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2019 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)最新文献

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Simulation of quantum dot based single-photon sources using the Schrödinger-Poisson-Drift-Diffusion-Lindblad system 利用Schrödinger-Poisson-Drift-Diffusion-Lindblad系统模拟基于量子点的单光子源
M. Kantner, T. Koprucki, H. Wünsche, U. Bandelow
The device-scale simulation of electrically driven quantum light sources based on semiconductor quantum dots requires a combination of the (semi-)classical semiconductor device equations with cavity quantum electrodynamics. We present a comprehensive quantum-classical simulation approach that self-consistently couples the (semi-)classical drift-diffusion system to a Lindblad-type quantum master equation. This allows to describe the spatially resolved carrier transport in complex, multi-dimensional device geometries along with the fully quantum-mechanical light-matter interaction in the quantum dot-cavity system. The latter gives access to important quantum optical figures of merit, in particular the second-order correlation function of the emitted radiation. In order to account for the quantum confined Stark effect in the device’s internal electric field, the system is solved along with a Schrödinger–Poisson problem, that describes the envelope wave functions and energy levels of the quantum dot carriers. The approach is demonstrated by numerical simulations of a single-photon emitting diode.
基于半导体量子点的电驱动量子光源的器件级模拟需要将(半)经典半导体器件方程与腔量子电动力学相结合。我们提出了一种综合的量子经典模拟方法,该方法将(半)经典漂移扩散系统自洽地耦合到lindblade型量子主方程。这允许描述复杂的空间分辨载流子输运,多维器件几何以及量子点腔系统中完全量子力学的光-物质相互作用。后者提供了获得重要的量子光学数字的机会,特别是发射辐射的二阶相关函数。为了解释设备内部电场中的量子受限斯塔克效应,该系统与Schrödinger-Poisson问题一起解决,该问题描述了量子点载流子的包络波函数和能级。通过单光子发光二极管的数值模拟验证了该方法的有效性。
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引用次数: 2
Modeling 1/f and Lorenzian noise in III-V MOSFETs III-V型mosfet的1/f和Lorenzian噪声建模
E. Caruso, F. Bettetti, L. D. Linz, D. Pin, M. Segatto, P. Palestri
We present an approach to model 1/f and random telegraph noise in TCAD combining the models for non-local tunneling to traps and generation/recombination noise. The TCAD results are compared with simple numerical expression to understand the influence of the device and trap parameters on the noise spectrum. The simulation deck is then used to compute the low-frequency noise spectrum in III-V MOSFETs using traps distributions extracted from multi-frequency C-V measurements.
我们提出了一种结合非局部隧道陷阱和产生/重组噪声模型的TCAD模型1/f和随机电报噪声的方法。将TCAD结果与简单的数值表达式进行比较,了解器件和陷阱参数对噪声谱的影响。然后使用仿真平台计算III-V mosfet中的低频噪声频谱,使用从多频C-V测量中提取的陷阱分布。
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引用次数: 2
Multiscale Modeling of Charge Trapping in Molecule Based Flash Memories 基于分子的快闪存储器中电荷捕获的多尺度建模
O. Badami, T. Sadi, V. Georgiev, F. Adamu-Lema, V. Thirunavukkarasu, J. Ding, A. Asenov
To keep up with the increase in demand for storing data, flash memories have been scaled down dramatically and stacked by the semiconductor industry. Furthermore, processing large data has highlighted the limitations of the von Neumann architecture. To overcome this, different types of memory devices like Resistive Random-Access Memories (RRAMs) have also gained a lot of importance. Hence, carrier dynamics in oxides has gained significant traction in recent years. In this work, we discuss the kinetic Monte Carlo methodology as implemented in our integrated simulation environment NESS (Nano-Electronic Simulation Software) that allows us to study carrier transport in the oxide using accurate physics based models. As an example, we study the retention characteristics in a molecule based flash memory.
