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Low loss AlInN/GaN Monolithic Microwave Integrated Circuit switch 低损耗alin /GaN单片微波集成电路开关
Pub Date : 2011-06-20 DOI: 10.1109/DRC.2011.5994438
A. Sattu, D. Billingsley, J. Deng, J. Yang, R. Gaska, M. Shur, G. Simin
We report on the first AlInN/GaN Heterojunction Field Effect Transistor (HFET) based Monolithic Microwave Integrated Circuit (MMIC) switch. Lattice-matched AlInN/GaN heterostructures with indium contents of ∼17% exhibit a very large conduction band discontinuity, ΔEC, of 1.7 eV. This large discontinuity results in 2DEG densities as high as 4.7×1013 cm−2 [1] and electron mobilities as high as 1617 cm2/V-s [2]. As a result these heterostructures can achieve record low sheet resistances, making them very attractive candidates for ultra-low loss microwave and other switching devices.
我们报道了第一种基于AlInN/GaN异质结场效应晶体管(HFET)的单片微波集成电路(MMIC)开关。铟含量为~ 17%的晶格匹配AlInN/GaN异质结构表现出非常大的导带不连续,ΔEC,为1.7 eV。这种大的不连续导致2DEG密度高达4.7×1013 cm−2[1],电子迁移率高达1617 cm2/V-s[2]。因此,这些异质结构可以达到创纪录的低片电阻,使其成为超低损耗微波和其他开关器件的非常有吸引力的候选者。
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引用次数: 2
Orthogonal spin transfer MRAM 正交自旋转移MRAM
Pub Date : 2011-06-20 DOI: 10.1109/DRC.2011.5994472
D. Bedau, D. Backes, H. Liu, J. Langer, P. Manandhar, A. Kent
Spin-Transfer Magnetic Random Access Memory (ST-MRAM) devices hold great promise as a universal memory [Katine 2008]. ST-MRAM is non-volatile, has a small cell size, high endurance and may match the speed of SRAM. A disadvantage of the common collinearly magnetized ST-MRAM is their non-deterministic switching process, which leads to long switching times and broad switching time distributions [Devolder 2008, Koch 2004]. This delay is due to the fact that the torque is zero if the layers are either parallel or antiparallel [Slonczewski 1996] and hence switching cannot be initiated by the torque alone. Typically the process is started by an initial misalignment of the free layer stemming from thermal excitations. Relying on thermal initiation leads to incoherent reversal with an unpredictable incubation delay in the ns range [Devolder 2008] and broad switching time distributions [Koch 2004]
自旋转移磁随机存取存储器(ST-MRAM)设备作为通用存储器具有很大的前景[Katine 2008]。ST-MRAM是非易失性的,具有小电池尺寸,高耐用性,并且可以匹配SRAM的速度。普通共线磁化ST-MRAM的缺点是其切换过程不确定,导致切换时间长,切换时间分布宽[Devolder 2008, Koch 2004]。这种延迟是由于如果层是平行或反平行的,则转矩为零[Slonczewski 1996],因此切换不能仅由转矩启动。典型的过程是由热激发引起的自由层的初始不对准开始的。依靠热启动导致非相干反转,其潜伏期在ns范围内不可预测[Devolder 2008]和宽开关时间分布[Koch 2004]。
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引用次数: 0
High-mobility organic thin-film transistors with photolithographically patterned top contacts 高迁移率有机薄膜晶体管与光刻图像化顶部触点
Pub Date : 2011-06-20 DOI: 10.1109/DRC.2011.5994449
U. Zschieschang, N. H. Hansen, J. Pflaum, Tatsuya Yamamoto, K. Takimiya, H. Kuwabara, M. Ikeda, T. Sekitani, T. Someya, H. Klauk
Due to its large-area capability and high resolution, photolithography is the preferred patterning method for pentacene thin-film transistors (TFTs) for display and circuit applications [1,2]. Since the morphology of thin pentacene films is very sensitive to solvents and heat [3,4], the photolithographic patterning of the source/drain contacts is ideally performed prior to the pentacene deposition, which explains the general preference for the bottom-contact (coplanar) TFT structure. However, as experiments [5] and simulations [6,7] have shown, the bottom-contact TFT structure is associated with substantially larger contact resistance than the top-contact (staggered) structure, which means that for the same channel length, top-contact TFTs are expected to provide larger transconductance and higher cutoff frequency than bottom-contact TFTs. Here we report on organic TFTs with Au top contacts patterned by ordinary photolithography and wet etching (using common solvents, photoresists, and etchants) having field-effect mobilities (0.4 cm2/Vs) and on/off current ratios (107) similar to those of optimized bottom-contact pentacene TFTs [1,2,5].
