Capacitive Mems Actuator Arrays
In their Research Article (10.1002/adpr.202500228), Van Minh Nguyen, Yoshiaki Kanamori, and co-workers present a SSPP waveguide integrated with SRR metamaterial and MEMS actuator arrays with electric field confinement in the gap below the micro-bridge. The notch-band in the microwave transmission characteristic shifts due to the micro-bridge’s deflection leading to a phase shift of the guided microwave.