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Are Mn-intercalated transition metal dichalcogenides helimagnetic? mn嵌入的过渡金属二硫族化合物是helmagnetic的吗?
IF 15 1区 物理与天体物理 Q1 PHYSICS, APPLIED Pub Date : 2025-10-29 DOI: 10.1063/5.0290971
Yun Chen, Kesong Yang
Mn-intercalated transition metal dichalcogenides (TMDs) are promising candidates for hosting helimagnetism, offering opportunities for next-generation spintronic applications. Despite their potential, key magnetic characteristics, including the intrinsic helix period, the critical magnetic field for phase transitions, and the role of shape anisotropy in modulating the spin textures, remain elusive. In this study, we investigate the helimagnetic properties of Mn1/3MX2 (M = Nb, Ta; X = S, Se) using first-principles calculations and micromagnetic simulations. Applying a rotation-state method, we extract the critical magnetic interaction parameters and successfully predict their helix periods, in agreement with experimental observations. By incorporating shape anisotropy into our theoretical framework, we elucidate its influence on spin configurations and clarify the distinct helimagnetic behaviors observed in bulk crystals and thin films. Furthermore, we propose a new approach to determine the critical magnetic field based on the slope of the magnetization curve in the low-field regime. Our results offer the first quantitative insights into the magnetic behavior of Mn-intercalated TMDs and establish a predictive framework for understanding helimagnetism in this emerging material class.
mn嵌入过渡金属二硫族化物(TMDs)是承载helimagism的有希望的候选者,为下一代自旋电子应用提供了机会。尽管它们具有潜力,但关键的磁特性,包括固有螺旋周期,相变的临界磁场,以及形状各向异性在调制自旋织构中的作用,仍然难以捉摸。在本研究中,我们利用第一性原理计算和微磁模拟研究了Mn1/3MX2 (M = Nb, Ta; X = S, Se)的helmagnetic性质。应用旋转状态法,我们提取了临界磁相互作用参数,并成功地预测了它们的螺旋周期,与实验观察结果一致。通过将形状各向异性纳入我们的理论框架,我们阐明了其对自旋构型的影响,并阐明了在块状晶体和薄膜中观察到的独特的helimagnetic行为。此外,我们还提出了一种基于低场磁化曲线斜率确定临界磁场的新方法。我们的研究结果首次提供了对mn插层tmd磁性行为的定量见解,并为理解这种新兴材料类别的helimnetic建立了预测框架。
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引用次数: 0
Strain engineering of van Hove singularity and coupled itinerant ferromagnetism in quasi-2D oxide superlattices 准二维氧化物超晶格中van Hove奇点和耦合流动铁磁性的应变工程
IF 15 1区 物理与天体物理 Q1 PHYSICS, APPLIED Pub Date : 2025-10-28 DOI: 10.1063/5.0283547
Seung Gyo Jeong, Minjae Kim, Jin Young Oh, Youngeun Ham, In Hyeok Choi, Seong Won Cho, Jihyun Kim, Huimin Jeong, Byungmin Sohn, Tuson Park, Suyoun Lee, Jong Seok Lee, Deok-Yong Cho, Bongjae Kim, Woo Seok Choi
Engineering van Hove singularities (vHss) near the Fermi level, if feasible, offers a powerful route to control exotic quantum phases in electronic and magnetic behaviors. However, conventional approaches rely primarily on chemical and electrical doping and focus mainly on local electrical or optical measurements, limiting their applicability to coupled functionalities. In this study, a vHs-induced insulator-metal transition coupled with a ferromagnetic phase transition was empirically achieved in atomically designed quasi-2D SrRuO3 (SRO) superlattices via epitaxial strain engineering, which has not been observed in conventional 3D SRO systems. Theoretical calculations revealed that epitaxial strain effectively modulates the strength and energy positions of vHs of specific Ru orbitals, driving correlated phase transitions in the electronic and magnetic ground states. X-ray absorption spectroscopy confirmed the anisotropic electronic structure of quasi-2D SRO modulated by epitaxial strain. Magneto-optic Kerr effect and electrical transport measurements demonstrated modulated magnetic and electronic phases. Furthermore, magneto-electrical measurements detected significant anomalous Hall effect signals and ferromagnetic magnetoresistance, indicating the presence of magnetically coupled charge carriers in the 2D metallic regime. This study establishes strain engineering as a promising platform for tuning vHss and resultant itinerant ferromagnetism of low-dimensional correlated quantum systems.
