首页 > 最新文献

70th Device Research Conference最新文献

英文 中文
Ultrafast spin torque memory based on magnetic tunnel junctions with combined in-plane and perpendicular polarizers 基于面内和垂直偏振片复合磁隧道结的超快自旋转矩记忆
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6256944
I. Krivorotov, G. Rowlands, T. Rahman, J. Katine, J. Langer, A. Lyle, H. Zhao, J. G. Alzate, A. Kovalev, Y. Tserkovnyak, Z. Zeng, H. W. Jiang, K. Galatsis, Y. Huai, P. Amiri, K. Wang, J. Wang
Since the initial prediction and experimental demonstration of magnetization reversal by spin transfer torque (STT), there has been continuous progress toward the development of nonvolatile magnetic random access memory based on STT switching (STT-RAM) in nanoscale magnetic tunnel junctions (MTJs). In the most common STT-RAM configuration shown in Fig. 1(a), the magnetic moments of the free layer and the pinned polarizing layer of an MTJ lie collinear to one another in the plane of the junction. In this configuration (in-plane STT-RAM or IST-RAM), STT is small during the initial stages of the free layer's magnetic moment reversal, resulting in a relatively long nanosecond-scale switching time. Switching can be greatly accelerated in an alternative STT-RAM configuration, in which a second polarizer with magnetic moment perpendicular to the MTJ plane is added to the magnetic multilayer (orthogonal STT-RAM or OST-RAM). The initial STT from the perpendicular polarizer is large and has been predicted to induce ultrafast precessional switching of the free layer's magnetization on a time scale of 100 ps. The differences in the reversal modes expected for the IST-RAM and OST-RAM devices are illustrated in Figs. 1(c) and 1(d), wherein magnetization switching trajectories are shown for the two types of memory.
自自旋传递转矩(STT)磁化反转的初步预测和实验证明以来,在纳米级磁隧道结(MTJs)中基于STT开关(STT- ram)的非易失性磁随机存取存储器(STT- ram)的开发不断取得进展。在图1(a)所示的最常见的STT-RAM结构中,MTJ的自由层和钉住的极化层的磁矩在结平面上彼此共线。在这种配置(平面内STT- ram或IST-RAM)中,STT在自由层磁矩反转的初始阶段很小,导致相对较长的纳秒级切换时间。在另一种STT-RAM配置中,在磁性多层(正交STT-RAM或OST-RAM)中添加磁矩垂直于MTJ平面的第二偏振片,可以大大加速开关。垂直偏振器的初始STT很大,预计会在100 ps的时间尺度上诱导自由层磁化的超快进动切换。IST-RAM和OST-RAM器件预期反转模式的差异如图1(c)和1(d)所示,其中显示了两种类型存储器的磁化切换轨迹。
{"title":"Ultrafast spin torque memory based on magnetic tunnel junctions with combined in-plane and perpendicular polarizers","authors":"I. Krivorotov, G. Rowlands, T. Rahman, J. Katine, J. Langer, A. Lyle, H. Zhao, J. G. Alzate, A. Kovalev, Y. Tserkovnyak, Z. Zeng, H. W. Jiang, K. Galatsis, Y. Huai, P. Amiri, K. Wang, J. Wang","doi":"10.1109/DRC.2012.6256944","DOIUrl":"https://doi.org/10.1109/DRC.2012.6256944","url":null,"abstract":"Since the initial prediction and experimental demonstration of magnetization reversal by spin transfer torque (STT), there has been continuous progress toward the development of nonvolatile magnetic random access memory based on STT switching (STT-RAM) in nanoscale magnetic tunnel junctions (MTJs). In the most common STT-RAM configuration shown in Fig. 1(a), the magnetic moments of the free layer and the pinned polarizing layer of an MTJ lie collinear to one another in the plane of the junction. In this configuration (in-plane STT-RAM or IST-RAM), STT is small during the initial stages of the free layer's magnetic moment reversal, resulting in a relatively long nanosecond-scale switching time. Switching can be greatly accelerated in an alternative STT-RAM configuration, in which a second polarizer with magnetic moment perpendicular to the MTJ plane is added to the magnetic multilayer (orthogonal STT-RAM or OST-RAM). The initial STT from the perpendicular polarizer is large and has been predicted to induce ultrafast precessional switching of the free layer's magnetization on a time scale of 100 ps. The differences in the reversal modes expected for the IST-RAM and OST-RAM devices are illustrated in Figs. 1(c) and 1(d), wherein magnetization switching trajectories are shown for the two types of memory.","PeriodicalId":6808,"journal":{"name":"70th Device Research Conference","volume":"1 1","pages":"211-212"},"PeriodicalIF":0.0,"publicationDate":"2012-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88924385","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Epitaxial Si punch-through based selector for bipolar RRAM 基于外延Si穿孔的双极RRAM选择器
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6256979
P. Bafna, P. Karkare, S. Srinivasan, S. Chopra, S. Lashkare, Y. Kim, S. Srinivasan, S. Kuppurao, S. Lodha, U. Ganguly
Resistive RAM is a very promising candidate for high density non-volatile memory. Although bipolar operation has been shown to work at lower current (essential for low power, mobile computing) [1], a suitable selector device that delivers high current density and high on/off current ratio is challenging [2–4]. We demonstrate a 4F2 bipolar selector device based on the punch-through mechanism. An npn vertical junction device fabricated using in-situ doped epitaxial silicon is presented. Superior on-current density (Jon=1MA/cm2) and high on-off current ratio (Ion/Ioff) of 300–5000 is experimentally demonstrated. TCAD simulations based performance, variability and scalability are presented.
