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2019 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)最新文献

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Simulation of Statistical NBTI Degradation in 10nm Doped Channel pFinFETs 10nm掺杂通道pfinfet中NBTI统计降解的模拟
F. Adamu-Lema, V. Georgiev, A. Asenov
In this paper, by means of simulations, we have studied the impact of Negative Bias Temperature Instability (NBTI) in bulk silicon FinFETs suitable to the 10nm CMOS technology generation. Different levels of channel doping are considered in controlling the threshold voltage and the leakage of the FinFETs for SoC applications. The interplay between the initial statistical variability introduced by random discrete dopants, line edge roughness and metal gate granularity and the statistical variability introduced by different level of trapped charges resulting from NBTI degradation is studied in details. Results related to the time dependent variability and the correlation of key transistor figures of merit are also presented.
在本文中,我们通过模拟研究了负偏置温度不稳定性(NBTI)对适用于10nm CMOS技术一代的体硅finfet的影响。在控制阈值电压和SoC应用的finfet的泄漏时,考虑了不同水平的通道掺杂。详细研究了随机离散掺杂剂、线边缘粗糙度和金属栅粒度引入的初始统计变异性与NBTI降解引起的不同水平的捕获电荷引入的统计变异性之间的相互作用。本文还介绍了与时间相关的变异性和关键晶体管参数的相关性的结果。
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引用次数: 1
A model of the interface charge and chemical noise due to surface reactions in Ion Sensitive FETs 离子敏感场效应管中表面反应引起的界面电荷和化学噪声模型
Leandro Julian Mele, P. Palestri, L. Selmi
We present a model of arbitrary chemical reactions at the interface between a solid and an electrolyte, aimed at computing the interface charge build-up and surface potential shift of ion-sensitive FETs in the presence of interfering ions. An expression for the rms value of the surface charge fluctuation and the resulting uncertainty in the ion concentration is derived as well. Application to nanoelectronic ISFET-based sensors for ions and proteins is demonstrated.
我们提出了一个固体和电解质界面上任意化学反应的模型,旨在计算干扰离子存在下离子敏感场效应管的界面电荷积聚和表面电位移动。并推导了表面电荷波动的均方根值和离子浓度的不确定度表达式。展示了在纳米电子离子和蛋白质传感器中的应用。
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引用次数: 6
TCAD Framework to Estimate the NBTI Degradation in FinFET and GAA NSFET Under Mechanical Strain 机械应变下FinFET和GAA NSFET中NBTI退化的TCAD框架
R. Tiwari, N. Parihar, Karansingh Thakor, H. Wong, S. Mahapatra
A physics-based TCAD framework is used to estimate the interface trap generation (ΔNIT) during Negative Bias Temperature Instability (NBTI) stress in P-channel FinFET and Gate All Around (GAA) Nano-Sheet (NS) FET. The impact of mechanical strain due to channel length scaling (LCH) on ΔNIT generation is estimated. The bandstructure calculations are used to explain the impact of mechanical strain on ΔNIT generation.
使用基于物理的TCAD框架来估计p沟道FinFET和GAA纳米片FET在负偏置温度不稳定性(NBTI)应力下产生的界面陷阱(ΔNIT)。估计了通道长度缩放(LCH)引起的机械应变对ΔNIT生成的影响。带结构计算用于解释机械应变对ΔNIT生成的影响。
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引用次数: 3
Precise Transient Mechanism of Steep Subthreshold Slope PN-Body-Tied SOI-FET and Proposal of a New Structure for Reducing Leakage Current upon Turn-off 陡坡次阈值pn体系soi场效应管的精确瞬态机理及关断时减小漏电流的新结构
Takayuki Mori, J. Ida, Hiroki Endo, Y. Arai
In this study, the precise transient mechanism of the super-steep subthreshold slope PN-body-tied (PNBT) silicon on insulator field-effect transistor (SOI-FET) is clarified by using technology computer-aided design. We found out that the operation mechanism differs between the turn-on and turn-off. Additionally, a new PNBT SOI-FET structure with a second gate for the high-speed operation is proposed and we showed that the new structure can reduce the leakage current upon the turn-off.