在费米能级附近设计范霍夫奇点(vHss),如果可行的话,将为控制电子和磁性行为中的奇异量子相提供一条强有力的途径。然而,传统的方法主要依赖于化学和电掺杂,主要关注局部电或光学测量,限制了它们对耦合功能的适用性。在本研究中,通过外延应变工程,在原子设计的准二维SrRuO3 (SRO)超晶格中实现了vhs诱导的绝缘体-金属相变耦合铁磁相变,这在传统的3D SRO系统中是没有观察到的。理论计算表明,外延应变可以有效地调节特定Ru轨道vHs的强度和能量位置,驱动电子基态和磁基态的相关相变。x射线吸收光谱证实了外延应变调制的准二维SRO的各向异性电子结构。磁光克尔效应和电输运测量证明了调制磁相位和电子相位。此外,磁电测量检测到显著的异常霍尔效应信号和铁磁磁阻,表明在二维金属区存在磁耦合载流子。本研究建立了应变工程作为一个有前途的平台来调谐vHss和由此产生的低维相关量子系统的流动铁磁性。
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引用次数: 0
Modeling of omnidirectional antenna space radiation shaped resistor networks and efficient path planning 全向天线空间辐射形电阻网络建模及有效路径规划
IF 15 1区 物理与天体物理 Q1 PHYSICS, APPLIED Pub Date : 2025-10-27 DOI: 10.1063/5.0291210
Xiaoyu Jiang, Jianwei Dai, Yanpeng Zheng, Zhaolin Jiang
This paper proposes an innovative omnidirectional antenna space radiation shaped resistor network model to analyze potential distribution characteristics in complex resistor networks and apply it to path planning. Through mathematical modeling based on Kirchhoff's laws and the recursive transformation method, combined with the discrete sine transform of the seventh kind and Chebyshev polynomials of the first kind, we derive precise formulas for node potentials and equivalent resistances. We further develop a novel path planning algorithm that leverages the natural decay properties of potentials, enhanced by directional deviation penalties and a backtracking mechanism. Comparative analyses with classical path planning algorithms demonstrate that the proposed method holds significant potential, particularly in dynamic environments. Finally, a fast algorithm for potential calculation is introduced, achieving a four- to five-fold improvement in computational efficiency over traditional approaches. These advances deepen research on resistor networks and provide strong support for applications in complex systems, autonomous driving, and wireless communications.
