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Adhesion Control Through Electric Field-Induced Water Adsorption at Oxidized Silicon Interfaces 电场诱导的氧化硅界面水吸附控制附着力
IF 3.3 3区 工程技术 Q2 ENGINEERING, CHEMICAL Pub Date : 2025-12-01 DOI: 10.1007/s11249-025-02093-x
H. Tunç Ciftçi, Jonathon Cottom, Rachid Hahury, Emilia Olsson, Bart Weber

Adhesion plays a pivotal role in computer chip manufacturing, directly affecting the precision and durability of positioning components, such as wafer stages. Electrical biasing is widely employed to eliminate floating potential and to enable electrostatic clamping. However, upon electrical grounding adhesion can persist and there is limited knowledge about the nature of this adhesion hysteresis. Here, we investigate potential causes underlying electric field-induced adhesion hysteresis at the interface between an n-type AFM tip and a p-type silicon sample using atomic force microscopy. Our findings reveal that neither charge trapping nor siloxane bond formation significantly impacts the measured adhesion. Surprisingly, we show that adhesion can be tuned through electric field-induced water adsorption under low relative humidity (RH (< 10%)). Our results provide new insights into adhesion hysteresis and opportunities for adhesion control.

Graphical Abstract

附着力在计算机芯片制造中起着举足轻重的作用,直接影响到晶圆级等定位元件的精度和耐用性。电偏置广泛用于消除浮电位和实现静电夹紧。然而,在电接地上,附着力可以持续存在,并且关于这种附着力迟滞的性质的知识有限。在这里,我们使用原子力显微镜研究了在n型AFM尖端和p型硅样品之间的界面上电场诱导粘附滞后的潜在原因。我们的研究结果表明,电荷捕获和硅氧烷键的形成都没有显著影响所测量的附着力。令人惊讶的是,我们发现在低相对湿度下,通过电场诱导的水吸附可以调节粘附性(RH (< 10%))。我们的结果为粘附滞后和粘附控制提供了新的见解。图形摘要
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引用次数: 0
Traceable Force Calibration (TFC) for Microtribometers via Diamagnetic Levitation and Microbalance 通过反磁悬浮和微天平的微摩擦计可追踪力校准(TFC)
IF 3.3 3区 工程技术 Q2 ENGINEERING, CHEMICAL Pub Date : 2025-12-01 DOI: 10.1007/s11249-025-02095-9
Zitong Huang, Tianci Chen, Yijiang Wang, Qingrui Song, Kun Liu, Jiaxin Ye

Accurate, traceable force calibration remains a challenge for microtribometers because of lateral/normal cross-talk and operating-point dependence bias in conventional procedures. We present a traceable force calibration (TFC) that solves the full 2 × 2 calibration matrix (C1-C4) from angle-resolved loading using a diamagnetic-levitation spring with a microbalance as an SI-traceable force standard. A known load is applied while the cantilever is tilted through multiple angles; linear slopes ΔVx,zF1 at each angle provide sufficient equations to recover C without neglecting cross-talk. Using 18 angles, TFC yields stable coefficients C1 =  − 746.98 ± 0.01 μN/V and C4 =  − 737.17 ± 0.45 μN/V, with small cross-terms C2 = 3.372 ± 0.003 μN/V and C3 =  − 45.14 ± 0.63 μN/V. Subsampling shows convergence with only 3–4 angles, and a ± 1° reference-angle bias changes C1 and C4 by ≤ 1.01% and ≤ 0.49%, respectively. Compared head-to-head with the diamagnetic-levitation force-calibration (DLFC) route, TFC produces C1 values invariant to angle choice, whereas DLFC yields set-point (Vz)-dependent results and larger scatter (e.g., C1 =  − 758 ± 41 μN/V). TFC thus offers a compact, low-uncertainty, SI-traceable workflow that quantifies cross-talk and delivers reliable calibration over micro- to milli-newton forces, enabling high-precision, reproducible microtribometry.

