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2021 18th China International Forum on Solid State Lighting & 2021 7th International Forum on Wide Bandgap Semiconductors (SSLChina: IFWS)最新文献

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Improved Ohmic Contact Performance on Undoped AlGaN/GaN HEMTs Using by Ternary Alloy Predeposition 三元合金预沉积提高未掺杂AlGaN/GaN hemt的欧姆接触性能
Hao Lu, Bin Hou, Ling Yang, Teng Huo, Zeyan Si, Meng Zhang, Mei Wu, Xiao-hua Ma, Y. Hao
In this paper, we have proposed a novel ohmic contact on undoped AlGaN/GaN heterostructures using the ternary SixTiyAl alloy pre-deposition ohmic contacts to reduce the contact resistance (RC) and improve the ohmic surface morphology. The use of ternary alloys simultaneously achieves n-type doping of barrier material by thermal annealing of Si and uniform Ti/Al contact with semiconductors. The systematical investigation of the parameters, including the pre-deposition layer and annealing temperature, have been performed. Low contact resistance of 0.34 Ω'mm and a specific resistivity (ρC) of 2.9 × 10−6 Ω.cm2 was achieved for the proposed metal scheme annealed at 900°C, which was superior compared with conventional Ti/Al/Ni/Au ohmic contacts (8.3 × 10−6 Ω.cm2, 0.56 Ω.mm). Atomic force microscope (AFM) compares the surface root mean square (RMS) roughness of the varied samples at the different annealing temperature. Through the results presented here, the ternary alloyed layer has significant advantages over monolayer Si or reference sample. These results are believed to facilitate the process of the GaN HEMT applied for next-generation communication systems.
在本文中,我们提出了一种在未掺杂的AlGaN/GaN异质结构上使用三元SixTiyAl预沉积欧姆触点的新型欧姆触点,以降低接触电阻(RC)并改善欧姆表面形貌。利用三元合金,通过Si的热退火和Ti/Al与半导体的均匀接触,同时实现了n型势垒材料的掺杂。对预沉积层和退火温度等参数进行了系统的研究。接触电阻低,0.34 Ω’mm,电阻率ρC为2.9 × 10−6 Ω。所提出的金属方案在900°C退火时达到了cm2,与传统的Ti/Al/Ni/Au欧姆触点(8.3 × 10−6 Ω)相比具有优越性。Cm2, 0.56 Ω.mm)。原子力显微镜(AFM)比较了不同退火温度下不同样品的表面均方根(RMS)粗糙度。通过本文给出的结果,三元合金层比单层Si或参考样品具有显著的优势。这些结果被认为有助于GaN HEMT应用于下一代通信系统的过程。
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引用次数: 0
A Fast Calculation Model for Parasitic Inductance of SiC Power Devices SiC功率器件寄生电感的快速计算模型
Lei Song, M. Cai, Hengjian He, Kailin Zhang
Silicon carbide (SiC) power device has a leap forward improvement in various performance indexes compared with the existing silicon-based power devices, and is suitable for higher frequency working occasions. Its high switching speed makes it more sensitive to stray parameters and easier to cause voltage and current oscillation. Therefore, reducing the inductance of power module has become the key to module design. Usually when designing the layout of the power module, it is necessary to establish the 3d model and then use the Q3d software to extract the internal circuit inductance of the device. The process is complicated and the design cycle is long. To solve this problem, this article focuses on the rapid evaluation method of loop inductance in the process of power module layout design, and proposes a faster, simpler, and relatively accurate calculation model based on the existing theories - Inductance Calculation Model of Arbitrary Shape Open-loop Circuit. Then, the convenience and accuracy of the equivalent closed loop model are verified by calculating three different IGBT layout loop inductances. This method is conducive to the rapid iteration of the power module layout design and shortens the design cycle.
