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A Study of Blocking and Tunnel Oxide Engineering on Double-Trapping (DT) BE-SONOS Performance 双捕集(DT) BE-SONOS性能的阻塞和隧道氧化工程研究
Pub Date : 2015-05-17 DOI: 10.1109/IMW.2015.7150273
R. Lo, P. Du, T. Hsu, C. Wu, Jung-Yi Guo, C. Cheng, H. Lue, Y. Shih, T. Hou, K. Hsieh, Chih-Yuan Lu
Double-trapping bandgap engineered SONOS (DT BE-SONOS) [1] was proposed to provide both fast erase speed and deep erase by means of a second nitride trapping layer and an additional blocking oxide on top of BE-SONOS. Although this provides excellent erase performance but the additional layers increase the EOT and subsequently the erase voltage, thus it is desirable to minimize their impact. This work investigates exhaustively the effect of thinning down the blocking layers. Since the ISPP and high temperature retention charge loss are mainly dominated by the ONO thickness of BE-SONOS below the blocking layers, reducing the blocking layer thickness has only minor impact on ISPP and retention. Moreover, erase saturation is determined by the dynamic balance of channel hole injection and gate electron injection. Experimental data show that reducing the thickness of the oxide between two trapping layers has little impact on erase saturation once the gate injected electrons are efficiently suppressed by the top most oxide. We have also investigated retention improvement by various oxides. By using HQ-SiO2 to replace the top tunnel ONO the trapped electron out-tunneling is reduced. Thus retention may be improved without increasing the effective oxide thickness.
提出了双捕获带隙工程SONOS (DT BE-SONOS)[1],通过在BE-SONOS上添加第二个氮化物捕获层和额外的阻塞氧化物,提供快速擦除速度和深度擦除。虽然这提供了出色的擦除性能,但额外的层增加了EOT,随后增加了擦除电压,因此希望尽量减少它们的影响。这项工作详尽地研究了减薄阻挡层的效果。由于ISPP和高温保留电荷损失主要由阻挡层以下BE-SONOS的ONO厚度决定,因此减小阻挡层厚度对ISPP和保留的影响较小。擦除饱和由通道空穴注入和栅极电子注入的动态平衡决定。实验数据表明,一旦栅极注入的电子被最顶层的氧化物有效抑制,减小两层捕获层之间的氧化物厚度对擦除饱和的影响很小。我们还研究了各种氧化物对保留率的改善。用HQ-SiO2代替顶部隧穿ONO,减少了捕获电子的出隧穿。因此,可以在不增加有效氧化物厚度的情况下改善保留。
{"title":"A Study of Blocking and Tunnel Oxide Engineering on Double-Trapping (DT) BE-SONOS Performance","authors":"R. Lo, P. Du, T. Hsu, C. Wu, Jung-Yi Guo, C. Cheng, H. Lue, Y. Shih, T. Hou, K. Hsieh, Chih-Yuan Lu","doi":"10.1109/IMW.2015.7150273","DOIUrl":"https://doi.org/10.1109/IMW.2015.7150273","url":null,"abstract":"Double-trapping bandgap engineered SONOS (DT BE-SONOS) [1] was proposed to provide both fast erase speed and deep erase by means of a second nitride trapping layer and an additional blocking oxide on top of BE-SONOS. Although this provides excellent erase performance but the additional layers increase the EOT and subsequently the erase voltage, thus it is desirable to minimize their impact. This work investigates exhaustively the effect of thinning down the blocking layers. Since the ISPP and high temperature retention charge loss are mainly dominated by the ONO thickness of BE-SONOS below the blocking layers, reducing the blocking layer thickness has only minor impact on ISPP and retention. Moreover, erase saturation is determined by the dynamic balance of channel hole injection and gate electron injection. Experimental data show that reducing the thickness of the oxide between two trapping layers has little impact on erase saturation once the gate injected electrons are efficiently suppressed by the top most oxide. We have also investigated retention improvement by various oxides. By using HQ-SiO2 to replace the top tunnel ONO the trapped electron out-tunneling is reduced. Thus retention may be improved without increasing the effective oxide thickness.","PeriodicalId":107437,"journal":{"name":"2015 IEEE International Memory Workshop (IMW)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-05-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121839995","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Comprehensive Methodology for ReRAM and Selector Design Guideline of Cross-point Array 交叉点阵列的ReRAM综合方法及选择器设计准则
Pub Date : 2015-05-17 DOI: 10.1109/IMW.2015.7150280
Sangheon Lee, Sooeun Lee, Kibong Moon, Jaehyuk Park, Byungsub Kim, H. Hwang
In this research, an one selector-one ReRAM (1S1R) cross-point array of a multi-level cell (MLC) was demonstrated and investigated. To expand high-density feasibility of cross-point array, MLC pulse writing and reading operations were assessed with parasitic line resistances and capacitances using Matlab and HSPICE simulations. We observed a switching energy is an important parameter for MLC in actual cross-point array in the operating point of view. In addition, not only ReRAM but also selector characteristics are highly important in the device point of view. Therefore, this study serves power efficient guidelines for 1S1R devices and operating schemes of cross-point array.
