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Effect of disorder on superfluidity in double layer graphene 无序对双层石墨烯超流动性的影响
Pub Date : 2011-06-20 DOI: 10.1109/DRC.2011.5994465
B. Dellabetta, M. J. Gilbert
Post-CMOS logic in bilayer graphene is very promising due to the possibility of observing room temperature collective states. An excitonic superfluid is predicted to form in double layer graphene systems at room temperature if the two individual monolayers of graphene are separated by an oxide no more than a few nanometers thick [1]. Recent experiments have shown evidence of interaction enhanced transport in double layer graphene [2], but there is a significant discrepancy in the quality of the two graphene layers which may be occluding the phase transition. We present and compare the performance characteristics of ideal and disordered double layer graphene systems at room temperature in the purported regime of superfluidity. We perform quantum transport calculations on double layer graphene using the Non-Equilibrium Green's Function (NEGF) formalism in an effort to elucidate the evolution of a BEC under non-equilibrium conditions in the presence of lattice defects. We find that lattice defects spread throughout the channel can degrade interlayer current by 30%, but disorder concentrated near the contacts causes a much more significant reduction of 80% in interlayer current. We also find that steady-state spontaneous coherence is lost for defect concentrations greater than 4%; a very clean system is therefore necessary for potential post-CMOS logic applications.
双层石墨烯中的后cmos逻辑非常有前途,因为可以观察室温集体状态。据预测,如果两层单层石墨烯被厚度不超过几纳米的氧化物隔开,则在室温下双层石墨烯体系中会形成激子超流体[1]。最近的实验表明,相互作用增强了双层石墨烯中的输运[2],但两层石墨烯的质量存在显著差异,这可能会阻碍相变。我们提出并比较了理想和无序双层石墨烯系统在室温下超流体状态下的性能特征。我们使用非平衡格林函数(NEGF)形式对双层石墨烯进行量子输运计算,以阐明存在晶格缺陷的非平衡条件下BEC的演化。我们发现遍布整个通道的晶格缺陷可以使层间电流降低30%,但集中在触点附近的无序会使层间电流降低80%。我们还发现,当缺陷浓度大于4%时,稳态自发相干丢失;因此,一个非常干净的系统对于潜在的后cmos逻辑应用是必要的。
{"title":"Effect of disorder on superfluidity in double layer graphene","authors":"B. Dellabetta, M. J. Gilbert","doi":"10.1109/DRC.2011.5994465","DOIUrl":"https://doi.org/10.1109/DRC.2011.5994465","url":null,"abstract":"Post-CMOS logic in bilayer graphene is very promising due to the possibility of observing room temperature collective states. An excitonic superfluid is predicted to form in double layer graphene systems at room temperature if the two individual monolayers of graphene are separated by an oxide no more than a few nanometers thick [1]. Recent experiments have shown evidence of interaction enhanced transport in double layer graphene [2], but there is a significant discrepancy in the quality of the two graphene layers which may be occluding the phase transition. We present and compare the performance characteristics of ideal and disordered double layer graphene systems at room temperature in the purported regime of superfluidity. We perform quantum transport calculations on double layer graphene using the Non-Equilibrium Green's Function (NEGF) formalism in an effort to elucidate the evolution of a BEC under non-equilibrium conditions in the presence of lattice defects. We find that lattice defects spread throughout the channel can degrade interlayer current by 30%, but disorder concentrated near the contacts causes a much more significant reduction of 80% in interlayer current. We also find that steady-state spontaneous coherence is lost for defect concentrations greater than 4%; a very clean system is therefore necessary for potential post-CMOS logic applications.","PeriodicalId":107059,"journal":{"name":"69th Device Research Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2011-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114199843","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Integration of high quality top-gated graphene field effect devices on 150 mm substrate 在150mm基板上集成高质量顶门控石墨烯场效应器件
Pub Date : 2011-06-20 DOI: 10.1109/DRC.2011.5994407
J. Heo, Hyun‐Jong Chung, Sung-Hoon Lee, Heejun Yang, Jaikwang Shin, U. Chung, S. Seo
Recent success of inexpensive and high-throughput chemical vapor deposition (CVD) growth [1] of graphene on Ni or Cu substrates has shown promises for potential industrial applications such as transparent electrodes [2] and field effect transistors (FET). [3] However, high-coverage uniform growth of monolayer graphene on a wafer scale is still a major obstruction, which impedes high yield integration of high performance field effect devices. Here, we report the first demonstration of high quality top-gated graphene field effect devices on 150 mm substrates exploiting unprecedented homogeneous CVD growth of monolayer graphene.
