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2019 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)最新文献

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Simulation and Investigation of Electrothermal Effects in Heterojunction Bipolar Transistors 异质结双极晶体管中电热效应的模拟与研究
Xujiao Gao, G. Hennigan, L. Musson, Andy Huang, Mihai Negoita
We present a comprehensive physics investigation of electrothermal effects in III-V heterojunction bipolar transistors (HBTs) via extensive Technology Computer Aided Design (TCAD) simulation and modeling. We show for the first time that the negative differential resistances of the common-emitter output responses in InGaP/GaAs HBTs are caused not only by the well-known carrier mobility reduction, but more importantly also by the increased base-to-emitter hole back injection, as the device temperature increases from self-heating. Both self-heating and impact ionization can cause fly-backs in the output responses under constant base-emitter voltages. We find that the fly-back behavior is due to competing processes of carrier recombination and self-heating or impact ionization induced carrier generation. These findings will allow us to understand and potentially improve the safe operating areas and circuit compact models of InGaP/GaAs HBTs.
我们通过广泛的技术计算机辅助设计(TCAD)仿真和建模,对III-V异质结双极晶体管(HBTs)的电热效应进行了全面的物理研究。我们首次表明,InGaP/GaAs hbt中共发射极输出响应的负差分电阻不仅是由众所周知的载流子迁移率降低引起的,更重要的是,随着器件自热温度的升高,基极到发射极的空穴反注入也增加了。在基极-发射极电压恒定的情况下,自热和冲击电离都会引起输出响应的反飞。我们发现飞回行为是由于载流子重组和自加热或冲击电离诱导的载流子生成的竞争过程。这些发现将使我们能够理解并潜在地改进InGaP/GaAs HBTs的安全操作区域和电路紧凑模型。
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引用次数: 2
Modeling Silicon CMOS devices for quantum computing 用于量子计算的硅CMOS器件建模
B. Venitucci, Jing Li, L. Bourdet, Y. Niquet
We review our recent results on the modeling of silicon spin qubits. We describe, in particular, the methodology we have set-up for the simulation of these devices, and give some illustrations on silicon-on-insulator (SOI) qubits. We discuss, in particular, the electrical manipulation of electron and hole spins.
我们回顾了硅自旋量子比特建模的最新成果。我们特别描述了我们为模拟这些器件而建立的方法,并给出了一些关于绝缘体上硅(SOI)量子比特的说明。我们特别讨论了电子和空穴自旋的电操纵。
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引用次数: 3
Molecular Dyanamics Simulation of Thermal Chemical Vapor Deposition for Hydrogenated Amorphous Silicon on Si (100) Substrate by Reactive Force-Field 反应力场模拟Si(100)衬底上氢化非晶硅热化学气相沉积的分子动力学
Naoya Uene, T. Mabuchi, M. Zaitsu, Shigeo Yasuhara, T. Tokumasu
We calculate a deposition process of hydrogenated amorphous silicon (a-Si:H) films on a silicon (100) substrate by reactive force-field molecular dynamics simulations. The influences of (a) substrate temperatures and (b) coverage of hydrogen atoms on the substrate on the adsorption probability are investigated, and it is found out that (a) the adsorption probability is almost constant for SiH2 and SiH3, but decrease with increase in the substrate temperature for SiH4, (b) it decreases with the increase in hydrogen coverage.
我们通过反应力场分子动力学模拟计算了氢化非晶硅(a- si:H)薄膜在硅(100)衬底上的沉积过程。考察了(a)底物温度和(b)底物上氢原子覆盖率对吸附概率的影响,发现(a) SiH2和SiH3的吸附概率基本不变,但SiH4的吸附概率随底物温度的升高而减小,(b)随氢覆盖率的增加而减小。
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引用次数: 0
TCAD-Enabled Machine Learning Defect Prediction to Accelerate Advanced Semiconductor Device Failure Analysis 支持tcad的机器学习缺陷预测加速先进半导体器件故障分析
C. Teo, Kain Lu Low, V. Narang, A. Thean
In this work, we present a unique approach of combining TCAD modelling and machine learning to detect the defect locations of a bridging defect in a single-fin FinFET. The prediction of the defect location is guided by the predictive model consisting of Random Forest algorithm which is trained with the measureable electrical attributes from the I-V. High accuracy in predicting the defect location is achieved by the proposed scheme which can further enhance the FA success rate, expediting the cycle of design to product.