由于常规方法中的横向/正常串扰和工作点依赖偏差,精确、可追踪的力校准仍然是微摩擦计的一个挑战。我们提出了一种可追溯力校准(TFC),它使用带有微天平的抗磁悬浮弹簧作为si可追溯力标准,从角度解析加载解决了完整的2 × 2校准矩阵(C1-C4)。当悬臂梁倾斜多个角度时,施加已知载荷;每个角度的线性斜率ΔVx,z/ΔF1提供了足够的方程来恢复C而不忽略串扰。在18个角度下,TFC的稳定系数C1 =−746.98±0.01 μN/V, C4 =−737.17±0.45 μN/V,小交叉项C2 = 3.372±0.003 μN/V, C3 =−45.14±0.63 μN/V。子采样仅显示3-4个角的收敛性,±1°参考角偏差对C1和C4的影响分别为≤1.01%和≤0.49%。与反磁悬浮力校准(DLFC)路线相比,TFC产生的C1值与角度选择无关,而DLFC产生的结果与设定点(Vz)相关且散射更大(例如,C1 =−758±41 μN/V)。因此,TFC提供了一个紧凑、低不确定性、si可追溯的工作流程,可以量化串扰,并在微至毫牛顿力的范围内提供可靠的校准,从而实现高精度、可重复的微摩擦测量。
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引用次数: 0
Synergistic Enhancement of Tribological Properties of Ti-6Al-4V Alloy via Combined Ultrasonic Shot Peening and Thermal Oxidation Treatment 超声喷丸与热氧化复合处理协同增强Ti-6Al-4V合金摩擦学性能
IF 3.3 3区 工程技术 Q2 ENGINEERING, CHEMICAL Pub Date : 2025-12-01 DOI: 10.1007/s11249-025-02080-2
Xiao-yi Wang, Zhi-biao Xu, Hao-wen Lu, Ming-wei Zhang, Hao Wu, Xing Xu, Hao Du

Leveraging advantageous properties including low density, high specific strength, and corrosion resistance, titanium alloys have become essential structural joining components in aerospace systems. Nevertheless, their inherently low hardness and poor wear resistance constrain reliability and service life in demanding in-service conditions. This study aims to enhance their surface properties through a combination of ultrasonic shot peening (USP) and thermal oxidation (TO). The results indicate that USP pretreatment refines surface grains, increases surface roughness, and optimizes oxygen atoms diffusion pathways, resulting in the formation of a thicker oxygen diffusion layer. Following the USP/TO composite treatment, a composite strengthening layer is formed on the Ti-6Al-4V alloy, consisting of Rutile TiO2, Brookite-TiO2, and other phases, which enhances both the microhardness of the surface and subsurface. Notably, the sample treated with USP/TO for 5 min exhibits a 98% reduction in wear volume and mitigates abrasive wear.

Graphical Abstract

钛合金具有低密度、高比强度和耐腐蚀等优点,已成为航空航天系统中必不可少的结构连接部件。然而,其固有的低硬度和较差的耐磨性限制了在苛刻的使用条件下的可靠性和使用寿命。本研究旨在通过超声波喷丸(USP)和热氧化(to)相结合来提高其表面性能。结果表明,USP预处理细化了表面晶粒,提高了表面粗糙度,优化了氧原子扩散途径,形成了较厚的氧扩散层。经过USP/TO复合处理后,Ti-6Al-4V合金表面形成了一层由金红石TiO2、Brookite-TiO2等相组成的复合强化层,增强了表面和亚表面的显微硬度。值得注意的是,用USP/TO处理5分钟的样品显示磨损体积减少98%,减轻了磨料磨损。图形抽象
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引用次数: 0
Gelling Properties, Mechanisms, and Lubricating Performances of Sodium Carboxylate-Based Bicomponent Supramolecular Gel Lubricants 基于羧酸钠的双组分超分子凝胶润滑剂的胶凝特性、机理和润滑性能
IF 3.3 3区 工程技术 Q2 ENGINEERING, CHEMICAL Pub Date : 2025-11-20 DOI: 10.1007/s11249-025-02094-w
Zhuoli Ding, Jiapeng Zhou, Xiaoping Bao, Minghuan Wang, Xiaodong Hu, Ruochong Zhang, Xuefeng Xu