本研究利用计算机辅助设计技术,明确了超陡亚阈斜率pn -体系硅(PNBT)绝缘子场效应晶体管(SOI-FET)的精确瞬态机理。我们发现打开和关闭的操作机制是不同的。此外,提出了一种新的PNBT SOI-FET结构,该结构具有用于高速运行的第二栅极,并且我们证明了新结构可以减少关断时的泄漏电流。
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引用次数: 2
Investigation of TCAD Calibration for Saturation and Tail Current of 6.5kV IGBTs 6.5kV igbt饱和电流和尾电流的TCAD标定研究
T. Suwa, S. Hayase
In this work we focus on two calibration methods to clarify a key point of TCAD calibration for turn-off waveforms and IV characteristics including the saturation currents of IGBTs at the same time. Simulated results with the method based on adjustments of the surface N+ and P+ depth ratio reproduce measured results of all calibration targets reasonably in terms of time and accuracy. On the other hand, simulated results by mainly calibrating parameters of the velocity saturation model for saturation currents hardly reproduce all calibration targets simultaneously. We explain the reason using the roughly approximated criteria of the dynamic punch-through oscillation and dynamic avalanche. We also analyze the temperature dependence of the tail current briefly which is one of the important design items of IGBTs.
在这项工作中,我们重点介绍了两种校准方法,以阐明TCAD校准的一个关键点,即关断波形和IV特性,同时包括igbt的饱和电流。基于地表N+和P+深度比调整方法的模拟结果在时间和精度上较好地再现了所有标定目标的测量结果。另一方面,主要校准饱和电流速度饱和模型参数的模拟结果很难同时再现所有校准目标。我们用动态冲穿振荡和动态雪崩的大致近似准则解释了原因。本文还简要分析了尾电流的温度依赖性,尾电流是igbt的重要设计项目之一。
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引用次数: 5
Deep Neural Network for Generation of the Initial Electrostatic Potential Profile 基于深度神经网络的初始静电电位分布生成
Seung-Cheol Han, Sung-Min Hong
A deep neural network is trained to learn the electrostatic potential of the semiconductor device. In order to demonstrate its feasibility, pn diodes are considered. Various pn diodes with different doping densities are generated and the numerical solutions are calculated. The resultant electrostatic potential profiles are used in the training phase. Our numerical results clearly demonstrate that the trained neural network can provide the initial electrostatic potential reasonably well. Since the initial electrostatic potential is improved, the Newton-Raphson loop for the nonlinear Poisson equation can be converged within a smaller number of iterations.
训练深度神经网络来学习半导体器件的静电势。为了证明其可行性,我们考虑了pn二极管。制备了不同掺杂密度的pn二极管,并计算了数值解。所得到的静电电位分布在训练阶段使用。数值结果清楚地表明,所训练的神经网络能较好地提供初始静电势。由于改进了初始静电势,非线性泊松方程的Newton-Raphson环可以在更少的迭代次数内收敛。
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引用次数: 4
Investigation and Modelling of Single-Molecule Organic Transistors 单分子有机晶体管的研究与建模
F. Torricelli, E. Macchia, P. Romele, K. Manoli, C. Franco, Z. Kovács-Vajna, G. Palazzo, G. Scamarcio, L. Torsi
Biofunctionalized organic transistors have been recently proposed as a simple wide-field single molecule technology. The further development and engineering of this disruptive technology urgently requires the understanding and modelling of the device operation. Here we show a physical-based numerical model of single molecule organic transistors. The model accurately reproduces the measurements in the whole range of protein concentrations with a unique set of parameters. The model provides quantitative information on the bioelectronic device operation. It is an important tool for further development of transistor-based single molecule.
生物功能化有机晶体管最近被提出作为一种简单的宽场单分子技术。这种颠覆性技术的进一步发展和工程迫切需要对设备操作的理解和建模。在这里,我们展示了一个基于物理的单分子有机晶体管的数值模型。该模型用一组独特的参数精确地再现了整个蛋白质浓度范围内的测量结果。该模型提供了生物电子器件操作的定量信息。这是进一步开发基于晶体管的单分子材料的重要工具。
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引用次数: 0
Transient Simulation of Field-Effect Biosensors How to Avoid Charge Screening Effect 场效应生物传感器瞬态仿真如何避免电荷筛选效应
Kyoung Yeon Kim, Byung-Gook Park
We developed a numerical simulator to model the operation of a bio-FET in transient state. The simulator takes a realistic device structure as a simulation domain, and it employs the drift-diffusion equation for ion/ channel transport, and the Ramo-Shockley theorem for accurate calculation of non- faradaic current. For efficient transient simulation, the implicit time integration scheme is employed where the solution at each time step is obtained from the coupled Newton-Raphson method. Using the simulator, we found that the sensitivity of bio- FET can be improved with transient measurement by redistribution of the mobile ions by an external electric field.