电阻式RAM是一种非常有前途的高密度非易失性存储器。虽然双极操作已被证明可以在较低的电流(对于低功耗、移动计算至关重要)下工作,但一个合适的选择器设备可以提供高电流密度和高通/关电流比,这是一个挑战[2-4]。我们展示了一种基于穿孔机制的4F2双极选择器装置。介绍了一种利用原位掺杂外延硅制备的npn垂直结器件。实验证明了优越的通流密度(Jon=1MA/cm2)和300-5000的高通断电流比(Ion/Ioff)。提出了基于性能、可变性和可扩展性的TCAD仿真。
{"title":"Epitaxial Si punch-through based selector for bipolar RRAM","authors":"P. Bafna, P. Karkare, S. Srinivasan, S. Chopra, S. Lashkare, Y. Kim, S. Srinivasan, S. Kuppurao, S. Lodha, U. Ganguly","doi":"10.1109/DRC.2012.6256979","DOIUrl":"https://doi.org/10.1109/DRC.2012.6256979","url":null,"abstract":"Resistive RAM is a very promising candidate for high density non-volatile memory. Although bipolar operation has been shown to work at lower current (essential for low power, mobile computing) [1], a suitable selector device that delivers high current density and high on/off current ratio is challenging [2–4]. We demonstrate a 4F2 bipolar selector device based on the punch-through mechanism. An npn vertical junction device fabricated using in-situ doped epitaxial silicon is presented. Superior on-current density (Jon=1MA/cm2) and high on-off current ratio (Ion/Ioff) of 300–5000 is experimentally demonstrated. TCAD simulations based performance, variability and scalability are presented.","PeriodicalId":6808,"journal":{"name":"70th Device Research Conference","volume":"4 1","pages":"115-116"},"PeriodicalIF":0.0,"publicationDate":"2012-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89116208","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
Electric field driven domain wall transfer in hybrid structures 杂化结构中电场驱动的畴壁转移
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6256982
Xiaopeng Duan, V. Stephanovich, Y. Semenov, H. Fangohr, M. Franchin, K. W. Kim
We proved for the first time the feasibility of the DW motion control by electric field using the exchange interaction between Gr electrons and the FMI layer. A device prototype is designed and modeled. It is shown an effective magnetic field at 10-100 Oe is generated upon the DW, which leads to a velocity around 30 m/s. 0.5-1 GHz operating frequency is expected in this condition as a bi-state memory. No active current is present and the equivalent circuit model is a set of capacitors. Therefore, low energy consumption is achieved, about 10-16 J/switch.