本文提出了一种创新的全向天线空间辐射形电阻网络模型,用于分析复杂电阻网络中的电位分布特性,并将其应用于路径规划。通过基于Kirchhoff定律和递归变换方法的数学建模,结合第七类离散正弦变换和第一类切比雪夫多项式,推导出节点电位和等效电阻的精确公式。我们进一步开发了一种新的路径规划算法,该算法利用电位的自然衰减特性,通过方向偏差惩罚和回溯机制增强。与经典路径规划算法的对比分析表明,该方法具有很大的潜力,特别是在动态环境中。最后,介绍了一种快速的势能计算算法,计算效率比传统方法提高了4 ~ 5倍。这些进展深化了电阻网络的研究,并为复杂系统、自动驾驶和无线通信中的应用提供了强有力的支持。
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引用次数: 0
3D-printed lithium-metal batteries: Multiscale architectures, hybrid technologies, and monolithic integration for next-generation energy storage 3d打印锂金属电池:用于下一代储能的多尺度架构、混合技术和单片集成
IF 15 1区 物理与天体物理 Q1 PHYSICS, APPLIED Pub Date : 2025-10-23 DOI: 10.1063/5.0284782
Shengchen Yang, Dongdong Li
Lithium-metal anodes, with their unmatched theoretical capacity (3860 mAh g−1) and ultra-low electrochemical potential (−3.04 V vs standard hydrogen electrode), are pivotal for next-generation high-energy-density batteries. However, their practical deployment is hindered by persistent challenges—dendritic growth, unstable solid electrolyte interphases (SEIs), and severe volumetric expansion. Emerging as a transformative solution, three-dimensional (3D) printing enables the rational design of multiscale architectures (e.g., micro-lattice anodes and gradient-porous cathodes) and hybrid solid-state electrolytes to address these limitations. This review presents a pioneering synthesis of 3D printing's role in lithium-metal battery engineering, focusing on its capacity to regulate lithium-ion flux, stabilize SEIs, and suppress dendrite proliferation through hierarchical structural control. We systematically analyze four key additive manufacturing technologies (inkjet printing, direct ink writing, fused deposition modeling, and stereolithography), delineating their unique advantages in tailoring ion transport pathways and mechanical robustness. Furthermore, we propose multi-material co-printing strategies to resolve interfacial incompatibilities in monolithic lithium-metal batteries, a critical barrier in current research. By bridging additive manufacturing with electrochemical fundamentals, this work outlines a roadmap to harness 3D printing's full potential, addressing scalability challenges and advancing applications in aerospace, wearables, and biomedical devices where energy density and safety are paramount.
锂金属阳极具有无与伦比的理论容量(3860 mAh g - 1)和超低电化学电位(- 3.04 V vs标准氢电极),是下一代高能量密度电池的关键。然而,它们的实际部署受到持续挑战的阻碍-枝晶生长,不稳定的固体电解质界面(SEIs)和严重的体积膨胀。作为一种变革性的解决方案,三维(3D)打印使多尺度结构(例如微晶格阳极和梯度多孔阴极)和混合固态电解质的合理设计能够解决这些限制。本文综述了3D打印在锂金属电池工程中的开创性作用,重点介绍了其通过分层结构控制调节锂离子通量、稳定sei和抑制枝晶增殖的能力。我们系统地分析了四种关键的增材制造技术(喷墨打印、直接墨水书写、熔融沉积建模和立体光刻),描绘了它们在定制离子传输途径和机械稳健性方面的独特优势。此外,我们提出了多材料共打印策略来解决单片锂金属电池的界面不兼容性,这是当前研究中的一个关键障碍。通过将增材制造与电化学基础相结合,这项工作概述了利用3D打印的全部潜力的路线图,解决了可扩展性挑战,并推进了能量密度和安全性至关重要的航空航天,可穿戴设备和生物医学设备的应用。
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引用次数: 0
Lithium niobate tuning fork-enhanced photoacoustic spectroscopy and light-induced thermoelastic spectroscopy 铌酸锂音叉增强光声光谱和光致热弹性光谱
IF 15 1区 物理与天体物理 Q1 PHYSICS, APPLIED Pub Date : 2025-10-17 DOI: 10.1063/5.0277336
Runqiu Wang, Guowei Han, Ying He, Shunda Qiao, Yufei Ma
In this paper, the performance of two self-designed lithium niobate tuning forks (LiNTF), round-head and tapered LiNTFs, was systematically explored in lithium niobate-enhanced photoacoustic spectroscopy (LiNPAS) and light-induced thermoelastic spectroscopy (LITES) sensors. Finite element analysis results revealed that the stress and surface charge density of the LiNTFs were higher than those of the standard quartz tuning fork (QTF), owing to the high piezoelectric coefficient and electromechanical coupling coefficient of the LiNbO3. The sensing performance of the two LiNTFs was experimentally evaluated, and acetylene (C2H2) was used as the test gas for performance validation. In the C2H2–LiNPAS system, the 2f signal peak values of the round-head LiNTF and the tapered LiNTF were 3.47 times and 4.29 times higher than those of the standard QTF, respectively. When the average time reached 1000 s, the minimum detection limits (MDLs) of the sensor based on round-head LiNTF and the tapered LiNTF were 723 and 450 ppb, respectively. In the C2H2–LITES system, the 2f signal peak values of the round-head LiNTF and the tapered LiNTF were found to be 3.79 times and 5.13 times higher than that of the standard QTF. The MDLs of the LITES sensor based on the round-head LiNTF and the tapered LiNTF were determined to be 101 and 52 ppb, respectively.