由于光刻的大面积性能和高分辨率,它是用于显示和电路应用的并五苯薄膜晶体管(tft)的首选图像化方法[1,2]。由于并五苯薄膜的形态对溶剂和热非常敏感[3,4],源/漏极触点的光刻图像化理想地在并五苯沉积之前进行,这解释了对底部触点(共面)TFT结构的普遍偏好。然而,正如实验[5]和模拟[6,7]所显示的那样,底部接触TFT结构比顶部接触(交错)结构具有更大的接触电阻,这意味着对于相同的通道长度,顶部接触TFT有望比底部接触TFT提供更大的跨导和更高的截止频率。在这里,我们报道了通过普通光刻和湿法蚀刻(使用普通溶剂、光刻剂和蚀刻剂)制作的具有Au顶部触点的有机tft,其场效应迁移率(0.4 cm2/Vs)和通/关电流比(107)类似于优化的底部触点五苯tft[1,2,5]。
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引用次数: 0
Indium-free transparent thin film transistors based on nanocrystalline ZnO 基于纳米晶ZnO的无铟透明薄膜晶体管
Pub Date : 2011-06-20 DOI: 10.1109/DRC.2011.5994516
B. Bayraktaroglu, K. Leedy, R. Scott
Wide bandgap semiconductors based on (Zn, In, Ga, Sn)-oxides are all good candidates for the channel material in transparent thin film transistors (TTFT) because of their simultaneous high electron mobility and optical transparency properties. The choice of contact layers are, however, more limited because not all metal oxides can be doped high enough to yield low resistivity layers. Historically, the most common contact layers are ternary compounds that include indium (e.g. indium-tin-oxide, indium-zinc-oxide etc). These indium-containing transparent conductive oxide (TCO) films find widespread applications in flat panel displays and touch-sensitive surfaces of many communication devices. Because of the rapidly expanding markets for such devices, and the limited availability of indium in the world markets, the increased demand-to-supply ratio has caused the cost of indium to increase very rapidly. There are concerns about the continuity of indium supply for future devices.1
基于(Zn, In, Ga, Sn)氧化物的宽带隙半导体由于其同时具有高电子迁移率和光学透明性,都是透明薄膜晶体管(TTFT)通道材料的良好候选者。然而,接触层的选择是有限的,因为并不是所有的金属氧化物都能掺杂到足够高的水平以产生低电阻率层。历史上,最常见的接触层是包含铟的三元化合物(如氧化铟锡、氧化铟锌等)。这些含铟的透明导电氧化物(TCO)薄膜广泛应用于平板显示器和许多通信设备的触摸敏感表面。由于这种设备的市场迅速扩大,而铟在世界市场上的可用性有限,需求与供应比的增加导致铟的成本迅速增加。人们担心未来设备的铟供应能否持续
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引用次数: 0
“Zero” drain-current drift of inversion-mode NMOSFET on InP (111)A surface InP (111)A表面上NMOSFET的“零”漏极电流漂移
Pub Date : 2011-06-20 DOI: 10.1109/DRC.2011.5994430
Chen Wang, Min Xu, R. Colby, E. Stach, P. Ye
InP is a commonly used compound semiconductor with wide applications in electronic, optoelectronic, and photonic devices. Compared to GaAs, InP is widely believed to be a more forgiving material with respect to Fermi level pinning and has a higher electron saturation velocity (2.5×107 cm/s) as well. It could be a viable channel material for high-speed logic applications if a high-quality, thermodynamically stable