在这项研究中,一个选择器-一个ReRAM (1S1R)交叉点阵列的多层次单元(MLC)进行了演示和研究。为了扩大交叉点阵列的高密度可行性,利用Matlab和HSPICE仿真,利用寄生线电阻和电容对MLC脉冲写入和读取操作进行了评估。从操作角度观察到开关能量是实际交叉点阵列中MLC的重要参数。此外,从器件的角度来看,不仅ReRAM,而且选择器的特性也非常重要。因此,本研究为1S1R器件和交叉点阵列的运行方案提供了能效指导。
{"title":"Comprehensive Methodology for ReRAM and Selector Design Guideline of Cross-point Array","authors":"Sangheon Lee, Sooeun Lee, Kibong Moon, Jaehyuk Park, Byungsub Kim, H. Hwang","doi":"10.1109/IMW.2015.7150280","DOIUrl":"https://doi.org/10.1109/IMW.2015.7150280","url":null,"abstract":"In this research, an one selector-one ReRAM (1S1R) cross-point array of a multi-level cell (MLC) was demonstrated and investigated. To expand high-density feasibility of cross-point array, MLC pulse writing and reading operations were assessed with parasitic line resistances and capacitances using Matlab and HSPICE simulations. We observed a switching energy is an important parameter for MLC in actual cross-point array in the operating point of view. In addition, not only ReRAM but also selector characteristics are highly important in the device point of view. Therefore, this study serves power efficient guidelines for 1S1R devices and operating schemes of cross-point array.","PeriodicalId":107437,"journal":{"name":"2015 IEEE International Memory Workshop (IMW)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-05-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116434716","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
TCAD Simulation of Data Retention Characteristics of Charge Trap Device for 3-D NAND Flash Memory 三维NAND闪存电荷阱器件数据保持特性的TCAD仿真
Pub Date : 2015-05-17 DOI: 10.1109/IMW.2015.7150306
Dongyean Oh, Bonghoon Lee, Eunmee Kwon, Sangyong Kim, G. Cho, Sungkye Park, Seokkiu Lee, Sungjoo Hong
We have developed a reliable and predictable TCAD modeling method for retention characteristics of the charge trap NAND Flash device. This modeling method can explain various retention phenomena related to temperature, program pattern, and bake time. The temperature dependency is well described by direct tunneling and thermionic emission, the pattern dependency can be explained by carrier diffusion and the short time retention can be described by the electron-hole dynamics in the storage nitride layer.