为了跟上存储数据需求的增长,闪存已经被半导体行业大幅缩小并堆叠起来。此外,处理大数据也凸显了冯·诺伊曼架构的局限性。为了克服这个问题,不同类型的存储设备,如电阻随机存取存储器(rram)也变得非常重要。因此,近年来,氧化物中的载流子动力学得到了极大的关注。在这项工作中,我们讨论了在我们的集成模拟环境NESS(纳米电子模拟软件)中实现的动力学蒙特卡罗方法,该方法允许我们使用精确的基于物理的模型来研究氧化物中的载流子输运。作为一个例子,我们研究了分子基闪存的保留特性。
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引用次数: 2
Numerical Investigation of the Leakage Current and Blocking Capabilities of High-Power Diodes with Doped DLC Passivation Layers 掺DLC钝化层的大功率二极管泄漏电流和阻流能力的数值研究
L. Balestra, S. Reggiani, A. Gnudi, E. Gnani, G. Baccarani, J. Dobrzynska, J. Vobecký
Diamond-like carbon (DLC) is a very attractive material for Microelectronics, as it can be used to create robust passivation layers in semiconductor devices. In this work, the modelling of DLC in a TCAD framework is addressed, with special attention to the role played as the bevel coating of large-area high-voltage diodes. The TCAD simulations are nicely compared with experiments, giving rise to a detailed explanation of the role played by the DLC conductivity on the diode performance.
类金刚石碳(DLC)是一种非常有吸引力的材料,因为它可以用来在半导体器件中创建坚固的钝化层。在这项工作中,解决了DLC在TCAD框架中的建模问题,特别注意作为大面积高压二极管的斜面涂层所起的作用。TCAD模拟与实验进行了很好的比较,从而详细解释了DLC电导率对二极管性能的影响。
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引用次数: 1
TCAD investigation of zero-cost high voltage transistor architectures for logic memory circuits 逻辑存储电路零成本高压晶体管结构的TCAD研究
J. Locati, C. Rivero, J. Delalleau, V. Della Marca, K. Coulié, J. Innocenti, O. Paulet, A. Régnier, S. Niel
In this paper, a new device architecture has been studied by TCAD process simulations in order to provide the improvements on the electrical characteristics. We focus mainly on the drain-bulk junction breakdown voltage, of a double 130 nm poly gate transistor for Non-Volatile Memory technology. It is used as a word line select transistor, handling the drain voltage up to 13 V. The proposed structure has been implemented on silicon and the electrical measurements demonstrate the good predictability given by simulations. Finally, a new zero-cost added process asymmetric architecture is also studied to propose further improvements in terms of footprint or electrical characteristics.
本文通过TCAD过程仿真研究了一种新的器件结构,以改善其电气特性。我们主要关注用于非易失性存储器技术的双130 nm多栅极晶体管的漏极-体结击穿电压。它被用作字选线晶体管,处理漏极电压高达13v。所提出的结构已在硅上实现,电学测量结果表明,仿真结果具有良好的可预测性。最后,还研究了一种新的零成本附加工艺不对称结构,以提出在占地面积或电气特性方面的进一步改进。
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引用次数: 1
SISPAD 2019 Author Index SISPAD 2019作者索引
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引用次数: 0
A SPICE Compatible Compact Model for Process and Bias Dependence of HCD in HKMG FDSOI MOSFETs HCD在HKMG FDSOI mosfet中工艺和偏置依赖性的SPICE兼容紧凑模型
Uma Sharma, S. Mahapatra
A SPICE compatible model is developed for the time kinetics of linear drain current drift (ΔIDLIN) under Hot Carrier Degradation (HCD) stress in 28 nm Fully Depleted Silicon On Insulator (FDSOI) n-channel FETs having High-K Metal Gate (HKMG) gate stack. The impact of varying the drain (VD), gate (VG) and body (VBB) biases is modeled. The framework is also capable of modeling the channel length (LCH) and gate-oxide thickness (TOX) variations. Impact of Self-Heating Effect (SHE) has also been taken into consideration during ΔIDLIN modeling.