我们开发了一个数值模拟器来模拟生物场效应管的瞬态工作。该模拟器以实际器件结构为模拟域,采用离子/通道输运的漂移-扩散方程,利用Ramo-Shockley定理精确计算非法拉第电流。为了有效地进行瞬态仿真,采用隐式时间积分方法,利用耦合Newton-Raphson方法求得各时间步的解。利用该模拟器,我们发现利用外电场重新分配可移动离子的瞬态测量可以提高生物场效应管的灵敏度。
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引用次数: 0
Quantum Mechanical Simulations of the Impact of Surface Roughness on Nanowire TFET performance 表面粗糙度对纳米线TFET性能影响的量子力学模拟
Yunhe Guan, Zunchao Li, H. Carrillo-Nuñez, V. Georgiev, A. Asenov
In this work, the impact of the surface roughness (SR) on the variability in p-type InAs nanowire Tunnel FET (TFET) has been investigated. Using the Non-Equilibrium Green’s Function (NEGF) module implemented in the University of Glasgow quantum transport simulation tool, called NESS, we have simulated a statistical ensemble of 200 TFETs with unique SR profiles. The SR in each device is defined by the characteristic values of the SR root mean square amplitude (RMS) and correlation length. Our results show that the larger the RMS, the stronger the variability. We find that the SR-induced variability is reduced in InAs-Si heterostructure TFETs when comparing with their homogenous InAs counterpart. The impacts of both metal grain granularity and random discrete dopants on InAs TFETs are also studied. Our finding suggests that SR is the weakest source of statistical variability.
本文研究了表面粗糙度(SR)对p型InAs纳米线隧道场效应管(TFET)变异性的影响。使用格拉斯哥大学量子输运模拟工具(称为NESS)中实现的非平衡格林函数(NEGF)模块,我们模拟了具有独特SR曲线的200个tfet的统计集合。每个器件中的SR由SR均方根幅值(RMS)和相关长度的特征值定义。结果表明,均方根值越大,变异性越强。我们发现,与均匀的InAs相比,在InAs- si异质结构tfet中,sr诱导的可变性降低了。研究了金属晶粒粒度和随机离散掺杂剂对纳米钛酸钠tfet的影响。我们的发现表明,SR是统计变异性的最弱来源。
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引用次数: 3
Atomistic Modeling Of Nanoscale Ferroelectric Capacitors Using a Density Functional Theory And Non-Equilibrium Green’s-Function Method 基于密度泛函理论和非平衡格林函数方法的纳米铁电电容器原子建模
D. Stradi, U. G. Vej-Hansen, P. Khomyakov, Maeng-Eun Lee, G. Penazzi, A. Blom, J. Wellendorff, S. Smidstrup, K. Stokbro
We propose a first-principles atomistic method based on density functional theory and the non-equilibrium Green’s-function method to investigate the electronic and structural response of metal-insulator-metal capacitors under applied bias voltages. We validate our method by showing its usefulness in two paradigmatic cases where including finite-bias structural relaxation effects is critical to describe the device behavior: formation of dielectric dead layers in a paraelectric SRO|STO|SRO capacitor due to an applied bias voltage, and the switching behavior of a ferroelectric SRO|BTO|SRO capacitor due to an external electric field.
我们提出了基于密度泛函理论和非平衡格林函数方法的第一性原理原子方法来研究施加偏置电压下金属-绝缘体-金属电容器的电子和结构响应。我们通过在两种典型情况下验证了我们的方法的有效性,其中包括有限偏置结构松弛效应对于描述器件行为至关重要:由于施加偏置电压而在拟电SRO|STO|SRO电容器中形成介电死层,以及由于外电场而导致的铁电SRO|BTO|SRO电容器的开关行为。
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2019 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
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