碳化硅(SiC)功率器件与现有的硅基功率器件相比,各项性能指标有了跨越式的提高,适用于更高频率的工作场合。它的高开关速度使其对杂散参数更敏感,更容易引起电压和电流的振荡。因此,减小功率模块的电感成为模块设计的关键。通常在设计电源模块的布局时,需要建立三维模型,然后使用Q3d软件提取器件的内部电路电感。过程复杂,设计周期长。针对这一问题,本文重点研究了功率模块布置图设计过程中环路电感的快速评估方法,并在现有理论的基础上提出了一种更快、更简单、相对准确的计算模型——任意形状开环电路电感计算模型。然后,通过计算三种不同IGBT布局的环路电感,验证了等效闭环模型的方便性和准确性。该方法有利于电源模块版图设计的快速迭代,缩短了设计周期。
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引用次数: 1
Simulation study on thermal mechanical properties of 4×4 Micro-LED array in flip-chip bonding process 4×4微型led阵列倒装键合过程热力学性能仿真研究
Xiaoxiao Ji, Fei Wang, Luqiao Yin, Jianhua Zhang
With the advent of the Micro-light-emitting diodes, it has become the focus of display and visible light communication research. However, as the LED chip size shrinks, the difficulty of integration increase gradually. Nowadays, the integration of Micro- LEDs in display is still a challenge for commercialization. In this work, we conducted a comparative study by finite element method simulation to reveal the influencing factors of bonding yield. The results show that stress concentrates at the junction of the bumps and electrodes of Micro-LED chips, and the stress concentration at the corner of Micro-LED array is more seriously. By altering the parameters of bumps, such as shapes and materials to reduce the stress and stress concentration. Numerical simulate results provide theoretical basis for reducing stress and stress concentration and optimizing the bump shape.
随着微型发光二极管的出现,它已成为显示和可见光通信研究的热点。然而,随着LED芯片尺寸的缩小,集成的难度逐渐增加。目前,微型led在显示屏上的集成仍然是一个商业化的挑战。在本工作中,我们通过有限元法模拟进行了对比研究,揭示了粘结收率的影响因素。结果表明:微led芯片凸起处和电极处应力集中,微led阵列拐角处应力集中更为严重;通过改变凸点的参数,如形状和材料来减小应力和应力集中。数值模拟结果为减小应力和应力集中、优化凸包形状提供了理论依据。
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引用次数: 0
Avalanche Robustness of 1.2kV SiC MOSFET with Integrated Junction-Barrier-Schottky Diode and Gate Leakage Current Analysis 集成结势垒肖特基二极管的1.2kV SiC MOSFET雪崩稳健性及栅极漏电流分析
Chongyu Jiang, Hongyi Xu, Zijian Gao, Na Ren, Qing Guo, Kuang Sheng
In this work, 1.2kV SiC MOSFET integrated Junction-Barrier-Schottky diode (JMOS) is fabricated. The Schottky width is 2μm. The static characteristic of the JMOS is evaluated at room and elevated temperature. The single pulse avalanche robustness under Vgs= −5V is studied. Moreover, excessive gate leakage current is observed during the avalanche. The mechanism of gate leakage current is studied by simulation. The high impact ionization and high temperature in JFET region causes high gate leakage current. The transfer characteristic after each UIS test is monitored to confirm ionized holes inject into gate oxide during the avalanche.
本文制作了1.2kV SiC MOSFET集成结垒肖特基二极管(JMOS)。肖特基宽度为2μm。对JMOS在室温和高温下的静态特性进行了评价。研究了Vgs= - 5V条件下的单脉冲雪崩鲁棒性。此外,在雪崩过程中观察到过大的栅漏电流。通过仿真研究了栅漏电流产生的机理。JFET区域的高冲击电离和高温导致了高栅极漏电流。监测每次UIS测试后的转移特性,以确认雪崩期间注入栅极氧化物的电离孔。
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引用次数: 0
Diamond Metal-Semiconductor Field-Effect-Transistor-based Solar Blind Detector 基于金刚石金属半导体场效应晶体管的太阳盲探测器
Lei Ge, Yan Peng, Xiwei Wang, Dufu Wang, Mingsheng Xu, Xiangang Xu
In this paper, a microwave plasma chemical vapor deposition (MPCVD) method is used to homoepitaxially epitaxial diamond film on a high-pressure high temperature(HPHT) diamond substrate, and a metal-semiconductor field effect transistor (MESFET) solar-blind detector is prepared to measure the photoelectric response performance of the detector. The results show that the detector made of diamond has a good photoelectric response to deep ultraviolet light.
本文采用微波等离子体化学气相沉积(MPCVD)方法在高压高温(HPHT)金刚石衬底上制备了同外延外延金刚石薄膜,并制备了金属半导体场效应晶体管(MESFET)太阳盲探测器,对探测器的光电响应性能进行了测量。结果表明,金刚石探测器对深紫外光具有良好的光电响应。
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引用次数: 1
Si Implantation in GaN at Elevated Temperatures 高温下氮化镓中Si的注入
Zheming Wang, Liguo Zhang, Rongkun Ji, Xuan Zhang, Yong Cai, B. Zhang
Activation annealing of implantation doping of GaN has been restricted by the phenomenon of GaN decomposition at high temperatures. Purpose of high temperature annealing is to recover the lattice damage caused by implantation and to activate the implanted atoms to substitute the lattice atoms. Since elevating the substrate temperature during implantation has been proved to be effective to reduce the lattice damage and help to enhance the activation efficiency in other semiconductor materials, in this work such a method was applied to Si implantation in GaN. The samples were implanted at different temperatures from room temperature to 500°C with a dose of 2×1015cm−2 and subsequently annealed at 1200°C for 5 min. Both structural and electrical characterizations were performed before and after annealing to investigate the effect of implantation temperature on Si implantation in GaN.