本文在铌酸锂增强光声光谱(LiNPAS)和光致热弹性光谱(LITES)传感器中系统地研究了两种自行设计的圆头和锥形铌酸锂音叉(LiNTF)的性能。有限元分析结果表明,由于LiNbO3具有较高的压电系数和机电耦合系数,其应力和表面电荷密度高于标准石英音叉(QTF)。实验评估了两种lintf的传感性能,并以乙炔(C2H2)作为测试气体进行了性能验证。在C2H2-LiNPAS体系中,圆头LiNTF和锥形LiNTF的2f信号峰值分别是标准QTF的3.47倍和4.29倍。当平均时间达到1000 s时,圆头LiNTF和锥形LiNTF传感器的最小检测限(MDLs)分别为723和450 ppb。在C2H2-LITES系统中,圆头LiNTF和锥形LiNTF的2f信号峰值分别是标准QTF的3.79倍和5.13倍。基于圆头LiNTF和锥形LiNTF的LITES传感器的MDLs分别为101和52 ppb。
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引用次数: 0
Voltage-controlled magnetic anisotropy in Pt/Fe/MgO and 2D dielectric LaOBr-capped Pt/Fe/MgO heterostructures 电压控制的Pt/Fe/MgO和二维介质labr_capped Pt/Fe/MgO异质结构的磁各向异性
IF 15 1区 物理与天体物理 Q1 PHYSICS, APPLIED Pub Date : 2025-10-15 DOI: 10.1063/5.0281436
Xinzhuo Zhang, Shiming Yan, Wen Qiao, Ru Bai, Tiejun Zhou
Low power consumption and fast response enabled by voltage control are core advantages of field-effect transistors. Similarly, in magnetoelectric random access memory (MeRAM), voltage-controlled magnetic anisotropy (VCMA) offers comparable advantages in assisting or directly inducing magnetization switching. Enhancing the VCMA coefficient is essential for fully realizing this functionality. In this work, first-principles calculations reveal that the Pt/Fe/MgO heterostructure exhibits a significant VCMA coefficient (β = −4394 fJ/V·m), which is mainly contributed by the Pt layer. It has been demonstrated that the large VCMA coefficient originates from four indispensable determinants associated with the Pt layer: (1) the strong spin–orbit coupling constant, (2) the high induced spin polarization, (3) electron accumulation/depletion on the Pt layer, and (4) the presence of Pt dz2 orbital states near the Fermi level. In consideration of practical application scenarios, Pt/Fe/MgO was further capped with an Au electrode layer and a dielectric BaTiO3 layer. However, the calculated results reveal a significant reduction in the VCMA coefficient for both structures. In contrast, introducing a 2D dielectric material, LaOBr, as a gate layer atop Pt/Fe/MgO, a comparably large VCMA coefficient (β = −4373 fJ/V·m) is obtained. This is attributed to the van der Waals nature of the LaOBr/Pt interface, which allows the Pt layer to meet the four determinants mentioned above. The insights into the factors governing the VCMA coefficient and the design of the LaOBr/Pt/Fe/MgO heterostructure provide valuable guidance for the development of next-generation, high-performance MeRAM devices with large VCMA.