我们开发了一种可靠且可预测的电荷阱NAND闪存器件保留特性的TCAD建模方法。这种建模方法可以解释与温度、程序模式和烘烤时间有关的各种滞留现象。直接隧穿和热离子发射可以很好地描述温度依赖性,载流子扩散可以解释模式依赖性,存储氮化物层中的电子-空穴动力学可以描述短时间保留。
{"title":"TCAD Simulation of Data Retention Characteristics of Charge Trap Device for 3-D NAND Flash Memory","authors":"Dongyean Oh, Bonghoon Lee, Eunmee Kwon, Sangyong Kim, G. Cho, Sungkye Park, Seokkiu Lee, Sungjoo Hong","doi":"10.1109/IMW.2015.7150306","DOIUrl":"https://doi.org/10.1109/IMW.2015.7150306","url":null,"abstract":"We have developed a reliable and predictable TCAD modeling method for retention characteristics of the charge trap NAND Flash device. This modeling method can explain various retention phenomena related to temperature, program pattern, and bake time. The temperature dependency is well described by direct tunneling and thermionic emission, the pattern dependency can be explained by carrier diffusion and the short time retention can be described by the electron-hole dynamics in the storage nitride layer.","PeriodicalId":107437,"journal":{"name":"2015 IEEE International Memory Workshop (IMW)","volume":"342 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-05-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124230820","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 18
Universal Thermoelectric Characteristic in Phase Change Memories 相变存储器中的通用热电特性
Pub Date : 2015-05-17 DOI: 10.1109/IMW.2015.7150311
N. Ciocchini, M. Laudato, A. Leone, P. Fantini, A. Lacaita, D. Ielmini
Thermoelectric effects play an important role in phase change memory (PCM), where phase transition and atomic migration are accelerated by temperature. A deep understanding of thermoelectric effects may allow a physics-based design of the cell structure and materials to optimize programming speed/energy and reliability. In this work we study the polarity-dependence of PCM characteristics, including crystallization, melting, electrical switching/holding, and ion migration. These characteristics show slower kinetics at negative voltage, which we attribute to thermoelectric effects of electrically-induced heating. We demonstrate a universal correlation of positive/negative kinetics, which we reproduce by modelling Thomson and Peltier heating in the PCM device.
热电效应在相变记忆(PCM)中起着重要的作用,温度会加速相变和原子迁移。对热电效应的深入理解可以使基于物理的电池结构和材料设计优化编程速度/能量和可靠性。在这项工作中,我们研究了PCM特性的极性依赖性,包括结晶,熔化,电气开关/保持和离子迁移。这些特性在负电压下表现出较慢的动力学,我们将其归因于电致加热的热电效应。我们证明了正/负动力学的普遍相关性,我们通过模拟汤姆逊和佩尔蒂埃加热在PCM装置中再现。
{"title":"Universal Thermoelectric Characteristic in Phase Change Memories","authors":"N. Ciocchini, M. Laudato, A. Leone, P. Fantini, A. Lacaita, D. Ielmini","doi":"10.1109/IMW.2015.7150311","DOIUrl":"https://doi.org/10.1109/IMW.2015.7150311","url":null,"abstract":"Thermoelectric effects play an important role in phase change memory (PCM), where phase transition and atomic migration are accelerated by temperature. A deep understanding of thermoelectric effects may allow a physics-based design of the cell structure and materials to optimize programming speed/energy and reliability. In this work we study the polarity-dependence of PCM characteristics, including crystallization, melting, electrical switching/holding, and ion migration. These characteristics show slower kinetics at negative voltage, which we attribute to thermoelectric effects of electrically-induced heating. We demonstrate a universal correlation of positive/negative kinetics, which we reproduce by modelling Thomson and Peltier heating in the PCM device.","PeriodicalId":107437,"journal":{"name":"2015 IEEE International Memory Workshop (IMW)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-05-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128961562","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Relationship among Current Fluctuations during Forming, Cell-To-Cell Variability and Reliability in RRAM Arrays RRAM阵列形成过程中电流波动、单元间变异性和可靠性的关系
Pub Date : 2015-05-17 DOI: 10.1109/IMW.2015.7150303
A. Grossi, C. Zambelli, P. Olivo, E. Miranda, V. Stikanov, T. Schroeder, C. Walczyk, C. Wenger
In this work, cells behavior during forming is monitored through an incremental pulse and verify algorithm on 4kbit RRAM arrays. This technique allows recognising different cell behaviors in terms of read-verify current oscillation: the impact of these oscillations on reliability and cell-to-cell variability has been investigated during 1k endurance cycles and 100k pulse stress under a variety of cycling conditions. Conductance histograms for the post-forming current reveal the nanosized nature of the filamentary paths across the dielectric film.