氮化镓注入掺杂的活化退火一直受到氮化镓高温分解现象的制约。高温退火的目的是恢复因注入而造成的晶格损伤,激活注入的原子以取代晶格原子。由于在注入过程中提高衬底温度已被证明可以有效地减少晶格损伤并有助于提高其他半导体材料的激活效率,因此在本工作中,将这种方法应用于Si在GaN中的注入。将样品以2×1015cm−2的剂量在室温至500℃的不同温度下注入,随后在1200℃退火5 min。在退火前后进行了结构和电学表征,以研究注入温度对Si在GaN中注入的影响。
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引用次数: 0
Study on Thermal Transient Measurement Method and Mechanism of GaN HEMT Power Devices 氮化镓HEMT功率器件热瞬态测量方法及机理研究
Xi Li, Wei Gao, Yanwei Shan, Bo Zhang
A novel power semiconductor device, GaN HEMT, has the advantages of high power density and high operating frequency. Thermal problems are caused by high power operation of the device, however, there is no specific test standard for GaN HEMT thermal resistance at present. For GaN HEMT devices with high gate impedance, the method of using gate source diode to extract junction temperature is not suitable. Therefore, in this paper, we used the on-resistance of the device as the thermal parameter of this type of device, but it is found in the test that the on-resistance of the device is unstable due to the threshold voltage drift, which leads to poor repeatability of the thermal resistance test results of the same device. The addition of high temperature baking in the post test restores the threshold voltage of the device to the initial state, so as to achieve the purpose of stable and repeatable thermal resistance test results of GaN HEMT devices. In addition, this paper does an in-depth analysis of the mechanism of poor thermal resistance test repeatability for this type of device.
GaN HEMT是一种新型的功率半导体器件,具有高功率密度和高工作频率的优点。器件的高功率运行会引起热问题,但目前对于GaN HEMT热阻尚无具体的测试标准。对于具有高栅阻抗的GaN HEMT器件,采用栅极源二极管提取结温的方法是不合适的。因此,在本文中,我们使用器件的导通电阻作为这类器件的热参数,但在测试中发现,由于阈值电压漂移,器件的导通电阻不稳定,导致同一器件的热阻测试结果重复性差。后测中加入高温烘烤,使器件的阈值电压恢复到初始状态,从而达到GaN HEMT器件热阻测试结果稳定、可重复的目的。此外,本文还对该类器件热阻测试重复性差的机理进行了深入分析。
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引用次数: 0
Research on Evaluation of Lighting Design for Cruise Interior Public Space: a Case study of Costa Venezia Cruise 邮轮内部公共空间照明设计评价研究——以歌诗达威尼斯号为例
Ge Wenjing, Jiang Minyu, Cao Jing, Yang Xiu
This paper presented the process and results of the questionnaire survey and brightness measurement toward the lobby and corridor space of Costa Venezia Cruise. The questionnaire content includes Visual Perception and Lighting Evaluation. The brightness measurement contents include average brightness, maximum brightness, glare index. The conclusion reached are as follows: 1)subjects are highly satisfied with the lighting environment of the lobby, 41%(13 subjects) of the subjects rated uncomfortable / comfortable as 6, uneven / uniform and cold / warm as 5; 2) 14% (4 subjects) and 7% (2 subjects) of the subjects rated dazzling / non-dazzling at the corridor as −2, −1 respectively; 3)If the 0–3 evaluation is defined as satisfactory, the average satisfaction degree of the Visual Perception and Lighting Evaluation of the lobby and corridor will reach more than 90%; 4)The difference toward the average brightness between the lobby and the corridor is not large, and the ratio is 1: 1.5; the difference toward the maximum brightness is large, the ratio is 1: 60; 5)Within a certain range of the brightness value changes, Visual Perception evaluation satisfaction and the indoor brightness show a significant negative correlation.