低功耗和快速响应的电压控制是场效应晶体管的核心优势。同样,在磁电随机存取存储器(MeRAM)中,电压控制磁各向异性(VCMA)在辅助或直接诱导磁化开关方面具有类似的优势。提高VCMA系数是充分实现这一功能的必要条件。第一性原理计算表明,Pt/Fe/MgO异质结构具有显著的VCMA系数(β = - 4394 fJ/V·m),这主要是由Pt层贡献的。结果表明,较大的VCMA系数来源于与Pt层相关的四个不可缺少的决定因素:(1)强自旋-轨道耦合常数,(2)高诱导自旋极化,(3)Pt层上的电子积累/耗尽,以及(4)Pt dz2轨道态在费米能级附近的存在。考虑到实际应用场景,在Pt/Fe/MgO表面进一步覆盖了Au电极层和介电BaTiO3层。然而,计算结果显示两种结构的VCMA系数都有显著降低。相反,在Pt/Fe/MgO上引入二维介电材料LaOBr作为栅极层,得到了较大的VCMA系数(β = - 4373 fJ/V·m)。这归因于LaOBr/Pt界面的范德华性质,它允许Pt层满足上面提到的四个决定因素。对影响VCMA系数的因素和LaOBr/Pt/Fe/MgO异质结构设计的深入了解,为开发具有大VCMA的下一代高性能MeRAM器件提供了有价值的指导。
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引用次数: 0
Carbon-based memristors for neuromorphic computing 用于神经形态计算的碳基忆阻器
IF 15 1区 物理与天体物理 Q1 PHYSICS, APPLIED Pub Date : 2025-10-13 DOI: 10.1063/5.0260582
Zheng Wang, Kangli Xu, Jialin Meng, Bo Feng, Tianyu Wang
Driven by the rapid advancement of the Internet of Things and artificial intelligence, computational power demands have experienced an exponential surge, thereby accentuating the inherent limitations of the conventional von Neumann architecture. Neuromorphic computing memristors are emerging as a promising solution to overcome this bottleneck. Among various material-based memristors, carbon-based memristors (CBMs) are particularly attractive due to their biocompatibility, flexibility, and stability, which make them well suited for next-generation neuromorphic applications. This review summarizes the recent advancements in CBMs and proposes potential application scenarios in neuromorphic computing. Representative CBMs and preparation methods of carbon-based materials in different dimensions (0D, 1D, 2D, and 3D) are presented, followed by structural, storage, and synaptic plasticity testing and switching mechanisms. The neural network architecture built by CBMs is summarized for image processing, wearable electronics, and three-dimensional integration. Finally, the future challenges and application prospects of CBMs are reviewed and summarized.
在物联网和人工智能快速发展的推动下,计算能力需求呈指数级增长,从而凸显了传统冯·诺伊曼架构的固有局限性。神经形态计算记忆电阻器正在成为克服这一瓶颈的一个有希望的解决方案。在各种基于材料的记忆电阻器中,碳基记忆电阻器(CBMs)由于其生物相容性,灵活性和稳定性而特别具有吸引力,这使得它们非常适合下一代神经形态应用。本文综述了CBMs的最新进展,并提出了CBMs在神经形态计算中的潜在应用前景。介绍了不同维度(0D、1D、2D和3D)碳基材料的代表性cbm和制备方法,以及结构、存储和突触可塑性测试和开关机制。总结了基于CBMs构建的神经网络结构在图像处理、可穿戴电子和三维集成等方面的应用。最后,对信任措施的未来挑战和应用前景进行了回顾和总结。
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引用次数: 0
Spin emission from antiferromagnets and compensated ferrimagnets 反铁磁体和补偿铁磁体的自旋发射
IF 15 1区 物理与天体物理 Q1 PHYSICS, APPLIED Pub Date : 2025-10-10 DOI: 10.1063/5.0273489
C. Ciccarelli, G. Nava Antonio, J. Barker
Despite their zero net magnetization, antiferromagnets and compensated ferrimagnets have great potential as electrically and optically activated spin sources. The absence of stray fields means that such spin sources can be placed in close proximity to other magnetic elements without disturbing their state. Recent advances have shown that antiferromagnets and compensated ferrimagnets can emit spin current pulses with timescales down to the picosecond range and in the presence of small or zero external magnetic fields. The spin currents emitted by antiferromagnets have been used in actual devices to induce the field-free switching of nearby ferromagnets. Here, we review the different ways of generating a spin current from a magnetically compensated material. We describe the theoretical models for spin generation and the experimental techniques adopted for measuring the spin currents in different time regimes.