建立了具有高k金属栅极(HKMG)栅极堆叠的28 nm全贫绝缘体上硅(FDSOI) n沟道场效应管在热载流子降解(HCD)应力下线性漏极电流漂移(ΔIDLIN)的时间动力学SPICE兼容模型。对漏极(VD)、栅极(VG)和本体(VBB)偏置的影响进行了建模。该框架还能够对通道长度(LCH)和栅极氧化物厚度(TOX)变化进行建模。在ΔIDLIN建模时也考虑了自热效应(SHE)的影响。
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引用次数: 1
Relationship between capacitance and conductance in MOS capacitors MOS电容器中电容与电导的关系
E. Caruso, J. Lin, S. Monaghan, K. Cherkaoui, L. Floyd, F. Gity, P. Palestri, D. Esseni, L. Selmi, P. Hurley
In this work, we describe how the frequency dependence of conductance (G) and capacitance (C) of a generic MOS capacitor results in peaks of the functions $mathrm {G}/omega$ and $-omega mathrm {dC}/mathrm {d}omega$. By means of TCAD simulations, we show that $mathrm {G}/omega$ and $-omega mathrm {dC}/mathrm {d}omega$ peak at the same value and at the same frequency for every bias point from accumulation to inversion. We illustrate how the properties of the peaks change with the semiconductor doping ($mathrm {N}_{mathrm {D}}$), oxide capacitance (Cox), minority carrier lifetime $(tau_{mathrm{g}})$, interface defect parameters ($mathrm {lt pgt N}_{mathrm {IT}}$, $sigma$) and majority carrier dielectric relaxation time $(tau_{mathrm {r}})$. Finally, we demonstrate how these insights on $mathrm {G}/omega$ and $-omega mathrm {dC}/mathrm {d}omega$ can be used to extract Cox, $mathrm {lt pgt N}_{mathrm {D}}$ and $tau_{mathrm {g}}$ from InGaAs MOSCAP measurements
在这项工作中,我们描述了通用MOS电容器的电导(G)和电容(C)的频率依赖性如何导致函数$mathrm {G}/omega$和$-omega mathrm {dC}/mathrm {d}omega$的峰值。通过TCAD模拟,我们发现$mathrm {G}/omega$和$-omega mathrm {dC}/mathrm {d}omega$从积累到反演的每一个偏置点都在相同的值和相同的频率上达到峰值。我们说明了峰的性质如何随半导体掺杂($mathrm {N}_{mathrm {D}}$)、氧化物电容(Cox)、少数载流子寿命$(tau_{mathrm{g}})$、界面缺陷参数($mathrm {lt pgt N}_{mathrm {IT}}$, $sigma$)和多数载流子介电弛豫时间$(tau_{mathrm {r}})$而变化。最后,我们将演示如何使用这些关于$mathrm {G}/omega$和$-omega mathrm {dC}/mathrm {d}omega$的见解从InGaAs MOSCAP测量中提取Cox、$mathrm {lt pgt N}_{mathrm {D}}$和$tau_{mathrm {g}}$
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引用次数: 1
DFT study of graphene doping due to metal contacts 金属接触石墨烯掺杂的DFT研究
P. Khakbaz, F. Driussi, A. Gambi, Paolo Giannozzi, S. Venica, David Esseni, A. Gaho, S. Kataria, Max C. Lemme
The experimental results of Metal-graphene (M-G) contact resistance RC have been investigated in-depth by means of Density Functional Theory (DFT). The simulations allowed us to build a consistent picture explaining the RC dependence on the metal contact materials employed in this work and on the applied back-gate voltage. In this respect, the M-G distance is paramount in determining the RC behavior.
利用密度泛函理论(DFT)对金属-石墨烯(M-G)接触电阻RC的实验结果进行了深入研究。模拟使我们能够建立一个一致的图片,解释RC依赖于本工作中使用的金属接触材料和施加的后门电压。在这方面,M-G距离是决定RC行为的最重要因素。
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引用次数: 4
Trap Dynamics based 3D Kinetic Monte Carlo Simulation for Reliability Evaluation of UTBB MOSFETs 基于陷阱动力学的三维动力学蒙特卡罗模拟用于UTBB mosfet可靠性评估
Wangyong Chen, Linlin Cai, Xiaoyan Liu, G. Du
Trap dynamics based 3D Kinetic Monte Carlo (KMC) simulator is developed to offer physical insights into the electrical characteristics degradation and quantitative reliability evaluation for advanced MOSFETs. The physics-based 3D KMC simulation enables to reproduce the evolution of stress-induced charge distribution in the multi-layer dielectrics and identify the trap impact on the degradation of device performance. Simulation results of UTBB FDSOI MOSFETs reveal that assumption of the uniform charge distribution in the dielectrics induced by stress underestimates the statistical degradation and variability. It also shows that the higher intrinsic trap density of back-gate oxide leads to the larger degradation and its variability, especially for the increased back-gate bias case.
基于陷阱动力学的三维动力学蒙特卡罗(KMC)模拟器的开发,为先进的mosfet的电气特性退化和定量可靠性评估提供了物理见解。基于物理的3D KMC模拟能够再现多层电介质中应力诱导电荷分布的演变,并识别陷阱对器件性能退化的影响。UTBB FDSOI mosfet的仿真结果表明,假设介质中由应力引起的电荷均匀分布低估了统计退化和变异性。研究还表明,较高的反向氧化本质阱密度导致了更大的降解及其变异性,特别是在反向偏压增加的情况下。
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2019 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
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