利用Gr电子与FMI层之间的交换相互作用,首次证明了电场控制DW运动的可行性。设计并建模了器件原型。结果表明,在DW上产生了10-100 Oe的有效磁场,导致速度约为30 m/s。在这种情况下,工作频率预计为0.5-1 GHz,作为双态存储器。不存在有源电流,等效电路模型是一组电容器。因此,实现了低能耗,约10- 16j /开关。
{"title":"Electric field driven domain wall transfer in hybrid structures","authors":"Xiaopeng Duan, V. Stephanovich, Y. Semenov, H. Fangohr, M. Franchin, K. W. Kim","doi":"10.1109/DRC.2012.6256982","DOIUrl":"https://doi.org/10.1109/DRC.2012.6256982","url":null,"abstract":"We proved for the first time the feasibility of the DW motion control by electric field using the exchange interaction between Gr electrons and the FMI layer. A device prototype is designed and modeled. It is shown an effective magnetic field at 10-100 Oe is generated upon the DW, which leads to a velocity around 30 m/s. 0.5-1 GHz operating frequency is expected in this condition as a bi-state memory. No active current is present and the equivalent circuit model is a set of capacitors. Therefore, low energy consumption is achieved, about 10-16 J/switch.","PeriodicalId":6808,"journal":{"name":"70th Device Research Conference","volume":"1 1","pages":"121-122"},"PeriodicalIF":0.0,"publicationDate":"2012-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75969881","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Can quasi-saturation in the output characteristics of short-channel graphene field-effect transistors be engineered? 短沟道石墨烯场效应晶体管输出特性的准饱和可以被设计出来吗?
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6256951
K. Ganapathi, M. Lundstrom, S. Salahuddin
To summarize, we propose that quasi-saturation in short-channel GFET output characteristics can be effectively engineered by doping in the drain-underlap region and show using self-consistent NEGF simulations that a 0.2% p-type doping can enhance output resistance by 13x and intrinsic gain by 4x in 20 nm gate-length GFETs.
综上所述,我们提出在漏极-底迭区掺杂可以有效地设计短沟道GFET输出特性的准饱和,并使用自一致的NEGF模拟表明,0.2% p型掺杂可以使20nm栅长GFET的输出电阻提高13倍,固有增益提高4倍。
{"title":"Can quasi-saturation in the output characteristics of short-channel graphene field-effect transistors be engineered?","authors":"K. Ganapathi, M. Lundstrom, S. Salahuddin","doi":"10.1109/DRC.2012.6256951","DOIUrl":"https://doi.org/10.1109/DRC.2012.6256951","url":null,"abstract":"To summarize, we propose that quasi-saturation in short-channel GFET output characteristics can be effectively engineered by doping in the drain-underlap region and show using self-consistent NEGF simulations that a 0.2% p-type doping can enhance output resistance by 13x and intrinsic gain by 4x in 20 nm gate-length GFETs.","PeriodicalId":6808,"journal":{"name":"70th Device Research Conference","volume":"100 3 1","pages":"85-86"},"PeriodicalIF":0.0,"publicationDate":"2012-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77098427","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Possible applications of topological insulator thin films for tunnel FETs 拓扑绝缘体薄膜在隧道场效应管中的可能应用
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6256984
Jiwon Chang, L. Register, S. Banerjee
We have begun to explore the possibility of thin film three dimensional (3D) topological insulator (TI) based tunnel FETs (TFETs), specifically Bi2Se3 here, using quantum ballistic transport simulations with a tight-binding Hamiltonian in the atomic orbital basis including spin degrees of freedom. TI-based TFETs would be analogous in some ways to graphene nanoribbon TFETs, but without the sensitivity to ribbon width and edge roughness, and in some ways to narrow gap III-V TFETs but with substantially thinner quantum well widths.
我们已经开始探索基于薄膜三维(3D)拓扑绝缘体(TI)的隧道场效应管(tfet)的可能性,特别是在这里的Bi2Se3,使用原子轨道基中包含自旋自由度的紧密结合哈密顿量的量子弹道输运模拟。钛基tfet在某些方面类似于石墨烯纳米带tfet,但没有对带宽度和边缘粗糙度的敏感性,并且在某些方面缩小了III-V型tfet的间隙,但量子阱宽度明显更薄。
{"title":"Possible applications of topological insulator thin films for tunnel FETs","authors":"Jiwon Chang, L. Register, S. Banerjee","doi":"10.1109/DRC.2012.6256984","DOIUrl":"https://doi.org/10.1109/DRC.2012.6256984","url":null,"abstract":"We have begun to explore the possibility of thin film three dimensional (3D) topological insulator (TI) based tunnel FETs (TFETs), specifically Bi2Se3 here, using quantum ballistic transport simulations with a tight-binding Hamiltonian in the atomic orbital basis including spin degrees of freedom. TI-based TFETs would be analogous in some ways to graphene nanoribbon TFETs, but without the sensitivity to ribbon width and edge roughness, and in some ways to narrow gap III-V TFETs but with substantially thinner quantum well widths.","PeriodicalId":6808,"journal":{"name":"70th Device Research Conference","volume":"74 1","pages":"31-32"},"PeriodicalIF":0.0,"publicationDate":"2012-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77404666","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Will strong quantum confinement effect limit low VCC logic application of III–V FINFETs? 强量子约束效应是否会限制III-V型finfet的低VCC逻辑应用?