本文介绍了对歌诗达威尼斯号邮轮大堂和走廊空间进行问卷调查和亮度测量的过程和结果。问卷内容包括视觉感知和照明评价。亮度测量内容包括平均亮度、最大亮度、眩光指数。得出的结论如下:1)被试对大堂照明环境的满意度较高,41%(13名)的被试认为不舒服/舒适为6分,不均匀/均匀为5分,冷/暖为5分;2) 14%(4名)和7%(2名)的被试对走廊上令人眼花缭乱/不令人眼花缭乱的评价分别为−2和−1;3)若以0-3级评价为满意,则大堂和走廊的视觉感知和照明评价平均满意度将达到90%以上;4)大厅与走廊的平均亮度相差不大,比值为1:1 .5;朝向最大亮度的差异较大,比例为1:60;5)在一定亮度值变化范围内,视觉感知评价满意度与室内亮度呈显著负相关。
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引用次数: 0
Degradation of 4H-SiC Trench MOSFET under single and repetitive short-circuit stress 单次和重复短路应力下4H-SiC沟槽MOSFET的退化
Yuan Zou, Jue Wang, Li Liu, Hongyi Xu, Hengyu Wang, Kuang Sheng
It is well known that despite the superior performance of SiC MOSFETs, reliability issues persist and limit their development. In this work, short-circuit (SC) stresses have been applied to commercial SiC trench MOSFETs to verify their reliability under extreme conditions. First, a single-pulse SC stress was applied to the device. Two different short-circuit failure mechanisms were identified. One type of failure was thermal runaway and the other was gate failure. Subsequently, multiple non-destructive short-circuit pulses have been applied to the device. After the stress, the shift in the device static characteristics has been measured and recorded to determine the effects of the stress on the degradation of the device's electrical parameters. Finally, TCAD device simulations have been used to help understand the intrinsic degradation mechanism.
众所周知,尽管SiC mosfet具有优异的性能,但可靠性问题仍然存在并限制了它们的发展。在这项工作中,短路(SC)应力已应用于商用碳化硅沟槽mosfet,以验证其在极端条件下的可靠性。首先,对器件施加单脉冲SC应力。确定了两种不同的短路失效机制。一种失效是热失控,另一种是门失效。随后,将多个非破坏性短路脉冲应用于该器件。应力作用后,测量并记录设备静态特性的变化,以确定应力对设备电气参数退化的影响。最后,利用TCAD器件仿真来帮助理解固有的退化机制。
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引用次数: 0
Research on Glare-free Lamps Based on the Concept of Effective Luminous Flux 基于有效光通量概念的无眩光灯研究
Bing Zhang, Pengjie Cui, Haitian Zhao
The intensity of glare in Low Mounting Height Luminaires(LMHL) is positively correlated with the light output efficiency of the lamps. The light interceptor that eliminates glare will cause the light output efficiency of the lamps to be extremely low. This paper analyzes the light output of the street lamps based on the driver's visual needs, and puts forward the concept of effective luminous flux for road lighting. The street lamp light is divided into three parts: effective luminous flux, invalid luminous flux and harmful luminous flux; according to the concept of effective luminous flux, a multi-channel luminaire structure is designed to convert invalid luminous flux into effective luminous flux and eliminate harmful luminous flux. The software simulation experiment verifies the relationship between the luminous efficiency of the lamp and the number of channels, and the final sample is made to prove the feasibility of the structure. The experimental results show that the luminous efficiency of the luminaire has a linear relationship with the number of channels. It is 67%; the light output efficiency of the dual-channel sample is increased by 34% compared with the single-channel sample; the light output efficiency of the four-channel sample is increased by 92% compared to the single-channel sample. Therefore, the multi-channel luminaire structure can simultaneously solve the problems of intense glare and high energy consumption in LMHL.
低安装高度灯具的眩光强度与灯具的光输出效率呈正相关。消除眩光的光拦截器会导致灯具的光输出效率极低。本文从驾驶员的视觉需求出发,分析了路灯的光输出,提出了道路照明有效光通量的概念。路灯照明分为三部分:有效光通量、无效光通量和有害光通量;根据有效光通量的概念,设计多通道灯具结构,将无效光通量转化为有效光通量,消除有害光通量。软件仿真实验验证了该灯的发光效率与通道数之间的关系,并制作了最终样品,证明了该结构的可行性。实验结果表明,该灯具的发光效率与通道数呈线性关系。是67%;双通道样品的光输出效率比单通道样品提高了34%;与单通道样品相比,四通道样品的光输出效率提高了92%。因此,采用多通道照明结构可以同时解决LMHL中强眩光和高能耗的问题。
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引用次数: 0
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2021 18th China International Forum on Solid State Lighting & 2021 7th International Forum on Wide Bandgap Semiconductors (SSLChina: IFWS)
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