尽管它们的净磁化强度为零,但反铁磁体和补偿铁磁体作为电和光激活自旋源具有很大的潜力。没有杂散场意味着这样的自旋源可以放置在离其他磁性元素很近的地方而不会干扰它们的状态。最近的进展表明,反铁磁体和补偿铁磁体可以发射自旋电流脉冲,其时间尺度降至皮秒范围,并且存在小或零外磁场。反铁磁体发出的自旋电流已在实际装置中用于诱导附近铁磁体的无场开关。在这里,我们回顾了从磁补偿材料产生自旋电流的不同方法。我们描述了自旋产生的理论模型和测量不同时间范围内自旋电流所采用的实验技术。
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引用次数: 0
Direct integration of atomic precision advanced manufacturing into middle-of-line silicon fabrication 原子精密先进制造直接集成到中线硅制造
IF 15 1区 物理与天体物理 Q1 PHYSICS, APPLIED Pub Date : 2025-10-08 DOI: 10.1063/5.0278639
E. M. Anderson, C. R. Allemang, A. J. Leenheer, S. W. Schmucker, J. A. Ivie, D. M. Campbell, W. Lepkowski, X. Gao, P. Lu, C. Arose, T.-M. Lu, C. Halsey, T. D. England, D. R. Ward, D. A. Scrymgeour, S. Misra
Atomic precision advanced manufacturing (APAM) dopes silicon with enough carriers to change its electronic structure and can be used to create novel devices by defining metallic regions whose boundaries have single-atom abruptness. Incompatibility with the thermal and lithography process requirements for gated silicon transistor manufacturing have inhibited exploration of both how APAM can enhance CMOS performance and how transistor manufacturing steps can accelerate the discovery of new APAM device concepts. In this work, we introduce an APAM process that enables direct integration into the middle of a transistor manufacturing workflow. We show that a process that combines sputtering and annealing with a hardmask preserves a defining characteristic of APAM, a doping density far in excess of the solid solubility limit, while trading another, the atomic precision, for compatibility with manufacturing. The electrical characteristics of a chip combining a transistor with an APAM resistor show that the APAM module has only affected the transistor through the addition of a resistance and not by altering the transistor. This proof-of-concept demonstration also outlines the requirements and limitations of a unified APAM tool, which could be introduced into manufacturing environments, greatly expanding access to this technology and inspiring a new generation of devices with it.