A simple and nonsynthetic way of bicomponent supramolecular gel lubricants was prepared by adding carboxylic acid and sodium organosulfur oxy-salts with varying chain lengths and saturation degrees into white oil (WO). The gelling properties have shown that the bicomponent supramolecular gelator with longer alkyl chains and higher saturation, such as stearic acid and sodium dodecyl sulfate (SA-SDS), possessed better gelling properties. SA self-assembles to helical fibers, and SDS enhances fiber cross-linking via the noncovalent interaction with SA, leading to the formation of three-dimensional networks with significantly increased rigidity. Tribological data show that SA-SDS gel reduces wear scar diameter and friction coefficient by approximately 25 and 24% compared to WO. And the gel system of SA-SDS in WO has better anti-friction and anti-wear performances than the sol system. This is because the multilayer tribofilm consisting of oxide layers, carbonaceous species, and organic films is formed at the interface, significantly improving lubrication. These findings provide insights into the design of supramolecular gel-based lubricants for enhanced friction and wear control.

通过在白油中加入羧酸和不同链长和饱和度的有机硫氧盐钠,制备了一种简单、非合成的双组分超分子凝胶润滑剂。胶凝性能表明,硬脂酸和十二烷基硫酸钠(SA-SDS)等烷基链较长、饱和度较高的双组分超分子胶凝剂具有较好的胶凝性能。SA自组装成螺旋纤维,SDS通过与SA的非共价相互作用增强纤维交联,导致三维网络的形成,刚性显著增加。摩擦学数据表明,与WO相比,SA-SDS凝胶可将磨损疤痕直径和摩擦系数分别降低约25%和24%。在WO中SA-SDS凝胶体系比溶胶体系具有更好的抗摩擦和抗磨性能。这是因为在界面处形成了由氧化层、碳质层和有机膜组成的多层摩擦膜,显著提高了润滑性能。这些发现为超分子凝胶润滑剂的设计提供了见解,以增强摩擦和磨损控制。
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引用次数: 0
Frictional Behaviour of Oleic Acid Under Boundary Lubrication Across Varying Temperatures: An Energy Dissipation Approach 油酸在不同温度边界润滑下的摩擦行为:能量耗散方法
IF 3.3 3区 工程技术 Q2 ENGINEERING, CHEMICAL Pub Date : 2025-11-19 DOI: 10.1007/s11249-025-02092-y
Vikas Kumar Singh, Adarsh Divakaran, K. R. Y. Simha, Satish V. Kailas

Evaluation of boundary lubricants is crucial for enhancing the energy efficiency of a system, as the boundary lubrication (BL) regime involves direct asperity contact and exhibits the highest friction. Fatty acids are widely used as friction modifiers in BL regimes, forming tribofilms that reduce direct asperity contact and lower friction. This study examines the effect of molecular unsaturation on the frictional behaviour of oleic acids across temperatures. A Force-Controlled Pendulum Tribometer (FCPeT), which operates on energy dissipation methodology, was used to evaluate the frictional performance of a blend of oleic acid with base oil at temperatures of 27 °C, 60 °C, and 100 °C. The FCPeT quantifies friction by measuring energy dissipation during sliding. Results indicate that the coefficient of friction increases with temperature, rising from 0.10 at 27 °C to ~ 0.12 (steady state) at 100 °C. FTIR and XPS analyses of the wear track confirmed tribofilm formation. The XPS results reveal that at higher temperatures, tribofilm degrades, contributing to increased frictional dissipation.