high-k dielectric could be found. [1] It is of great importance for the understanding of high-k/InP interfaces since InP is identified as a transition layer for ALD high-k/InGaAs quantum well transistor in state-of-the-art devices. [2] Motivated by previous work on surface orientation studies of GaAs [3] and InGaAs [4], we have systematically studied NMOSFETs, MOSCAPs, and interfacial chemistry on two different crystalline surfaces: InP (100) and (111)A (In-rich). With ALD Al2O3 in direct contact as gate dielectric, a record high drain current of 600 µA/µm is obtained for an InP inversion-mode MOSFET on the (111)A surface with a gate length of 1µm, which is a factor of 2.6 enhancement compared to the (100) surface at the same VG-VT condition. The smoother Al2O3/(111)A interface and a shift of the charge-neutrality-level (CNL) [5] on InP(111)A toward the conduction band edge is identified as the origin of this drain current enhancement in spite of the extracted interface trap density (Dit). [6] In this paper, we report on “zero” drain-current drift on InP (111)A MOSFETs which is a major issue to prevent commercializing InP MOSFET technology on (100) surface in 1980s. [7]
InP是一种常用的化合物半导体,在电子、光电和光子器件中有着广泛的应用。与砷化镓相比,InP被广泛认为是一种更宽容的材料,相对于费米水平钉钉,并且具有更高的电子饱和速度(2.5×107 cm/s)。如果能找到一种高质量的、热力学稳定的高k介电介质,它可能成为高速逻辑应用的可行通道材料。[1]这对于理解高k/InP接口具有重要意义,因为在最先进的器件中,InP被认为是ALD高k/InGaAs量子阱晶体管的过渡层。[2]受前人对GaAs[3]和InGaAs[4]的表面取向研究的启发,我们系统地研究了两种不同晶体表面:InP(100)和(111)A (In-rich)上的nmosfet、MOSCAPs和界面化学。当ALD Al2O3作为栅极电介质直接接触时,在栅极长度为1 μ m的(111)a表面上的InP反相MOSFET获得了600 μ a / μ m的高漏极电流,与相同VG-VT条件下的(100)表面相比,这是2.6倍。尽管提取了界面陷阱密度(Dit),但更光滑的Al2O3/(111)A界面和InP(111)A上向导带边缘移动的电荷中性电平(CNL)[5]被确定为漏极电流增强的来源。[6]在本文中,我们报道了InP (111)A MOSFET上的“零”漏极电流漂移,这是20世纪80年代阻碍(100)表面InP MOSFET技术商业化的主要问题。[7]
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引用次数: 3
High performance N- and P-type gate-all-around nanowire MOSFETs fabricated on bulk Si by CMOS-compatible process 采用cmos兼容工艺在大块硅上制备高性能N型和p型栅极全能纳米线mosfet
Pub Date : 2011-06-20 DOI: 10.1109/DRC.2011.5994423
Yi Song, Huajie Zhou, Qiuxia Xu, Jun Luo, Chao Zhao, Q. Liang
We demonstrate high performance silicon nanowire gate-all-around MOSFETs (SNWFETs) fabricated on bulk Si by a novel top-down CMOS-compatible method. The fabricated N- and P-type SNWFETs of sub-50 nm gate length and of ∼5 nm in diameter show excellent short channel effects (SCEs) immunity with subthreshold slope (SS) of 90/69 mV/dec, DIBL of 47/10 mV/V, and high driving current of 2×103/5.4×103 µA/µm at 0.1 nA/µm off-current.