在这项工作中,通过在4kbit RRAM阵列上的增量脉冲和验证算法来监测细胞在形成过程中的行为。该技术允许在读取验证电流振荡方面识别不同的细胞行为:在各种循环条件下,在1k耐力循环和100k脉冲应力下,研究了这些振荡对可靠性和细胞间变异性的影响。后形成电流的电导直方图揭示了穿过介电膜的丝状路径的纳米级性质。
{"title":"Relationship among Current Fluctuations during Forming, Cell-To-Cell Variability and Reliability in RRAM Arrays","authors":"A. Grossi, C. Zambelli, P. Olivo, E. Miranda, V. Stikanov, T. Schroeder, C. Walczyk, C. Wenger","doi":"10.1109/IMW.2015.7150303","DOIUrl":"https://doi.org/10.1109/IMW.2015.7150303","url":null,"abstract":"In this work, cells behavior during forming is monitored through an incremental pulse and verify algorithm on 4kbit RRAM arrays. This technique allows recognising different cell behaviors in terms of read-verify current oscillation: the impact of these oscillations on reliability and cell-to-cell variability has been investigated during 1k endurance cycles and 100k pulse stress under a variety of cycling conditions. Conductance histograms for the post-forming current reveal the nanosized nature of the filamentary paths across the dielectric film.","PeriodicalId":107437,"journal":{"name":"2015 IEEE International Memory Workshop (IMW)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-05-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129031567","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 22
From Resistive Switching Mechanisms in AM4Q8 Mott Insulators to Mott Memories 从AM4Q8莫特绝缘体的电阻开关机制到莫特存储器
Pub Date : 2015-05-17 DOI: 10.1109/IMW.2015.7150287
J. Tranchant, E. Janod, B. Corraze, M. Besland, L. Cario
The application of electrical pulses on Mott insulators AM4Q8 (A = Ga, Ge ; M = V, Nb, Ta, Mo; Q = S, Se) induces a new phenomenon of resistive switching (RS). Appearing above threshold electric fields of a few kV/cm, this volatile transition stabilizes into a non volatile RS for higher electric fields. A pulse protocol alternating short multi-pulses of high voltage with long single pulses of low voltage enables to control this reversible RS in crystals and thin films. The resulting cycling performances obtained on GaV4S8 miniaturized devices demonstrate the interest of these compounds towards Mott memory applications.
电脉冲在Mott绝缘子AM4Q8 (A = Ga, Ge)上的应用M = V, Nb, Ta, Mo;Q = S, Se)引起了一种新的电阻开关现象。出现在几kV/cm的阈值电场之上,这种挥发性跃迁在更高的电场中稳定为非挥发性RS。一种高电压的短多脉冲与低电压的长单脉冲交替的脉冲协议能够控制晶体和薄膜中的可逆RS。在GaV4S8小型化器件上获得的循环性能证明了这些化合物对Mott存储器应用的兴趣。
{"title":"From Resistive Switching Mechanisms in AM4Q8 Mott Insulators to Mott Memories","authors":"J. Tranchant, E. Janod, B. Corraze, M. Besland, L. Cario","doi":"10.1109/IMW.2015.7150287","DOIUrl":"https://doi.org/10.1109/IMW.2015.7150287","url":null,"abstract":"The application of electrical pulses on Mott insulators AM4Q8 (A = Ga, Ge ; M = V, Nb, Ta, Mo; Q = S, Se) induces a new phenomenon of resistive switching (RS). Appearing above threshold electric fields of a few kV/cm, this volatile transition stabilizes into a non volatile RS for higher electric fields. A pulse protocol alternating short multi-pulses of high voltage with long single pulses of low voltage enables to control this reversible RS in crystals and thin films. The resulting cycling performances obtained on GaV4S8 miniaturized devices demonstrate the interest of these compounds towards Mott memory applications.","PeriodicalId":107437,"journal":{"name":"2015 IEEE International Memory Workshop (IMW)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-05-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130306166","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Performance Prediction of Large-Scale 1S1R Resistive Memory Array Using Machine Learning 基于机器学习的大规模1S1R阻性存储阵列性能预测