Graphical Abstract

边界润滑剂的评价对于提高系统的能量效率是至关重要的,因为边界润滑(BL)制度涉及直接的粗糙接触,并表现出最高的摩擦。脂肪酸被广泛用作摩擦改进剂在BL制度,形成摩擦膜,减少直接的粗糙接触和降低摩擦。本研究考察了分子不饱和对油酸在不同温度下的摩擦行为的影响。采用能量耗散方法的力控摆摩擦计(FCPeT),在27°C、60°C和100°C的温度下,对油酸与基础油的混合物的摩擦性能进行了评估。FCPeT通过测量滑动过程中的能量耗散来量化摩擦。结果表明,摩擦系数随温度升高而增大,从27℃时的0.10上升到100℃时的~ 0.12(稳态)。磨损轨迹的FTIR和XPS分析证实了摩擦膜的形成。XPS结果表明,在较高的温度下,摩擦膜降解,有助于增加摩擦耗散。图形抽象
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引用次数: 0
Research on the Differences Between the Stick-Slide and Roll-Slide Friction Behaviors of Third-Body Colloidal Particles 第三体胶体颗粒粘滑与滚滑摩擦行为差异研究
IF 3.3 3区 工程技术 Q2 ENGINEERING, CHEMICAL Pub Date : 2025-11-16 DOI: 10.1007/s11249-025-02086-w
Chunsheng Luo, Keke Xu, Zhanyun Deng, Honglin Gou, Chen Xiao, Steven E. Franklin, Linmao Qian, Lei Chen

The tribo-dynamic behaviors of third-body colloidal particles (CPs) at the soft–hard contact interface significantly impact the substrate surface performance. To explore the differences of the stick-slide and roll-slide tribo-dynamic behaviors of CPs, the tribological behaviors of fixed and free CPs on hydrophilic silicon substrates were investigated using the colloid probe and nano-manipulation technology in atomic force microscopy, respectively. In contrast to the velocity-enhanced static friction commonly observed in fixed CPs, the static friction of free CPs exhibits a logarithmic decrease with increasing velocity. This phenomenon can be attributed to the transition from a “sliding-dominated” to a “rolling-dominated” driving state of the CPs as velocity increases. The findings enhance the understanding of tribo-dynamic behaviors of CPs at the nanoscale and provide a foundation for the deliberate design and optimization of CP-based applications in chemical mechanical polishing (CMP) and post-CMP cleaning technologies.

第三体胶体颗粒(CPs)在软硬接触界面处的摩擦动力学行为对衬底表面性能有显著影响。为了探究CPs的粘滑和滚滑摩擦动力学行为的差异,分别利用胶体探针和原子力显微镜纳米操作技术研究了固定和游离CPs在亲水性硅衬底上的摩擦动力学行为。与固定cp中通常观察到的速度增强静摩擦相反,自由cp的静摩擦随着速度的增加而呈对数递减。这种现象可以归因于随着速度的增加,CPs的驱动状态从“滑动主导”转变为“滚动主导”。该研究结果增强了对纳米级CPs摩擦动力学行为的理解,并为有意设计和优化基于cp的化学机械抛光(CMP)和后CMP清洁技术的应用提供了基础。
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引用次数: 0
Mechanical and Tribological Performance of Magnetron-Sputtered MoS2–ZrN Composite Coatings: A Combined Experimental and Modeling Study 磁控溅射MoS2-ZrN复合涂层的力学和摩擦学性能:实验和模型相结合的研究
IF 3.3 3区 工程技术 Q2 ENGINEERING, CHEMICAL Pub Date : 2025-11-07 DOI: 10.1007/s11249-025-02090-0
P. O. Bukovskiy, Ahraf Gulzar, A. A. Yakovenko, I. G. Goryacheva, Shahid Saleem, M. F. Wani, Rakesh Sehgal