在这项工作中,我们提出了一种结合TCAD建模和机器学习的独特方法来检测单鳍FinFET中桥接缺陷的缺陷位置。缺陷位置的预测由随机森林算法组成的预测模型指导,该模型由可测量的电属性训练而成。该方法对缺陷位置的预测精度较高,进一步提高了缺陷分析的成功率,加快了从设计到产品的周期。
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引用次数: 31
Thermal Conductivity of Silicon Nanowire Using Landauer Approach for Thermoelectric Applications 用兰道尔法研究热电应用中硅纳米线的导热性
Ming-Yi Lee, Min-Hui Chuang, Yiming Li, S. Samukawa
The electronic and phononic band structure of silicon nanowires embedded in SiGeo.3 is calculated and used to investigate its effect on the thermoelectric properties by Landauer approach. The contribution from elec-tron/hole on power factor and electronic thermal con-ductance is less than that from phonons on lattice ther-mal conductance.
嵌入SiGeo的硅纳米线的电子和声子带结构。用兰道尔法计算并研究了其对热电性能的影响。电子-电子/空穴对功率因数和电子热传导的贡献小于声子对晶格热传导的贡献。
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引用次数: 0
From devices to circuits: modelling the performance of 5nm nanosheets 从器件到电路:模拟5nm纳米片的性能
A. Brown, Liping Wang, P. Asenov, F. Klüpfel, B. Cheng, S. Martinie, O. Rozeau, S. Barraud, J. Barbe, C. Millar, J. Lorenz
A simulation flow for design-technology co-optimisation using 5nm stacked nanowires is presented. The effect of variation in key process parameters on the behaviour of benchmark circuits is examined through the use of variability-aware compact models, accounting for both global and local variability.
提出了一种利用5nm堆叠纳米线进行设计-技术协同优化的仿真流程。关键过程参数变化对基准电路行为的影响通过使用可变感知紧凑模型进行检查,考虑全局和局部可变性。
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引用次数: 0
Exact Correction of the Self-Force Problem in Monte Carlo Device Simulation 蒙特卡罗器件仿真中自力问题的精确修正
A. Ghetti
The self-force is a specific problem of self-consistent Monte Carlo-Poisson simulation resulting in an un-physical field component acting on a particle coming from the particle itself (the self-force). Several approaches have been proposed in literature to mitigate this problem, but all of them suffer to some extent of approximations and/or limitations. In this paper we propose a new and mathematically exact correction of the self-force problem based on a numerical approach. Although computationally expensive, it has no restriction and can be always applied. The new method has been tested on the difficult problem of plasma oscillation simulation providing the expected plasma energy from theory. Moreover, the same mathematical framework introduced here for the self-force correction can be readily applied also for the exact calculation of the reference force in the Particle-Particle-Particle-Mesh (P3M) method. The accuracy of such approach to P3M method is demonstrated by simulating the bulk low field mobility dependence on doping concentration.
自作用力是自洽蒙特卡罗-泊松模拟的一个特殊问题,它导致一个非物理场分量作用于来自粒子本身的粒子(自作用力)。文献中提出了几种方法来缓解这个问题,但它们都有一定程度的近似值和/或局限性。本文提出了一种新的、数学上精确的基于数值方法的自力问题的修正方法。尽管计算成本很高,但它没有限制,并且总是可以应用。该方法已在等离子体振荡模拟难题上进行了验证,并从理论上提供了期望的等离子体能量。此外,本文引入的自力修正的数学框架也可以很容易地应用于粒子-粒子-粒子-网格(P3M)方法中参考力的精确计算。通过模拟掺杂浓度对块体低场迁移率的依赖性,证明了该方法对P3M方法的准确性。
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引用次数: 0
Compact Modeling Perspetive – Bridge to Industrial Applications 紧凑的建模透视-桥梁到工业应用
M. Miura-Mattausch
This paper summarizes briefly compact-model development history, which is characterized by the evolution into the role as a bridge between devices and circuits. It is demonstrated that the task of predicting circuitry performance accurately has been realized by considering the microscopic features of the device phenomena in the compact model, which had been previously treated only macroscopically.