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6256968
A. Nidhi, V. Saripalli, V. Narayanan, Y. Kimura, R. Arghavani, S. Datta
We compared the impact of Fin LER and Lg variations in Si and In0.53Ga0.47As FINFETs, for the first time. Better electrostatics in In0.53Ga0.47As than in Si, due to higher effective channel length from lower SD doping in In0.53Ga0.47As, reduces Lg variation impact. Strong quantum confinement effects in In0.53Ga0.47As FINFET make them more sensitive to Fin LER variation than Si. However, the lower sensitivity to LG variation in In0.53Ga0.47As FINFETs compensates for the increased variation from quantum confinement effect. Interestingly, by considering both Fin LER and LG variations, both devices show similar sensitivity to variation. We conclude that tighter control of Fin LER in In0.53Ga0.47As together with improved short channel immunity will make III-VFINFETs a promising device for 0.5V and below logic applications.
我们首次比较了Si和In0.53Ga0.47As finfet中Fin LER和Lg变化的影响。In0.53Ga0.47As的静电性能优于Si,这是由于In0.53Ga0.47As中较低SD掺杂的有效沟道长度较高,减小了Lg变化的影响。In0.53Ga0.47As FINFET的强量子约束效应使其对finler的变化比Si更敏感。然而,In0.53Ga0.47As finfet对LG变化的较低灵敏度补偿了量子限制效应增加的变化。有趣的是,通过考虑Fin LER和LG的变化,两种设备对变化的敏感性相似。我们得出结论,在In0.53Ga0.47As中更严格地控制Fin - LER以及改进的短通道抗扰度将使iii - vfinfet成为0.5V及以下逻辑应用的有前途的器件。
{"title":"Will strong quantum confinement effect limit low VCC logic application of III–V FINFETs?","authors":"A. Nidhi, V. Saripalli, V. Narayanan, Y. Kimura, R. Arghavani, S. Datta","doi":"10.1109/DRC.2012.6256968","DOIUrl":"https://doi.org/10.1109/DRC.2012.6256968","url":null,"abstract":"We compared the impact of Fin LER and Lg variations in Si and In0.53Ga0.47As FINFETs, for the first time. Better electrostatics in In0.53Ga0.47As than in Si, due to higher effective channel length from lower SD doping in In0.53Ga0.47As, reduces Lg variation impact. Strong quantum confinement effects in In0.53Ga0.47As FINFET make them more sensitive to Fin LER variation than Si. However, the lower sensitivity to LG variation in In0.53Ga0.47As FINFETs compensates for the increased variation from quantum confinement effect. Interestingly, by considering both Fin LER and LG variations, both devices show similar sensitivity to variation. We conclude that tighter control of Fin LER in In0.53Ga0.47As together with improved short channel immunity will make III-VFINFETs a promising device for 0.5V and below logic applications.","PeriodicalId":6808,"journal":{"name":"70th Device Research Conference","volume":"85 4 1","pages":"231-232"},"PeriodicalIF":0.0,"publicationDate":"2012-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76195693","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Electrical evidence of disorder at the SiO2/4H-SiC MOS interface and its effect on electron transport SiO2/4H-SiC MOS界面无序的电学证据及其对电子传递的影响
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6257045
S. Swandono, A. Penumatcha, J. Cooper
Silicon carbide Schottky diodes have been in commercial production since 2002, their use has saved about $2B in energy and prevented about 10M tons of CO2 from being released into the atmosphere worldwide, equivalent to taking 1.7M automobiles off the roads. Recently, SiC power DMOSFETs entered commercial production, ushering in a new era of opportunity for wide bandgap power electronics. Going forward, high-voltage SiC MOSFETs and IGBTs hold the key to more efficient energy utilization and renewable energy production.
