparison of Switching Models for Perpendicular Spin-Transfer Torque MRAM Cells","authors":"S. Fiorentini, R. Orio, W. Goes, J. Ender, V. Sverdlov","doi":"10.1109/SISPAD.2019.8870359","DOIUrl":"https://doi.org/10.1109/SISPAD.2019.8870359","url":null,"abstract":"Simulations of free-layer switching in spin - transfer torque MRAM are usually performed with the torque computed approximately by assuming a position-independent electric current density through the structure. For high values of the tunneling magnetoresistance, this description is not accurate anymore, and one needs to solve the spin and charge drift-diffusion equations in the whole structure self-consistently. We compute the switching time distribution obtained by the self-consistent model and compare it to the switching times from the fixed current density approach. We show that, provided the current is appropriately adjusted, the simplified model can mimic the correct switching time distribution even in the case of high TMR.","PeriodicalId":6755,"journal":{"name":"2019 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)","volume":"1 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"2019-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76896284","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
期刊
2019 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
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