最近,石墨烯在Ni或Cu衬底上的廉价和高通量化学气相沉积(CVD)生长[1]取得了成功,这为透明电极[2]和场效应晶体管(FET)等潜在的工业应用带来了希望。[3]然而,单层石墨烯在晶圆尺度上的高覆盖均匀生长仍然是阻碍高性能场效应器件高成品率集成的主要障碍。在这里,我们报告了首次在150mm衬底上展示高质量的顶门控石墨烯场效应器件,利用前所未有的均匀CVD单层石墨烯生长。
{"title":"Integration of high quality top-gated graphene field effect devices on 150 mm substrate","authors":"J. Heo, Hyun‐Jong Chung, Sung-Hoon Lee, Heejun Yang, Jaikwang Shin, U. Chung, S. Seo","doi":"10.1109/DRC.2011.5994407","DOIUrl":"https://doi.org/10.1109/DRC.2011.5994407","url":null,"abstract":"Recent success of inexpensive and high-throughput chemical vapor deposition (CVD) growth [1] of graphene on Ni or Cu substrates has shown promises for potential industrial applications such as transparent electrodes [2] and field effect transistors (FET). [3] However, high-coverage uniform growth of monolayer graphene on a wafer scale is still a major obstruction, which impedes high yield integration of high performance field effect devices. Here, we report the first demonstration of high quality top-gated graphene field effect devices on 150 mm substrates exploiting unprecedented homogeneous CVD growth of monolayer graphene.","PeriodicalId":107059,"journal":{"name":"69th Device Research Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2011-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115445977","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
3D simulation of electrical characteristic fluctuation induced by interface traps at Si/high-к oxide interface and random dopants in 16-nm-Gate CMOS devices 16nm栅极CMOS器件中Si/高氧化硅界面陷阱和随机掺杂引起的电特性波动的三维模拟
Pub Date : 2011-06-20 DOI: 10.1109/DRC.2011.5994435
Hui-Wen Cheng, Y. Chiu, Yiming Li
The random dopant (RD)-induced threshold voltage fluctuation (σVth) was explored recently [1–4]. RD fluctuation (RDF) has been one of challenges in nano-CMOS technologies; consequently, high-к/metal gate (HKMG) approach is adopted to suppress intrinsic parameter fluctuation and leakage current for sub-45-nm generations. However, random interface traps (ITs) appearing at Si/high-к oxide interface results in a new fluctuation source [2]. Effects of ITs and RDs on electrical characteristic fluctuation have not been explored yet. In this work, we study influences of random ITs and RDs on 16-nm CMOS devices using an experimentally calibrated 3D device simulation [1–4]. Devices with totally random ITs, RDs, and “ITs+RDs” (i.e., 3D device simulation with considering random ITs and RDs simultaneously) are generated and simulated to assess the device variability.