自2002年以来,碳化硅肖特基二极管已投入商业生产,其使用已节省了约20亿美元的能源,并在全球范围内减少了约1000万吨二氧化碳的排放,相当于减少了170万辆汽车的行驶。最近,SiC功率dmosfet进入商业化生产,迎来了宽带隙功率电子的新时代。展望未来,高压SiC mosfet和igbt是提高能源利用效率和可再生能源生产的关键。
{"title":"Electrical evidence of disorder at the SiO2/4H-SiC MOS interface and its effect on electron transport","authors":"S. Swandono, A. Penumatcha, J. Cooper","doi":"10.1109/DRC.2012.6257045","DOIUrl":"https://doi.org/10.1109/DRC.2012.6257045","url":null,"abstract":"Silicon carbide Schottky diodes have been in commercial production since 2002, their use has saved about $2B in energy and prevented about 10M tons of CO2 from being released into the atmosphere worldwide, equivalent to taking 1.7M automobiles off the roads. Recently, SiC power DMOSFETs entered commercial production, ushering in a new era of opportunity for wide bandgap power electronics. Going forward, high-voltage SiC MOSFETs and IGBTs hold the key to more efficient energy utilization and renewable energy production.","PeriodicalId":6808,"journal":{"name":"70th Device Research Conference","volume":"25 1","pages":"167-168"},"PeriodicalIF":0.0,"publicationDate":"2012-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88950119","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Graphene field-effect transistors with self-aligned spin-on-doping of source/drain access regions 具有自对准自旋掺杂的石墨烯场效应晶体管
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6256963
H. Movva, M. Ramón, C. Corbet, F. Chowdhury, G. Carpenter, E. Tutuc, S. Banerjee
The exceptional electronic properties of graphene field-effect transistors (GFETs) make them a promlsmg replacement for conventional Si CMOS transistors for high frequency analog applications. Radio frequency GFETs with intrinsic cut-off frequencies as high as 300GHz have been reported, with theoretically predicted THz frequencies only being limited by fabrication challenges. A major factor responsible for degradation of GFET performance is high series resistance of the access regions between the source/drain contacts and the top-gated graphene channel, which reduces maximum possible drive currents. A back-gate bias can be used to modulate this resistance, but this approach does not provide for independent control of mUltiple GFETs on the same substrate and for GFETs on insulating substrates. GFETs with self-aligned gates overcome this problem by reducing the access region resistance, but their fabrication is not straightforward. Here, we propose a simple scheme of improving GFET performance by reducing the source/drain access resistance using self-aligned charge-transfer doping. A novel and controllable way of "spin-on-doping" of the access regions with chemical dopants is demonstrated.
石墨烯场效应晶体管(gfet)的特殊电子特性使其成为传统Si CMOS晶体管在高频模拟应用中的理想替代品。据报道,射频gfet的固有截止频率高达300GHz,理论上预测的太赫兹频率仅受制造挑战的限制。导致GFET性能下降的一个主要因素是源极/漏极触点和顶门控石墨烯通道之间的访问区域的串联电阻高,这会降低最大可能的驱动电流。反向偏置可以用来调制这种电阻,但这种方法不能提供对同一衬底上的多个gfet和绝缘衬底上的gfet的独立控制。具有自对准栅极的gfet通过降低存取区电阻克服了这个问题,但是它们的制造并不简单。在这里,我们提出了一种简单的方案,通过使用自对准电荷转移掺杂降低源/漏极通路电阻来提高GFET的性能。提出了一种新型的、可控的化学掺杂“自旋-掺杂”方法。
{"title":"Graphene field-effect transistors with self-aligned spin-on-doping of source/drain access regions","authors":"H. Movva, M. Ramón, C. Corbet, F. Chowdhury, G. Carpenter, E. Tutuc, S. Banerjee","doi":"10.1109/DRC.2012.6256963","DOIUrl":"https://doi.org/10.1109/DRC.2012.6256963","url":null,"abstract":"The exceptional electronic properties of graphene field-effect transistors (GFETs) make them a promlsmg replacement for conventional Si CMOS transistors for high frequency analog applications. Radio frequency GFETs with intrinsic cut-off frequencies as high as 300GHz have been reported, with theoretically predicted THz frequencies only being limited by fabrication challenges. A major factor responsible for degradation of GFET performance is high series resistance of the access regions between the source/drain contacts and the top-gated graphene channel, which reduces maximum possible drive currents. A back-gate bias can be used to modulate this resistance, but this approach does not provide for independent control of mUltiple GFETs on