本文简要总结了紧凑模型的发展历史,其特点是演变为器件和电路之间的桥梁。结果表明,通过考虑紧凑模型中器件现象的微观特征,可以实现精确预测电路性能的任务,而以前只能从宏观上进行处理。
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引用次数: 2
A First Principle Insight into Defect Assisted Contact Engineering at the Metal-Graphene and Metal-Phosphorene Interfaces 金属-石墨烯和金属-磷烯界面缺陷辅助接触工程的第一性原理研究
J. Kumar, A. Meersha, Ansh, M. Shrivastava
In this work we have studied bonding nature of Graphene and Phosphorene with metal (Pd) followed by carrier transport behavior and contact resistance engineering across the metal-Graphene and the metal-Phosphorene interfaces using Density Functional Theory (DFT) and Non Equilibrium Green’s Function (NEGF) computational methods. We have studied, how carrier transports at the interfaces is limited by van der Waals (vdW) gap across the interfaces and how the gap can be reduced by creating the Carbon vacancy (defect engineering) at the Graphene-Palladium interface. We have seen that the defect engineering enhances the Carbon-Palladium bond at the interface which reduces the van der Walls (vdW) gap, hence contact resistance due to corresponding reduction in the tunneling barrier width at the interface. We have also studied that the defect engineering (Phosphorous vacancy) at the Phosphorene-Palladium interface is not effective as Graphene-Palladium interface because it has less interfacial (vdW) gap than Graphene-Palladium interface intrinsically.
在这项工作中,我们研究了石墨烯和磷烯与金属(Pd)的键合性质,然后利用密度泛函理论(DFT)和非平衡格林函数(NEGF)计算方法研究了金属-石墨烯和金属-磷烯界面上的载流子输运行为和接触电阻工程。我们研究了界面上的载流子输运如何受到界面上范德华间隙的限制,以及如何通过在石墨烯-钯界面上创造碳空位(缺陷工程)来减少这种间隙。我们已经看到,缺陷工程增强了界面处的碳-钯键,减小了范德华斯(vdW)间隙,从而减小了界面处的隧道势垒宽度,从而减少了接触电阻。我们还研究了在磷-钯界面处的缺陷工程(磷空位)并不像石墨烯-钯界面那样有效,因为它具有比石墨烯-钯界面更小的界面间隙(vdW)。
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引用次数: 1
Polarization Effect Induced by Discrete Impurity at Semiconductor/Oxide Interface in Si-FinFET Si-FinFET中半导体/氧化物界面离散杂质诱导的极化效应
K. Yoshida, Kohei Tsukahara, N. Sano
The random dopant fluctuation (RDF) is a dominant source of statistical variability for nano-scale metal-oxide-semiconductor-field-effect-transistors (MOSFETs). We study RDF with the polarization effect induced by the discreteness of impurity and the dielectric mismatch at the Si/oxide interface by 3D drift-diffusion simulation. The charge distribution model employed in this study for the discrete impurity clarifies RDF dependence on the dielectric constant of oxide material. It is shown that explicit modeling of the polarization charge associated with discrete impurities is inevitable for reliable prediction of threshold voltage.
随机掺杂波动(RDF)是纳米级金属氧化物半导体场效应晶体管(mosfet)统计变变性的主要来源。采用三维漂移-扩散模拟的方法研究了杂质离散和硅/氧化物界面处介电失配引起的RDF极化效应。本研究采用的离散杂质电荷分布模型澄清了RDF对氧化物介质常数的依赖。结果表明,为了可靠地预测阈值电压,必须对与离散杂质相关的极化电荷进行显式建模。
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2019 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
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