Pub Date : 2015-05-17 DOI: 10.1109/IMW.2015.7150302
Zizhen Jiang, Peng Huang, Liang Zhao, Shahar Kvatinsky, Shimeng Yu, Xiaoyan Liu, Jinfeng Kang, Y. Nishi, H. Wong
A methodology to analyze device-to-circuit characteristics and predict memory array performance is presented. With a five- parameter characterization of the selection device and a compact model of RRAM, we are able to capture the behaviors of reported selection devices and simulate 1S1R cell/array performance with RRAM compact modeling using HSPICE. To predict the performance of the memory array for a variety of selectors, machine-learning algorithms are employed, using device characteristics and circuit simulation results as the training data. The influence of selector parameters on the 1S1R cell and array behavior is investigated and projected to large Gbit arrays. The machine learning methods enable time-efficient and accurate estimates of 1S1R array performance to guide large-scale memory design.
提出了一种分析器件电路特性和预测存储阵列性能的方法。通过对选择器件的五参数表征和RRAM的紧凑模型,我们能够捕获所报告的选择器件的行为,并使用HSPICE通过RRAM紧凑建模模拟1S1R单元/阵列性能。为了预测各种选择器的存储阵列的性能,采用机器学习算法,以器件特性和电路仿真结果作为训练数据。研究了选择器参数对1S1R单元和阵列性能的影响,并将其应用于大阵列。机器学习方法能够有效和准确地估计1S1R阵列的性能,以指导大规模存储器设计。
{"title":"Performance Prediction of Large-Scale 1S1R Resistive Memory Array Using Machine Learning","authors":"Zizhen Jiang, Peng Huang, Liang Zhao, Shahar Kvatinsky, Shimeng Yu, Xiaoyan Liu, Jinfeng Kang, Y. Nishi, H. Wong","doi":"10.1109/IMW.2015.7150302","DOIUrl":"https://doi.org/10.1109/IMW.2015.7150302","url":null,"abstract":"A methodology to analyze device-to-circuit characteristics and predict memory array performance is presented. With a five- parameter characterization of the selection device and a compact model of RRAM, we are able to capture the behaviors of reported selection devices and simulate 1S1R cell/array performance with RRAM compact modeling using HSPICE. To predict the performance of the memory array for a variety of selectors, machine-learning algorithms are employed, using device characteristics and circuit simulation results as the training data. The influence of selector parameters on the 1S1R cell and array behavior is investigated and projected to large Gbit arrays. The machine learning methods enable time-efficient and accurate estimates of 1S1R array performance to guide large-scale memory design.","PeriodicalId":107437,"journal":{"name":"2015 IEEE International Memory Workshop (IMW)","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-05-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125833424","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
A 16-Level-Cell Nonvolatile Memory with Crystalline In-Ga-Zn Oxide FET 一种具有晶体In-Ga-Zn氧化场效应晶体管的16电平电池非易失性存储器
Pub Date : 2015-05-17 DOI: 10.1109/IMW.2015.7150266
T. Matsuzaki, T. Onuki, S. Nagatsuka, H. Inoue, T. Ishizu, Y. Ieda, Naoto Yamade, H. Miyairi, M. Sakakura, Y. Shionoiri, K. Kato, T. Okuda, J. Koyama, Yoshitaka Yamamoto, S. Yamazaki
A 16-level cell is demonstrated using a test chip of nonvolatile oxide semiconductor RAM comprising c-axis aligned crystalline In-Ga-Zn oxide FETs. A read circuit composed of voltage followers outputs a read voltage with a maximum distribution of 37 mV. A single voltage follower has a maximum distribution of the read voltage of 25.3 mV. A 200 ns write time of the test chip is demonstrated.