the same substrate and for GFETs on insulating substrates. GFETs with self-aligned gates overcome this problem by reducing the access region resistance, but their fabrication is not straightforward. Here, we propose a simple scheme of improving GFET performance by reducing the source/drain access resistance using self-aligned charge-transfer doping. A novel and controllable way of \"spin-on-doping\" of the access regions with chemical dopants is demonstrated.","PeriodicalId":6808,"journal":{"name":"70th Device Research Conference","volume":"14 1","pages":"175-176"},"PeriodicalIF":0.0,"publicationDate":"2012-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89961236","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Epitaxialy defined (ED) FinFET: to reduce VT variability and enable multiple VT 外延定义(ED) FinFET:减少VT变异性并实现多个VT
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6256997
S. Mittal, S. Gupta, A. Nainani, M. Abraham, K. Schuegraf, S. Lodha, U. Ganguly
Device variability has become a major concern for CMOS technology [1]. Various sources of variability include Random Dopant Fluctuation (RDF), Gate Edge Roughness (GER) and Line Edge Roughness (LER) [2]. The introduction of FinFETs at 22nm node has two issues. Firstly, the effect of RDF is considerably reduced due to undoped fins [3]. But the aggressive fin width (Wfin) requirement (~Lg/3 [4]) to reduce short channel effect aggravates the electrical impact of LER and makes it greatest contributor to patterning induced variability [2]. Moreover, the edge roughness does not scale with technology and remains independent of the type of lithography used [5]. Secondly, multiple threshold voltage (VT) is achieved in planar technology by various patterned implant steps, which is unavailable for FinFET technology as the fin is undoped. Multiple VT transistor technology is essential for power vs. performance optimization by circuit designers [6]. In this work, we propose an alternative to conventional FinFET structure which can (a) reduce overall variability by 4× reduction in sensitivity to LER and (b) enable multiple VT by applying body bias dynamically without any costly patterned implant steps.
器件可变性已成为CMOS技术的主要关注点。各种可变性的来源包括随机掺杂波动(RDF),栅极边缘粗糙度(GER)和线边缘粗糙度(LER)[2]。在22nm节点引入finfet有两个问题。首先,由于未掺杂翼b[3], RDF的影响大大降低。但为了减少短通道效应而要求的大鳍宽(Wfin) (~Lg/3[4])加剧了LER的电影响,使其成为图案诱导变异性[2]的最大贡献者。此外,边缘粗糙度不随技术的变化而变化,与[5]使用的光刻类型无关。其次,在平面技术中,通过各种图像化的植入步骤实现了多个阈值电压(VT),这在FinFET技术中是不可用的,因为鳍是未掺杂的。多VT晶体管技术对于电路设计人员的功率与性能优化至关重要。在这项工作中,我们提出了一种替代传统FinFET结构的方法,它可以(a)通过将对LER的灵敏度降低4倍来降低整体变异性,(b)通过动态应用体偏置来实现多次VT,而无需任何昂贵的模式植入步骤。
{"title":"Epitaxialy defined (ED) FinFET: to reduce VT variability and enable multiple VT","authors":"S. Mittal, S. Gupta, A. Nainani, M. Abraham, K. Schuegraf, S. Lodha, U. Ganguly","doi":"10.1109/DRC.2012.6256997","DOIUrl":"https://doi.org/10.1109/DRC.2012.6256997","url":null,"abstract":"Device variability has become a major concern for CMOS technology [1]. Various sources of variability include Random Dopant Fluctuation (RDF), Gate Edge Roughness (GER) and Line Edge Roughness (LER) [2]. The introduction of FinFETs at 22nm node has two issues. Firstly, the effect of RDF is considerably reduced due to undoped fins [3]. But the aggressive fin width (Wfin) requirement (~Lg/3 [4]) to reduce short channel effect aggravates the electrical impact of LER and makes it greatest contributor to patterning induced variability [2]. Moreover, the edge roughness does not scale with technology and remains independent of the type of lithography used [5]. Secondly, multiple threshold voltage (VT) is achieved in planar technology by various patterned implant steps, which is unavailable for FinFET technology as the fin is undoped. Multiple VT transistor technology is essential for power vs. performance optimization by circuit designers [6]. In this work, we propose an alternative to conventional FinFET structure which can (a) reduce overall variability by 4× reduction in sensitivity to LER and (b) enable multiple VT by applying body bias dynamically without any costly patterned implant steps.","PeriodicalId":6808,"journal":{"name":"70th Device Research Conference","volume":"10 1","pages":"127-128"},"PeriodicalIF":0.0,"publicationDate":"2012-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90991301","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Bilayer graphene vertical tunneling field effect transistor 双层石墨烯垂直隧道场效应晶体管