我们展示了高性能硅纳米线栅极全能mosfet (snwfet)通过一种新颖的自上而下的cmos兼容方法在体硅上制造。所制备的栅极长度小于50 nm、直径约5 nm的N型和p型snwfet具有优异的短沟道效应抗扰度,亚阈值斜率(SS)为90/69 mV/dec, DIBL为47/10 mV/V,在0.1 nA/µm的断流下驱动电流为2×103/5.4×103µA/µm。
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引用次数: 1
C-V measurements of single vertical nanowire capacitors 单垂直纳米线电容器的C-V测量
Pub Date : 2011-06-20 DOI: 10.1109/DRC.2011.5994444
P. Mensch, K. Moselund, S. Karg, E. Lortscher, M. Bjork, H. Schmid, H. Riel
The density of interface states, Dit, is important for the device performance in view of the fact that it limits the inverse subthreshold slope in both, MOSFETs and TFETs [1]. This poses particular challenges for nanowire (NW) devices, because the measured Dit is expected to increase due to the extensive processing and the various crystallographic orientations of the surface, which differ from the ideal (100) orientation. For a detailed investigation of the Dit of NWs it is best to analyze single NW MOS capacitors. However, the capacitance of a single NW MOS capacitor lies in the fF regime which is very challenging to measure. To date, very few capacitance measurements on single NWs have been reported, e.g., on lateral devices based on InAs [2], Ge [3], and Si [4]. Dit analysis of NWs has been demonstrated, however, based on capacitance measurements only of large arrays of InAs NWs [5]. In the present work, we report on the capacitance measurement and Dit analysis of vertical silicon MOS capacitors based on single NWs.
界面态密度Dit对器件性能很重要,因为它限制了mosfet和tfet的逆亚阈值斜率[1]。这对纳米线(NW)器件提出了特别的挑战,因为由于广泛的加工和表面的各种晶体取向(与理想(100)取向不同),测量的Dit预计会增加。为了详细研究NW的Dit,最好分析单个NW MOS电容器。然而,单个NW MOS电容器的电容处于fF区,这是非常具有挑战性的测量。迄今为止,对单个NWs进行电容测量的报道很少,例如,基于InAs[2]、Ge[3]和Si[4]的横向器件。然而,已经证明了NWs的Dit分析,仅基于大型InAs NWs阵列的电容测量[5]。在本工作中,我们报道了基于单个NWs的垂直硅MOS电容器的电容测量和Dit分析。
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引用次数: 6
1.0 THz fmax InP DHBTs in a refractory emitter and self-aligned base process for reduced base access resistance 1.0 THz fmax InP dhbt在耐火发射极和自对准基极工艺,以减少基极接入电阻
Pub Date : 2011-06-20 DOI: 10.1109/DRC.2011.5994528
V. Jain, J. Rode, H. Chiang, A. Baraskar, E. Lobisser, B. Thibeault, M. Rodwell, M. Urteaga, D. Loubychev, A. Snyder, Y. Wu, J. Fastenau, W.K. Liu
We report 220 nm InP double heterojunction bipolar transistors (DHBTs) demonstrating fτ = 480 GHz and fmax = 1.0 THz. Improvements in the emitter and base processes have made it possible to achieve a 1.0 THz fmax even at 220 nm wide emitter-base junction with a 1.1 µm wide base-collector mesa. A vertical emitter metal etch profile, wet-etched thin InP emitter semiconductor with less than 10 nm undercut and self-aligned base contact deposition reduces the emitter semiconductor-base metal gap (Wgap) to ∼ 10 nm, thereby significantly reducing the gap resistance term (Rgap) in the total base access resistance (Rbb), enabling a high fmax device. Reduction in the total collector base capacitance (Ccb) through undercut in the base mesa below base post further improved fmax. These devices employ a Mo/W/TiW refractory emitter metal contact which allows biasing the transistors at high emitter current densities (Je) without problems of electromigration or contact diffusion under electrical stress [1].