随机掺杂剂(RD)诱导的阈值电压波动(σVth)是近年来研究的热点[1-4]。RD波动(RDF)一直是纳米cmos技术面临的挑战之一。因此,采用高通量/金属栅极(HKMG)方法抑制45 nm以下世代的固有参数波动和漏电流。然而,在Si/高氧界面上出现的随机界面陷阱(ITs)导致了新的波动源[2]。ITs和RDs对电特性波动的影响尚未探讨。在这项工作中,我们通过实验校准的3D器件模拟研究了随机ITs和rd对16纳米CMOS器件的影响[1-4]。生成并模拟具有完全随机ITs、rd和“ITs+ rd”(即同时考虑随机ITs和rd的3D设备模拟)的设备,以评估设备可变性。
{"title":"3D simulation of electrical characteristic fluctuation induced by interface traps at Si/high-к oxide interface and random dopants in 16-nm-Gate CMOS devices","authors":"Hui-Wen Cheng, Y. Chiu, Yiming Li","doi":"10.1109/DRC.2011.5994435","DOIUrl":"https://doi.org/10.1109/DRC.2011.5994435","url":null,"abstract":"The random dopant (RD)-induced threshold voltage fluctuation (σVth) was explored recently [1–4]. RD fluctuation (RDF) has been one of challenges in nano-CMOS technologies; consequently, high-к/metal gate (HKMG) approach is adopted to suppress intrinsic parameter fluctuation and leakage current for sub-45-nm generations. However, random interface traps (ITs) appearing at Si/high-к oxide interface results in a new fluctuation source [2]. Effects of ITs and RDs on electrical characteristic fluctuation have not been explored yet. In this work, we study influences of random ITs and RDs on 16-nm CMOS devices using an experimentally calibrated 3D device simulation [1–4]. Devices with totally random ITs, RDs, and “ITs+RDs” (i.e., 3D device simulation with considering random ITs and RDs simultaneously) are generated and simulated to assess the device variability.","PeriodicalId":107059,"journal":{"name":"69th Device Research Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2011-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124122761","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
N-Polar AlGaN/GaN MIS-HEMTs on SiC with a 16.7 W/mm power density at 10 GHz using an Al2O3 based etch stop technology for the gate recess n -极性AlGaN/GaN mishemts在SiC上,功率密度为16.7 W/mm,在10 GHz下使用基于Al2O3的蚀刻停止技术作为栅极凹槽
Pub Date : 2011-06-20 DOI: 10.1109/DRC.2011.5994504
S. Kolluri, S. Keller, S. Denbaars, U. Mishra
This paper presents the X-band and C-band power performance of MOCVD grown N-polar AlGaN/GaN MIS-HEMTs grown on semi-insulating SiC substrates. Additionally, an Al2O3 based etch stop technology was demonstrated for improving the manufacturability of N-polar GaN HEMTs with SixNy passivation. The reported output power densities of 16.7 W/mm at 10 GHz and 20.7 W/mm at 4 GHz represent the highest reported values so far for an N-polar device, at both of these frequencies.
本文介绍了在半绝缘SiC衬底上MOCVD生长的n极性AlGaN/GaN mishemt的x波段和c波段功率性能。此外,基于Al2O3的蚀刻停止技术被证明可以提高氮极氮化镓hemt的SixNy钝化的可制造性。据报道,在10 GHz和4 GHz的输出功率密度分别为16.7 W/mm和20.7 W/mm,这是迄今为止n极器件在这两个频率下的最高输出功率密度。
{"title":"N-Polar AlGaN/GaN MIS-HEMTs on SiC with a 16.7 W/mm power density at 10 GHz using an Al2O3 based etch stop technology for the gate recess","authors":"S. Kolluri, S. Keller, S. Denbaars, U. Mishra","doi":"10.1109/DRC.2011.5994504","DOIUrl":"https://doi.org/10.1109/DRC.2011.5994504","url":null,"abstract":"This paper presents the X-band and C-band power performance of MOCVD grown N-polar AlGaN/GaN MIS-HEMTs grown on semi-insulating SiC substrates. Additionally, an Al2O3 based etch stop technology was demonstrated for improving the manufacturability of N-polar GaN HEMTs with SixNy passivation. The reported output power densities of 16.7 W/mm at 10 GHz and 20.7 W/mm at 4 GHz represent the highest reported values so far for an N-polar device, at both of these frequencies.","PeriodicalId":107059,"journal":{"name":"69th Device Research Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2011-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126420504","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Graphene quantum capacitance varactors for wireless sensing applications 用于无线传感应用的石墨烯量子电容变容管
Pub Date : 2011-06-20 DOI: 10.1109/DRC.2011.5994413
S. Koester
The low density of states in graphene makes it possible for the quantum capacitance to be of the same order of magnitude as the oxide capacitance for experimentally achievable gate dielectric thicknesses [1]. This property, combined with the fact that the density of states varies as a function of energy, means that the capacitance in a metal-oxide-graphene capacitor can be tuned by varying the carrier concentration [2]. The very high mobility and zero band gap in graphene also allow it to remain conductive throughout the entire tuning range, making graphene an idea material to realize a high quality factor (Q) variable capacitor (varactor). If combined with an on-chip inductor to form an LC oscillator circuit, graphene varactors could enable a new class of ultra-compact sensors with wireless readout capability. Compared to MEMS-based varactors [3], the extremely-large capacitance per unit area of graphene varactors should allow orders-of-magnitude improvement in scalability, a vital feature for numerous applications including in vivo sensing where small size is critical. In this abstract, the device concept is described and simulated performance projections are provided. The main findings in this study are that wide frequency tuning ratios (> 50%) and high Q (> 40 at 1 GHz) are possible using realistic assumptions for the graphene properties, device dimensions and parasitic resistances.