原子精密先进制造(APAM)将硅掺杂到足够的载流子中以改变其电子结构,并且可以通过定义边界具有单原子突然性的金属区域来用于制造新型器件。与门控硅晶体管制造的热和光刻工艺要求的不兼容性阻碍了APAM如何提高CMOS性能以及晶体管制造步骤如何加速发现新的APAM器件概念的探索。在这项工作中,我们引入了一种APAM工艺,可以直接集成到晶体管制造工作流程的中间。我们表明,将溅射和退火与硬掩膜相结合的工艺保留了APAM的定义特征,即远远超过固体溶解度极限的掺杂密度,同时交换了另一个原子精度,以适应制造。结合晶体管和APAM电阻的芯片的电气特性表明,APAM模块仅通过增加电阻而不是通过改变晶体管来影响晶体管。此概念验证演示还概述了统一APAM工具的要求和限制,该工具可以引入制造环境,极大地扩展了对该技术的访问,并激发了新一代设备的使用。
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引用次数: 0
The enduring legacy of scanning spreading resistance microscopy: Overview, advancements, and future directions 扫描扩散电阻显微镜的持久遗产:概述,进展和未来方向
IF 15 1区 物理与天体物理 Q1 PHYSICS, APPLIED Pub Date : 2025-10-08 DOI: 10.1063/5.0280969
Md Ashiqur Rahman Laskar, Lennaert Wouters, Pieter Lagrain, Jill Serron, Nemanja Peric, Andrea Pondini, Pierre Eyben, Thomas Hantschel, Umberto Celano
Scanning spreading resistance microscopy (SSRM) has recently celebrated 30 years of existence when counting from the original patent of 1994. In this time, the technique has experienced an incredible journey with substantial evolutions that transformed SSRM from a small-scale experiment into a staple for chip manufacturing laboratories for physical analysis of materials, failure analysis, and process development of integrated circuits. As the nanoelectronics industry is ready for a new inflection point, with the introduction of nanosheet field-effect transistor to replace FinFETs and cell track scaling architectures such as the complementary field-effect transistors, SSRM is once again at a turning point. This review aims to highlight the state-of-the-art while discussing the emerging challenges introduced by the ever-increasing complexity in complementary metal–oxide–semiconductor (CMOS) manufacturing. We start by illustrating the unique capability of the SSRM technique, its origin, and its evolution. Next, we continue by showing the considerable research effort that enabled SSRM to transition to a tomographic sensing method in support of FinFET transistors. Here, the high aspect ratio fin geometry and the complex contacts technology have imposed important modifications to the original method. Later, we elaborate on some of the key challenges introduced by the upcoming device transition from three-sided channel FinFETs into nanosheet FETs, i.e., offering a four-sided electrostatic control of the channel. Finally, we present the use of machine learning for automation in carrier calibration with increased accuracy. We close by introducing some of the concepts that we consider promising for further extension of SSRM to obtain sub-nm structural information and doping profiles in the area of advanced FinFETs and nanosheet FET technologies, including (a) correlative analysis flow, (b) liquid-assisted probing, and (c) top–down and bottom–up multi-probe sensing schemes to merge low- and high-pressure SSRM scans.
扫描扩散电阻显微镜(SSRM)从1994年的原始专利算起,最近已经庆祝了30年的存在。在此期间,该技术经历了令人难以置信的发展历程,从小规模实验转变为芯片制造实验室的主要材料物理分析,失效分析和集成电路的工艺开发。随着纳米电子学行业准备好迎接一个新的拐点,纳米片场效应晶体管的引入取代了finfet和细胞轨道缩放架构,如互补场效应晶体管,SSRM再次处于转折点。本综述旨在强调最先进的技术,同时讨论互补金属氧化物半导体(CMOS)制造中日益增加的复杂性所带来的新挑战。我们首先说明SSRM技术的独特能力、它的起源和发展。接下来,我们将继续展示大量的研究工作,使SSRM能够过渡到支持FinFET晶体管的层析传感方法。在这里,高纵横比翅片几何形状和复杂接触技术对原始方法进行了重要的修改。随后,我们详细阐述了即将到来的器件从三面通道finfet过渡到纳米片fet所带来的一些关键挑战,即提供通道的四方静电控制。最后,我们介绍了机器学习在载波校准自动化中的应用,提高了精度。最后,我们介绍了一些我们认为有希望进一步扩展SSRM的概念,以获得先进finfet和纳米片FET技术领域的亚纳米结构信息和掺杂概况,包括(a)相关分析流,(b)液体辅助探测,以及(c)自上而下和自下而上的多探针传感方案,以合并低压和高压SSRM扫描。
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