我们报道了220 nm InP双异质结双极晶体管(dhbt),其fτ = 480 GHz, fmax = 1.0 THz。发射极和基极工艺的改进使得即使在220 nm宽的发射极-基极结和1.1 μ m宽的基极-集电极台面上也可以实现1.0 THz的fmax。垂直发射极金属蚀刻轮廓,湿蚀刻薄的InP发射极半导体具有小于10 nm的凹边和自对准基极接触沉积,将发射极半导体基极金属间隙(Wgap)减少到~ 10 nm,从而显着降低总基极存取电阻(Rbb)中的间隙电阻项(Rgap),从而实现高fmax器件。通过在基柱下方的基台凹边减小总集电极基电容(Ccb),进一步提高了fmax。这些器件采用Mo/W/TiW耐火发射极金属触点,允许在高发射极电流密度(Je)下对晶体管进行偏置,而不会出现电应力下的电迁移或触点扩散问题[1]。
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引用次数: 23
Spintronics search engines 自旋电子学搜索引擎
Pub Date : 2011-06-20 DOI: 10.1109/DRC.2011.5994459
H. Dery, B. Ciftcioglu, Yang Song, Hui Wu, Michael C. Huang, R. Kawakami, Jing Shi, I. Krivorotov, I. Žutić, L. Sham
We present a novel design concept for spintronic nanoelectronics that emphasizes a seamless integration of spin-based memory and logic circuits. The building blocks are magneto-logic gates [1,2] based on a hybrid graphene/ferromagnet material system. We use network search engines as a technology demonstration vehicle and present a spin-based circuit design with smaller area and lower energy consumption than the state-of-the-art CMOS counterparts. This design can also be applied in applications such as data compression, coding and image recognition. In the proposed scheme, over 100 spin-based logic operations are carried out before any need for a spin-charge conversion. Consequently, supporting CMOS electronics requires little power consumption. The spintronic-CMOS integrated system can be implemented on a single 3-D chip. These nonvolatile logic circuits hold potential for a paradigm shift in computing applications.
我们提出了一种新的自旋电子纳米电子学设计概念,强调自旋存储和逻辑电路的无缝集成。构建模块是基于石墨烯/铁磁体混合材料系统的磁逻辑门[1,2]。我们使用网络搜索引擎作为技术演示工具,并提出了一个比最先进的CMOS同行更小的面积和更低能耗的旋转电路设计。该设计还可以应用于数据压缩、编码和图像识别等应用。在提出的方案中,在任何需要自旋-电荷转换之前,进行了100多个基于自旋的逻辑运算。因此,支持CMOS电子器件需要很少的功耗。该自旋电子- cmos集成系统可在单个三维芯片上实现。这些非易失性逻辑电路在计算应用中具有范式转换的潜力。
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引用次数: 0
Numerical study of electronic transport through bilayer graphene nanoribbons 双层石墨烯纳米带电子输运的数值研究
Pub Date : 2011-06-20 DOI: 10.1109/DRC.2011.5994439
K. M. Masum Habib, R. Lake
In graphene, a sheet of carbon atoms arranged in a honeycomb structure, charge carriers behave as massless Dirac fermions and move with extremely high speed leading to exotic electronic properties. However, lack of a band-gap reduces its utility for conventional electronic device applications. A tunable bandgap can be induced in bilayer graphene by application of a potential difference between the two layers.
在石墨烯中,一层碳原子呈蜂窝状排列,载流子表现为无质量的狄拉克费米子,并以极高的速度移动,从而产生奇异的电子特性。然而,缺乏带隙降低了其在传统电子器件应用中的效用。利用两层之间的电位差,可以在双层石墨烯中诱导出可调谐的带隙。
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引用次数: 4
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69th Device Research Conference
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