石墨烯中的低密度态使得量子电容与实验可实现的栅介电厚度的氧化物电容具有相同的数量级[1]。这一特性,再加上状态密度随能量变化的事实,意味着金属-氧化物-石墨烯电容器的电容可以通过改变载流子浓度来调节[2]。石墨烯的高迁移率和零带隙也使其在整个调谐范围内保持导电性,使石墨烯成为实现高质量因数(Q)可变电容器(varactor)的理想材料。如果与片上电感结合形成LC振荡器电路,石墨烯变容管可以实现具有无线读出能力的新型超紧凑传感器。与基于mems的变容管相比[3],石墨烯变容管单位面积的超大电容可以使可扩展性提高几个数量级,这是许多应用的重要特征,包括小尺寸至关重要的体内传感。在这个摘要中,描述了器件的概念,并提供了模拟性能预测。本研究的主要发现是,使用对石墨烯性质、器件尺寸和寄生电阻的现实假设,可以实现宽频率调谐比(> 50%)和高Q(> 40在1 GHz)。
{"title":"Graphene quantum capacitance varactors for wireless sensing applications","authors":"S. Koester","doi":"10.1109/DRC.2011.5994413","DOIUrl":"https://doi.org/10.1109/DRC.2011.5994413","url":null,"abstract":"The low density of states in graphene makes it possible for the quantum capacitance to be of the same order of magnitude as the oxide capacitance for experimentally achievable gate dielectric thicknesses [1]. This property, combined with the fact that the density of states varies as a function of energy, means that the capacitance in a metal-oxide-graphene capacitor can be tuned by varying the carrier concentration [2]. The very high mobility and zero band gap in graphene also allow it to remain conductive throughout the entire tuning range, making graphene an idea material to realize a high quality factor (Q) variable capacitor (varactor). If combined with an on-chip inductor to form an LC oscillator circuit, graphene varactors could enable a new class of ultra-compact sensors with wireless readout capability. Compared to MEMS-based varactors [3], the extremely-large capacitance per unit area of graphene varactors should allow orders-of-magnitude improvement in scalability, a vital feature for numerous applications including in vivo sensing where small size is critical. In this abstract, the device concept is described and simulated performance projections are provided. The main findings in this study are that wide frequency tuning ratios (> 50%) and high Q (> 40 at 1 GHz) are possible using realistic assumptions for the graphene properties, device dimensions and parasitic resistances.","PeriodicalId":107059,"journal":{"name":"69th Device Research Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2011-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117010870","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Spin-torque switchable perpendicular magnetic junctions for solid-state memory 用于固态存储器的自旋转矩可切换垂直磁结
Pub Date : 2011-06-20 DOI: 10.1109/DRC.2011.5994475
J. Sun, R. Robertazzi, J. Nowak, P. Trouilloud, G. Hu, M. Gaidis, S. Brown, D. Abraham, E. O'Sullivan, W. Gallagher, D. Worledge, A. Kent
PMA spin-torque switchable junctions have been demonstrated with lower switching current and faster switching speed compared to IMA devices. They are promising for further technology exploration in solid-state memory applications.