使用非易失性氧化物半导体RAM测试芯片,包括c轴排列的晶体In-Ga-Zn氧化物场效应管,演示了16电平电池。由电压跟随器组成的读电路输出最大分布为37mv的读电压。单个电压从动器的最大读电压分布为25.3 mV。测试芯片的写入时间为200ns。
{"title":"A 16-Level-Cell Nonvolatile Memory with Crystalline In-Ga-Zn Oxide FET","authors":"T. Matsuzaki, T. Onuki, S. Nagatsuka, H. Inoue, T. Ishizu, Y. Ieda, Naoto Yamade, H. Miyairi, M. Sakakura, Y. Shionoiri, K. Kato, T. Okuda, J. Koyama, Yoshitaka Yamamoto, S. Yamazaki","doi":"10.1109/IMW.2015.7150266","DOIUrl":"https://doi.org/10.1109/IMW.2015.7150266","url":null,"abstract":"A 16-level cell is demonstrated using a test chip of nonvolatile oxide semiconductor RAM comprising c-axis aligned crystalline In-Ga-Zn oxide FETs. A read circuit composed of voltage followers outputs a read voltage with a maximum distribution of 37 mV. A single voltage follower has a maximum distribution of the read voltage of 25.3 mV. A 200 ns write time of the test chip is demonstrated.","PeriodicalId":107437,"journal":{"name":"2015 IEEE International Memory Workshop (IMW)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-05-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125463523","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Functionality Demonstration of a High-Density 1.1V Self-Aligned Split-Gate NVM Cell Embedded into LP 40 nm CMOS for Automotive and Smart Card Applications 用于汽车和智能卡应用的高密度1.1V自对准分栅NVM单元嵌入LP 40 nm CMOS的功能演示
Pub Date : 2015-05-17 DOI: 10.1109/IMW.2015.7150288
L. Luo, Y. Chow, X. Cai, F. Zhang, Z. Teo, D. Wang, K. Lim, B. Zhou, J. F. Liu, A. Yeo, T. Chang, Y. Kong, C. W. Yap, S. Lup, R. Long, J. B. Tan, D. Shum, N. Do, J. Kim, P. Ghazavi, V. Tiwari
This paper successfully demonstrates a functional and reliable self-aligned, split-gate NVM cell, down to a very competitive and small cell size. This NVM cell is embedded into a 40 nm Low Power (LP) ground rule logic process with copper low-K interconnects. The self- alignment sequence with gate spacer and poly CMP (Chemical Mechanical Polishing) provides an optimized and small cell that can be easily integrated in the standard logic process, in a modular way. This is the first time that the industry has demonstrated a functional split-gate embedded Flash memory cell at 1.1V VDD. This embedded Flash process also yielded on a baseline 32 Mb high-density SRAM test chip as well as a 10% larger automotive-grade embedded Flash cell. We have further demonstrated reliability data that met the tightest market requirements, with a more relaxed 55 nm ground rule on a 16 Mb test array, using the same 40 nm LP process.