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6256932
D. Reddy, L. Register, S. Banerjee
Electronic devices have been explored in the past based on resonant single-electron CB (conduction band) to CB tunneling between parallel quasi-two dimensional (2D) quantum wells within III-V heterostructures and their accompanying negative differential resistance (NDR) [1]. Such devices are attractive for high speed electronics, and digital logic circuits also have been demonstrated using a combination of conventional and such NDR FETs [2]. For two graphene layers separated by a tunnel barrier, we recently proposed the ultra-low-voltage Bilayer pseudoSpin FET (BiSFET) which would employ enhanced nonresonant VB (valence band) to CB tunneling, with a nevertheless very sharp NDR characteristic based on a predicted room-temperature many-body superfluid state [3]. However, NDR due to resonant single-particle CB-to-CB or VB-to-VB tunneling may also be achievable in such a structure. Furthermore, the atomically near-perfect 2D nature of the component graphene layers and the conduction/valence band symmetry may offer advantages over III-Vs. Here, we model the I-V characteristics due to single-particle tunneling in such a structure, Fig. 1, using a perturbative tunneling Hamiltonian approach [4,5], and deviations from this simple theory using atomistic tight-binding nonequilibrium Green's function (NEGF) simulation.
过去已经探索了基于III-V异质结构中平行准二维(2D)量子阱之间的共振单电子CB(传导带)到CB隧穿及其伴随的负差分电阻(NDR)的电子器件[1]。这种器件对高速电子器件很有吸引力,数字逻辑电路也已被证明使用传统和这种NDR fet的组合[2]。对于被隧道势垒隔开的两层石墨烯,我们最近提出了超低电压双层伪自旋场效应晶体管(BiSFET),它将利用增强的非共振VB(价带)到CB隧道,基于预测的室温多体超流体状态,具有非常尖锐的NDR特性[3]。然而,由于共振单粒子CB-to-CB或VB-to-VB隧道,NDR也可以在这种结构中实现。此外,元件石墨烯层的原子接近完美的二维性质和导电/价带对称性可能比iii - v提供优势。在这里,我们使用微扰隧穿哈密顿方法[4,5]对这种结构中的单粒子隧穿所导致的I-V特性进行建模,并使用原子紧密结合非平衡格林函数(NEGF)模拟来偏离这一简单理论。
{"title":"Bilayer graphene vertical tunneling field effect transistor","authors":"D. Reddy, L. Register, S. Banerjee","doi":"10.1109/DRC.2012.6256932","DOIUrl":"https://doi.org/10.1109/DRC.2012.6256932","url":null,"abstract":"Electronic devices have been explored in the past based on resonant single-electron CB (conduction band) to CB tunneling between parallel quasi-two dimensional (2D) quantum wells within III-V heterostructures and their accompanying negative differential resistance (NDR) [1]. Such devices are attractive for high speed electronics, and digital logic circuits also have been demonstrated using a combination of conventional and such NDR FETs [2]. For two graphene layers separated by a tunnel barrier, we recently proposed the ultra-low-voltage Bilayer pseudoSpin FET (BiSFET) which would employ enhanced nonresonant VB (valence band) to CB tunneling, with a nevertheless very sharp NDR characteristic based on a predicted room-temperature many-body superfluid state [3]. However, NDR due to resonant single-particle CB-to-CB or VB-to-VB tunneling may also be achievable in such a structure. Furthermore, the atomically near-perfect 2D nature of the component graphene layers and the conduction/valence band symmetry may offer advantages over III-Vs. Here, we model the I-V characteristics due to single-particle tunneling in such a structure, Fig. 1, using a perturbative tunneling Hamiltonian approach [4,5], and deviations from this simple theory using atomistic tight-binding nonequilibrium Green's function (NEGF) simulation.","PeriodicalId":6808,"journal":{"name":"70th Device Research Conference","volume":"23 1","pages":"73-74"},"PeriodicalIF":0.0,"publicationDate":"2012-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87275691","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
期刊
70th Device Research Conference
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1