In this paper, MoS2–ZrN composite coatings with a Chromium interlayer were fabricated using magnetron sputtering technique. The structure and properties of the MoS2–ZrN composite coatings with different ZrN contents were systematically investigated. It was observed that both hardness and elastic modulus improved with increasing ZrN content, reaching peak values of 6.60 GPa and 109.95 GPa, respectively, at 30% ZrN. Tribological performance was assessed using steel balls with varying surface roughness, where the lowest coefficient of friction of 0.09 was recorded when the coating was paired with a smoother counterface. Abrasive wear was identified as the dominant wear mechanism. Additionally, a contact mechanics model was developed to describe the interaction between a rough spherical indenter and the coating surface. This model enabled analysis of how surface roughness and coating mechanical properties jointly affect macroscopic contact parameters, such as real and nominal pressure distributions and contact radius. A good qualitative agreement was found between the experimental results and theoretical predictions, confirming the model's validity.

Graphical Abstract

本文采用磁控溅射技术制备了含铬中间层的MoS2-ZrN复合镀层。系统地研究了不同ZrN含量的MoS2-ZrN复合镀层的结构和性能。随着ZrN含量的增加,合金的硬度和弹性模量均有所提高,在ZrN含量为30%时,硬度和弹性模量分别达到6.60 GPa和109.95 GPa的峰值。使用不同表面粗糙度的钢球来评估摩擦学性能,当涂层与更光滑的表面配对时,摩擦系数最低,为0.09。磨粒磨损是主要的磨损机制。此外,建立了一个接触力学模型来描述粗糙球形压头与涂层表面之间的相互作用。该模型能够分析表面粗糙度和涂层力学性能如何共同影响宏观接触参数,如实际压力分布和公称压力分布以及接触半径。实验结果与理论预测有很好的定性一致性,证实了模型的有效性。图形抽象
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引用次数: 0
A Thermodynamic Insight into the Speed Dependence of Brass Sliding Wear Process 黄铜滑动磨损过程速度依赖性的热力学分析
IF 3.3 3区 工程技术 Q2 ENGINEERING, CHEMICAL Pub Date : 2025-11-04 DOI: 10.1007/s11249-025-02084-y
Kai Chen, Shuaishuai Zeng, Xiang Li, Dongdong Zhou, Xianfa Li, Yi Liu

This study examined the impact of sliding speed on the wear process of brass by integrating thermodynamic principles with molecular dynamics simulation. The simulation findings indicate that as the sliding speed increases, the strain rate of the workpiece rises while the tensile stress decreases and the compressive stress increases. Consequently, the tangential force remains constant regardless of sliding speed, whereas the normal force increases with higher speeds. Additionally, the temperature of the workpiece rises with increasing sliding speed, leading to a more significant thermal softening effect. Due to the interplay between strain rate hardening and thermal softening, the wear of the workpiece initially decreases and then increases as the sliding speed continues to rise. The specific wear rate, specific wear amount, and degradation coefficient all decrease with increasing sliding speed, suggesting that cutting becomes more challenging at higher speeds. Therefore, careful consideration is necessary when selecting the cutting speed to achieve efficient machining. This study serves as a valuable reference for the machining of metal materials.

采用热力学原理与分子动力学模拟相结合的方法,研究了滑动速度对黄铜磨损过程的影响。仿真结果表明,随着滑动速度的增加,工件的应变速率增大,拉应力减小,压应力增大。因此,无论滑动速度如何,切向力保持不变,而法向力随着速度的增加而增加。此外,随着滑动速度的增加,工件温度升高,导致更显著的热软化效应。由于应变速率硬化和热软化的相互作用,随着滑动速度的继续增加,工件的磨损先减小后增大。比磨损率、比磨损量和退化系数都随着滑动速度的增加而降低,这表明在更高的速度下切削变得更具挑战性。因此,在选择切削速度时必须仔细考虑,以实现高效的加工。该研究为金属材料的加工提供了有价值的参考。
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引用次数: 0
Research on the Effects of Roughness, Load, and Speed on Rubber-Ice Friction 粗糙度、载荷和速度对橡胶-冰摩擦影响的研究
IF 3.3 3区 工程技术 Q2 ENGINEERING, CHEMICAL Pub Date : 2025-11-03 DOI: 10.1007/s11249-025-02088-8
Manjiang Niu, XiaoQian Hou, Wenzhen Yang, Aiqin Wu, Yu Zhang, Hongzhen Wang