与IMA器件相比,PMA自旋转矩可切换结具有更低的开关电流和更快的开关速度。它们有望在固态存储器应用方面进行进一步的技术探索。
{"title":"Spin-torque switchable perpendicular magnetic junctions for solid-state memory","authors":"J. Sun, R. Robertazzi, J. Nowak, P. Trouilloud, G. Hu, M. Gaidis, S. Brown, D. Abraham, E. O'Sullivan, W. Gallagher, D. Worledge, A. Kent","doi":"10.1109/DRC.2011.5994475","DOIUrl":"https://doi.org/10.1109/DRC.2011.5994475","url":null,"abstract":"PMA spin-torque switchable junctions have been demonstrated with lower switching current and faster switching speed compared to IMA devices. They are promising for further technology exploration in solid-state memory applications.","PeriodicalId":107059,"journal":{"name":"69th Device Research Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2011-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131294960","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Graphene field-effect transistors using large-area monolayer graphene grown by chemical vapor deposition on Co thin films 石墨烯场效应晶体管采用化学气相沉积法在Co薄膜上生长大面积单层石墨烯
Pub Date : 2011-06-20 DOI: 10.1109/DRC.2011.5994446
M. Ramón, A. Gupta, C. Corbet, D. Ferrer, H. Movva, G. Carpenter, L. Colombo, G. Bourianoff, M. Doczy, D. Akinwande, E. Tutuc, S. Banerjee
There has been great interest in methods for the synthesis of high-quality, large-area graphene films, as required for practical applications in the electronics industry. In particular, recent developments in chemical vapor deposition (CVD) methods have shown a promising approach to grow large-area graphene on metal substrates by catalyzed CVD growth [1]. Reports of CVD growth on Cu and Ni are common [1–3]; however, there have been few efforts to grow graphene on Co [4], and attempts to grow graphene on Co/SiO2/Si resulted in very small domains of predominantly multilayer graphene that were not suitable for transistor fabrication. Unlike Ni, Co is attractive due to the low lattice mismatch (< 2%) between graphene and the Co (0001) surface, and Co exhibits greater compatibility with Si than Cu, which is a deep trap in Si and a fast diffuser. Here we have demonstrated graphene field-effect transistors (GFETs) fabricated using large-area monolayer graphene grown by catalyzed CVD on Co films.
人们对合成高质量、大面积石墨烯薄膜的方法非常感兴趣,因为这是电子工业实际应用所必需的。特别是,化学气相沉积(CVD)方法的最新发展表明,通过催化CVD生长在金属衬底上生长大面积石墨烯是一种很有前途的方法[1]。在Cu和Ni上生长CVD的报道很常见[1-3];然而,在Co上生长石墨烯的努力很少[4],并且在Co/SiO2/Si上生长石墨烯的尝试导致了非常小的以多层石墨烯为主的区域,不适合晶体管制造。与Ni不同,Co由于低晶格失配而具有吸引力(<Co(0001)和Co(0001)表面之间的差异为2%,Co与Si的相容性优于Cu,这是Si的深阱和快速扩散器。在这里,我们展示了石墨烯场效应晶体管(gfet)是用Co薄膜上催化CVD生长的大面积单层石墨烯制备的。
{"title":"Graphene field-effect transistors using large-area monolayer graphene grown by chemical vapor deposition on Co thin films","authors":"M. Ramón, A. Gupta, C. Corbet, D. Ferrer, H. Movva, G. Carpenter, L. Colombo, G. Bourianoff, M. Doczy, D. Akinwande, E. Tutuc, S. Banerjee","doi":"10.1109/DRC.2011.5994446","DOIUrl":"https://doi.org/10.1109/DRC.2011.5994446","url":null,"abstract":"There has been great interest in methods for the synthesis of high-quality, large-area graphene films, as required for practical applications in the electronics industry. In particular, recent developments in chemical vapor deposition (CVD) methods have shown a promising approach to grow large-area graphene on metal substrates by catalyzed CVD growth [1]. Reports of CVD growth on Cu and Ni are