本文成功地演示了一个功能可靠的自对准分栅NVM单元,其尺寸非常小且具有竞争力。该NVM单元嵌入到40nm低功耗(LP)接地规则逻辑过程中,具有铜低k互连。自对准序列与栅极间隔和聚CMP(化学机械抛光)提供了一个优化和小的细胞,可以很容易地集成在标准的逻辑过程中,以模块化的方式。这是业界首次展示1.1V VDD的功能性分栅嵌入式闪存单元。这种嵌入式闪存工艺还产生了一个基准32 Mb高密度SRAM测试芯片,以及一个大10%的汽车级嵌入式闪存单元。我们进一步展示了满足最严格市场要求的可靠性数据,在16 Mb测试阵列上采用更宽松的55 nm基本规则,使用相同的40 nm LP工艺。
{"title":"Functionality Demonstration of a High-Density 1.1V Self-Aligned Split-Gate NVM Cell Embedded into LP 40 nm CMOS for Automotive and Smart Card Applications","authors":"L. Luo, Y. Chow, X. Cai, F. Zhang, Z. Teo, D. Wang, K. Lim, B. Zhou, J. F. Liu, A. Yeo, T. Chang, Y. Kong, C. W. Yap, S. Lup, R. Long, J. B. Tan, D. Shum, N. Do, J. Kim, P. Ghazavi, V. Tiwari","doi":"10.1109/IMW.2015.7150288","DOIUrl":"https://doi.org/10.1109/IMW.2015.7150288","url":null,"abstract":"This paper successfully demonstrates a functional and reliable self-aligned, split-gate NVM cell, down to a very competitive and small cell size. This NVM cell is embedded into a 40 nm Low Power (LP) ground rule logic process with copper low-K interconnects. The self- alignment sequence with gate spacer and poly CMP (Chemical Mechanical Polishing) provides an optimized and small cell that can be easily integrated in the standard logic process, in a modular way. This is the first time that the industry has demonstrated a functional split-gate embedded Flash memory cell at 1.1V VDD. This embedded Flash process also yielded on a baseline 32 Mb high-density SRAM test chip as well as a 10% larger automotive-grade embedded Flash cell. We have further demonstrated reliability data that met the tightest market requirements, with a more relaxed 55 nm ground rule on a 16 Mb test array, using the same 40 nm LP process.","PeriodicalId":107437,"journal":{"name":"2015 IEEE International Memory Workshop (IMW)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-05-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128840365","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Characterization and Modeling of Advanced Placement Algorithms for NAND Flash Arrays NAND闪存阵列先进放置算法的表征与建模
Pub Date : 2015-05-17 DOI: 10.1109/IMW.2015.7150279
C. Miccoli, K. Sarpatwari, Domenico Di Cicco, Mattia Cichocki, V. Moschiano, P. Ruby, K. Parat
This work aims at providing an accurate and flexible tool to simulate the most advanced placement algorithms for state-of-the-art NAND Flash devices. A model for incremental step pulse programming is discussed and experimentally validated, showing its capability to describe the dependence on the program pulse duration/amplitude and to correctly reproduce the proximity effect and the selective slow program convergence behavior, when a bit line/channel bias is applied. Finally, when the entire memory array is simulated in a Monte Carlo fashion, the placement of our decananometer 3bit/cell device can be accurately reproduced, including the behavior of the advanced programming features.
这项工作旨在提供一个准确和灵活的工具来模拟最先进的NAND闪存器件的最先进的放置算法。讨论并实验验证了一种增量步进脉冲编程模型,表明它能够描述对程序脉冲持续时间/幅度的依赖,并正确地再现了当位线/信道偏置时的接近效应和选择性慢程序收敛行为。最后,当整个存储器阵列以蒙特卡罗方式模拟时,我们的十纳米计3bit/cell器件的位置可以精确地再现,包括高级编程功能的行为。
{"title":"Characterization and Modeling of Advanced Placement Algorithms for NAND Flash Arrays","authors":"C. Miccoli, K. Sarpatwari, Domenico Di Cicco, Mattia Cichocki, V. Moschiano, P. Ruby, K. Parat","doi":"10.1109/IMW.2015.7150279","DOIUrl":"https://doi.org/10.1109/IMW.2015.7150279","url":null,"abstract":"This work aims at providing an accurate and flexible tool to simulate the most advanced placement algorithms for state-of-the-art NAND Flash devices. A model for incremental step pulse programming is discussed and experimentally validated, showing its capability to describe the dependence on the program pulse duration/amplitude and to correctly reproduce the proximity effect and the selective slow program convergence behavior, when a bit line/channel bias is applied. Finally, when the entire memory array is simulated in a Monte Carlo fashion, the placement of our decananometer 3bit/cell device can be accurately reproduced, including the behavior of the advanced programming features.","PeriodicalId":107437,"journal":{"name":"2015 IEEE International Memory Workshop (IMW)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-05-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123907018","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
2015 IEEE International Memory Workshop (IMW)
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