Three different reinforcing fillers were selected for winter tire tread rubber. After improving the testing method using the LAT100 testing machine, tests were conducted on the effect of rubber surface roughness on ice grip and wet grip performance, as well as research on the effect of load and speed on the rubber-ice friction coefficient at different temperatures. The results showed that with the increase of the macroscopic roughness of the rubber surface, the frictional force between the rubber and the ice surface decreased, the frictional force between the rubber and the wet road surface increased; With the increase of load and speed, the friction coefficient of rubber on the ice surface decreases, and the change is more obvious on the – 15 ℃ ice surface compared to the – 5 ℃ ice surface, and the friction coefficient on the – 15 ℃ dry ice surface is greater than that on the – 5 ℃ wet ice surface; In order to better predict the results of the real vehicle test, in the LAT ice friction test, the load was selected from 75 to 100N, the speed was selected from 0.6 km/h, and the run-in conditions specifically for winter tread rubber were determined. This provided theoretical support for improving the accuracy of indoor predictions of real vehicle ice grip test results and enriched the research on the rubber-ice friction mechanism.

选择了三种不同的增强填料用于冬季轮胎胎面胶。在改进了试验方法后,利用LAT100试验机进行了橡胶表面粗糙度对冰握性和湿握性的影响试验,并研究了不同温度下载荷和速度对橡胶-冰摩擦系数的影响。结果表明:随着橡胶表面宏观粗糙度的增大,橡胶与冰面之间的摩擦力减小,橡胶与湿路面之间的摩擦力增大;随着载荷和速度的增加,橡胶在冰面上的摩擦系数减小,且- 15℃冰面比- 5℃冰面变化更明显,- 15℃干冰表面的摩擦系数大于- 5℃湿冰表面;为了更好地预测实车试验结果,在LAT冰摩擦试验中,载荷选取75 ~ 100N,速度选取0.6 km/h,并确定了专用于冬季胎面橡胶的磨合条件。这为提高室内实车冰抓力试验结果预测精度提供了理论支持,丰富了橡胶-冰摩擦机理的研究。
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引用次数: 0
In-situ Investigation of Stick–Slip Behavior of an Elastic String: Insights into Fiber-Based Friction 弹性管柱粘滑特性的原位研究:纤维基摩擦的新见解
IF 3.3 3区 工程技术 Q2 ENGINEERING, CHEMICAL Pub Date : 2025-11-03 DOI: 10.1007/s11249-025-02087-9
Zitong Huang, Qingrui Song, Kun Liu, Jiaxin Ye

Using a custom-built microtribometer, the stick–slip behavior of a single elastic string in Hertz contact with a cylindrical glass lens was observed in situ, collecting dynamic contact area and friction force data during the adhesion phase. The results indicate that stick–slip occurs periodically due to repeated contact and elastic deformation. The friction pair was modeled for both translational and rotational movement, quantifying energy changes during the adhesion phase. It was inferred that slip occurs due to instability when the contact area reaches its maximum, which is possibly determined by a combination of factors including surface roughness, rubber deformation, and cylindrical rotation. These findings provide new insight into the macroscopic frictional properties of fiber-structured surfaces.

利用特制的微摩擦计,原位观察了单弹性弦与圆柱形玻璃透镜赫兹接触时的粘滑行为,收集了粘着阶段的动态接触面积和摩擦力数据。结果表明,由于反复接触和弹性变形,粘滑是周期性发生的。对摩擦副进行了平移和旋转运动建模,量化了粘附阶段的能量变化。由此推断,当接触面积达到最大时,由于不稳定而发生滑移,这可能是由表面粗糙度、橡胶变形和圆柱旋转等因素共同决定的。这些发现为纤维结构表面的宏观摩擦特性提供了新的见解。
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引用次数: 0
期刊
Tribology Letters
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