common [1–3]; however, there have been few efforts to grow graphene on Co [4], and attempts to grow graphene on Co/SiO2/Si resulted in very small domains of predominantly multilayer graphene that were not suitable for transistor fabrication. Unlike Ni, Co is attractive due to the low lattice mismatch (&#60; 2%) between graphene and the Co (0001) surface, and Co exhibits greater compatibility with Si than Cu, which is a deep trap in Si and a fast diffuser. Here we have demonstrated graphene field-effect transistors (GFETs) fabricated using large-area monolayer graphene grown by catalyzed CVD on Co films.","PeriodicalId":107059,"journal":{"name":"69th Device Research Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2011-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134207093","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Bias temperature stress analysis of ZnO thin film transistors with HfO2 gate dielectrics HfO2栅极介质ZnO薄膜晶体管的偏置温度应力分析
Pub Date : 2011-06-20 DOI: 10.1109/DRC.2011.5994419
J. Siddiqui, J. Phillips, K. Leedy, B. Bayraktaroglu
ZnO thin film electronics have received much attention due to the relatively high electron mobility of ZnO thin films in comparison to amorphous silicon (a-Si) and organic thin films. There is significant interest in using ZnO thin film transistors (TFTs), or similar oxides such as InGaZnO and zinc tin oxide, to replace a-Si TFTs in large area display technologies such as active matrix liquid crystal display devices and active matrix organic light-emitting displays where transparency in the visible range and high carrier mobilities are significant advantages. In addition, the integration of high dielectric constant (high-k) dielectrics in ZnO TFTs has demonstrated performance advantages including reduced operating voltage, increased Ion/Ioff ratios, and larger transconductance. HfO2 has emerged as a high-k dielectric of choice for both silicon microelectronics and thin film electronics due to the high dielectric constant (εr ∼ 25ε0), low leakage current, and low synthesis temperature. Voltage stability is an important figure of merit for many TFT applications and much work has been done to characterize the voltage stability of a-Si and poly-crystalline silicon (p-Si) TFTs. Extensive Bias-Temperature-Stress (BTS) studies have been carried out on a-Si and p-Si TFTs to track the threshold voltage (VTH), subthreshold slope (S), mobility (μ), and grain boundary trap creation (NTG) over time and to correlate TFT parameter instabilities with physical mechanisms that include charge trapping in the gate oxide and charge state creation in the oxide, interface, and p-Si grain boundaries. Prior studies on the stability of ZnO TFTs have indicated threshold voltage shifts (ΔVTH) with the same polarity as the stress voltage (VSTR) that increase with time and that S remains unchanged below a certain VSTR, but will degrade with time above this value [1–3]. Ability to recover pre-stress characteristics with and without post-stress treatments has also been reported. Further investigation is desired to both understand the device instability behavior dependence on temperature and gate-bias and to determine the physical origins governing the instabilities in this important material system. In this work, the instabilities of HfO2/ZnO TFTs are studied by BTS investigation.
由于ZnO薄膜与非晶硅(a-Si)和有机薄膜相比具有较高的电子迁移率,因此ZnO薄膜电子学受到了广泛的关注。人们对使用ZnO薄膜晶体管(TFTs)或类似的氧化物(如InGaZnO和锌锡氧化物)来取代a-Si薄膜晶体管在大面积显示技术中的应用非常感兴趣,如有源矩阵液晶显示器件和有源矩阵有机发光显示器,其中可见范围内的透明度和高载流子迁移率是显著的优势。此外,在ZnO TFTs中集成高介电常数(高k)介电体具有降低工作电压、提高离子/断比和更大跨导等性能优势。由于高介电常数(εr ~ 25ε0)、低漏电流和低合成温度,HfO2已成为硅微电子和薄膜电子的高k介电选择。电压稳定性是许多TFT应用的一个重要指标,人们已经做了很多工作来表征a-Si和多晶硅(p-Si) TFT的电压稳定性。对a-Si和p-Si TFT进行了广泛的偏置温度-应力(BTS)研究,以跟踪阈值电压(VTH)、亚阈值斜率(S)、迁移率(μ)和晶界陷阱形成(NTG)随时间的变化,并将TFT参数不稳定性与物理机制(包括栅极氧化物中的电荷捕获和氧化物、界面和p-Si晶界中的电荷态形成)联系起来。先前对ZnO tft稳定性的研究表明,阈值电压位移(ΔVTH)与应力电压(VSTR)的极性相同,随着时间的推移而增加,并且S在一定的VSTR以下保持不变,但在此值以上会随着时间的推移而降低[1-3]。有和没有后应力处理恢复应力前特征的能力也有报道。需要进一步的研究来了解器件不稳定性行为对温度和栅极偏置的依赖,并确定控制这一重要材料系统不稳定性的物理根源。本文采用BTS法研究了HfO2/ZnO tft的不稳定性。
{"title":"Bias temperature stress analysis of ZnO thin film transistors with HfO2 gate dielectrics","authors":"J. Siddiqui, J. Phillips, K. Leedy, B. Bayraktaroglu","doi":"10.1109/DRC.2011.5994419","DOIUrl":"https://doi.org/10.1109/DRC.2011.5994419","url":null,"abstract":"ZnO thin film electronics have received much attention due to the relatively high electron mobility of ZnO thin films in comparison to amorphous silicon (a-Si) and organic thin films. There is significant interest in using ZnO thin film transistors (TFTs), or similar oxides such as InGaZnO and zinc tin oxide, to replace a-Si TFTs in large area display technologies such as active matrix liquid crystal display devices and active matrix organic light-emitting displays where transparency in the visible range and high carrier mobilities are significant advantages. In addition, the integration of high dielectric constant (high-k) dielectrics in ZnO TFTs has demonstrated performance advantages including reduced operating voltage, increased Ion/Ioff ratios, and larger transconductance. HfO2 has emerged as a high-k dielectric of choice for both silicon microelectronics and thin film electronics due to the high dielectric constant (εr ∼ 25ε0), low leakage current, and low synthesis temperature. Voltage stability is an important figure of merit for many TFT applications and much work has been done to characterize the voltage stability of a-Si and poly-crystalline silicon (p-Si) TFTs. Extensive Bias-Temperature-Stress (BTS) studies have been carried out on a-Si and p-Si TFTs to track the threshold voltage (VTH), subthreshold slope (S), mobility (μ), and grain boundary trap creation (NTG) over time and to correlate TFT parameter instabilities with physical mechanisms that include charge trapping in the gate oxide and charge state creation in the oxide, interface, and p-Si grain boundaries. Prior studies on the stability of ZnO TFTs have indicated threshold voltage shifts (ΔVTH) with the same polarity as the stress voltage (VSTR) that increase with time and that S remains unchanged below a certain VSTR, but will degrade with time above this value [1–3]. Ability to recover pre-stress characteristics with and without post-stress treatments has also been reported. Further investigation is desired to both understand the device instability behavior dependence on temperature and gate-bias and to determine the physical origins governing the instabilities in this important material system. In this work, the instabilities of HfO2/ZnO TFTs are studied by BTS investigation.","PeriodicalId":107059,"journal":{"name":"69th Device Research Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2011-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133799890","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Integrated non-III-nitride/III-nitride tandem solar cell 集成非iii -氮化物/ iii -氮化物串联太阳能电池
Pub Date : 2011-06-20 DOI: 10.1109/DRC.2011.5994525
N. Toledo, S. C. Cruz, C. Neufeld, J. R. Lang, M. Scarpulla, T. Buehl, A. Gossard, S. Denbaars, J. Speck, U. Mishra
III-nitrides have recently been demonstrated as potential photovoltaic device material particularly in the high-energy portion of the solar spectrum [1–2]. The large lattice mismatch between InN and GaN however, makes it difficult to grow good quality high In-composition InGaN films for low bandgap subcells. The integration of III-N based solar cells, which have currently been demonstrated to work well above 2.0 eV, with mature IV and III–V based solar cell technologies, which work well at bandgaps ≤ 2.0 eV, has the potential to improve the efficiency of current multi-junction solar cells. In this paper, we present the first on-wafer integration of InGaN/GaN solar cells with non-III-nitride (GaAs) solar cells.
iii -氮化物最近被证明是一种潜在的光伏器件材料,特别是在太阳光谱的高能部分[1-2]。然而,InN和GaN之间的大晶格不匹配使得难以在低带隙亚电池中生长出高质量的高成分InGaN薄膜。III-N基太阳能电池(目前已被证明能在2.0 eV以上工作)与成熟的IV和III-V基太阳能电池技术(能在≤2.0 eV的带隙下工作)的集成,有可能提高当前多结太阳能电池的效率。在本文中,我们首次提出了InGaN/GaN太阳能电池与非iii -氮化物(GaAs)太阳能电池的片上集成。
{"title":"Integrated non-III-nitride/III-nitride tandem solar cell","authors":"N. Toledo, S. C. Cruz, C. Neufeld, J. R. Lang, M. Scarpulla, T. Buehl, A. Gossard, S. Denbaars, J. Speck, U. Mishra","doi":"10.1109/DRC.2011.5994525","DOIUrl":"https://doi.org/10.1109/DRC.2011.5994525","url":null,"abstract":"III-nitrides have recently been demonstrated as potential photovoltaic device material particularly in the high-energy portion of the solar spectrum [1–2]. The large lattice mismatch between InN and GaN however, makes it difficult to grow good quality high In-composition InGaN films for low bandgap subcells. The integration of III-N based solar cells, which have currently been demonstrated to work well above 2.0 eV, with mature IV and III–V based solar cell technologies, which work well at bandgaps ≤ 2.0 eV, has the potential to improve the efficiency of current multi-junction solar cells. In this paper, we present the first on-wafer integration of InGaN/GaN solar cells with non-III-nitride (GaAs) solar cells.","PeriodicalId":107059,"journal":{"name":"69th Device Research Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2011-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133950807","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Electrical measurement of the spin Hall effects in Fe/InxGa1−xAs heterostructures Fe/InxGa1−xAs异质结构中自旋霍尔效应的电测量
Pub Date : 2011-06-20 DOI: 10.1109/DRC.2011.5994468
E. Garlid, Q. Hu, C. Geppert, M. Chan, C. Palmstrøm, P. Crowell
There has been extensive theoretical discussion of the spin Hall effect (SHE) and the various ways that it could be exploited to generate or manipulate spin currents. However, only a handful of recent experiments have investigated this effect, and in semiconductor materials they have relied on optical techniques to either detect or generate spins [1,2].
关于自旋霍尔效应(SHE)以及利用自旋霍尔效应产生或操纵自旋电流的各种方法已经有了广泛的理论讨论。然而,最近只有少数实验研究了这种效应,并且在半导体材料中,他们依靠光学技术来检测或产生自旋[1,2]。
{"title":"Electrical measurement of the spin Hall effects in Fe/InxGa1−xAs heterostructures","authors":"E. Garlid, Q. Hu, C. Geppert, M. Chan, C. Palmstrøm, P. Crowell","doi":"10.1109/DRC.2011.5994468","DOIUrl":"https://doi.org/10.1109/DRC.2011.5994468","url":null,"abstract":"There has been extensive theoretical discussion of the spin Hall effect (SHE) and the various ways that it could be exploited to generate or manipulate spin currents. However, only a handful of recent experiments have investigated this effect, and in semiconductor materials they have relied on optical techniques to either detect or generate spins [1,2].","PeriodicalId":107059,"journal":{"name":"69th Device Research Conference","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2011-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123992831","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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69th Device Research Conference
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